DE2630640B2 - Piezoresistive Druckmeßzellen-Baueinheit - Google Patents
Piezoresistive Druckmeßzellen-BaueinheitInfo
- Publication number
- DE2630640B2 DE2630640B2 DE19762630640 DE2630640A DE2630640B2 DE 2630640 B2 DE2630640 B2 DE 2630640B2 DE 19762630640 DE19762630640 DE 19762630640 DE 2630640 A DE2630640 A DE 2630640A DE 2630640 B2 DE2630640 B2 DE 2630640B2
- Authority
- DE
- Germany
- Prior art keywords
- pressure
- measuring cell
- base
- membrane
- pressure measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 210000004027 cell Anatomy 0.000 claims description 32
- 239000012528 membrane Substances 0.000 claims description 31
- 230000005540 biological transmission Effects 0.000 claims description 26
- 238000007789 sealing Methods 0.000 claims description 10
- 239000005401 pressed glass Substances 0.000 claims description 8
- 239000012530 fluid Substances 0.000 claims description 6
- 210000002421 cell wall Anatomy 0.000 claims description 5
- 210000002445 nipple Anatomy 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000012546 transfer Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 241001669680 Dormitator maculatus Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH899775A CH592300A5 (en, 2012) | 1975-07-08 | 1975-07-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2630640A1 DE2630640A1 (de) | 1977-01-27 |
| DE2630640B2 true DE2630640B2 (de) | 1980-09-18 |
Family
ID=4347194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19762630640 Ceased DE2630640B2 (de) | 1975-07-08 | 1976-07-07 | Piezoresistive Druckmeßzellen-Baueinheit |
Country Status (2)
| Country | Link |
|---|---|
| CH (1) | CH592300A5 (en, 2012) |
| DE (1) | DE2630640B2 (en, 2012) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3313260A1 (de) * | 1983-04-13 | 1984-10-25 | Ermeto Armaturen Gmbh, 4800 Bielefeld | Sensor |
| DE3313261A1 (de) * | 1983-04-13 | 1984-10-25 | Ermeto Armaturen Gmbh, 4800 Bielefeld | Sensor |
| DE3500613A1 (de) * | 1984-03-09 | 1985-09-19 | Hans W. Dipl.-Phys. ETH Winterthur Keller | Piezoresistive druckmesszelle |
| DE3908855A1 (de) * | 1988-03-29 | 1989-10-19 | Nippon Denso Co | Drucksensor |
| DE29502825U1 (de) * | 1995-02-21 | 1996-06-20 | Keller AG für Druckmeßtechnik, Winterthur | Piezoresistiver Drucksensor oder Druckaufnehmer |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5937716Y2 (ja) * | 1979-01-31 | 1984-10-19 | 日産自動車株式会社 | 半導体差圧センサ |
| JPS5817421B2 (ja) * | 1979-02-02 | 1983-04-07 | 日産自動車株式会社 | 半導体圧力センサ |
| JPS55103438A (en) * | 1979-02-05 | 1980-08-07 | Hitachi Ltd | Pressure converter |
| ATE7737T1 (de) * | 1980-02-06 | 1984-06-15 | Hans W. Dipl.-Phys. Keller | Piezoresistive zylinderdosenartige druckmesszelle. |
| DE3703685A1 (de) * | 1987-02-06 | 1988-08-18 | Rbs Techn Anlagen Und Apparate | Verfahren zur montage eines drucksensors sowie drucksensor |
| DE3777188D1 (de) * | 1987-11-27 | 1992-04-09 | Kristal Instr Ag | Messzelle, insbesondere fuer relativ- und differenzdruckmessungen. |
| CA2217019A1 (en) * | 1995-04-28 | 1996-10-31 | Rosemount Inc. | Pressure transmitter with high pressure isolator mounting assembly |
| DE10134360A1 (de) * | 2001-07-14 | 2003-02-06 | Endress & Hauser Gmbh & Co Kg | Drucksensor |
| DE10228000A1 (de) | 2002-06-22 | 2004-01-08 | Robert Bosch Gmbh | Vorrichtung zur Druckmessung |
| US7228744B2 (en) * | 2005-05-09 | 2007-06-12 | Delphi Technologies, Inc. | Pressure transducer for gaseous hydrogen environment |
| US7243552B2 (en) * | 2005-05-09 | 2007-07-17 | Delphi Technologies, Inc. | Pressure sensor assembly |
-
1975
- 1975-07-08 CH CH899775A patent/CH592300A5/xx not_active IP Right Cessation
-
1976
- 1976-07-07 DE DE19762630640 patent/DE2630640B2/de not_active Ceased
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3313260A1 (de) * | 1983-04-13 | 1984-10-25 | Ermeto Armaturen Gmbh, 4800 Bielefeld | Sensor |
| DE3313261A1 (de) * | 1983-04-13 | 1984-10-25 | Ermeto Armaturen Gmbh, 4800 Bielefeld | Sensor |
| EP0135653A3 (de) * | 1983-04-13 | 1985-10-23 | ERMETO Armaturen GmbH | Druck- und/oder Temperatursensor |
| DE3500613A1 (de) * | 1984-03-09 | 1985-09-19 | Hans W. Dipl.-Phys. ETH Winterthur Keller | Piezoresistive druckmesszelle |
| DE3908855A1 (de) * | 1988-03-29 | 1989-10-19 | Nippon Denso Co | Drucksensor |
| DE29502825U1 (de) * | 1995-02-21 | 1996-06-20 | Keller AG für Druckmeßtechnik, Winterthur | Piezoresistiver Drucksensor oder Druckaufnehmer |
Also Published As
| Publication number | Publication date |
|---|---|
| CH592300A5 (en, 2012) | 1977-10-31 |
| DE2630640A1 (de) | 1977-01-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8263 | Opposition against grant of a patent | ||
| 8228 | New agent |
Free format text: FLACH, D., DIPL.-PHYS., 8200 ROSENHEIM ANDRAE, S., DIPL.-CHEM. DR.RER.NAT. HAUG, D., DIPL.-ING. OTTO, D., DIPL.-ING. DR.-ING., PAT.-ANW., 8000 MUENCHEN |
|
| 8228 | New agent |
Free format text: FLACH, D., DIPL.-PHYS., 8200 ROSENHEIM ANDRAE, S., DIPL.-CHEM. DR.RER.NAT. HAUG, D., DIPL.-ING., PAT.-ANW., 8000 MUENCHEN |
|
| 8235 | Patent refused |