DE2113980C2 - Vorrichtung zum Ausrichten eines Werkstücks - Google Patents

Vorrichtung zum Ausrichten eines Werkstücks

Info

Publication number
DE2113980C2
DE2113980C2 DE2113980A DE2113980A DE2113980C2 DE 2113980 C2 DE2113980 C2 DE 2113980C2 DE 2113980 A DE2113980 A DE 2113980A DE 2113980 A DE2113980 A DE 2113980A DE 2113980 C2 DE2113980 C2 DE 2113980C2
Authority
DE
Germany
Prior art keywords
carriers
workpiece
spring
carrier
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2113980A
Other languages
German (de)
English (en)
Other versions
DE2113980A1 (de
Inventor
Edward Paul Poughkeepsie N.Y. Hecker
Joseph Edward Hopewell Junction N.Y. Kulak
Bela Wappingers Falls N.Y. Musits
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE2113980A1 publication Critical patent/DE2113980A1/de
Application granted granted Critical
Publication of DE2113980C2 publication Critical patent/DE2113980C2/de
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18056—Rotary to or from reciprocating or oscillating
    • Y10T74/18208—Crank, pitman, and slide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18856—Oscillating to oscillating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
  • Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
  • Control Of Position Or Direction (AREA)
DE2113980A 1970-04-06 1971-03-23 Vorrichtung zum Ausrichten eines Werkstücks Expired DE2113980C2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2600770A 1970-04-06 1970-04-06

Publications (2)

Publication Number Publication Date
DE2113980A1 DE2113980A1 (de) 1971-10-21
DE2113980C2 true DE2113980C2 (de) 1983-05-11

Family

ID=21829311

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2113980A Expired DE2113980C2 (de) 1970-04-06 1971-03-23 Vorrichtung zum Ausrichten eines Werkstücks

Country Status (6)

Country Link
US (1) US3626769A (enExample)
JP (1) JPS5610137B1 (enExample)
CA (1) CA924824A (enExample)
DE (1) DE2113980C2 (enExample)
FR (1) FR2092380A5 (enExample)
GB (1) GB1328437A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4006645A (en) * 1974-09-26 1977-02-08 The Perkin-Elmer Corporation X, Y, θ alignment mechanism
CA1034393A (en) * 1976-10-13 1978-07-11 Henry J. Taylor Powered wrist joint
EP0036912A1 (de) * 1980-03-26 1981-10-07 Maschinenfabrik Meyer AG. Greifer für Handhabungsgeräte
US4607461A (en) * 1984-12-10 1986-08-26 Charles Adams Accurate positioning apparatus
JP2557316Y2 (ja) * 1990-02-28 1997-12-10 エヌティエヌ 株式会社 移動テーブル
DE69500707T2 (de) * 1994-02-07 1998-02-12 Ushiodenki K.K., Tokio/Tokyo Haltevorrichtung
US7384228B2 (en) * 2004-05-24 2008-06-10 Asml Netherlands B.V. Insertion device, lithographic apparatus with said insertion device and device manufacturing method
DE502008002465D1 (de) * 2008-01-23 2011-03-10 R & W Antriebselemente Gmbh Ausgleichselement für eine Positioniereinrichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1008966B (de) * 1954-07-20 1957-05-23 Kurt Konrad Loewenfeld Dipl In Vorrichtung zur Feineinstellung von Maschinenteilen, welche auf Gerad- oder Rundfuehrungen bewegt werden
US3466514A (en) * 1967-06-26 1969-09-09 Ibm Method and apparatus for positioning objects in preselected orientations

Also Published As

Publication number Publication date
JPS5610137B1 (enExample) 1981-03-05
FR2092380A5 (enExample) 1972-01-21
DE2113980A1 (de) 1971-10-21
GB1328437A (en) 1973-08-30
CA924824A (en) 1973-04-17
US3626769A (en) 1971-12-14

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Legal Events

Date Code Title Description
D2 Grant after examination
8380 Miscellaneous part iii

Free format text: DER VERTRETER LAUTET RICHTIG: WILLICH, W., DIPL.-ING., PAT.-ANW., 7030 BOEBLINGEN

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee