DE2158320B2 - Vorrichtung zur berührungsfreien relativen Abstandsmessung - Google Patents
Vorrichtung zur berührungsfreien relativen AbstandsmessungInfo
- Publication number
- DE2158320B2 DE2158320B2 DE2158320A DE2158320A DE2158320B2 DE 2158320 B2 DE2158320 B2 DE 2158320B2 DE 2158320 A DE2158320 A DE 2158320A DE 2158320 A DE2158320 A DE 2158320A DE 2158320 B2 DE2158320 B2 DE 2158320B2
- Authority
- DE
- Germany
- Prior art keywords
- switching
- sensor
- frequency
- measuring
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 title claims description 31
- 239000000523 sample Substances 0.000 claims description 17
- 239000003990 capacitor Substances 0.000 claims description 12
- 230000000903 blocking effect Effects 0.000 claims description 4
- 230000010354 integration Effects 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 230000002441 reversible effect Effects 0.000 claims description 4
- 238000012986 modification Methods 0.000 claims description 3
- 230000004048 modification Effects 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 230000005672 electromagnetic field Effects 0.000 claims description 2
- 230000033764 rhythmic process Effects 0.000 claims description 2
- 230000007704 transition Effects 0.000 claims description 2
- 230000000414 obstructive effect Effects 0.000 claims 1
- 238000011156 evaluation Methods 0.000 description 11
- 238000011161 development Methods 0.000 description 8
- 230000018109 developmental process Effects 0.000 description 8
- 230000008901 benefit Effects 0.000 description 7
- 230000002411 adverse Effects 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000001960 triggered effect Effects 0.000 description 2
- 101150087426 Gnal gene Proteins 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
- G01B7/31—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2158320A DE2158320B2 (de) | 1971-11-24 | 1971-11-24 | Vorrichtung zur berührungsfreien relativen Abstandsmessung |
| FR7241974A FR2161109B1 (enExample) | 1971-11-24 | 1972-11-24 | |
| US00309406A US3815020A (en) | 1971-11-24 | 1972-11-24 | Capacitance/inductance distance measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2158320A DE2158320B2 (de) | 1971-11-24 | 1971-11-24 | Vorrichtung zur berührungsfreien relativen Abstandsmessung |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2158320A1 DE2158320A1 (de) | 1973-05-30 |
| DE2158320B2 true DE2158320B2 (de) | 1980-04-10 |
| DE2158320C3 DE2158320C3 (enExample) | 1980-12-11 |
Family
ID=5826026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2158320A Granted DE2158320B2 (de) | 1971-11-24 | 1971-11-24 | Vorrichtung zur berührungsfreien relativen Abstandsmessung |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US3815020A (enExample) |
| DE (1) | DE2158320B2 (enExample) |
| FR (1) | FR2161109B1 (enExample) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2386811A1 (fr) * | 1977-04-06 | 1978-11-03 | Elf Aquitaine | Detecteur de niveau de separation entre deux liquides |
| US4190797A (en) * | 1978-03-31 | 1980-02-26 | Gould Inc. | Capacitive gauging system utilizing a low internal capacitance, high impedance amplifier means |
| JPS5735320A (en) * | 1980-08-11 | 1982-02-25 | Telmec Co Ltd | Structure of mask for baking of semiconductor integrated circuit |
| FR2519137A1 (fr) * | 1981-12-24 | 1983-07-01 | Europ Agence Spatiale | Detecteur de position a deux axes pour dispositif a suspension magnetique |
| GB8322002D0 (en) * | 1983-08-16 | 1983-09-21 | Atomic Energy Authority Uk | Gauging apparatus |
| US5021740A (en) * | 1989-03-07 | 1991-06-04 | The Boeing Company | Method and apparatus for measuring the distance between a body and a capacitance probe |
| US5070302A (en) * | 1989-09-05 | 1991-12-03 | Eastman Kodak Company | Capacitance probe for measuring a width of a clearance between parts |
| US5315259A (en) * | 1992-05-26 | 1994-05-24 | Universities Research Association, Inc. | Omnidirectional capacitive probe for gauge of having a sensing tip formed as a substantially complete sphere |
| CA2127135A1 (en) * | 1994-06-30 | 1995-12-31 | Bryan P. Mclaughlin | Apparatus and method of determining the best position for inner and outer members in a rotary machine |
| GB9712848D0 (en) * | 1997-06-18 | 1997-08-20 | Queensgate Instr Ltd | Capacitance micrometer |
| US7289230B2 (en) | 2002-02-06 | 2007-10-30 | Cyberoptics Semiconductors, Inc. | Wireless substrate-like sensor |
| US20050224902A1 (en) * | 2002-02-06 | 2005-10-13 | Ramsey Craig C | Wireless substrate-like sensor |
| WO2007012502A1 (de) | 2005-07-29 | 2007-02-01 | Gerd Reime | Verfahren und vorrichtung zur entfernungsmessung mittels kapazitiven oder induktiven sensoren |
| US7893697B2 (en) * | 2006-02-21 | 2011-02-22 | Cyberoptics Semiconductor, Inc. | Capacitive distance sensing in semiconductor processing tools |
| CN101410690B (zh) * | 2006-02-21 | 2011-11-23 | 赛博光学半导体公司 | 半导体加工工具中的电容性距离感测 |
| CN101517701B (zh) | 2006-09-29 | 2011-08-10 | 赛博光学半导体公司 | 衬底形的粒子传感器 |
| NL1033148C2 (nl) * | 2006-12-29 | 2008-07-01 | Univ Delft Tech | Elektrische meetinrichting, werkwijze en computer programma product. |
| US20080246493A1 (en) * | 2007-04-05 | 2008-10-09 | Gardner Delrae H | Semiconductor Processing System With Integrated Showerhead Distance Measuring Device |
| DE202007008439U1 (de) * | 2007-06-16 | 2008-10-23 | Brose Fahrzeugteile Gmbh & Co. Kommanditgesellschaft, Hallstadt | Auswerteschaltung für eine Messkapazität |
| US20090015268A1 (en) * | 2007-07-13 | 2009-01-15 | Gardner Delrae H | Device and method for compensating a capacitive sensor measurement for variations caused by environmental conditions in a semiconductor processing environment |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE567800A (enExample) * | 1957-10-21 | |||
| US3096591A (en) * | 1960-06-29 | 1963-07-09 | Jr Edward F Higgins | Radio frequency leveling device |
| CH387752A (de) * | 1960-07-21 | 1965-02-15 | Ibm | Verfahren und Einrichtung zur Regelung einer durch elektrische Schwingungen veränderliche Frequenz dargestellten Grösse eines Vorganges |
| US3140608A (en) * | 1960-12-16 | 1964-07-14 | Brooks Equipment Corp | Liquid level gauge |
| US3408566A (en) * | 1964-03-17 | 1968-10-29 | Industrial Nucleonics Corp | Phase shift method and apparatus for mass-independent measurement of the properties of dielectric materials |
| US3688190A (en) * | 1970-09-25 | 1972-08-29 | Beckman Instruments Inc | Differential capacitance circuitry for differential pressure measuring instruments |
-
1971
- 1971-11-24 DE DE2158320A patent/DE2158320B2/de active Granted
-
1972
- 1972-11-24 FR FR7241974A patent/FR2161109B1/fr not_active Expired
- 1972-11-24 US US00309406A patent/US3815020A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3815020A (en) | 1974-06-04 |
| FR2161109A1 (enExample) | 1973-07-06 |
| DE2158320C3 (enExample) | 1980-12-11 |
| DE2158320A1 (de) | 1973-05-30 |
| FR2161109B1 (enExample) | 1979-10-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OD | Request for examination | ||
| C3 | Grant after two publication steps (3rd publication) | ||
| 8339 | Ceased/non-payment of the annual fee |