DE20108171U1 - Arrangement for contactless determination of product properties - Google Patents

Arrangement for contactless determination of product properties

Info

Publication number
DE20108171U1
DE20108171U1 DE2001208171 DE20108171U DE20108171U1 DE 20108171 U1 DE20108171 U1 DE 20108171U1 DE 2001208171 DE2001208171 DE 2001208171 DE 20108171 U DE20108171 U DE 20108171U DE 20108171 U1 DE20108171 U1 DE 20108171U1
Authority
DE
Grant status
Grant
Patent type
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE2001208171
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Jenoptik AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/02Measuring arrangements characterised by the use of optical means for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical means for measuring length, width or thickness for measuring thickness, e.g. of sheet material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/30Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36Investigating two or more bands of a spectrum by separate detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N2021/3155Measuring in two spectral ranges, e.g. UV and visible
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infra-red light
    • G01N21/3563Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infra-red light for analysing solids; Preparation of samples therefor

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text has not been detected electronically

Claims (7)

  1. 1. Meßeinrichtung zur Ermittlung geometrischer und/oder optischer Eigenschaften der verschiedenen Schichten eines Schichtsystems, mit mindestens einer zur Be leuchtung einer Meßfläche ( 5 ) auf dem Produkt ( 2 ) die nenden Beleuchtungseinrichtung ( 4 ), mit mindestens ei ner Detektionseinrichtung für das von der Meßflä che ( 5 ) kommende Licht und mit einer Signalverarbei tungseinrichtung ( 10 ), die mit den Signalausgängen der Detektionseinrichtung in Verbindung steht, dadurch ge kennzeichnet , daß 1. Measuring device for determining geometric and / or optical properties of the various layers of a layer system with at least one of Be illumination of a measurement surface (5) on the product (2) the nenden illumination device (4), with at least ei ner detection means for the Meßflä surface (5) and with a light coming Signalverarbei processing device (10), which is connected to the signal outputs of the detection device, characterized in that
    die Beleuchtungseinrichtung ( 4 ) Strahlungsquellen auf weist, deren Strahlung die Wellenlängenbereiche UV, VIS und IR lückenlos abdeckt und the lighting means (4) comprises radiation sources, the radiation of which the wavelength ranges of UV, VIS and IR covers without gaps and
    in der Detektionseinrichtung Detektoren für jeweils un mittelbar aneinander angrenzende Wellenlängenbereiche vorgesehen sind, wobei die Detektoren und die Signal verarbeitungseinrichtung ( 10 ) zur lückenlosen Bewertung des von der Meßfläche ( 5 ) kommenden Lichtes mit Wellen längen von 200 nm bis über 2400 nm ausgebildet sind. Detectors for each un adjacent wavelength ranges are in the detection device indirectly to one another are provided, the detectors and the signal processing means (10) for complete evaluation of the measuring surface (5) coming light with wave lengths are formed from 200 nm to about 2400 nm.
  2. 2. Meßeinrichtung nach Anspruch 1, dadurch gekennzeich net, daß als Detektoren ein UV-VIS-Spektralphotome ter ( 8 ) und ein NIR-Spektralphotometer ( 9 ) vorgesehen sind. 2. Measuring device according to claim 1, characterized in that a UV-VIS-Spektralphotome ter (8) and a NIR spectrophotometer (9) are provided as detectors.
  3. 3. Meßeinrichtung nach Anspruch 2, dadurch gekennzeich net, daß die Spektralphotometer ( 8 , 9 ) als Dioden array-Spektralphotometer ausgebildet sind. 3. Measuring device according to claim 2, characterized in that, the spectrophotometer (8, 9) as a diode array spectrophotometer formed.
  4. 4. Meßeinrichtung nach Anspruch einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß die Beleuchtungs einrichtung ( 4 ), die Photometer und die Signalverar beitungseinrichtung ( 10 ) in einem gemeinsamen Meß kopf ( 1 ) integriert sind, der über der Meßfläche ( 5 ) positioniert ist, wobei der Einfallswinkel α der Strahlung auf die Meßfläche variierbar ist. 4. Measuring device according to claim any one of claims 1 to 3, characterized in that the illumination device (4), the photometer and the Signalverar beitungseinrichtung (10) in a common measuring head (1) are integrated, which above the surface (5) is positioned, wherein the angle of incidence α of the radiation is varied on the measuring surface.
  5. 5. Meßeinrichtung nach einem der vorgenannten Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die Signalverarbei tungseinrichtung ( 10 ) eine zur Kopplung an einen ex ternen Rechner und/oder eine Anzeigevorrichtung die nende Schnittstelle ( 11 ) aufweist. Has 5. Measuring device according to one of the preceding claims 1 to 4, characterized in that the Signalverarbei processing device (10) for coupling to an ex ternal computer and / or a display device designating the interface (11).
  6. 6. Meßeinrichtung nach einem der vorgenannten Ansprüche 1 bis 5, dadurch gekennzeichnet, daß zur Übertragung des von der Beleuchtungseinrichtung ( 4 ) ausgehenden, auf die Meßfläche ( 5 ) gerichteten Lichtes sowie zur Über tragung des von der Meßfläche ( 5 ) ausgehenden Lichtes zu den Photometern flexible Lichtleiter ( 7 ) vorgesehen sind. 6. Measuring device according to one of the preceding claims 1 to 5, characterized in that outbound for transmitting the of the illumination device (4) on the measuring surface (5) directional light and transmission for over of the measuring surface (5) outgoing light to the photometers flexible light guide (7) are provided.
  7. 7. Meßeinrichtung nach Anspruch 6, dadurch gekennzeich net, daß die Lichtleiter ( 7 ) aus einer Vielzahl von Lichtleitfasern bestehen. 7. Measuring device according to claim 6, characterized in that the light conductor (7) from a plurality of optical fibers are made.
DE2001208171 2001-05-15 2001-05-15 Arrangement for contactless determination of product properties Expired - Lifetime DE20108171U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE2001208171 DE20108171U1 (en) 2001-05-15 2001-05-15 Arrangement for contactless determination of product properties

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2001208171 DE20108171U1 (en) 2001-05-15 2001-05-15 Arrangement for contactless determination of product properties
GB0210855A GB0210855D0 (en) 2001-05-15 2002-05-13 Arrangement for determining product characteristics in a contact-free manner

Publications (1)

Publication Number Publication Date
DE20108171U1 true DE20108171U1 (en) 2001-08-09

Family

ID=7956910

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2001208171 Expired - Lifetime DE20108171U1 (en) 2001-05-15 2001-05-15 Arrangement for contactless determination of product properties

Country Status (2)

Country Link
DE (1) DE20108171U1 (en)
GB (1) GB0210855D0 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003033995A1 (en) * 2001-10-16 2003-04-24 Therma-Wave, Inc. Measurement system with separate optimized beam paths

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003033995A1 (en) * 2001-10-16 2003-04-24 Therma-Wave, Inc. Measurement system with separate optimized beam paths
US7061614B2 (en) 2001-10-16 2006-06-13 Therma-Wave, Inc. Measurement system with separate optimized beam paths
US7227637B2 (en) 2001-10-16 2007-06-05 Therma-Wave, Inc. Measurement system with separate optimized beam paths

Also Published As

Publication number Publication date Type
GB0210855D0 (en) 2002-06-19 grant

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20010913

R150 Term of protection extended to 6 years

Effective date: 20040723

R151 Term of protection extended to 8 years

Effective date: 20070620

R152 Term of protection extended to 10 years

Effective date: 20090702

R071 Expiry of right