DE2255507C2 - Elektromagnetisches Elektronenstrahl- Ablenksystem - Google Patents

Elektromagnetisches Elektronenstrahl- Ablenksystem

Info

Publication number
DE2255507C2
DE2255507C2 DE19722255507 DE2255507A DE2255507C2 DE 2255507 C2 DE2255507 C2 DE 2255507C2 DE 19722255507 DE19722255507 DE 19722255507 DE 2255507 A DE2255507 A DE 2255507A DE 2255507 C2 DE2255507 C2 DE 2255507C2
Authority
DE
Germany
Prior art keywords
deflection
coils
coil
electron beam
compensation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19722255507
Other languages
German (de)
English (en)
Other versions
DE2255507A1 (de
Inventor
George Alfred Yorktown Heights N.Y. Wardly
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE2255507A1 publication Critical patent/DE2255507A1/de
Application granted granted Critical
Publication of DE2255507C2 publication Critical patent/DE2255507C2/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/70—Arrangements for deflecting ray or beam
    • H01J29/701—Systems for correcting deviation or convergence of a plurality of beams by means of magnetic fields at least
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/70—Arrangements for deflecting ray or beam
    • H01J29/72—Arrangements for deflecting ray or beam along one straight line or along two perpendicular straight lines
    • H01J29/76—Deflecting by magnetic fields only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1475—Scanning means magnetic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Details Of Television Scanning (AREA)
DE19722255507 1971-11-26 1972-11-13 Elektromagnetisches Elektronenstrahl- Ablenksystem Expired DE2255507C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20244071A 1971-11-26 1971-11-26

Publications (2)

Publication Number Publication Date
DE2255507A1 DE2255507A1 (de) 1973-05-30
DE2255507C2 true DE2255507C2 (de) 1983-01-20

Family

ID=22749879

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19722255507 Expired DE2255507C2 (de) 1971-11-26 1972-11-13 Elektromagnetisches Elektronenstrahl- Ablenksystem

Country Status (4)

Country Link
JP (1) JPS551669B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2255507C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2160856B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1372930A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52128054A (en) * 1976-04-20 1977-10-27 Rikagaku Kenkyusho Electromagnetic deflecting coil
JPS5788659A (en) * 1980-11-21 1982-06-02 Jeol Ltd Electron ray device

Also Published As

Publication number Publication date
FR2160856B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-06-04
GB1372930A (en) 1974-11-06
DE2255507A1 (de) 1973-05-30
JPS551669B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-01-16
FR2160856A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-07-06
JPS4861068A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-08-27

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Legal Events

Date Code Title Description
OD Request for examination
8128 New person/name/address of the agent

Representative=s name: BRUEGEL, G., DIPL.-ING., PAT.-ANW., 7030 BOEBLINGE

D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee