DE2542636C2 - Digitale Schwingquarz-Schichtdicken-Meßeinrichtung - Google Patents

Digitale Schwingquarz-Schichtdicken-Meßeinrichtung

Info

Publication number
DE2542636C2
DE2542636C2 DE19752542636 DE2542636A DE2542636C2 DE 2542636 C2 DE2542636 C2 DE 2542636C2 DE 19752542636 DE19752542636 DE 19752542636 DE 2542636 A DE2542636 A DE 2542636A DE 2542636 C2 DE2542636 C2 DE 2542636C2
Authority
DE
Germany
Prior art keywords
layer thickness
measuring device
counter
input
period
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19752542636
Other languages
German (de)
English (en)
Other versions
DE2542636A1 (de
Inventor
Andreas Dipl.-Ing. Ban
Istvan Dipl.-Phys. Budapest Fabian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MUESZERIPARI KUTATO INTEZET BUDAPEST HU
Original Assignee
MUESZERIPARI KUTATO INTEZET BUDAPEST HU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MUESZERIPARI KUTATO INTEZET BUDAPEST HU filed Critical MUESZERIPARI KUTATO INTEZET BUDAPEST HU
Publication of DE2542636A1 publication Critical patent/DE2542636A1/de
Application granted granted Critical
Publication of DE2542636C2 publication Critical patent/DE2542636C2/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE19752542636 1975-05-05 1975-09-24 Digitale Schwingquarz-Schichtdicken-Meßeinrichtung Expired DE2542636C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HUMU000540 HU170602B (enExample) 1975-05-05 1975-05-05

Publications (2)

Publication Number Publication Date
DE2542636A1 DE2542636A1 (de) 1976-11-18
DE2542636C2 true DE2542636C2 (de) 1983-10-13

Family

ID=10999715

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19752542636 Expired DE2542636C2 (de) 1975-05-05 1975-09-24 Digitale Schwingquarz-Schichtdicken-Meßeinrichtung

Country Status (2)

Country Link
DE (1) DE2542636C2 (enExample)
HU (1) HU170602B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT382963B (de) * 1980-11-24 1987-05-11 Leybold Heraeus Gmbh & Co Kg Messverfahren zur bestimmung der dicke duenner schichten

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3689747A (en) * 1970-12-09 1972-09-05 Ibm Digital evaporation monitor system
HU167641B (enExample) * 1974-02-07 1975-11-28

Also Published As

Publication number Publication date
DE2542636A1 (de) 1976-11-18
HU170602B (enExample) 1977-07-28

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Legal Events

Date Code Title Description
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee