CA929277A - Thin film devices and methods of making the devices - Google Patents

Thin film devices and methods of making the devices

Info

Publication number
CA929277A
CA929277A CA113274A CA113274A CA929277A CA 929277 A CA929277 A CA 929277A CA 113274 A CA113274 A CA 113274A CA 113274 A CA113274 A CA 113274A CA 929277 A CA929277 A CA 929277A
Authority
CA
Canada
Prior art keywords
devices
making
methods
thin film
film devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA113274A
Other languages
English (en)
Other versions
CA113274S (en
Inventor
R. Hudnall Joseph
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of CA929277A publication Critical patent/CA929277A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/28—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
    • H01C17/288—Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thin film techniques

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Non-Adjustable Resistors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
CA113274A 1970-11-06 1971-05-18 Thin film devices and methods of making the devices Expired CA929277A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8746270A 1970-11-06 1970-11-06

Publications (1)

Publication Number Publication Date
CA929277A true CA929277A (en) 1973-06-26

Family

ID=22205332

Family Applications (1)

Application Number Title Priority Date Filing Date
CA113274A Expired CA929277A (en) 1970-11-06 1971-05-18 Thin film devices and methods of making the devices

Country Status (9)

Country Link
US (1) US3765937A (cs)
JP (1) JPS5146250B1 (cs)
BE (1) BE774894A (cs)
CA (1) CA929277A (cs)
DE (1) DE2154794B2 (cs)
FR (1) FR2113648A1 (cs)
GB (1) GB1363907A (cs)
IT (1) IT942287B (cs)
SE (1) SE370162B (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3925572A (en) * 1972-10-12 1975-12-09 Ncr Co Multilevel conductor structure and method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2000226A (en) * 1932-02-29 1935-05-07 Lehon Co Method of treating asphalt shingles and composition therefor
US2063268A (en) * 1933-05-15 1936-12-08 Patent & Licensing Corp Roofing unit and method of making the same
US2563936A (en) * 1948-02-06 1951-08-14 Willard Storage Battery Co Method of manufacturing battery grids
DE1085209B (de) * 1959-12-12 1960-07-14 Dielektra Ag Gedruckte elektrische Leiterplatte
NL299975A (cs) * 1962-11-01
US3322655A (en) * 1963-08-12 1967-05-30 United Aircraft Corp Method of making terminated microwafers
US3329922A (en) * 1964-05-08 1967-07-04 Allen Bradley Co Welded terminal resistor
USB392136I5 (cs) * 1964-08-26
US3387952A (en) * 1964-11-09 1968-06-11 Western Electric Co Multilayer thin-film coated substrate with metallic parting layer to permit selectiveequential etching
US3437888A (en) * 1966-07-01 1969-04-08 Union Carbide Corp Method of providing electrical contacts by sputtering a film of gold on a layer of sputtered molybdenum
US3591413A (en) * 1967-08-25 1971-07-06 Nippon Electric Co Resistor structure for thin film variable resistor
US3469226A (en) * 1967-10-26 1969-09-23 Angstrohm Precision Inc Thin film resistor

Also Published As

Publication number Publication date
FR2113648A1 (cs) 1972-06-23
JPS5146250B1 (cs) 1976-12-08
SE370162B (cs) 1974-09-30
DE2154794A1 (de) 1972-05-25
DE2154794B2 (de) 1972-10-05
BE774894A (fr) 1972-03-01
GB1363907A (en) 1974-08-21
US3765937A (en) 1973-10-16
IT942287B (it) 1973-03-20

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