DE2012075A1 - - Google Patents

Info

Publication number
DE2012075A1
DE2012075A1 DE19702012075 DE2012075A DE2012075A1 DE 2012075 A1 DE2012075 A1 DE 2012075A1 DE 19702012075 DE19702012075 DE 19702012075 DE 2012075 A DE2012075 A DE 2012075A DE 2012075 A1 DE2012075 A1 DE 2012075A1
Authority
DE
Germany
Prior art keywords
melt
detector device
light beam
photodetector
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19702012075
Other languages
German (de)
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE2012075A1 publication Critical patent/DE2012075A1/de
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • C23C14/542Controlling the film thickness or evaporation rate
    • C23C14/543Controlling the film thickness or evaporation rate using measurement on the vapor source
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/246Replenishment of source material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/28Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
    • G01F23/284Electromagnetic waves
    • G01F23/292Light, e.g. infrared or ultraviolet

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Electromagnetism (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Measurement Of Optical Distance (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE19702012075 1969-03-13 1970-03-13 Pending DE2012075A1 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US80695669A 1969-03-13 1969-03-13

Publications (1)

Publication Number Publication Date
DE2012075A1 true DE2012075A1 (enExample) 1970-09-10

Family

ID=25195217

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19702012075 Pending DE2012075A1 (enExample) 1969-03-13 1970-03-13

Country Status (6)

Country Link
US (1) US3574650A (enExample)
CA (1) CA959145A (enExample)
DE (1) DE2012075A1 (enExample)
FR (1) FR2037794A5 (enExample)
GB (1) GB1294234A (enExample)
SE (1) SE366832B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3336210A1 (de) * 1982-10-06 1984-04-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Verfahren und vorrichtung zur fuellstandsmessung
DE10040942A1 (de) * 2000-08-21 2002-03-07 Endress Hauser Gmbh Co Vorrichtung zur Bestimmung des Füllstands eines Füllguts in einem Behälter

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3740563A (en) * 1971-06-25 1973-06-19 Monsanto Co Electroptical system and method for sensing and controlling the diameter and melt level of pulled crystals
US3958129A (en) * 1974-08-05 1976-05-18 Motorola, Inc. Automatic crystal diameter control for growth of semiconductor crystals
US4061800A (en) * 1975-02-06 1977-12-06 Applied Materials, Inc. Vapor desposition method
US4046100A (en) * 1975-10-20 1977-09-06 Trw Inc. Apparatus for thermal deposition of metal
DE2931199A1 (de) * 1979-08-01 1981-02-19 Endress Hauser Gmbh Co Anordnung zur messung des badspiegels in einer giessanlage, insbesondere in der kokille einer stranggiessanlage
FR2482290A1 (fr) * 1980-05-09 1981-11-13 Poncet Pierre Perfectionnements a la detection photoelectrique du niveau du bain dans les lingotieres de coulee continue
US4396005A (en) * 1981-07-06 1983-08-02 Corning Glass Works Solar collector and control
US4508970A (en) * 1982-07-15 1985-04-02 Motorola, Inc. Melt level sensing system and method
DE3720303C2 (de) * 1987-06-19 1993-09-30 Schenck Ag Carl Probeneinspannvorrichtung für Prüfmaschinen
DE3720248A1 (de) * 1987-06-19 1989-01-05 Schenck Ag Carl Verfahren und anordnung zur messung von verformungen an proben oder pruefkoerpern in pruefmaschinen
DE3740227C2 (de) * 1987-11-27 1994-03-24 Schenck Ag Carl Verfahren und Vorrichtung zur Messung von Verformungen an Proben oder Prüfkörpern in Prüfmaschinen
US5718951A (en) * 1995-09-08 1998-02-17 Aeroquip Corporation Method and apparatus for creating a free-form three-dimensional article using a layer-by-layer deposition of a molten metal and deposition of a powdered metal as a support material
US5617911A (en) * 1995-09-08 1997-04-08 Aeroquip Corporation Method and apparatus for creating a free-form three-dimensional article using a layer-by-layer deposition of a support material and a deposition material
US5787965A (en) * 1995-09-08 1998-08-04 Aeroquip Corporation Apparatus for creating a free-form metal three-dimensional article using a layer-by-layer deposition of a molten metal in an evacuation chamber with inert environment
US5746844A (en) * 1995-09-08 1998-05-05 Aeroquip Corporation Method and apparatus for creating a free-form three-dimensional article using a layer-by-layer deposition of molten metal and using a stress-reducing annealing process on the deposited metal
US6342265B1 (en) * 1997-08-20 2002-01-29 Triumf Apparatus and method for in-situ thickness and stoichiometry measurement of thin films
US20080160171A1 (en) * 2006-12-29 2008-07-03 United Technologies Corporation Electron beam physical vapor deposition apparatus and processes for adjusting the feed rate of a target and manufacturing a multi-component condensate free of lamination
EP3349924A1 (en) * 2015-09-15 2018-07-25 Retech Systems LLC Laser sensor for melt control of hearth furnaces and the like
US11213912B2 (en) 2018-06-25 2022-01-04 Bwxt Nuclear Operations Group, Inc. Methods and systems for monitoring a temperature of a component during a welding operation
CN115867688B (zh) * 2020-06-30 2025-05-27 马克思-普朗克科学促进协会 控制蒸发源材料的磁通分布的方法、测量在源表面上反射的电磁辐射的检测器及利用电磁辐射进行热蒸发的系统
WO2022002371A1 (en) * 2020-06-30 2022-01-06 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Method for controlling an evaporation rate of source material, detector for measuring electromagnetic radiation reflected on a source surface and system for thermal evaporation with electromagnetic radiation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3336210A1 (de) * 1982-10-06 1984-04-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Verfahren und vorrichtung zur fuellstandsmessung
DE10040942A1 (de) * 2000-08-21 2002-03-07 Endress Hauser Gmbh Co Vorrichtung zur Bestimmung des Füllstands eines Füllguts in einem Behälter

Also Published As

Publication number Publication date
SE366832B (enExample) 1974-05-06
US3574650A (en) 1971-04-13
FR2037794A5 (enExample) 1970-12-31
GB1294234A (en) 1972-10-25
CA959145A (en) 1974-12-10

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