JPS5610137B1 - - Google Patents
Info
- Publication number
- JPS5610137B1 JPS5610137B1 JP1225471A JP1225471A JPS5610137B1 JP S5610137 B1 JPS5610137 B1 JP S5610137B1 JP 1225471 A JP1225471 A JP 1225471A JP 1225471 A JP1225471 A JP 1225471A JP S5610137 B1 JPS5610137 B1 JP S5610137B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/18—Mechanical movements
- Y10T74/18056—Rotary to or from reciprocating or oscillating
- Y10T74/18208—Crank, pitman, and slide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/18—Mechanical movements
- Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/18—Mechanical movements
- Y10T74/18856—Oscillating to oscillating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
- Machine Tool Positioning Apparatuses (AREA)
- Control Of Position Or Direction (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US2600770A | 1970-04-06 | 1970-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5610137B1 true JPS5610137B1 (enExample) | 1981-03-05 |
Family
ID=21829311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1225471A Pending JPS5610137B1 (enExample) | 1970-04-06 | 1971-03-09 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3626769A (enExample) |
| JP (1) | JPS5610137B1 (enExample) |
| CA (1) | CA924824A (enExample) |
| DE (1) | DE2113980C2 (enExample) |
| FR (1) | FR2092380A5 (enExample) |
| GB (1) | GB1328437A (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4006645A (en) * | 1974-09-26 | 1977-02-08 | The Perkin-Elmer Corporation | X, Y, θ alignment mechanism |
| CA1034393A (en) * | 1976-10-13 | 1978-07-11 | Henry J. Taylor | Powered wrist joint |
| EP0036912A1 (de) * | 1980-03-26 | 1981-10-07 | Maschinenfabrik Meyer AG. | Greifer für Handhabungsgeräte |
| US4607461A (en) * | 1984-12-10 | 1986-08-26 | Charles Adams | Accurate positioning apparatus |
| JP2557316Y2 (ja) * | 1990-02-28 | 1997-12-10 | エヌティエヌ 株式会社 | 移動テーブル |
| DE69500707T2 (de) * | 1994-02-07 | 1998-02-12 | Ushiodenki K.K., Tokio/Tokyo | Haltevorrichtung |
| US7384228B2 (en) * | 2004-05-24 | 2008-06-10 | Asml Netherlands B.V. | Insertion device, lithographic apparatus with said insertion device and device manufacturing method |
| DE502008002465D1 (de) * | 2008-01-23 | 2011-03-10 | R & W Antriebselemente Gmbh | Ausgleichselement für eine Positioniereinrichtung |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1008966B (de) * | 1954-07-20 | 1957-05-23 | Kurt Konrad Loewenfeld Dipl In | Vorrichtung zur Feineinstellung von Maschinenteilen, welche auf Gerad- oder Rundfuehrungen bewegt werden |
| US3466514A (en) * | 1967-06-26 | 1969-09-09 | Ibm | Method and apparatus for positioning objects in preselected orientations |
-
1970
- 1970-04-06 US US26007A patent/US3626769A/en not_active Expired - Lifetime
-
1971
- 1971-02-16 FR FR7106550A patent/FR2092380A5/fr not_active Expired
- 1971-03-09 JP JP1225471A patent/JPS5610137B1/ja active Pending
- 1971-03-11 CA CA107421A patent/CA924824A/en not_active Expired
- 1971-03-23 DE DE2113980A patent/DE2113980C2/de not_active Expired
- 1971-04-19 GB GB2463071*A patent/GB1328437A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2113980C2 (de) | 1983-05-11 |
| FR2092380A5 (enExample) | 1972-01-21 |
| DE2113980A1 (de) | 1971-10-21 |
| GB1328437A (en) | 1973-08-30 |
| CA924824A (en) | 1973-04-17 |
| US3626769A (en) | 1971-12-14 |