DE20105505U1 - pressure transmitters - Google Patents

pressure transmitters

Info

Publication number
DE20105505U1
DE20105505U1 DE20105505U DE20105505U DE20105505U1 DE 20105505 U1 DE20105505 U1 DE 20105505U1 DE 20105505 U DE20105505 U DE 20105505U DE 20105505 U DE20105505 U DE 20105505U DE 20105505 U1 DE20105505 U1 DE 20105505U1
Authority
DE
Germany
Prior art keywords
contact points
pressure
measuring cell
pressure transmitter
transmitter according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE20105505U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Keller AG fuer Druckmesstechnik
Original Assignee
Keller AG fuer Druckmesstechnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Keller AG fuer Druckmesstechnik filed Critical Keller AG fuer Druckmesstechnik
Priority to DE20105505U priority Critical patent/DE20105505U1/en
Publication of DE20105505U1 publication Critical patent/DE20105505U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßtThe description text was not recorded electronically

Claims (5)

1. Drucktransmitter mit einer piezoresistiven Druckmess­ zelle (1), die zumindest mittelbar auf einem Träger (7) sitzt, der vorzugsweise als sogenannte Glasdurchführung ausgebildet ist, wobei die Druckmesszelle (1) mit einen mit einer Messmembran (3) versehenen Chip gebildet ist, und wobei Kontaktstellen (17) auf der Druckmesszelle (1) über Drähte (19) mit entsprechenden Kontaktstellen (9') vorzugsweise an Sockelstiften (9) verbunden sind, und mit einer elektrischen/elektronischen Auswertschaltung (21), dadurch gekennzeichnet, dass die Auswertschaltung (21) ebenfalls in dem die Druckmesszelle (1) aufnehmenden und mit einem Druckübertragungsmedium befüllten Raum unterge­ bracht und mittels Drähten (19) angeschlossen ist.1. Pressure transmitter having a piezoresistive pressure measuring cell (1) which sits at least indirectly on a support (7), which is preferably designed as a so-called glass seal, wherein the pressure measuring cell (1) with a provided with a measuring diaphragm (3) chip is formed, and wherein contact points ( 17 ) on the pressure measuring cell ( 1 ) are connected via wires ( 19 ) to corresponding contact points ( 9 '), preferably on base pins ( 9 ), and to an electrical / electronic evaluation circuit ( 21 ), characterized in that the evaluation circuit ( 21 ) also accommodated in the pressure measuring cell ( 1 ) receiving and filled with a pressure transmission medium space and connected by means of wires ( 19 ). 2. Drucktransmitter nach Anspruch 1, dadurch gekennzeich­ net, dass die elektrische/elektronische Auswertschaltung (21) wie die Druckmesszelle (1) auch zumindest mittelbar auf der als Träger fungierenden Glasdurchführung (7) posi­ tioniert und gehalten ist. 2. Pressure transmitter according to claim 1, characterized in that the electrical / electronic evaluation circuit ( 21 ) like the pressure measuring cell ( 1 ) is also positioned and held at least indirectly on the glass bushing ( 7 ) acting as a carrier. 3. Drucktransmitter nach Anspruch 1 oder 2, dadurch ge­ kennzeichnet, dass Kontaktstellen (21') an den elektri­ schen/elektronischen Auswertschaltungen (21) über Drähte (19"), vorzugsweise Bonddrähte, mit entsprechenden Kon­ taktstellen auf der Messmembran (3) verbunden sind.3. Pressure transmitter according to claim 1 or 2, characterized in that contact points ( 21 ') on the electrical / electronic evaluation circuits ( 21 ) via wires ( 19 "), preferably bond wires, connected to corresponding contact points on the measuring membrane ( 3 ) are. 4. Drucktransmitter nach Anspruch 1, 2 oder 3, dadurch gekennzeichnet, dass die Auswertelektronik (21), d. h. entsprechende Kontaktstellen (21') über Drähte, vorzugs­ weise Bonddrähte (19') mit Kontaktstellen (19") zum aus der Vorrichtung hinausführenden elektrischen Leitung, vorzugsweise an Kontaktstellen (19') von Sockelstiften (9) elektrisch verbunden sind.4. Pressure transmitter according to claim 1, 2 or 3, characterized in that the evaluation electronics ( 21 ), ie corresponding contact points ( 21 ') via wires, preferably as bond wires ( 19 ') with contact points ( 19 ") for leading out of the device electrical Line, preferably at contact points ( 19 ') of base pins ( 9 ) are electrically connected. 5. Drucktransmitter nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass der Träger oder die Glas­ durchführung (7) nur von vier Sockelstiften (9) durchsetzt ist, an welchen das abgeglichene Messsignal abgreifbar ist.5. Pressure transmitter according to one of claims 1 to 4, characterized in that the carrier or the glass bushing ( 7 ) is penetrated only by four base pins ( 9 ), on which the balanced measurement signal can be tapped.
DE20105505U 2001-03-29 2001-03-29 pressure transmitters Expired - Lifetime DE20105505U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE20105505U DE20105505U1 (en) 2001-03-29 2001-03-29 pressure transmitters

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE20105505U DE20105505U1 (en) 2001-03-29 2001-03-29 pressure transmitters

Publications (1)

Publication Number Publication Date
DE20105505U1 true DE20105505U1 (en) 2002-08-01

Family

ID=7955048

Family Applications (1)

Application Number Title Priority Date Filing Date
DE20105505U Expired - Lifetime DE20105505U1 (en) 2001-03-29 2001-03-29 pressure transmitters

Country Status (1)

Country Link
DE (1) DE20105505U1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202009013919U1 (en) 2009-10-14 2010-06-24 Keller AG für Druckmeßtechnik pressure transmitters

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2552393C2 (en) * 1974-12-02 1985-03-28 N.V. Philips' Gloeilampenfabrieken, Eindhoven Pressure transducer
US4838089A (en) * 1986-05-07 1989-06-13 Nippondenso Co., Ltd. Semiconductor pressure sensor
DE4111539A1 (en) * 1990-07-05 1992-01-16 Mitsubishi Electric Corp SEMICONDUCTOR PRESSURE RECEIVER AND METHOD FOR THE PRODUCTION THEREOF
DE3315266C2 (en) * 1983-04-27 1993-10-21 Fuji Electric Co Ltd Semiconductor pressure sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2552393C2 (en) * 1974-12-02 1985-03-28 N.V. Philips' Gloeilampenfabrieken, Eindhoven Pressure transducer
DE3315266C2 (en) * 1983-04-27 1993-10-21 Fuji Electric Co Ltd Semiconductor pressure sensor
US4838089A (en) * 1986-05-07 1989-06-13 Nippondenso Co., Ltd. Semiconductor pressure sensor
DE4111539A1 (en) * 1990-07-05 1992-01-16 Mitsubishi Electric Corp SEMICONDUCTOR PRESSURE RECEIVER AND METHOD FOR THE PRODUCTION THEREOF

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202009013919U1 (en) 2009-10-14 2010-06-24 Keller AG für Druckmeßtechnik pressure transmitters

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Legal Events

Date Code Title Description
R163 Identified publications notified
R207 Utility model specification

Effective date: 20020905

R150 Term of protection extended to 6 years

Effective date: 20040601

R151 Term of protection extended to 8 years

Effective date: 20070309

R152 Term of protection extended to 10 years

Effective date: 20090311

R071 Expiry of right