DE2424306A1 - Einrichtung fuer die sekundaer-ionenmassenspektroskopie - Google Patents

Einrichtung fuer die sekundaer-ionenmassenspektroskopie

Info

Publication number
DE2424306A1
DE2424306A1 DE19742424306 DE2424306A DE2424306A1 DE 2424306 A1 DE2424306 A1 DE 2424306A1 DE 19742424306 DE19742424306 DE 19742424306 DE 2424306 A DE2424306 A DE 2424306A DE 2424306 A1 DE2424306 A1 DE 2424306A1
Authority
DE
Germany
Prior art keywords
sample
lens
mass analyzer
quadrupole mass
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19742424306
Other languages
German (de)
English (en)
Inventor
Helmut Dipl Phys Schillalies
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE19742424306 priority Critical patent/DE2424306A1/de
Priority to CH500175A priority patent/CH585965A5/xx
Priority to GB2101775A priority patent/GB1472356A/en
Priority to FR7515488A priority patent/FR2271662B2/fr
Publication of DE2424306A1 publication Critical patent/DE2424306A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0431—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples
    • H01J49/044—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for liquid samples with means for preventing droplets from entering the analyzer; Desolvation of droplets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H01J49/4215—Quadrupole mass filters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE19742424306 1974-05-18 1974-05-18 Einrichtung fuer die sekundaer-ionenmassenspektroskopie Withdrawn DE2424306A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19742424306 DE2424306A1 (de) 1974-05-18 1974-05-18 Einrichtung fuer die sekundaer-ionenmassenspektroskopie
CH500175A CH585965A5 (en:Method) 1974-05-18 1975-04-18
GB2101775A GB1472356A (en) 1974-05-18 1975-05-16 Instrument for secondary ion mass spectroscopy
FR7515488A FR2271662B2 (en:Method) 1974-05-18 1975-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742424306 DE2424306A1 (de) 1974-05-18 1974-05-18 Einrichtung fuer die sekundaer-ionenmassenspektroskopie

Publications (1)

Publication Number Publication Date
DE2424306A1 true DE2424306A1 (de) 1975-11-27

Family

ID=5915979

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19742424306 Withdrawn DE2424306A1 (de) 1974-05-18 1974-05-18 Einrichtung fuer die sekundaer-ionenmassenspektroskopie

Country Status (4)

Country Link
CH (1) CH585965A5 (en:Method)
DE (1) DE2424306A1 (en:Method)
FR (1) FR2271662B2 (en:Method)
GB (1) GB1472356A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4041871A1 (de) * 1989-12-25 1991-06-27 Hitachi Ltd Massenspektrometer mit plasmaionenquelle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4041871A1 (de) * 1989-12-25 1991-06-27 Hitachi Ltd Massenspektrometer mit plasmaionenquelle

Also Published As

Publication number Publication date
CH585965A5 (en:Method) 1977-03-15
FR2271662A2 (en:Method) 1975-12-12
FR2271662B2 (en:Method) 1978-07-13
GB1472356A (en) 1977-05-04

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Legal Events

Date Code Title Description
OD Request for examination
8130 Withdrawal