DE2154794B2 - Duennschicht-bauelemente und verfahren zu ihrer herstellung - Google Patents

Duennschicht-bauelemente und verfahren zu ihrer herstellung

Info

Publication number
DE2154794B2
DE2154794B2 DE19712154794 DE2154794A DE2154794B2 DE 2154794 B2 DE2154794 B2 DE 2154794B2 DE 19712154794 DE19712154794 DE 19712154794 DE 2154794 A DE2154794 A DE 2154794A DE 2154794 B2 DE2154794 B2 DE 2154794B2
Authority
DE
Germany
Prior art keywords
thin
production
film components
film
components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19712154794
Other languages
German (de)
English (en)
Other versions
DE2154794A1 (de
DE2154794C (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE2154794A1 publication Critical patent/DE2154794A1/de
Publication of DE2154794B2 publication Critical patent/DE2154794B2/de
Application granted granted Critical
Publication of DE2154794C publication Critical patent/DE2154794C/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
    • H01C17/288—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thin film techniques

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Non-Adjustable Resistors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
DE19712154794 1970-11-06 1971-11-04 Duennschicht-bauelemente und verfahren zu ihrer herstellung Granted DE2154794B2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US8746270A 1970-11-06 1970-11-06
US8746270 1970-11-06

Publications (3)

Publication Number Publication Date
DE2154794A1 DE2154794A1 (de) 1972-05-25
DE2154794B2 true DE2154794B2 (de) 1972-10-05
DE2154794C DE2154794C (cs) 1973-04-26

Family

ID=22205332

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712154794 Granted DE2154794B2 (de) 1970-11-06 1971-11-04 Duennschicht-bauelemente und verfahren zu ihrer herstellung

Country Status (9)

Country Link
US (1) US3765937A (cs)
JP (1) JPS5146250B1 (cs)
BE (1) BE774894A (cs)
CA (1) CA929277A (cs)
DE (1) DE2154794B2 (cs)
FR (1) FR2113648A1 (cs)
GB (1) GB1363907A (cs)
IT (1) IT942287B (cs)
SE (1) SE370162B (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3925572A (en) * 1972-10-12 1975-12-09 Ncr Co Multilevel conductor structure and method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2000226A (en) * 1932-02-29 1935-05-07 Lehon Co Method of treating asphalt shingles and composition therefor
US2063268A (en) * 1933-05-15 1936-12-08 Patent & Licensing Corp Roofing unit and method of making the same
US2563936A (en) * 1948-02-06 1951-08-14 Willard Storage Battery Co Method of manufacturing battery grids
DE1085209B (de) * 1959-12-12 1960-07-14 Dielektra Ag Gedruckte elektrische Leiterplatte
NL299975A (cs) * 1962-11-01
US3322655A (en) * 1963-08-12 1967-05-30 United Aircraft Corp Method of making terminated microwafers
US3329922A (en) * 1964-05-08 1967-07-04 Allen Bradley Co Welded terminal resistor
USB392136I5 (cs) * 1964-08-26
US3387952A (en) * 1964-11-09 1968-06-11 Western Electric Co Multilayer thin-film coated substrate with metallic parting layer to permit selectiveequential etching
US3437888A (en) * 1966-07-01 1969-04-08 Union Carbide Corp Method of providing electrical contacts by sputtering a film of gold on a layer of sputtered molybdenum
US3591413A (en) * 1967-08-25 1971-07-06 Nippon Electric Co Resistor structure for thin film variable resistor
US3469226A (en) * 1967-10-26 1969-09-23 Angstrohm Precision Inc Thin film resistor

Also Published As

Publication number Publication date
FR2113648A1 (cs) 1972-06-23
CA929277A (en) 1973-06-26
JPS5146250B1 (cs) 1976-12-08
SE370162B (cs) 1974-09-30
DE2154794A1 (de) 1972-05-25
BE774894A (fr) 1972-03-01
GB1363907A (en) 1974-08-21
US3765937A (en) 1973-10-16
IT942287B (it) 1973-03-20

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
EHJ Ceased/non-payment of the annual fee