DE20205363U1 - tube target - Google Patents

tube target

Info

Publication number
DE20205363U1
DE20205363U1 DE20205363U DE20205363U DE20205363U1 DE 20205363 U1 DE20205363 U1 DE 20205363U1 DE 20205363 U DE20205363 U DE 20205363U DE 20205363 U DE20205363 U DE 20205363U DE 20205363 U1 DE20205363 U1 DE 20205363U1
Authority
DE
Germany
Prior art keywords
silicon
layer
molybdenum
target
tube target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE20205363U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GfE Fremat GmbH
Original Assignee
FNE GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FNE GmbH filed Critical FNE GmbH
Priority to DE20205363U priority Critical patent/DE20205363U1/en
Publication of DE20205363U1 publication Critical patent/DE20205363U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßtThe description text was not recorded electronically

Claims (1)

Rohrtarget für die großflächige Dünnbeschichtung von Architekturglas, Automobil­ glas und Kunststofffolien, gekennzeichnet dadurch, daß es aus einem Trägerrohr aus Stahl besteht, dessen Oberfläche mittels einer an sich bekannten Methode durch Strahlen, Bürsten oder chemisches Ätzen aufgerauht ist, auf dem sich eine Nickel-Chrom-Legierungsschicht, darüber eine Molybdän­ schicht und eine Molybdän-Silizium-Schicht und abschließend auf dieser eine Tar­ getschicht auf Siliziumbasis mit einem Silziumgehalt von mindestens 85 Masse-% Silizium und einem Restanteil eines Metalles mit für das Magnetronzerstäuben aus­ reichender elektrischer und Wärmeleitfähigkeit befinden, wobei alle Schichten durch thermisches Materialspritzen aufgebracht wurden.Tube target for the large-area thin coating of architectural glass, automotive glass and plastic films, characterized in that it consists of a carrier tube made of steel, the surface of which is roughened by means of a known method by blasting, brushing or chemical etching, on which a nickel-chrome -Alloy layer, over it a molybdenum layer and a molybdenum-silicon layer and finally on this a target layer on silicon basis with a silicon content of at least 85% by mass silicon and a residual portion of a metal with for the magnetron sputtering from sufficient electrical and thermal conductivity, whereby all layers were applied by thermal spraying.
DE20205363U 2002-04-06 2002-04-06 tube target Expired - Lifetime DE20205363U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE20205363U DE20205363U1 (en) 2002-04-06 2002-04-06 tube target

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE20205363U DE20205363U1 (en) 2002-04-06 2002-04-06 tube target

Publications (1)

Publication Number Publication Date
DE20205363U1 true DE20205363U1 (en) 2002-07-18

Family

ID=7969745

Family Applications (1)

Application Number Title Priority Date Filing Date
DE20205363U Expired - Lifetime DE20205363U1 (en) 2002-04-06 2002-04-06 tube target

Country Status (1)

Country Link
DE (1) DE20205363U1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007016411A1 (en) 2007-04-02 2008-10-09 Gfe Fremat Gmbh Semi-finished refractory metal product for producing ingot has protective layer giving protection against oxidation during hot deformation of semi-finished product
US8900340B2 (en) 2005-10-14 2014-12-02 Plansee Se Tubular target and production method
CN104878353A (en) * 2014-02-27 2015-09-02 烟台大丰轴瓦有限责任公司 Vacuum magnetron bearing shell antifriction alloy layer sputtering technology

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8900340B2 (en) 2005-10-14 2014-12-02 Plansee Se Tubular target and production method
US9890451B2 (en) 2005-10-14 2018-02-13 Plansee Se Tubular target and production method
DE102007016411A1 (en) 2007-04-02 2008-10-09 Gfe Fremat Gmbh Semi-finished refractory metal product for producing ingot has protective layer giving protection against oxidation during hot deformation of semi-finished product
CN104878353A (en) * 2014-02-27 2015-09-02 烟台大丰轴瓦有限责任公司 Vacuum magnetron bearing shell antifriction alloy layer sputtering technology

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20020822

R150 Term of protection extended to 6 years

Effective date: 20050512

R081 Change of applicant/patentee

Owner name: GFE FREMAT GMBH, DE

Free format text: FORMER OWNER: FNE FORSCHUNGSINSTITUT FUER NICHTEISEN-METALLE FREIBERG GMBH, 09599 FREIBERG, DE

Effective date: 20080409

R151 Term of protection extended to 8 years

Effective date: 20080516

R152 Term of protection extended to 10 years

Effective date: 20100707

R071 Expiry of right
R071 Expiry of right