DE2538966A1 - Verfahren zur herstellung elektrischer temperaturfuehler - Google Patents
Verfahren zur herstellung elektrischer temperaturfuehlerInfo
- Publication number
- DE2538966A1 DE2538966A1 DE19752538966 DE2538966A DE2538966A1 DE 2538966 A1 DE2538966 A1 DE 2538966A1 DE 19752538966 DE19752538966 DE 19752538966 DE 2538966 A DE2538966 A DE 2538966A DE 2538966 A1 DE2538966 A1 DE 2538966A1
- Authority
- DE
- Germany
- Prior art keywords
- layer
- substrate
- resistance
- metal oxide
- metal layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title description 8
- 239000010410 layer Substances 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- 229910044991 metal oxide Inorganic materials 0.000 claims description 6
- 150000004706 metal oxides Chemical class 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 3
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims description 2
- 239000011241 protective layer Substances 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000002253 acid Substances 0.000 claims 1
- GVFOJDIFWSDNOY-UHFFFAOYSA-N antimony tin Chemical compound [Sn].[Sb] GVFOJDIFWSDNOY-UHFFFAOYSA-N 0.000 claims 1
- 238000009713 electroplating Methods 0.000 claims 1
- 238000001556 precipitation Methods 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 238000004804 winding Methods 0.000 claims 1
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- 229910000342 sodium bisulfate Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910000410 antimony oxide Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000004811 fluoropolymer Substances 0.000 description 1
- 239000006112 glass ceramic composition Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- CHKVPAROMQMJNQ-UHFFFAOYSA-M potassium bisulfate Chemical compound [K+].OS([O-])(=O)=O CHKVPAROMQMJNQ-UHFFFAOYSA-M 0.000 description 1
- 229910000343 potassium bisulfate Inorganic materials 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- WBHQBSYUUJJSRZ-UHFFFAOYSA-M sodium bisulfate Chemical compound [Na+].OS([O-])(=O)=O WBHQBSYUUJJSRZ-UHFFFAOYSA-M 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C1/00—Details
- H01C1/14—Terminals or tapping points or electrodes specially adapted for resistors; Arrangements of terminals or tapping points or electrodes on resistors
- H01C1/1406—Terminals or electrodes formed on resistive elements having positive temperature coefficient
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
- H01C7/021—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient formed as one or more layers or coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/22—Elongated resistive element being bent or curved, e.g. sinusoidal, helical
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S205/00—Electrolysis: processes, compositions used therein, and methods of preparing the compositions
- Y10S205/917—Treatment of workpiece between coating steps
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Thermistors And Varistors (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/507,284 US3982218A (en) | 1974-09-19 | 1974-09-19 | Temperature sensing device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2538966A1 true DE2538966A1 (de) | 1976-04-01 |
Family
ID=24018008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19752538966 Withdrawn DE2538966A1 (de) | 1974-09-19 | 1975-09-02 | Verfahren zur herstellung elektrischer temperaturfuehler |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3982218A (enExample) |
| JP (1) | JPS5151790A (enExample) |
| BE (1) | BE833535A (enExample) |
| CA (1) | CA1033467A (enExample) |
| DE (1) | DE2538966A1 (enExample) |
| FR (1) | FR2285690A1 (enExample) |
| GB (1) | GB1512526A (enExample) |
| IT (1) | IT1042382B (enExample) |
| NL (1) | NL7510997A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10020932C1 (de) * | 2000-04-28 | 2001-07-05 | Heinrich Zitzmann | Temperaturmessfühler und Verfahren zur Herstellung desselben |
| WO2006007930A1 (de) * | 2004-07-15 | 2006-01-26 | Georg Bernitz | Temperaturfühler und verfahren zu dessen herstellung |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4130722A (en) * | 1977-01-10 | 1978-12-19 | Globe-Union Inc. | Thick-film circuit module including a monolithic ceramic cross-over device |
| NL7707078A (nl) * | 1977-06-27 | 1978-12-29 | Philips Nv | Koolstoffilmweerstand. |
| US4153518A (en) * | 1977-11-18 | 1979-05-08 | Tektronix, Inc. | Method of making a metalized substrate having a thin film barrier layer |
| JPS61502856A (ja) * | 1984-07-31 | 1986-12-04 | ロ−ズマウント インコ． | 白金抵抗温度計の製造方法 |
| JPH0620119Y2 (ja) * | 1986-09-10 | 1994-05-25 | 株式会社岡崎製作所 | 耐振速応型測温抵抗体 |
| US4734641A (en) * | 1987-03-09 | 1988-03-29 | Tektronix, Inc. | Method for the thermal characterization of semiconductor packaging systems |
| JPH0682057B2 (ja) * | 1987-07-13 | 1994-10-19 | 日本碍子株式会社 | 検出素子 |
| US7869181B2 (en) * | 2006-03-29 | 2011-01-11 | The Boeing Company | Flex circuit lightning protection applique system for skin fasteners in composite structures |
| TW201239914A (en) * | 2011-03-18 | 2012-10-01 | Giant Chip Technology Co Ltd | Micro resistance device and manufacturing method thereof |
| CN102768888B (zh) * | 2011-05-04 | 2015-03-11 | 旺诠科技(昆山)有限公司 | 微电阻装置及其制造方法 |
| TWM450811U (zh) * | 2012-12-13 | 2013-04-11 | Viking Tech Corp | 電阻元件 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2671950A (en) * | 1950-03-09 | 1954-03-16 | Sukacev Lev | Method of constructing thermopiles |
| US2803729A (en) * | 1953-03-03 | 1957-08-20 | Wilbur M Kohring | Resistors |
| DE1066654B (enExample) * | 1955-09-30 | 1959-10-08 | ||
| US3217281A (en) * | 1962-05-28 | 1965-11-09 | Corning Glass Works | Electrical resistor |
-
1974
- 1974-09-19 US US05/507,284 patent/US3982218A/en not_active Expired - Lifetime
-
1975
- 1975-06-25 CA CA230,157A patent/CA1033467A/en not_active Expired
- 1975-08-20 JP JP50101093A patent/JPS5151790A/ja active Pending
- 1975-09-02 DE DE19752538966 patent/DE2538966A1/de not_active Withdrawn
- 1975-09-09 IT IT27036/75A patent/IT1042382B/it active
- 1975-09-09 GB GB37037/75A patent/GB1512526A/en not_active Expired
- 1975-09-17 BE BE7000713A patent/BE833535A/nl unknown
- 1975-09-18 NL NL7510997A patent/NL7510997A/xx not_active Application Discontinuation
- 1975-09-18 FR FR7528597A patent/FR2285690A1/fr active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10020932C1 (de) * | 2000-04-28 | 2001-07-05 | Heinrich Zitzmann | Temperaturmessfühler und Verfahren zur Herstellung desselben |
| DE10020932C5 (de) * | 2000-04-28 | 2004-12-30 | Zitzmann, Heinrich, Dr. | Temperaturmessfühler und Verfahren zur Herstellung desselben |
| WO2006007930A1 (de) * | 2004-07-15 | 2006-01-26 | Georg Bernitz | Temperaturfühler und verfahren zu dessen herstellung |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2285690B1 (enExample) | 1981-10-09 |
| US3982218A (en) | 1976-09-21 |
| CA1033467A (en) | 1978-06-20 |
| NL7510997A (nl) | 1976-03-23 |
| IT1042382B (it) | 1980-01-30 |
| BE833535A (nl) | 1976-01-16 |
| FR2285690A1 (fr) | 1976-04-16 |
| GB1512526A (en) | 1978-06-01 |
| JPS5151790A (en) | 1976-05-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8128 | New person/name/address of the agent |
Representative=s name: HERZFELD, A., RECHTSANW., 6370 OBERURSEL |
|
| 8139 | Disposal/non-payment of the annual fee |