DE20219511U1 - Seal used for sealing a laser, especially a gas discharge laser such as an excimer laser or a fluorine laser is made from indium, lead or gold - Google Patents

Seal used for sealing a laser, especially a gas discharge laser such as an excimer laser or a fluorine laser is made from indium, lead or gold

Info

Publication number
DE20219511U1
DE20219511U1 DE20219511U DE20219511U DE20219511U1 DE 20219511 U1 DE20219511 U1 DE 20219511U1 DE 20219511 U DE20219511 U DE 20219511U DE 20219511 U DE20219511 U DE 20219511U DE 20219511 U1 DE20219511 U1 DE 20219511U1
Authority
DE
Germany
Prior art keywords
laser
seal
gold
lead
indium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE20219511U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lambda Physik AG
Original Assignee
Lambda Physik AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lambda Physik AG filed Critical Lambda Physik AG
Priority to DE20219511U priority Critical patent/DE20219511U1/en
Publication of DE20219511U1 publication Critical patent/DE20219511U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/032—Constructional details of gas laser discharge tubes for confinement of the discharge, e.g. by special features of the discharge constricting tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

Seal is made from indium, lead or gold. An independent claim is also included for a laser, especially a gas discharge laser such as an excimer laser or an F2 laser, comprising a coupling window and/or rear window sealed using the above seal. Preferred Features: The seal has a cylindrical or flat cross-section.

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßtThe description text was not recorded electronically

Claims (6)

1. Dichtung zum Abdichten eines Lasers, insbesondere eines Gasentladungslasers, wie ein Excimerlaser oder F2-Laser, dadurch gekennzeichnet, dass die Dichtung im Wesentlichen Indium oder Blei oder Gold aufweist.1. Seal for sealing a laser, in particular a gas discharge laser, such as an excimer laser or F 2 laser, characterized in that the seal essentially comprises indium or lead or gold. 2. Dichtung nach Anspruch 1, dadurch gekennzeichnet, dass die Dichtung drahtförmig ausgebildet ist, insbesondere mit kreiszylindrischem Querschnitt oder flachem Querschnitt.2. Seal according to claim 1, characterized in that the seal is wire-shaped, in particular with a circular cylindrical cross section or flat cross section. 3. Laser, insbesondere Gasentladungslaser, wie einem Excimerlaser oder F2- Laser, dadurch gekennzeichnet, dass sein Auskoppelfenster und/oder sein Rückfenster jeweils mit einer Dichtung abgedichtet ist bzw. sind, die als wesentlichen Bestandteil Indium oder Blei oder Gold aufweist.3. Laser, in particular gas discharge laser, such as an excimer laser or F 2 laser, characterized in that its outcoupling window and / or its rear window are each sealed with a seal which has indium or lead or gold as an essential component. 4. Laser, insbesondere Gasentladungslaser, wie einem Excimerlaser oder F2- Laser, dadurch gekennzeichnet, dass ein Frontoptikmodut und/oder ein Rückoptikmodul des Lasers jeweils mit einer Dichtung abgedichtet ist bzw. sind, die als wesentlichen Bestandteil Indium oder Blei oder Gold aufweist.4. Laser, in particular gas discharge laser, such as an excimer laser or F 2 laser, characterized in that a front optical module and / or a rear optical module of the laser is or are sealed with a seal which has indium or lead or gold as an essential component. 5. Laser, insbesondere ein Excimerlaser oder F2-Laser, gekennzeichnet durch eine Vertiefung (11) in zumindest einer Fläche von zwei zum Abdichten aneinandergepressten Flächen, wobei in der Vertiefung eine Dichtung gemäß einem der Ansprüche 1 bis 3 angeordnet ist.5. Laser, in particular an excimer laser or F 2 laser, characterized by a recess (11) in at least one surface of two surfaces pressed together for sealing, a seal according to one of claims 1 to 3 being arranged in the recess. 6. Laser, insbesondere ein Excimerlaser oder F2-Laser, gekennzeichnet durch eine zwischen Dichtflächen des Lasers angeordnete drahtförmige Dichtung aus Indium oder Blei oder Gold, wobei die drahtförmige Dichtung an einer Stelle (3.1) durch Überlappung zu einer umlaufend geschlossenen Abdichtung geformt ist.6. Laser, in particular an excimer laser or F 2 laser, characterized by a wire-shaped seal made of indium or lead or gold arranged between the sealing surfaces of the laser, the wire-shaped seal being formed at one point (3.1) by overlapping to form a circumferentially closed seal.
DE20219511U 2002-12-17 2002-12-17 Seal used for sealing a laser, especially a gas discharge laser such as an excimer laser or a fluorine laser is made from indium, lead or gold Expired - Lifetime DE20219511U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE20219511U DE20219511U1 (en) 2002-12-17 2002-12-17 Seal used for sealing a laser, especially a gas discharge laser such as an excimer laser or a fluorine laser is made from indium, lead or gold

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE20219511U DE20219511U1 (en) 2002-12-17 2002-12-17 Seal used for sealing a laser, especially a gas discharge laser such as an excimer laser or a fluorine laser is made from indium, lead or gold

Publications (1)

Publication Number Publication Date
DE20219511U1 true DE20219511U1 (en) 2003-03-20

Family

ID=7978036

Family Applications (1)

Application Number Title Priority Date Filing Date
DE20219511U Expired - Lifetime DE20219511U1 (en) 2002-12-17 2002-12-17 Seal used for sealing a laser, especially a gas discharge laser such as an excimer laser or a fluorine laser is made from indium, lead or gold

Country Status (1)

Country Link
DE (1) DE20219511U1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007027679A1 (en) * 2007-06-15 2009-01-02 Coherent Gmbh Fastening device for optical element, and for use in laser arrangement for producing laser light, has mounting frame having surface area of contact

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007027679A1 (en) * 2007-06-15 2009-01-02 Coherent Gmbh Fastening device for optical element, and for use in laser arrangement for producing laser light, has mounting frame having surface area of contact
DE102007027679B4 (en) * 2007-06-15 2009-04-09 Coherent Gmbh Fixing device for an optical element

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20030424

R156 Lapse of ip right after 3 years

Effective date: 20060701