DE2356921A1 - METHOD FOR MANUFACTURING SILICON NITRIDE CERAMICS - Google Patents

METHOD FOR MANUFACTURING SILICON NITRIDE CERAMICS

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Publication number
DE2356921A1
DE2356921A1 DE2356921A DE2356921A DE2356921A1 DE 2356921 A1 DE2356921 A1 DE 2356921A1 DE 2356921 A DE2356921 A DE 2356921A DE 2356921 A DE2356921 A DE 2356921A DE 2356921 A1 DE2356921 A1 DE 2356921A1
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Prior art keywords
sintered
reaction
pressure
silicon
sintering
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DE2356921A
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German (de)
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DE2356921C2 (en
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Norman Lawrence Parr
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National Research Development Corp UK
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National Research Development Corp UK
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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/593Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/71Ceramic products containing macroscopic reinforcing agents
    • C04B35/74Ceramic products containing macroscopic reinforcing agents containing shaped metallic materials
    • C04B35/76Fibres, filaments, whiskers, platelets, or the like
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/71Ceramic products containing macroscopic reinforcing agents
    • C04B35/78Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
    • C04B35/80Fibres, filaments, whiskers, platelets, or the like

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Products (AREA)

Description

"betreffend"concerning

Verfahren zur Herstellung von Siliciumnitrid-KeramikenProcess for the production of silicon nitride ceramics

Es ist "bekannt, Siliciumnitrid-Keramikköfper herzustellen, indem zuerst Siliciumnitrid hergestellt, dieses dann gebrochen und gemahlen und pulverförmiges Siliciumnitrid unter Druck gesintert wird. Alle diese Verfahren sind sehr aufwändig, die erhaltenen Keramikkörper nicht sehr dicht.It is "known to manufacture silicon nitride ceramic bodies by First silicon nitride was produced, this was then broken and ground, and powdered silicon nitride was sintered under pressure will. All of these processes are very complex, and the ceramic bodies obtained are not very dense.

Gegenstand der Erfindung ist nun ein Verfahren zur Verringerung der Kosten zur Herstellung von Siliciumnitrid-Formkörpern, wobei diese möglichst nahe an die theoretische Dichte herankommen und bei dem erfindungsgemäßen Verfahren die Zwischenstufen des Aufbrechens und Mahlens von Siliciumnitrid, welches sich bekanntlich durch außerordentliche Härte auszeichnet, vermieden werden.The invention now relates to a method for reducing the costs of producing silicon nitride molded bodies, wherein these come as close as possible to the theoretical density and in the process according to the invention the intermediate stages of the Breaking and grinding of silicon nitride, which is known characterized by extraordinary hardness, should be avoided.

Nach dem erfindungsgemäßen Verfahren werden die Formkörper dadurch hergestellt, daß man zuerst Siliciumpulver entsprechend formt unter Verdichtung, dann den Grünling in einer Stickstoffatmosphäre bis zur vollständigen-Nitrierung des Siliciums brennt (Reaktionssintern), woraufhin der-Reaktionssinterkörper in die Endform drucksintert. Es wurde nun festgestellt, daß die Herstellung hoch" dichter Körper nach der Erfindung zu Pro-According to the process according to the invention, the moldings are thereby manufactured by first shaping silicon powder accordingly with compression, then the green compact in a nitrogen atmosphere burns until the silicon is completely nitrated (Reaction sintering), whereupon the reaction sintered body is pressure sintered into the final shape. It has now been found that the manufacture high "dense body according to the invention to pro-

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dukten führt, die gegenüber hohen Temperaturen stabil sind und darüberhinaus sich auch bei erhöhten Temperaturen durch geringes Kriechen und gute Schlagfestigkeit ausseichnen.products that are stable to high temperatures and in addition, even at elevated temperatures, low Creep and good impact resistance can be identified.

Da es sich bei dem Ausgangsmaterial um feinteiliges Silicium handelt und die Herstellung durch Reaktionssintern gelingt, so wird Silicium und Stickstoff zu Siliciumnitrid umgewandelt, dabei tritt keine Dinensionsänderung auf. Man hat merklichen Spielraum in der Formgebung der Endprodukte während der anfänglichen Pulververdichtung oder- in dem in etwa die Endform gebildet wird.Since the starting material is finely divided silicon and it can be produced by reaction sintering, see above silicon and nitrogen are converted to silicon nitride, with no change in dimension. You have noticeable leeway in the shaping of the end products during the initial powder compaction or - in which roughly the end shape is formed.

Nach einer bevorzugten Ausführungsform des erfindungsgemäßen Verfahrens wird vor dem Drucksintern der Körper mit einem Flußmittel infiltriert. Das Flußmittel ist vorzugsweise Magnesiumoxid in einer Menge von 1 bis 5 $According to a preferred embodiment of the method according to the invention the body is infiltrated with a flux before pressure sintering. The flux is preferably magnesium oxide in an amount ranging from $ 1 to $ 5

Zusätzliches Material wie Siliciumdioxid, Siliciumcarbid, Graphit, Bornitrid, Aluminium, Titan oder Eisen können dem Siliciumpulver vor dem ersten Verdichten zugefügt werden, um spezielle Eigenschaften des Fertigprodukts zu verbessern.Additional material such as silicon dioxide, silicon carbide, graphite, boron nitride, aluminum, titanium or iron can be added Silicon powder can be added before the first compaction in order to improve special properties of the finished product.

Das Drucksintern geschieht bei erhöhten Temperaturen,maximal 1600° bis 18500C.The pressure sintering takes place at elevated temperatures, a maximum of 1600 ° to 1850 0 C.

Die vollständige Umwandlung des Siliciumpulver-Pormlings zu einem ineinander greifenden Kristallaggregat von Siliciumnitrid erreicht man in Stickstoffatmosphäre bei einer Temperatur unmittelbar unter dem Schmelzpunkt von Silicium, bis die vollständige Umwandlung in Siliciumnitrid stattgefunden hat. Dies dauert im allgemeinen etwa 12 Stunden, abhängig von der Querschnitt sflache der Presslinge. Die Reaktion setzt bei 1200°c ein, ist jedoch schneller bei Temperaturen in der Nähe von 1400 c. Obwohl die Reaktion exotherm ist, ist es insbesondere bei großen Querschnittsflächen vorzuziehen, nicht über 135O0C zu gehen, um ein örtliches Schmelzen von Siliciumpulver zu Klumpen, die einem Reaktionssintern unzugänglich wären, zu ver-Complete conversion of the silicon powder pellet to an interlocking crystal aggregate of silicon nitride is achieved in a nitrogen atmosphere at a temperature just below the melting point of silicon until complete conversion to silicon nitride has taken place. This generally takes about 12 hours, depending on the cross-sectional area of the compacts. The reaction starts at 1200 ° C, but is faster at temperatures in the vicinity of 1400 ° C. Although the reaction is exothermic, it is preferable, especially in the case of large cross-sectional areas, not to go above 135O 0 C in order to prevent local melting of silicon powder into lumps that would be inaccessible to reaction sintering.

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hindern. Die Nitrierung kann vorzugsweise auch 2-stufig ausgeführt v/erden (GB-PS 887 942). Obwohl keine Dimensionsänderungen oder merkliche Verziehungen während des Reaktionssinterns stattfinden, ist es notwendig, ausreichenden Materialüberschuß vorzusehen, um das Schrumpfen während des folgenden Drucksinterns zu kompensieren. Es kann auch notwendig sein, Überschußmaterial an bestimmten Flächen vorzusehen, die schließlich abgearbeitet v/erden, damit der erhaltene Formkörper hohe Oberflächengüte aufweist. prevent. The nitration can preferably also be carried out in two stages v / earth (GB-PS 887 942). Although there are no dimensional changes or noticeable distortions during reaction sintering, it is necessary to provide sufficient excess material to prevent shrinkage during the subsequent pressure sintering to compensate. It may also be necessary to provide excess material on certain areas that will eventually be worked off v / ground, so that the molded body obtained has a high surface quality.

Der Siliciumnitridkörper wird dann in einer Graphitform, überzogen mit einer Bornitridanstrichsmasse, unter leichtem Druck verdichtet, während die Temperatur auf maximal 1600° bis 185O0O gesteigert und gleichzeitig der Pressdruck auf 2,35 kg/mm (1,5 t/sq_.in) erhöht wird. Diese Bedingungen werden dann kurze Zeit, abhängig von der Materialstärke, in der Form aufrechterhalten und dann langsam aufgehoben. Es schließt sich dann ein Tempern zur Aufhebung der Restspannung an. Durch Verdichten des Siliciumpulvers zu einem Körper in etwa Endform und durch Anwendung von Graphitformen und möglicherweise einer einfachen Schiaiedeoperation ist es möglich, Formkörper weit-gehendst der Endform herzustellen, so daß die aufwändigen Nacharbeitskosten minimal gehalten werden. The silicon nitride body is then compacted under slight pressure in a graphite mold, coated with a boron nitride paint, while the temperature is increased to a maximum of 1600 ° to 185O 0 O and at the same time the pressure is increased to 2.35 kg / mm (1.5 t / sq_.in ) is increased. These conditions are then maintained in the mold for a short time, depending on the material thickness, and then slowly removed. This is then followed by tempering to remove the residual stress. By compacting the silicon powder into a body in an approximately final shape and by using graphite molds and possibly a simple cutting operation, it is possible to produce shaped bodies largely in the final shape, so that the costly reworking costs are kept to a minimum.

Das Verfahren kann vereinfacht v/erden durch Infiltrieren eines Flußmittels in den porösen-Sinterkörper vor der Stufe des Drucksint erns. Als Flußmittel eigenen sich Magnesiumoxid, Magnesiumnitrid, Calciumoxid, Aluminiumoxid, Eisenoxid, Berylliumoxid, Berylliumnitrid und Calciumnitrid.The process can be simplified by infiltrating a Flux in the porous sintered body prior to the step of pressure sintering erns. Magnesium oxide, magnesium nitride, calcium oxide, aluminum oxide, iron oxide, beryllium oxide, Beryllium nitride and calcium nitride.

Eine Abwandlung äes erfindungsgemäßen Verfahrens zur"Herstellung verschiedenster Materialien auf der Basis der Siliciumnitrid-Technologie für ungewöhnliche Kombinationen von physikalischen und mechanischen Eigenschaften, insbesondere die Komponenten für tribologische und Hochtemperatursysteme, liegt darin, daß zusätzliches Material dem Siliciumpulver vor dem Reaktionssintern einverleibt wird. - 4 -A modification of the inventive method for "production various materials based on silicon nitride technology for unusual combinations of physical and mechanical properties, especially the components for tribological and high temperature systems, is that additional material is incorporated into the silicon powder prior to the reaction sintering. - 4 -

4098,://10344098,: // 1034

- 4 - 1A-44 028- 4 - 1A-44 028

Beispiele für diese Materialien sind Dispersionen von 1 bis 50 Vol.-?' solcher Stoffe in Siliciumnitrid, wie Siliciumdioxid, Siliciumcarbid, Graphit, Bornitrid, Aluminium, Titan oder Eisen in feinteiliger oder grobkörniger Form in regelloser Anordnung oder als orientierte Drähte oder Pasern oder aber auch in Sandwichs truktur.Examples of these materials are dispersions from 1 to 50 vol.? ' such substances in silicon nitride as silicon dioxide, Silicon carbide, graphite, boron nitride, aluminum, titanium or iron in finely divided or coarse-grained form in a random arrangement or as oriented wires or fibers or in sandwiches structure.

Durch selektrive Anordnung von Verstärkungsmaterialien während der Anfangsstufen der Herstellung ist es möglich, Teile mit lokal besseren Eigenschaften, wie Oberfiächenhärte, elektrische Leitfähigkeit, thermisches Isolationsvermögen, herzustellen oder mit speziellen Eigenschaften hinsichtlich der Verbindung von Keramik und Metall. Es ist auch möglich, die Struktur dieser Produkte zu modifizieren und die Eigenschaften durch weitere Warmbearbeitung zu beeinflussen, welche auch dahin abzielen kann, um aus dem Material besondere Formen zu erreichen.Through selective placement of reinforcement materials during In the initial stages of production it is possible to produce parts with locally better properties, such as surface hardness, electrical Conductivity, thermal insulation capacity, or with special properties with regard to the connection of Ceramic and metal. It is also possible to modify the structure of these products and the properties through further ones To influence hot processing, which can also aim to achieve special shapes from the material.

Auf speziellem Wunsch eines Abnehmers wurden Körper mit praktisch theoretischer Dichte aus Siliciumnitrid,enthaltend 1 bis 5 YoI.-90 Magnesiumoxid, hergestellt, mit zusätzlich Dispersionen von ) 10 bis 30 Vol.-^o Siliciumcarbid für tribologische und Hochtemperatureigenschaften|init 10 bis 30 Vol.-$ Graphit für Lagereigenschaften | mit 10 bis 30 <fo Bornitrid für tribologische und Verschleißeigenschaften und schließlich 10 bis 30 fo Eisen für Schlagfestigkeit und Eigenschaften bei. Raumtemperatur.At the special request of a customer, bodies with a practically theoretical density were made of silicon nitride containing 1 to 5 YoI. -90 Magnesium oxide, produced, with additional dispersions of) 10 to 30 Vol .- ^ o silicon carbide for tribological and high-temperature properties | with 10 to 30 Vol .- $ graphite for storage properties | with 10 to 30 fo boron nitride for tribological and wear properties and finally 10 to 30 fo iron for impact resistance and properties. Room temperature.

Es ist offensichtlich, daß man durch geringfügige Abwandlungen obigen Verfahrens spezielle Legierungen und Verbundkörper für besondere Anforderungen herstellen kann.It is obvious that by making slight modifications to the above procedure, special alloys and composites for can produce special requirements.

Patentansprüche 81/XIX Claims 81 / XIX

40 9 822/1G3440 9 822 / 1G34

Claims (6)

PatentansprücheClaims 1. Verfahren zur Herstellung von Körpern aus Siliciumnitrid ausgehend von Siliciumpulver durch Reaktionssintern in Stickstoff atmosphäre, dadurch gekennzeichnet , daß man Silxciumpulver zu der gewünschten Form verdichtet, dann in Stickstoffatmosphäre bis zur vollständigen Nitrierung reaktionssintert und anschließend den Sinterkörper unter Druck sintert1. Process for the production of bodies from silicon nitride starting from silicon powder by reaction sintering in nitrogen atmosphere, characterized in that one Silxcium powder compacted into the desired shape, then in Reaction sintered in a nitrogen atmosphere until complete nitration and then sintering the sintered body under pressure , . etwa , ., .,. approximately , ., . bis zur endgültigen Form. ·until the final shape. · 2. Verfahren nach Anspruch 1, dadurch geken'.n zeichne t , daß man den reaktionsgesinterten Formkörper mit einem Flußmittel infiltriert und dann drucksintert.2. The method according to claim 1, characterized geken'.n draw t that the reaction-sintered shaped body is infiltrated with a flux and then pressure-sintered. 3. Verfahren nach Anspruch 2, dadurch gekennzeichnet , daß man als Flußmittel 1 "bis 5 Vol.-$ Magnesiumoxid anwendet.3. The method according to claim 2, characterized in that the flux is 1 "to 5 vol .- $ magnesium oxide applies. 4. Verfahren nach Anspruch 1 bis 3, dadurch gekennzeichnet , daß man dem Siliciumpulver zusätzlich Siliciumdioxid, Siliciumcarbid, Graphit, Bornitrid, Aluminium, Titan und/oder Eisen.insbesondere in einer Menge von 10 bis 30 zusetzt. ■ ' · ■4. The method according to claim 1 to 3, characterized in that the silicon powder is additionally silicon dioxide, Silicon carbide, graphite, boron nitride, aluminum, titanium and / or iron, especially in an amount of 10 to 30 clogs. ■ '· ■ 5. Verfahren nach Anspruch 1 bis 4? dadurch gekennzeichnet, daß man zum Drucksintern den reaktionsgesinterten Formling unter Druck auf eine Temperatur von maximal 1600 bis 185O0C erhitzt.5. The method according to claim 1 to 4? characterized in that, for pressure sintering, the reaction-sintered molding is heated under pressure to a temperature of a maximum of 1600 to 185O 0 C. 6. Verfahren nach Anspruch 5, dadurch gekennzeichnet, daß man den reaktionsgesinterten Pressling in einer Graphitform unter leiöxtem Druck vorpresst und bei steigendem6. The method according to claim 5, characterized in that that one pre-presses the reaction sintered compact in a graphite mold under leiöxtem pressure and with increasing — 2 —- 2 - 409822/1034409822/1034 - t - 1A-44 028- t - 1A-44 028 Pressdruck bis 2,35 kg/mm2 die Temperatur auf maximal 1600°- 18500G steigert. 2 Press pressure to 2.35 kg / mm the temperature to a maximum of 1600 ° - 1850 0 G increases. 81/XIX81 / XIX 409822/1034409822/1034
DE2356921A 1972-11-14 1973-11-14 Process for the production of silicon nitride bodies by reaction sintering of silicon powder in a nitrogen atmosphere and subsequent pressure sintering Expired DE2356921C2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5244572A GB1393579A (en) 1972-11-14 1972-11-14 Method of producing high density silicon nitride

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DE2356921A1 true DE2356921A1 (en) 1974-05-30
DE2356921C2 DE2356921C2 (en) 1982-09-23

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0061611A1 (en) * 1981-03-27 1982-10-06 The Boeing Company Method for producing pre-shaped alpha-silicon nitride whisker compacts and loose whiskers for composite material reinforcement
US4412008A (en) * 1980-02-23 1983-10-25 Nippon Kokan Kabushiki Kaisha Composite sinter of silicon nitride/boron nitride and method for manufacturing thereof
US4579699A (en) * 1983-09-29 1986-04-01 The Boeing Company Method for making α-Si3 N4 whiskers and articles therefrom

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1117334B (en) * 1977-12-23 1986-02-17 Fiat Spa PROCEDURE FOR THE SYNTERIZATION OF SILICON NITRIDE REACTION BONDED
EP0126063B1 (en) * 1982-09-30 1988-05-18 Ford Motor Company Process for producing cutting tools from si3n4-silicon nitride by chemical bonding or by hot-pressing
AU559361B2 (en) * 1982-09-30 1987-03-05 Ford Motor Co. Method of making high strength hot pressed si3n4

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1646700B1 (en) * 1965-04-22 1970-12-17 Montedison Spa Process for the production of molded bodies from silicon nitride or its mixtures with silicon carbide
DE2134072A1 (en) * 1970-07-10 1972-01-20 Lucas Industries Ltd Process for the production of objects from silicon nitride

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1646700B1 (en) * 1965-04-22 1970-12-17 Montedison Spa Process for the production of molded bodies from silicon nitride or its mixtures with silicon carbide
DE2134072A1 (en) * 1970-07-10 1972-01-20 Lucas Industries Ltd Process for the production of objects from silicon nitride

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4412008A (en) * 1980-02-23 1983-10-25 Nippon Kokan Kabushiki Kaisha Composite sinter of silicon nitride/boron nitride and method for manufacturing thereof
EP0061611A1 (en) * 1981-03-27 1982-10-06 The Boeing Company Method for producing pre-shaped alpha-silicon nitride whisker compacts and loose whiskers for composite material reinforcement
US4388255A (en) * 1981-03-27 1983-06-14 Boeing Aerospace Co. (A Division Of The Boeing Company) Method for producing pre-shaped α-silicon nitride whisker compacts and loose whiskers for composite material reinforcement
US4579699A (en) * 1983-09-29 1986-04-01 The Boeing Company Method for making α-Si3 N4 whiskers and articles therefrom

Also Published As

Publication number Publication date
GB1393579A (en) 1975-05-07
DE2356921C2 (en) 1982-09-23

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