DE2550075A1 - Mit selektiver reflexion von elastischen oberflaechenwellen arbeitende einrichtung - Google Patents
Mit selektiver reflexion von elastischen oberflaechenwellen arbeitende einrichtungInfo
- Publication number
- DE2550075A1 DE2550075A1 DE19752550075 DE2550075A DE2550075A1 DE 2550075 A1 DE2550075 A1 DE 2550075A1 DE 19752550075 DE19752550075 DE 19752550075 DE 2550075 A DE2550075 A DE 2550075A DE 2550075 A1 DE2550075 A1 DE 2550075A1
- Authority
- DE
- Germany
- Prior art keywords
- lines
- substrate
- grid
- transducer
- electromechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000000758 substrate Substances 0.000 claims description 18
- 210000001520 comb Anatomy 0.000 claims description 8
- 230000000737 periodic effect Effects 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 4
- 230000007704 transition Effects 0.000 claims description 2
- 238000004049 embossing Methods 0.000 claims 2
- 238000005468 ion implantation Methods 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000013043 chemical agent Substances 0.000 claims 1
- 230000008859 change Effects 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010849 ion bombardment Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6423—Means for obtaining a particular transfer characteristic
- H03H9/6433—Coupled resonator filters
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/36—Devices for manipulating acoustic surface waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02614—Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves
- H03H9/02629—Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves of the edges
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02637—Details concerning reflective or coupling arrays
- H03H9/02685—Grating lines having particular arrangements
- H03H9/02716—Tilted, fan shaped or slanted grating lines
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02637—Details concerning reflective or coupling arrays
- H03H9/02685—Grating lines having particular arrangements
- H03H9/02771—Reflector banks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02637—Details concerning reflective or coupling arrays
- H03H9/02795—Multi-strip couplers as track changers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14544—Transducers of particular shape or position
- H03H9/14547—Fan shaped; Tilted; Shifted; Slanted; Tapered; Arched; Stepped finger transducers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14544—Transducers of particular shape or position
- H03H9/14561—Arched, curved or ring shaped transducers
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7437075A FR2290786A1 (fr) | 1974-11-08 | 1974-11-08 | Dispositif a reflexion selective d'ondes elastiques de surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2550075A1 true DE2550075A1 (de) | 1976-05-20 |
Family
ID=9144790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752550075 Ceased DE2550075A1 (de) | 1974-11-08 | 1975-11-07 | Mit selektiver reflexion von elastischen oberflaechenwellen arbeitende einrichtung |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4013983A (enExample) |
| JP (1) | JPS5831767B2 (enExample) |
| DE (1) | DE2550075A1 (enExample) |
| FR (1) | FR2290786A1 (enExample) |
| GB (1) | GB1531999A (enExample) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4144507A (en) * | 1976-09-29 | 1979-03-13 | Texas Instruments Incorporated | Surface acoustic wave resonator incorporating coupling transducer into reflecting arrays |
| US4130813A (en) * | 1977-05-23 | 1978-12-19 | Raytheon Company | Surface wave device having enhanced reflectivity gratings |
| US4121467A (en) * | 1977-05-31 | 1978-10-24 | The United States Of America As Represented By The Secretary Of The Army | Non-destructive technique for surface wave velocity measurement |
| US4155056A (en) * | 1977-08-25 | 1979-05-15 | Bell Telephone Laboratories, Incorporated | Cascaded grating resonator filters with external input-output couplers |
| US4184131A (en) * | 1978-07-20 | 1980-01-15 | Massachusetts Institute Of Technology | Electrical filter of cascaded surface acoustic wave resonators |
| US4327340A (en) * | 1978-09-19 | 1982-04-27 | Bell Telephone Laboratories Incorporated | Surface wave resonator cascade |
| JPS5544253A (en) * | 1978-09-22 | 1980-03-28 | Matsushima Kogyo Co Ltd | Surface acoustic wave filter |
| US4206426A (en) * | 1978-11-29 | 1980-06-03 | Sperry Corporation | Multiple pole surface wave acoustic filters employing angled grooved distributed reflector arrays |
| US4319154A (en) * | 1979-12-26 | 1982-03-09 | Sperry Corporation | Temperature insensitive reflective array S.A.W. device |
| FR2519475A1 (fr) * | 1981-12-31 | 1983-07-08 | Thomson Csf | Dispositif selectif accordable a ondes magnetostatiques de volume |
| JPS60109916A (ja) * | 1983-11-18 | 1985-06-15 | Pioneer Electronic Corp | 弾性表面波素子及びその製造方法 |
| US4577169A (en) * | 1984-08-01 | 1986-03-18 | At&T Bell Laboratories | Small ripple surface acoustic wave filter with low insertion loss |
| JPH0773177B2 (ja) * | 1984-12-17 | 1995-08-02 | 株式会社東芝 | 弾性表面波共振子 |
| JPH0210908A (ja) * | 1988-06-28 | 1990-01-16 | Clarion Co Ltd | 弾性表面波素子 |
| US5374908A (en) * | 1992-11-25 | 1994-12-20 | Rf Monolithics, Inc. | Surface acoustic wave device for generating an output signal with only a symmetric or only an asymmetric vibration mode acoustic wave |
| DE69522066T2 (de) * | 1994-09-28 | 2002-03-28 | Ngk Insulators, Ltd. | Akustische Oberflächenwellenanordnung |
| US6243194B1 (en) * | 1998-12-18 | 2001-06-05 | Eastman Kodak Company | Electro-mechanical grating device |
| US6407650B1 (en) * | 1999-08-27 | 2002-06-18 | Board Of Regents The University Of Texas System | Surface acoustic wave shaping system |
| US6624726B2 (en) * | 2001-08-31 | 2003-09-23 | Motorola, Inc. | High Q factor MEMS resonators |
| US6607969B1 (en) | 2002-03-18 | 2003-08-19 | The United States Of America As Represented By The Secretary Of The Navy | Method for making pyroelectric, electro-optical and decoupling capacitors using thin film transfer and hydrogen ion splitting techniques |
| US6767749B2 (en) | 2002-04-22 | 2004-07-27 | The United States Of America As Represented By The Secretary Of The Navy | Method for making piezoelectric resonator and surface acoustic wave device using hydrogen implant layer splitting |
| US7639105B2 (en) | 2007-01-19 | 2009-12-29 | Georgia Tech Research Corporation | Lithographically-defined multi-standard multi-frequency high-Q tunable micromechanical resonators |
| US8368487B1 (en) * | 2010-02-26 | 2013-02-05 | Integrated Device Technology, Inc. | Thin-film bulk acoustic resonators having multi-axis acoustic wave propagation therein |
| CN113948965B (zh) * | 2021-10-18 | 2023-08-22 | 中国工程物理研究院应用电子学研究所 | 一种纯增益耦合分布反馈式半导体激光器及制备方法 |
| CN120513586A (zh) * | 2023-01-25 | 2025-08-19 | 株式会社村田制作所 | 弹性波装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1538114A (fr) * | 1966-09-08 | 1968-08-30 | Int Standard Electric Corp | Dispositif à ondes acoustiques progressives |
| BE785945A (fr) * | 1971-07-06 | 1973-01-08 | Siemens Ag | Filtre electrique utilisant le principe des ondes de surface |
| FR2235633A5 (enExample) * | 1973-06-29 | 1975-01-24 | Thomson Csf | |
| US3883831A (en) * | 1973-09-27 | 1975-05-13 | Massachusetts Inst Technology | Surface wave devices |
| US3886504A (en) * | 1974-05-20 | 1975-05-27 | Texas Instruments Inc | Acoustic surface wave resonator devices |
-
1974
- 1974-11-08 FR FR7437075A patent/FR2290786A1/fr active Granted
-
1975
- 1975-11-07 DE DE19752550075 patent/DE2550075A1/de not_active Ceased
- 1975-11-07 US US05/629,963 patent/US4013983A/en not_active Expired - Lifetime
- 1975-11-07 GB GB46280/75A patent/GB1531999A/en not_active Expired
- 1975-11-08 JP JP50134616A patent/JPS5831767B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5831767B2 (ja) | 1983-07-08 |
| GB1531999A (en) | 1978-11-15 |
| FR2290786A1 (fr) | 1976-06-04 |
| US4013983A (en) | 1977-03-22 |
| JPS5199448A (en) | 1976-09-02 |
| FR2290786B1 (enExample) | 1978-11-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| 8131 | Rejection |