DE20108171U1 - Arrangement for the contactless determination of product properties - Google Patents

Arrangement for the contactless determination of product properties

Info

Publication number
DE20108171U1
DE20108171U1 DE20108171U DE20108171U DE20108171U1 DE 20108171 U1 DE20108171 U1 DE 20108171U1 DE 20108171 U DE20108171 U DE 20108171U DE 20108171 U DE20108171 U DE 20108171U DE 20108171 U1 DE20108171 U1 DE 20108171U1
Authority
DE
Germany
Prior art keywords
measuring
measuring surface
light
signal processing
spectrophotometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE20108171U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Priority to DE20108171U priority Critical patent/DE20108171U1/en
Publication of DE20108171U1 publication Critical patent/DE20108171U1/en
Priority to GBGB0210855.3A priority patent/GB0210855D0/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N2021/3155—Measuring in two spectral ranges, e.g. UV and visible
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßtThe description text was not recorded electronically

Claims (7)

1. Meßeinrichtung zur Ermittlung geometrischer und/oder optischer Eigenschaften der verschiedenen Schichten eines Schichtsystems, mit mindestens einer zur Be­ leuchtung einer Meßfläche (5) auf dem Produkt (2) die­ nenden Beleuchtungseinrichtung (4), mit mindestens ei­ ner Detektionseinrichtung für das von der Meßflä­ che (5) kommende Licht und mit einer Signalverarbei­ tungseinrichtung (10), die mit den Signalausgängen der Detektionseinrichtung in Verbindung steht, dadurch ge­ kennzeichnet, daß
die Beleuchtungseinrichtung (4) Strahlungsquellen auf­ weist, deren Strahlung die Wellenlängenbereiche UV, VIS und IR lückenlos abdeckt und
in der Detektionseinrichtung Detektoren für jeweils un­ mittelbar aneinander angrenzende Wellenlängenbereiche vorgesehen sind, wobei die Detektoren und die Signal­ verarbeitungseinrichtung (10) zur lückenlosen Bewertung des von der Meßfläche (5) kommenden Lichtes mit Wellen­ längen von 200 nm bis über 2400 nm ausgebildet sind.1. Measuring device for determining the geometric and / or optical properties of the different layers of a layer system, with at least one for illuminating a measuring surface ( 5 ) on the product ( 2 ) the nnen lighting device ( 4 ), with at least one detection device for the Measuring surface ( 5 ) coming light and with a signal processing device ( 10 ) which is connected to the signal outputs of the detection device, characterized in that
the lighting device ( 4 ) has radiation sources, the radiation of which completely covers the wavelength ranges UV, VIS and IR and
in the detection device detectors are provided for each un directly adjacent wavelength ranges, the detectors and the signal processing device ( 10 ) for the complete evaluation of the light coming from the measuring surface ( 5 ) with wavelengths from 200 nm to over 2400 nm are formed. 2. Meßeinrichtung nach Anspruch 1, dadurch gekennzeich­ net, daß als Detektoren ein UV-VIS-Spektralphotome­ ter (8) und ein NIR-Spektralphotometer (9) vorgesehen sind.2. Measuring device according to claim 1, characterized in that a UV-VIS spectrophotometer ter ( 8 ) and an NIR spectrophotometer ( 9 ) are provided as detectors. 3. Meßeinrichtung nach Anspruch 2, dadurch gekennzeich­ net, daß die Spektralphotometer (8, 9) als Dioden­ array-Spektralphotometer ausgebildet sind. 3. Measuring device according to claim 2, characterized in that the spectrophotometer ( 8 , 9 ) are designed as a diode array spectrophotometer. 4. Meßeinrichtung nach Anspruch einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß die Beleuchtungs­ einrichtung (4), die Photometer und die Signalverar­ beitungseinrichtung (10) in einem gemeinsamen Meß­ kopf (1) integriert sind, der über der Meßfläche (5) positioniert ist, wobei der Einfallswinkel α der Strahlung auf die Meßfläche variierbar ist.4. Measuring device according to one of claims 1 to 3, characterized in that the lighting device ( 4 ), the photometer and the signal processing device ( 10 ) are integrated in a common measuring head ( 1 ) which is above the measuring surface ( 5 ) is positioned, the angle of incidence α of the radiation on the measuring surface being variable. 5. Meßeinrichtung nach einem der vorgenannten Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die Signalverarbei­ tungseinrichtung (10) eine zur Kopplung an einen ex­ ternen Rechner und/oder eine Anzeigevorrichtung die­ nende Schnittstelle (11) aufweist.5. Measuring device according to one of the preceding claims 1 to 4, characterized in that the signal processing device ( 10 ) has a coupling for coupling to an external computer and / or a display device, the interface ( 11 ). 6. Meßeinrichtung nach einem der vorgenannten Ansprüche 1 bis 5, dadurch gekennzeichnet, daß zur Übertragung des von der Beleuchtungseinrichtung (4) ausgehenden, auf die Meßfläche (5) gerichteten Lichtes sowie zur Über­ tragung des von der Meßfläche (5) ausgehenden Lichtes zu den Photometern flexible Lichtleiter (7) vorgesehen sind.6. Measuring device according to one of the preceding claims 1 to 5, characterized in that for transmitting the light emanating from the lighting device ( 4 ), directed onto the measuring surface ( 5 ) and for transmitting the light emitted from the measuring surface ( 5 ) to the Flexible light guides ( 7 ) are provided for photometers. 7. Meßeinrichtung nach Anspruch 6, dadurch gekennzeich­ net, daß die Lichtleiter (7) aus einer Vielzahl von Lichtleitfasern bestehen.7. Measuring device according to claim 6, characterized in that the light guide ( 7 ) consist of a plurality of optical fibers.
DE20108171U 2001-05-15 2001-05-15 Arrangement for the contactless determination of product properties Expired - Lifetime DE20108171U1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE20108171U DE20108171U1 (en) 2001-05-15 2001-05-15 Arrangement for the contactless determination of product properties
GBGB0210855.3A GB0210855D0 (en) 2001-05-15 2002-05-13 Arrangement for determining product characteristics in a contact-free manner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE20108171U DE20108171U1 (en) 2001-05-15 2001-05-15 Arrangement for the contactless determination of product properties

Publications (1)

Publication Number Publication Date
DE20108171U1 true DE20108171U1 (en) 2001-08-09

Family

ID=7956910

Family Applications (1)

Application Number Title Priority Date Filing Date
DE20108171U Expired - Lifetime DE20108171U1 (en) 2001-05-15 2001-05-15 Arrangement for the contactless determination of product properties

Country Status (2)

Country Link
DE (1) DE20108171U1 (en)
GB (1) GB0210855D0 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003033995A1 (en) * 2001-10-16 2003-04-24 Therma-Wave, Inc. Measurement system with separate optimized beam paths

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003033995A1 (en) * 2001-10-16 2003-04-24 Therma-Wave, Inc. Measurement system with separate optimized beam paths
US7061614B2 (en) 2001-10-16 2006-06-13 Therma-Wave, Inc. Measurement system with separate optimized beam paths
US7227637B2 (en) 2001-10-16 2007-06-05 Therma-Wave, Inc. Measurement system with separate optimized beam paths

Also Published As

Publication number Publication date
GB0210855D0 (en) 2002-06-19

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20010913

R150 Term of protection extended to 6 years

Effective date: 20040723

R151 Term of protection extended to 8 years

Effective date: 20070620

R152 Term of protection extended to 10 years

Effective date: 20090702

R071 Expiry of right