DE202006005237U1 - Device for breaking of semiconductor disks or wafers has breaking wedge, tilted and aligned opposite to section of semiconductor disk for single semiconductor disk that is pre scratched in initial area of reference break line - Google Patents
Device for breaking of semiconductor disks or wafers has breaking wedge, tilted and aligned opposite to section of semiconductor disk for single semiconductor disk that is pre scratched in initial area of reference break line Download PDFInfo
- Publication number
- DE202006005237U1 DE202006005237U1 DE200620005237 DE202006005237U DE202006005237U1 DE 202006005237 U1 DE202006005237 U1 DE 202006005237U1 DE 200620005237 DE200620005237 DE 200620005237 DE 202006005237 U DE202006005237 U DE 202006005237U DE 202006005237 U1 DE202006005237 U1 DE 202006005237U1
- Authority
- DE
- Germany
- Prior art keywords
- breaking
- semiconductor
- wafers
- wedge
- semiconductor disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
- B28D5/0023—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rectilinearly
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Abstract
Description
Die Erfindung betrifft eine Vorrichtung zum Brechen von Halbleiterscheiben bzw. Wafern nach den Merkmalen des Oberbegriffs des Anspruchs 1.The The invention relates to a device for breaking semiconductor wafers or wafers according to the features of the preamble of claim 1.
Als Wafer (engl. "Scheibe") wird in der Halbleiterindustrie und Mikroelektronik eine kreisrunde, wenige 100 μm dicke Scheibe bezeichnet, auf der elektronische Bauelemente, vor allem integrierte Schaltkreise (IC, "Chip") oder mikromechanische Bauelemente durch verschiedene technische Verfahren hergestellt werden.When Wafer (English: "disk") is used in the semiconductor industry and microelectronics a circular, a few 100 microns thick disc called on the electronic components, especially integrated circuits (IC, "chip") or micromechanical components produced by various technical processes.
Diese Scheibe besteht in den meisten Fällen aus monokristallinem Silizium, es werden aber auch andere Materialien wie Siliziumcarbid, Gallium-Arsenid und Indium-Phosphid verwendet. In der Mikrosystemtechnik werden auch Glaswafer mit einer Dicke im 1-mm-Bereich verwendet.These Disk is made in most cases monocrystalline silicon, but there are also other materials such as silicon carbide, gallium arsenide and indium phosphide. In microsystem technology, glass wafers with a thickness in the 1 mm range used.
Die Scheiben werden in verschiedenen Durchmessern gefertigt. Die zur Zeit hauptsächlich verwendeten Waferdurchmesser unterscheiden sich je nach Halbleiterwerkstoff und vorgesehenem Verwendungszweck und liegen für Silizium z. B. bei 150 mm, 200 mm, 300 mm und künftig auch bei 450 mm, für Gallium-Arsenid bei 2 Zoll, 3 Zoll, 100 mm, 125 mm oder 150 mm. Je größer der Wafer, desto mehr integrierte Schaltkreise, auch Chips genannt, können darauf untergebracht werden. Da bei größeren Wafern der geometrische Verschnitt kleiner wird, können die integrierten Schaltkreise kostengünstiger produziert werden.The Discs are made in different diameters. The to Time mainly used Wafer diameters differ depending on the semiconductor material and intended use and are for silicon z. At 150 mm, 200 mm, 300 mm and future also at 450 mm, for Gallium arsenide at 2 inches, 3 inches, 100 mm, 125 mm or 150 mm. The bigger the Wafer, the more integrated circuits, also called chips, can on it be housed. As with larger wafers the geometric waste becomes smaller, the integrated circuits can cost-effective to be produced.
Für die meisten Anwendungen müssen die Oberflächen der Wafer optisch spiegelnd poliert sein. Hinsichtlich der Ebenheit der Wafer, der Perfektion der Politur und der Reinheit der Oberfläche gelten extreme Forderungen. So sind beispielsweise nur Unebenheiten von wenigen nm über die gesamte Waferfläche zulässig.For the most Applications need the surfaces the wafer should be optically mirror-polished. Regarding the flatness the wafer, the perfection of polish and the purity of the surface apply extreme demands. For example, only bumps of a few nm above the entire wafer surface allowed.
Da für die Verarbeitung der Wafer die exakte Position in der bearbeitenden Maschine wichtig ist, werden die Wafer mit sogenannten Flats gekennzeichnet. Dabei wird mit Hilfe eines primären und eventuell einem sekundären Flat angezeigt, welche Winkelorientierung vorliegt und welche Kristallorientierung die Oberfläche hat. In neuerer Zeit werden an Stelle der Flats Kerben, so genannte Notches, eingesetzt. Sie bieten den Vorteil der besseren Positionierung und verursachen vor allem weniger Verschnitt.There for the Processing the wafer the exact position in the processing Machine is important, the wafers are marked with so-called flats. This is done with the help of a primary and possibly a secondary one Flat displayed, which angle orientation is present and which crystal orientation the surface Has. In recent times, instead of flats notches, so-called Notches, used. They offer the advantage of better positioning and above all cause less waste.
Um
die einzelnen Schaltkreise voneinander zu trennen, werden die Halbleiterscheiben
mit Hilfe bereits bekannter Verfahren und Vorrichtungen zunächst in
einzelnen Streifen unterteilt. Dabei werden die jeweiligen Trennlinien
vorab mittels eines Diamantstichels an der Oberseite der Halbleiterscheibe durch
eingeritzte Kerben entsprechend markiert. Bei der beispielsweise
aus der aus
Insbesondere bei Halbleiterscheiben auf Gallium-Arsenid-Basis, die im Prinzip einen vergleichsweise kleineren Durchmesser aufweisen, wird gelegentlich darauf verzichtet, die Oberfläche jeweils über die gesamte Länge der Sollbruchlinie anzuritzen. Üblicherweise wird dann nur ein kleinerer Abschnitt, vorzugsweise nur ein relativ kurzer Anfangsbereich einer Sollbruchlinie durch eine Einritzung markiert.Especially in the case of semiconductor wafers based on gallium arsenide, which in principle have a comparatively smaller diameter is occasionally on it omitted, the surface each over the entire length to attack the break line. Usually Then only a smaller portion, preferably only a relative short beginning of a fracture line marked by a scoring.
Der vorliegenden Erfindung liegt deshalb die Aufgabe zugrunde, eine Vorrichtung der eingangs genannten Art so zu verbessern, dass auch für Halbleiterscheiben, deren Sollbruchstellen nur in einem kurzen Anfangsbereich durch eine vorab durchgeführte Einritzung markiert sind, eine einfache und sichere Trennung bei gleichzeitig möglichst geringer Fehlerquote erzielt werden kann.Of the The present invention is therefore based on the object, a Device of the type mentioned above to improve so that for semiconductor wafers, whose predetermined breaking points only in a short initial range an advance performed Scratch marks are marked, a simple and safe separation at as possible as possible low error rate can be achieved.
Diese Aufgabe wird erfindungsgemäß durch eine Vorrichtung mit den Merkmalen des Anspruchs 1 gelöst. Erfindungsgemäß ist vorgesehen, dass für lediglich im Anfangsbereich einer Sollbruchlinie vorgeritzte Halbleiterscheiben der Brechkeil gegenüber der Ebene der Halbleiterscheibe derart geneigt ausgerichtet ist, dass eine Druckausübung seitens des Brechkeils ausschließlich in dem durch die Ritzung vorbehandelten Anfangsbereich der Sollbruchlinie erfolgt.These The object is achieved by a Device solved with the features of claim 1. According to the invention, it is provided that for only Pre-scored in the initial region of a predetermined breaking line semiconductor wafers the Brechkeil opposite the Level of the semiconductor wafer is oriented inclined so that a pressure exercise on the part of the crushing wedge exclusively in the pretreated by the scribe Initial range of the predetermined breaking line takes place.
Vorteilhafte Weiterbildungen der Erfindung ergeben sich aus den Merkmalen der Unteransprüche.advantageous Developments of the invention will become apparent from the features of Dependent claims.
Ein Ausführungsbeispiel der Erfindung wird im Folgenden an Hand der Zeichnungen näher beschrieben.One embodiment The invention will be described in more detail below with reference to the drawings.
- 11
- HalbleiterscheibeSemiconductor wafer
- 22
- Halterungbracket
- 33
- Brechkeilbreaking wedge
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200620005237 DE202006005237U1 (en) | 2006-03-31 | 2006-03-31 | Device for breaking of semiconductor disks or wafers has breaking wedge, tilted and aligned opposite to section of semiconductor disk for single semiconductor disk that is pre scratched in initial area of reference break line |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200620005237 DE202006005237U1 (en) | 2006-03-31 | 2006-03-31 | Device for breaking of semiconductor disks or wafers has breaking wedge, tilted and aligned opposite to section of semiconductor disk for single semiconductor disk that is pre scratched in initial area of reference break line |
Publications (1)
Publication Number | Publication Date |
---|---|
DE202006005237U1 true DE202006005237U1 (en) | 2006-11-23 |
Family
ID=37513932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE200620005237 Expired - Lifetime DE202006005237U1 (en) | 2006-03-31 | 2006-03-31 | Device for breaking of semiconductor disks or wafers has breaking wedge, tilted and aligned opposite to section of semiconductor disk for single semiconductor disk that is pre scratched in initial area of reference break line |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE202006005237U1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007112984A1 (en) * | 2006-03-31 | 2007-10-11 | Dyntest Technologies Gmbh | Device for breaking semiconductor wafers using a breaking block |
-
2006
- 2006-03-31 DE DE200620005237 patent/DE202006005237U1/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007112984A1 (en) * | 2006-03-31 | 2007-10-11 | Dyntest Technologies Gmbh | Device for breaking semiconductor wafers using a breaking block |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
AT500075B1 (en) | DEVICE AND METHOD FOR CONNECTING WAFER | |
DE60024731T2 (en) | Scratcher | |
EP2028164A2 (en) | Method and device for separating a plan plate made of brittle material into several individual plates with a laser | |
CN105198198A (en) | Mechanical scoring and separation of strengthened glass | |
DE2028910A1 (en) | Device for testing and sorting electrical Schaltungsele elements | |
DE102006015142B4 (en) | Device for breaking semiconductor wafers | |
DE102019212927A1 (en) | PROCESSING METHOD FOR A SIC SUBSTRATE | |
DE102019212840A1 (en) | SiC SUBSTRATE PROCESSING METHOD | |
DE102019212100B4 (en) | BACKING PLATE DETACHMENT PROCEDURE | |
DE102012101237A1 (en) | A method for temporarily connecting a product substrate to a carrier substrate | |
DE102020200724B4 (en) | Backing plate removal procedure | |
DE202006005237U1 (en) | Device for breaking of semiconductor disks or wafers has breaking wedge, tilted and aligned opposite to section of semiconductor disk for single semiconductor disk that is pre scratched in initial area of reference break line | |
DE202006005238U1 (en) | Device for breaking of semiconductor disks has two counter holder which are facing upper side of semiconductor disk, which with one another is positioned, vertical and horizontal, at two opposite side of breaking line | |
DE102006015141A1 (en) | Semiconductor wafer breaking device for e.g. integrated circuit chip, has wedge arranged at lower side of wafer premarked in starting area of break line, and arranged opposite to wafer plane such that pressure is exerted at wedge sides | |
DE112004001036T5 (en) | Diamond disc and scoring device | |
DE102020211312A1 (en) | WAFER GRINDING PROCESS | |
DE102018217410A1 (en) | Workpiece grinding method | |
EP2143537B1 (en) | Method and device for breaking semiconductor discs or similar substrates | |
DE102022208279A1 (en) | wafer processing methods | |
DE102014219908A1 (en) | Production method for a photomask | |
TW512450B (en) | Apparatus and method to dice integrated circuits from a wafer using a pressurized jet | |
DE102019202564A1 (en) | Stripping method for detaching a substrate from a carrier plate | |
DE10030004A1 (en) | Device for storing an optical element, e.g. a lens in a lens | |
DE202006013398U1 (en) | Device for scoring semi-conductor wafers or similar substrates has precision drive which is connected with force transducer which is mechanically coupled with scoring tool holder guided in axial direction in damping element | |
EP1129835A3 (en) | Tile breaking device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R207 | Utility model specification |
Effective date: 20061228 |
|
R150 | Term of protection extended to 6 years |
Effective date: 20090429 |
|
R081 | Change of applicant/patentee |
Owner name: ASYS AUTOMATISIERUNGSSYSTEME GMBH, DE Free format text: FORMER OWNER: DYNTEST TECHNOLOGIES GMBH, 83224 GRASSAU, DE Effective date: 20100906 |
|
R151 | Term of protection extended to 8 years |
Effective date: 20120412 |
|
R158 | Lapse of ip right after 8 years | ||
R158 | Lapse of ip right after 8 years |
Effective date: 20141001 |