DE2123667A1 - Interferometer - Google Patents
InterferometerInfo
- Publication number
- DE2123667A1 DE2123667A1 DE19712123667 DE2123667A DE2123667A1 DE 2123667 A1 DE2123667 A1 DE 2123667A1 DE 19712123667 DE19712123667 DE 19712123667 DE 2123667 A DE2123667 A DE 2123667A DE 2123667 A1 DE2123667 A1 DE 2123667A1
- Authority
- DE
- Germany
- Prior art keywords
- separating plate
- light source
- measuring
- interferometer
- separating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000003989 dielectric material Substances 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- OQCFWECOQNPQCG-UHFFFAOYSA-N 1,3,4,8-tetrahydropyrimido[4,5-c]oxazin-7-one Chemical compound C1CONC2=C1C=NC(=O)N2 OQCFWECOQNPQCG-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910001610 cryolite Inorganic materials 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 210000000936 intestine Anatomy 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02061—Reduction or prevention of effects of tilts or misalignment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US6247970A | 1970-08-10 | 1970-08-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2123667A1 true DE2123667A1 (de) | 1972-02-17 |
Family
ID=22042773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19712123667 Pending DE2123667A1 (de) | 1970-08-10 | 1971-05-13 | Interferometer |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE765248A (OSRAM) |
| DE (1) | DE2123667A1 (OSRAM) |
| FR (1) | FR2117014A5 (OSRAM) |
| NL (1) | NL7107593A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993009394A1 (en) * | 1991-11-08 | 1993-05-13 | British Technology Group Ltd. | Measuring instruments |
-
1971
- 1971-04-05 FR FR7111945A patent/FR2117014A5/fr not_active Expired
- 1971-04-05 BE BE765248A patent/BE765248A/xx unknown
- 1971-05-13 DE DE19712123667 patent/DE2123667A1/de active Pending
- 1971-06-02 NL NL7107593A patent/NL7107593A/xx unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993009394A1 (en) * | 1991-11-08 | 1993-05-13 | British Technology Group Ltd. | Measuring instruments |
| US5546184A (en) * | 1991-11-08 | 1996-08-13 | British Technology Group Ltd. | Single-frequency bidirectional fringe-counting interferometer |
| JP3351527B2 (ja) | 1991-11-08 | 2002-11-25 | ブリテイッシュ・テクノロジー・グループ・リミテッド | 計測装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| NL7107593A (OSRAM) | 1972-02-14 |
| BE765248A (fr) | 1971-08-30 |
| FR2117014A5 (OSRAM) | 1972-07-21 |
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