DE2337219A1 - Optischer messkopf zur abstandsanzeige - Google Patents
Optischer messkopf zur abstandsanzeigeInfo
- Publication number
- DE2337219A1 DE2337219A1 DE19732337219 DE2337219A DE2337219A1 DE 2337219 A1 DE2337219 A1 DE 2337219A1 DE 19732337219 DE19732337219 DE 19732337219 DE 2337219 A DE2337219 A DE 2337219A DE 2337219 A1 DE2337219 A1 DE 2337219A1
- Authority
- DE
- Germany
- Prior art keywords
- light
- detector
- optical
- distance
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims description 59
- 238000002310 reflectometry Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 13
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 8
- 230000000295 complement effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 7
- 238000012546 transfer Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- QEBYEVQKHRUYPE-UHFFFAOYSA-N 2-(2-chlorophenyl)-5-[(1-methylpyrazol-3-yl)methyl]-4-[[methyl(pyridin-3-ylmethyl)amino]methyl]-1h-pyrazolo[4,3-c]pyridine-3,6-dione Chemical compound C1=CN(C)N=C1CN1C(=O)C=C2NN(C=3C(=CC=CC=3)Cl)C(=O)C2=C1CN(C)CC1=CC=CN=C1 QEBYEVQKHRUYPE-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US27543272A | 1972-07-26 | 1972-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2337219A1 true DE2337219A1 (de) | 1974-02-14 |
Family
ID=23052264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19732337219 Pending DE2337219A1 (de) | 1972-07-26 | 1973-07-21 | Optischer messkopf zur abstandsanzeige |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3788741A (enExample) |
| JP (1) | JPS578401B2 (enExample) |
| CA (1) | CA984137A (enExample) |
| DE (1) | DE2337219A1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3130965A1 (de) * | 1981-08-05 | 1983-02-24 | Teldix Gmbh, 6900 Heidelberg | Optische sensoranordnung |
| DE3418247A1 (de) * | 1983-05-16 | 1984-11-22 | Gould Inc., Rolling Meadows, Ill. | Durchbiegungsmesser |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3885872A (en) * | 1973-06-12 | 1975-05-27 | Ibm | Digital proximity sensing system |
| US3937574A (en) * | 1973-10-29 | 1976-02-10 | Kaman Sciences Corporation | System and method for measuring distance |
| US3940608A (en) * | 1974-02-04 | 1976-02-24 | Mechanical Technology Incorporated | Fiber optic displacement measuring apparatus |
| JPS5415419B2 (enExample) * | 1974-05-20 | 1979-06-14 | ||
| FR2325018A1 (fr) * | 1975-06-23 | 1977-04-15 | Ibm | Dispositif de mesure d'intervalle pour definir la distance entre deux faces ou plus |
| EP0070141B1 (en) * | 1981-07-07 | 1989-05-31 | Renishaw plc | Device for measuring dimensions |
| SE430539B (sv) * | 1982-03-24 | 1983-11-21 | Asea Ab | Fiberoptiskt metsystem for metande, hanterande och bearbetande organ |
| US4527893A (en) * | 1982-10-13 | 1985-07-09 | Taylor Francis M | Method and apparatus for optically measuring the distance to a workpiece |
| USRE33078E (en) * | 1985-03-08 | 1989-10-03 | Mechanical Technology Incorporated | Optical configuration of fiber optic sensor for symmetric dynamic response about the optical null |
| EP0260933B1 (en) * | 1986-09-15 | 1993-02-24 | EOTec Corporation | Fiber optic displacement measuring apparatus |
| US5440390A (en) * | 1993-06-14 | 1995-08-08 | Hughes Aircraft Company | Optical fiber polarimeter |
| US5489987A (en) * | 1994-04-07 | 1996-02-06 | Owens-Brockway Glass Container Inc. | Container sealing surface inspection |
| US5790242A (en) * | 1995-07-31 | 1998-08-04 | Robotic Vision Systems, Inc. | Chromatic optical ranging sensor |
| US5801817A (en) * | 1997-05-05 | 1998-09-01 | Umm Electronics Inc. | Method and apparatus for eliminating the effects of varying sample distance on optical measurements |
| US5896195A (en) * | 1997-05-15 | 1999-04-20 | Owens-Brockway Glass Container Inc. | Container sealing surface area inspection |
| SE521173C2 (sv) * | 1998-09-17 | 2003-10-07 | Spectra Prec Ab | Elektronisk distansmätanordning |
| US6256095B1 (en) | 2000-01-21 | 2001-07-03 | Owens-Brockway Glass Container Inc. | Container sealing surface area inspection |
| DE10242373B4 (de) * | 2002-09-12 | 2009-07-16 | Siemens Ag | Konfokaler Abstandssensor |
| JP2004239886A (ja) * | 2002-12-11 | 2004-08-26 | Fuji Xerox Co Ltd | 三次元画像撮像装置および方法 |
| DE102004053659B3 (de) * | 2004-11-03 | 2006-04-13 | My Optical Systems Gmbh | Verfahren und Vorrichtung zur berührungslosen Erfassung von thermischen Eigenschaften einer Objektoberfläche |
| DE102006003269A1 (de) * | 2006-01-24 | 2007-07-26 | Mechaless Systems Gmbh | Verfahren zur Lichtlaufzeitmessung |
| CN103487237B (zh) * | 2013-09-10 | 2016-05-18 | 中国计量科学研究院 | 一种激光光束分析仪探测面定位方法及系统 |
| JP6779233B2 (ja) * | 2015-12-25 | 2020-11-04 | 株式会社キーエンス | 共焦点変位計 |
| JP6779234B2 (ja) | 2015-12-25 | 2020-11-04 | 株式会社キーエンス | 共焦点変位計 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2116872A5 (fr) * | 1970-12-10 | 1972-07-21 | Compteurs Comp D | Perfectionnements aux dispositifs palpeurs optiques |
-
1972
- 1972-07-26 US US00275432A patent/US3788741A/en not_active Expired - Lifetime
-
1973
- 1973-07-13 CA CA176,350A patent/CA984137A/en not_active Expired
- 1973-07-21 DE DE19732337219 patent/DE2337219A1/de active Pending
- 1973-07-25 JP JP8327073A patent/JPS578401B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3130965A1 (de) * | 1981-08-05 | 1983-02-24 | Teldix Gmbh, 6900 Heidelberg | Optische sensoranordnung |
| DE3418247A1 (de) * | 1983-05-16 | 1984-11-22 | Gould Inc., Rolling Meadows, Ill. | Durchbiegungsmesser |
Also Published As
| Publication number | Publication date |
|---|---|
| CA984137A (en) | 1976-02-24 |
| US3788741A (en) | 1974-01-29 |
| JPS578401B2 (enExample) | 1982-02-16 |
| JPS4959660A (enExample) | 1974-06-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP3891465B1 (de) | Optische messeinrichtung | |
| DE60025221T2 (de) | Optisches inspektionssystem für teile im subpixel bereich | |
| EP0932816B1 (de) | Verfahren und vorrichtung zum messen des verlaufs reflektierender oberflächen | |
| EP0534284B1 (de) | Verfahren und Vorrichtung zur Bestimmung der Absolut-Koordinaten eines Objektes | |
| DE102012217240B4 (de) | Vorrichtung zum Messen einer dreidimensionalen Form | |
| EP1606577A1 (de) | Verfahren zur berührungslosen dynamischen erfassung des profils eines festkörpers | |
| DE2440321C3 (de) | Vorrichtung zur automatischen Messung von Tunnel-Profilen | |
| DE3428593A1 (de) | Optisches oberflaechenmessgeraet | |
| DE3930632A1 (de) | Verfahren zur direkten phasenmessung von strahlung, insbesondere lichtstrahlung, und vorrichtung zur durchfuehrung dieses verfahrens | |
| DE2260090B2 (de) | Photoelektrische Einrichtung zur Bestimmung der Rauhigkeit bzw. Glätte diffusstreuender Oberflächen | |
| DE102018114860A1 (de) | Vorrichtung und Verfahren zur optischen Vermessung eines Messobjekts | |
| EP0449859B1 (de) | Verfahren und vorrichtung zur beobachtung von moiremustern von zu untersuchenden oberflächen unter anwendung des moireverfahrens mit phasenshiften | |
| DE102008029459A1 (de) | Verfahren und Vorrichtung zur berührungslosen Abstandsmessung | |
| EP0185167B1 (de) | Optisch-elektronisches Messverfahren, eine dafür erforderliche Einrichtung und deren Verwendung | |
| EP3811025B1 (de) | Vorrichtung zur chromatisch konfokalen optischen vermessung und konfokalen abbildung eines messobjekts sowie verfahren | |
| DE2161405A1 (de) | Optische Vorrichtung zur Bestimmung des Ortes eines Punktes auf einer Flache | |
| EP3477252A1 (de) | Anordnung zur erfassung des oberflächenprofils einer objektoberfläche mittels interferometrischer abstandsmessung | |
| DE3116671C2 (enExample) | ||
| DE3805785A1 (de) | Verfahren und vorrichtung zur optischen erfassung des rauheitsprofils einer materialoberflaeche | |
| DE1905392A1 (de) | Vorrichtung zum Erzeugen von elektrischen Signalen mittels eines Skalengitters,das relativ zu einem Indexgitter bewegbar ist | |
| DE4036120C2 (de) | Verfahren zur Bestimmung der Wegänderung von Strahlen, insbesondere von Lichtstrahlen, und Vorrichtung zur Durchführung des Verfahrens | |
| DE69103514T2 (de) | Moire distanzmessungen mit einem aus objekt fixiertem oder aufgedrucktem raster. | |
| DE69316822T2 (de) | Prüfungsvorrichtung für Bandbreitefehler | |
| DE3528047C2 (enExample) | ||
| EP4012329A1 (de) | Verfahren und vorrichtung zur optischen verzahnungsmessung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHA | Expiration of time for request for examination |