DE2945952A1 - Turbo-molecular vacuum pump rotor revolution rate determn. - is by counting residual armature magnetism induced coil voltage frequency - Google Patents

Turbo-molecular vacuum pump rotor revolution rate determn. - is by counting residual armature magnetism induced coil voltage frequency

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Publication number
DE2945952A1
DE2945952A1 DE19792945952 DE2945952A DE2945952A1 DE 2945952 A1 DE2945952 A1 DE 2945952A1 DE 19792945952 DE19792945952 DE 19792945952 DE 2945952 A DE2945952 A DE 2945952A DE 2945952 A1 DE2945952 A1 DE 2945952A1
Authority
DE
Germany
Prior art keywords
vacuum pump
coil
turbo
armature
determn
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19792945952
Other languages
German (de)
Inventor
Helmut 5352 Zülpich Schneider
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE19792945952 priority Critical patent/DE2945952A1/en
Publication of DE2945952A1 publication Critical patent/DE2945952A1/en
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
    • G01P3/487—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by rotating magnets

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

A method and arrangement for measuring the rate of revolution of a vacuum pump rotor are esp. suitable for a turbomolecular vacuum pump driven by an electric motor with a coil and armature. They enable the partic. simple measurement of revolution rate. The pump drive motor is switched off for a short period during which the frequency of the alternating voltage induced in the coil by residual magnetism of the armature is measured by a conventional frequency counter (11). The coil of the electric motor is either connected to the voltage source (2) or to the counter (11) via a changeover switch (8) in the motor power line (3). At least two (5,6) of the three power line phases (4,5,6) are able to be connected to the counter.

Description

Verfahren und Vorrichtung zur Messung der Drehzahl desMethod and device for measuring the speed of the

Rotors einer Vakuumpumpe, vorzugsweise Turbomolekular-Vakuumpumpe Die Erfindung bezieht sich auf ein Verfahren zur Messung der Drehzahl des Rotors einer von einem Elektromotor mit Spule und Anker angetriebenen Vakuumpumpe, vorzugsweise Turbomolekular-Vakuumpumpe, sowie auf. eine zur Durchführung dieses Verfahrens geeignete Vorrichtung.Rotor of a vacuum pump, preferably a turbo-molecular vacuum pump The invention relates to a method for measuring the speed of the rotor a vacuum pump driven by an electric motor with a coil and armature, preferably Turbomolecular vacuum pump, as well as on. one suitable for carrying out this procedure Contraption.

Bei Turbomolekular-Vakuumpumpen ist bekannt, zur Messung ihrer Drehzahl optisch, magnetisch oder akustisch arbeitende Drehzahlaufnehmer zu verwenden und die von diesen erzeugten Signale einem bekanntenFrequenzzähler zuzuführen.Turbomolecular vacuum pumps are known to measure their speed to use optically, magnetically or acoustically operating speed sensors and to apply the signals generated by these to a known frequency counter.

Ein optischer Drehzahl-Aufnehmer umfaßt eine Fotozelle, der auf der sich drehenden Welle eine Markierung zugeordnet ist, Ein magnetisch arbeitender Drehzahl-Aufnehmer besteht aus einem sich mit der Welle mitdrehenden Permanent-Magneten, der in einer der Welle zugeordneten Spule elektrische Signale induziert. Die von der Fotozelle bzw. von der Spule abgegebenen Signale werden dem Frequenzzähler zugeführt. Nachteilig daran ist, daß die Aufnehmer innerhalb des Gehäuses der Turbomolekularpumpe untergebracht werden müssen, so daß im Falle des Defektgehens oder im Falle des Nachrüstens einer Turbomolekularpumpe umfangreiche Montagearbeiten notwendig sind. Außerdem sind derartige Aufnehmer relativ empfindlich.An optical speed sensor includes a photocell, which is located on the A marking is assigned to a rotating shaft, A magnetically operating The speed sensor consists of a permanent magnet that rotates with the shaft, induces electrical signals in a coil associated with the shaft. The from the photocell or the signals emitted by the coil are fed to the frequency counter. The disadvantage of this is that the sensors are inside the housing of the turbo molecular pump must be accommodated so that in the event of a defect or in the case of Retrofitting a turbo molecular pump requires extensive assembly work. In addition, such sensors are relatively sensitive.

Weiterhin ist es bekannt, als Drehzahl-Aufnehmer ein Mikrophon zu verwenden. Die vom Mikrophon abgegebenen Signale sind aber sehr schwach, so daß sie vor der Zuführung zum Frequenzzähler verstärkt werden müssen. Diese Methode der Feststellung der Drehzahl hat sich deshalb, weil sie empfindlich und relativ teuer zu bewerkstelligen ist, nicht durchgesetzt.It is also known to use a microphone as a speed sensor use. The signals emitted by the microphone are very weak, so that them before being fed to the Frequency counters need to be amplified. This method of determining the speed has proven to be because it is sensitive and is relatively expensive to do, not enforced.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, ein Verfahren und eine Vorrichtung der eingangs genannten Art anzugeben, womit es in besonders einfacher Weise möglich ist, die Drehzahl einer Vakuumpumpe, vorzugsweise einer Turbomolekular-Vakuumpumpe, festzustellen.The present invention is based on the object of a method and to specify a device of the type mentioned, which makes it particularly is easily possible, the speed of a vacuum pump, preferably one Turbomolecular vacuum pump to determine.

Erfindungsgemäß wird diese Aufgabe dadurch gelöst, daß der Antriebsmotor der Pumpe ftir eine kurze Zeit, welche in der Größenordnung einiger Sekunden liegt, abgeschaltet wird und daß die Frequen der Wechselspannung, die in der Spule des Motors vom Anker infolge seines Restmagnetismus' induziert wird, mit Hilfe eines an sich bekannten Frequenzzählers gemessen wird.According to the invention this object is achieved in that the drive motor the pump for a short time, which is of the order of a few seconds, is switched off and that the frequencies of the alternating voltage, which in the coil of the Motor is induced by the armature as a result of its residual magnetism, with the help of a known frequency counter is measured.

Bei einer vorteilhaften Vorrichtung zur Durchführung dieses Verfahrens ist zweckmäßigerweise in der der Zuführung elektrischer Energie zur Spule des Antriebsmotors dienenden Leitung ein Wechselschalter vorgesehen, mit dem entweder das Versorgungsgerät des Elektromotors oder der Frequenzzähler mit der Spule des Elektromotors verbindbar ist. Bei einer Vorrichtung dieser Art kann durch kurzzeitiges Umschalten des Wechselschalters die Drehzahl der Pumpe gemessen werden. Da in der sehr kurzen Umschaltzeit eine wesentlich. Verringerung der Drehzahl des Rotors nicht eintritt, ist die Messung äußerst genau.In an advantageous device for carrying out this method is expediently in the supply of electrical energy to the coil of the drive motor Serving line a changeover switch is provided with which either the supply unit of the electric motor or the frequency counter can be connected to the coil of the electric motor is. In a device of this type, by briefly switching the changeover switch the speed of the pump can be measured. Since a essential. Reducing the speed of the rotor does not occur is the measurement extremely accurate.

Vorteile und Einzelheiten der Erfindung sollen anhand eines in der Figur schematisch dargestellten Ausführungsbelspieles erläutert werden.Advantages and details of the invention are based on one in the Figure schematically illustrated Ausführungsbelspieles are explained.

Mit 1 ist eine Turbomolekular-Vakuumpumpe bezeichnet, deren Motor vom Versorgungsgerät bzw. Frequenzwandler 2 über eine Zuleitung 3 mit den Phasen 4 bis 6 versorgt wird. In die Zuleitung 3 ist ein mit Hilfe eines Schützes 7 betätigbarer Schalter 8 angeordnet, der normalerweise eine solche Stellung einnimmt, daß der Motor der Turbomolekular-Vakuumpumpe 1 über die Zuleitung 3 mit dem Versorgungsgerät 2 verbunden ist. In der anderen Stellung des Wechselschalters sind die beiden Phasen 5 und 6 der Zuleitung 3 über die Verbindungsleitung 9 und 10 mit dem Frequenzzähler 11 verbunden. Die Verbindungsleitungen 10 und 9 sind mittels des Kondensators 12 überbrückt, der der Glättung von Spannungsspitzen dient und einen Wert von ca. 0,1 mF hat.1 with a turbomolecular vacuum pump is referred to, the motor from the supply device or frequency converter 2 via a supply line 3 with the phases 4 to 6 is supplied. In the supply line 3 is operated with the help of a contactor 7 Arranged switch 8, which normally occupies such a position that the Motor of the turbomolecular vacuum pump 1 via the supply line 3 to the supply device 2 is connected. The two phases are in the other position of the changeover switch 5 and 6 of the supply line 3 via the connecting line 9 and 10 to the frequency counter 11 connected. The connecting lines 10 and 9 are connected by means of the capacitor 12 bridged, which is used to smooth voltage peaks and has a value of approx. 0.1 mF has.

Durch kurzzeitiges Umschalten mittels des Schütze 7 werden die Zuleitungen 9 und 10 mit der Spule des Antriebsmotors der Turbomolekularpumpe 1 verbunden. In der Spule wird infolge des Restmagnetismus' des Läufers eine Wechselspannung erzeugt, deren Frequenz dann mit Hilfe des Frequenzzählers 11 gemessen wird.By briefly switching over by means of the contactor 7, the supply lines 9 and 10 are connected to the coil of the drive motor of the turbo molecular pump 1. In an alternating voltage is generated in the coil as a result of the rotor's residual magnetism, the frequency of which is then measured with the aid of the frequency counter 11.

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Claims (5)

Verfahren und Vorrichtung zur Messung der Drehzahl des Rotors einer Vakuumpumpe, vorzugsweise Turbomolekular-Vakuumpumpe Ansprüche » Verfahren zur Messung der Drehzahl des Rotors einer von einem Elektromotor mit Spule und Anker angetriebenen Vakuumpumpe, vorzugsweise Turbomolekular-takuumpumpe, dadurch gekennzeichnet, daß der Antriebsmotor der Pumpe für eine kurze Zeit abgeschaltet wird und daß die Frequenz der Wechselspannung, die in der Spule des Motors vom Anker infolge seines Restmagnetismus' induziert wird, mit Hilfe eines an sich bekannten Frequenzzählers (11) gemessen wird.Method and device for measuring the speed of the rotor of a Vacuum pump, preferably turbo-molecular vacuum pump Claims »Method of measurement the speed of the rotor is driven by an electric motor with coil and armature Vacuum pump, preferably turbo-molecular takuumpump, characterized in that the drive motor of the pump is switched off for a short time and that the frequency the alternating voltage generated in the coil of the motor by the armature as a result of its residual magnetism is induced, measured with the aid of a frequency counter (11) known per se will. 2. Vorrichtung zur Durchführung des Verfahrens nach Anspruch 1, dadurch gekennzeichnet, daß in der der Zuführung elektrischer Energie zur Spule des Antriebsmotors dienenden Leitung (3) ein Wechselschalter (8) vorgesehen ist, mit dem entweder die Spannungsquelle (2) oder der Frequenzzähler (11) mit der Spule des Elektromotors verbindbar ist.2. Apparatus for performing the method according to claim 1, characterized characterized in that in the supply of electrical energy to the coil of the drive motor serving line (3) a changeover switch (8) is provided with which either the Voltage source (2) or the frequency counter (11) with the coil of the electric motor is connectable. 3. Vorrichtung nach Anspruch 2, dadurch gekennzeichnet, daß mindestens zwei (5, 6) von drei Phasen (4, 5, 6) der Zuführungsleitung (3) mit dem Frequenzzähler (11) verbindbar sind.3. Apparatus according to claim 2, characterized in that at least two (5, 6) of three phases (4, 5, 6) of the supply line (3) with the frequency counter (11) are connectable. 4. Vorrichtung nach Anspruch 3, dadurch gekennzeichnet, daß ein Kondensator (12) zur Glättung von Spannungsspitzen vorgesehen ist.4. Apparatus according to claim 3, characterized in that a capacitor (12) is provided for smoothing voltage peaks. 5. Vorrichtung nach Anspruch 2, 3 oder 4, dadurch gekennzeichnet, daß zur Betätigung des Wechselschalters (8) ein Schaltschütz (7) vorgesehen ist.5. Apparatus according to claim 2, 3 or 4, characterized in that that a contactor (7) is provided for actuating the changeover switch (8).
DE19792945952 1979-11-14 1979-11-14 Turbo-molecular vacuum pump rotor revolution rate determn. - is by counting residual armature magnetism induced coil voltage frequency Ceased DE2945952A1 (en)

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Application Number Priority Date Filing Date Title
DE19792945952 DE2945952A1 (en) 1979-11-14 1979-11-14 Turbo-molecular vacuum pump rotor revolution rate determn. - is by counting residual armature magnetism induced coil voltage frequency

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3543941A1 (en) * 1985-12-12 1987-06-19 Siemens Ag METHOD FOR DETERMINING THE SPEED OF A STILL TURNING TURNING MACHINE
DE3824811A1 (en) * 1988-07-21 1990-01-25 Teves Gmbh Co Ohg Alfred Method for measuring the number of revolutions of a DC motor
DE4113068A1 (en) * 1991-04-22 1992-11-05 Leybold Ag Ascertaining or regulating RPM of async. motor - altering frequency of variable voltage or current source until characteristic signal indicates switching between motor and generator modes
DE19843133A1 (en) * 1998-09-21 2000-04-20 Siemens Ag Method of measuring the speed of an induction machine
DE4437750C2 (en) * 1994-10-21 2001-03-01 Mannesmann Vdo Ag Circuit arrangement for measuring the speed of an electric motor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1225636A (en) * 1968-05-16 1971-03-17
DE1673364A1 (en) * 1967-12-14 1971-08-19 Bosch Gmbh Robert Arrangement for measuring the speed of a direct current motor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1673364A1 (en) * 1967-12-14 1971-08-19 Bosch Gmbh Robert Arrangement for measuring the speed of a direct current motor
GB1225636A (en) * 1968-05-16 1971-03-17

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3543941A1 (en) * 1985-12-12 1987-06-19 Siemens Ag METHOD FOR DETERMINING THE SPEED OF A STILL TURNING TURNING MACHINE
US4839589A (en) * 1985-12-12 1989-06-13 Siemens Aktiengesellschaft Method and circuit for determining the speed of rotation of a rotating machine
DE3824811A1 (en) * 1988-07-21 1990-01-25 Teves Gmbh Co Ohg Alfred Method for measuring the number of revolutions of a DC motor
DE4113068A1 (en) * 1991-04-22 1992-11-05 Leybold Ag Ascertaining or regulating RPM of async. motor - altering frequency of variable voltage or current source until characteristic signal indicates switching between motor and generator modes
DE4437750C2 (en) * 1994-10-21 2001-03-01 Mannesmann Vdo Ag Circuit arrangement for measuring the speed of an electric motor
DE19843133A1 (en) * 1998-09-21 2000-04-20 Siemens Ag Method of measuring the speed of an induction machine
DE19843133C2 (en) * 1998-09-21 2001-03-15 Siemens Ag Method for measuring the speed of an induction machine and associated device

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