DE2637497C3 - Turbomolekular-Hochvakuumpumpe - Google Patents
Turbomolekular-HochvakuumpumpeInfo
- Publication number
- DE2637497C3 DE2637497C3 DE2637497A DE2637497A DE2637497C3 DE 2637497 C3 DE2637497 C3 DE 2637497C3 DE 2637497 A DE2637497 A DE 2637497A DE 2637497 A DE2637497 A DE 2637497A DE 2637497 C3 DE2637497 C3 DE 2637497C3
- Authority
- DE
- Germany
- Prior art keywords
- shaft
- pump
- speed
- ball bearings
- high vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000314 lubricant Substances 0.000 claims description 25
- 210000000078 claw Anatomy 0.000 claims description 11
- 230000001050 lubricating effect Effects 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 3
- 230000009471 action Effects 0.000 claims description 2
- 239000003302 ferromagnetic material Substances 0.000 claims description 2
- 239000003921 oil Substances 0.000 description 11
- 238000005461 lubrication Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000012549 training Methods 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000010724 circulating oil Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000010410 dusting Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005580 one pot reaction Methods 0.000 description 1
- AJCDFVKYMIUXCR-UHFFFAOYSA-N oxobarium;oxo(oxoferriooxy)iron Chemical compound [Ba]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O AJCDFVKYMIUXCR-UHFFFAOYSA-N 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 210000003462 vein Anatomy 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/14—Structural association with mechanical loads, e.g. with hand-held machine tools or fans
- H02K7/16—Structural association with mechanical loads, e.g. with hand-held machine tools or fans for operation above the critical speed of vibration of the rotating parts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/06—Lubrication
- F04D29/063—Lubrication specially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU2322616 | 1976-02-11 | ||
| SU762323859A SU612100A1 (ru) | 1976-02-19 | 1976-02-19 | Устройство дл подачи смазки к подшипникам |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2637497A1 DE2637497A1 (de) | 1977-08-18 |
| DE2637497B2 DE2637497B2 (de) | 1979-04-12 |
| DE2637497C3 true DE2637497C3 (de) | 1979-11-29 |
Family
ID=26665573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2637497A Expired DE2637497C3 (de) | 1976-02-11 | 1976-08-20 | Turbomolekular-Hochvakuumpumpe |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE2637497C3 (enExample) |
| FR (1) | FR2341054A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4113068A1 (de) * | 1991-04-22 | 1992-11-05 | Leybold Ag | Verfahren zur ermittlung oder regelung der drehzahl eines asynchronmotors |
| DE4237972C2 (de) * | 1992-11-11 | 1997-06-12 | Leybold Ag | Vakuumpumpe mit Rotor |
| DE4237971B4 (de) * | 1992-11-11 | 2004-05-06 | Unaxis Deutschland Holding Gmbh | Vakuumpumpe mit Wandler |
| CN115995935B (zh) * | 2023-02-16 | 2025-07-18 | 中国科学院高能物理研究所 | 一种快速扫描x射线吸收精细结构谱学单色器高精度转轴系统 |
-
1976
- 1976-08-20 DE DE2637497A patent/DE2637497C3/de not_active Expired
-
1977
- 1977-02-11 FR FR7703978A patent/FR2341054A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2341054B1 (enExample) | 1978-10-20 |
| DE2637497B2 (de) | 1979-04-12 |
| DE2637497A1 (de) | 1977-08-18 |
| FR2341054A1 (fr) | 1977-09-09 |
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| DE823478C (de) | Gaskompressor mit Hilfsfluessigkeit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |