DE2012075A1 - - Google Patents
Info
- Publication number
- DE2012075A1 DE2012075A1 DE19702012075 DE2012075A DE2012075A1 DE 2012075 A1 DE2012075 A1 DE 2012075A1 DE 19702012075 DE19702012075 DE 19702012075 DE 2012075 A DE2012075 A DE 2012075A DE 2012075 A1 DE2012075 A1 DE 2012075A1
- Authority
- DE
- Germany
- Prior art keywords
- melt
- detector device
- light beam
- photodetector
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 21
- 230000003287 optical effect Effects 0.000 claims description 18
- 238000000576 coating method Methods 0.000 claims description 17
- 239000011248 coating agent Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 15
- 239000000155 melt Substances 0.000 claims description 14
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 3
- 230000008016 vaporization Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 238000011176 pooling Methods 0.000 claims 1
- 230000000750 progressive effect Effects 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 description 12
- 239000000956 alloy Substances 0.000 description 12
- 230000008569 process Effects 0.000 description 8
- 239000000203 mixture Substances 0.000 description 7
- 238000012544 monitoring process Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 230000002285 radioactive effect Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002543 FeCrAlY Inorganic materials 0.000 description 1
- 229910000946 Y alloy Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 239000005337 ground glass Substances 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000289 melt material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/543—Controlling the film thickness or evaporation rate using measurement on the vapor source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
- G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
- G01F23/28—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
- G01F23/284—Electromagnetic waves
- G01F23/292—Light, e.g. infrared or ultraviolet
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Electromagnetism (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Measurement Of Optical Distance (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US80695669A | 1969-03-13 | 1969-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2012075A1 true DE2012075A1 (enExample) | 1970-09-10 |
Family
ID=25195217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702012075 Pending DE2012075A1 (enExample) | 1969-03-13 | 1970-03-13 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3574650A (enExample) |
| CA (1) | CA959145A (enExample) |
| DE (1) | DE2012075A1 (enExample) |
| FR (1) | FR2037794A5 (enExample) |
| GB (1) | GB1294234A (enExample) |
| SE (1) | SE366832B (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3336210A1 (de) * | 1982-10-06 | 1984-04-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München | Verfahren und vorrichtung zur fuellstandsmessung |
| DE10040942A1 (de) * | 2000-08-21 | 2002-03-07 | Endress Hauser Gmbh Co | Vorrichtung zur Bestimmung des Füllstands eines Füllguts in einem Behälter |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3740563A (en) * | 1971-06-25 | 1973-06-19 | Monsanto Co | Electroptical system and method for sensing and controlling the diameter and melt level of pulled crystals |
| US3958129A (en) * | 1974-08-05 | 1976-05-18 | Motorola, Inc. | Automatic crystal diameter control for growth of semiconductor crystals |
| US4061800A (en) * | 1975-02-06 | 1977-12-06 | Applied Materials, Inc. | Vapor desposition method |
| US4046100A (en) * | 1975-10-20 | 1977-09-06 | Trw Inc. | Apparatus for thermal deposition of metal |
| DE2931199A1 (de) * | 1979-08-01 | 1981-02-19 | Endress Hauser Gmbh Co | Anordnung zur messung des badspiegels in einer giessanlage, insbesondere in der kokille einer stranggiessanlage |
| FR2482290A1 (fr) * | 1980-05-09 | 1981-11-13 | Poncet Pierre | Perfectionnements a la detection photoelectrique du niveau du bain dans les lingotieres de coulee continue |
| US4396005A (en) * | 1981-07-06 | 1983-08-02 | Corning Glass Works | Solar collector and control |
| US4508970A (en) * | 1982-07-15 | 1985-04-02 | Motorola, Inc. | Melt level sensing system and method |
| DE3720248A1 (de) * | 1987-06-19 | 1989-01-05 | Schenck Ag Carl | Verfahren und anordnung zur messung von verformungen an proben oder pruefkoerpern in pruefmaschinen |
| DE3720303C2 (de) * | 1987-06-19 | 1993-09-30 | Schenck Ag Carl | Probeneinspannvorrichtung für Prüfmaschinen |
| DE3740227C2 (de) * | 1987-11-27 | 1994-03-24 | Schenck Ag Carl | Verfahren und Vorrichtung zur Messung von Verformungen an Proben oder Prüfkörpern in Prüfmaschinen |
| US5746844A (en) * | 1995-09-08 | 1998-05-05 | Aeroquip Corporation | Method and apparatus for creating a free-form three-dimensional article using a layer-by-layer deposition of molten metal and using a stress-reducing annealing process on the deposited metal |
| US5787965A (en) * | 1995-09-08 | 1998-08-04 | Aeroquip Corporation | Apparatus for creating a free-form metal three-dimensional article using a layer-by-layer deposition of a molten metal in an evacuation chamber with inert environment |
| US5617911A (en) * | 1995-09-08 | 1997-04-08 | Aeroquip Corporation | Method and apparatus for creating a free-form three-dimensional article using a layer-by-layer deposition of a support material and a deposition material |
| US5718951A (en) * | 1995-09-08 | 1998-02-17 | Aeroquip Corporation | Method and apparatus for creating a free-form three-dimensional article using a layer-by-layer deposition of a molten metal and deposition of a powdered metal as a support material |
| US6342265B1 (en) | 1997-08-20 | 2002-01-29 | Triumf | Apparatus and method for in-situ thickness and stoichiometry measurement of thin films |
| US20080160171A1 (en) * | 2006-12-29 | 2008-07-03 | United Technologies Corporation | Electron beam physical vapor deposition apparatus and processes for adjusting the feed rate of a target and manufacturing a multi-component condensate free of lamination |
| WO2017048523A1 (en) * | 2015-09-15 | 2017-03-23 | Retech Systems Llc | Laser sensor for melt control of hearth furnaces and the like |
| US11213912B2 (en) * | 2018-06-25 | 2022-01-04 | Bwxt Nuclear Operations Group, Inc. | Methods and systems for monitoring a temperature of a component during a welding operation |
| US20230175892A1 (en) * | 2020-06-30 | 2023-06-08 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Method for controlling an evaporation rate of source material, detector for measuring electromagnetic radiation reflected on a source surface and system for thermal evaporation with electromagnetic radiation |
| EP4143362B1 (en) * | 2020-06-30 | 2025-04-30 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Method for controlling a flux distribution of evaporated source material, detector for measuring electromagnetic radiation reflected on a source surface and system for thermal evaporation with electromagnetic radiation |
| CN121409121B (zh) * | 2025-11-07 | 2026-05-29 | 深圳市立联旭科技有限公司 | 基于3d视觉的密封圈高度检测设备 |
-
1969
- 1969-03-13 US US806956A patent/US3574650A/en not_active Expired - Lifetime
-
1970
- 1970-02-16 CA CA075,012A patent/CA959145A/en not_active Expired
- 1970-02-24 GB GB8855/70A patent/GB1294234A/en not_active Expired
- 1970-03-09 FR FR7008248A patent/FR2037794A5/fr not_active Expired
- 1970-03-11 SE SE03250/70A patent/SE366832B/xx unknown
- 1970-03-13 DE DE19702012075 patent/DE2012075A1/de active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3336210A1 (de) * | 1982-10-06 | 1984-04-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München | Verfahren und vorrichtung zur fuellstandsmessung |
| DE10040942A1 (de) * | 2000-08-21 | 2002-03-07 | Endress Hauser Gmbh Co | Vorrichtung zur Bestimmung des Füllstands eines Füllguts in einem Behälter |
Also Published As
| Publication number | Publication date |
|---|---|
| SE366832B (enExample) | 1974-05-06 |
| CA959145A (en) | 1974-12-10 |
| US3574650A (en) | 1971-04-13 |
| FR2037794A5 (enExample) | 1970-12-31 |
| GB1294234A (en) | 1972-10-25 |
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