DE19983727T1 - Improved tantalum-containing copper barrier layers using high purity tantalum targets for sputtering - Google Patents
Improved tantalum-containing copper barrier layers using high purity tantalum targets for sputteringInfo
- Publication number
- DE19983727T1 DE19983727T1 DE19983727T DE19983727T DE19983727T1 DE 19983727 T1 DE19983727 T1 DE 19983727T1 DE 19983727 T DE19983727 T DE 19983727T DE 19983727 T DE19983727 T DE 19983727T DE 19983727 T1 DE19983727 T1 DE 19983727T1
- Authority
- DE
- Germany
- Prior art keywords
- tantalum
- sputtering
- high purity
- barrier layers
- containing copper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229910052715 tantalum Inorganic materials 0.000 title 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 title 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title 1
- 230000004888 barrier function Effects 0.000 title 1
- 229910052802 copper Inorganic materials 0.000 title 1
- 239000010949 copper Substances 0.000 title 1
- 238000004544 sputter deposition Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/28568—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System the conductive layers comprising transition metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US19107898A | 1998-11-12 | 1998-11-12 | |
PCT/US1999/026290 WO2000029636A2 (en) | 1998-11-12 | 1999-11-05 | High purity tantalum targets for sputtering |
Publications (1)
Publication Number | Publication Date |
---|---|
DE19983727T1 true DE19983727T1 (en) | 2002-03-21 |
Family
ID=22704050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19983727T Withdrawn DE19983727T1 (en) | 1998-11-12 | 1999-11-05 | Improved tantalum-containing copper barrier layers using high purity tantalum targets for sputtering |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP2002530526A (en) |
KR (1) | KR20010080437A (en) |
DE (1) | DE19983727T1 (en) |
GB (1) | GB2359825A (en) |
TW (1) | TW520401B (en) |
WO (1) | WO2000029636A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4336206B2 (en) | 2004-01-07 | 2009-09-30 | Hoya株式会社 | Mask blank manufacturing method and mask blank manufacturing sputtering target |
US7686926B2 (en) | 2004-05-26 | 2010-03-30 | Applied Materials, Inc. | Multi-step process for forming a metal barrier in a sputter reactor |
US7211507B2 (en) * | 2004-06-02 | 2007-05-01 | International Business Machines Corporation | PE-ALD of TaN diffusion barrier region on low-k materials |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0621346B2 (en) * | 1986-06-11 | 1994-03-23 | 日本鉱業株式会社 | Method for manufacturing high-purity metal tantalum target |
US5111355A (en) * | 1990-09-13 | 1992-05-05 | National Semiconductor Corp. | High value tantalum oxide capacitor |
DE69233201T2 (en) * | 1991-01-25 | 2004-07-01 | Kabushiki Kaisha Toshiba, Kawasaki | High-purity conductive films and their application in semiconductor devices |
US5707498A (en) * | 1996-07-12 | 1998-01-13 | Applied Materials, Inc. | Avoiding contamination from induction coil in ionized sputtering |
TW358964B (en) * | 1996-11-21 | 1999-05-21 | Applied Materials Inc | Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma |
JP3755559B2 (en) * | 1997-04-15 | 2006-03-15 | 株式会社日鉱マテリアルズ | Sputtering target |
-
1999
- 1999-11-05 DE DE19983727T patent/DE19983727T1/en not_active Withdrawn
- 1999-11-05 WO PCT/US1999/026290 patent/WO2000029636A2/en not_active Application Discontinuation
- 1999-11-05 JP JP2000582614A patent/JP2002530526A/en not_active Withdrawn
- 1999-11-05 GB GB0112058A patent/GB2359825A/en not_active Withdrawn
- 1999-11-05 KR KR1020017006025A patent/KR20010080437A/en not_active Application Discontinuation
- 1999-11-09 TW TW088119605A patent/TW520401B/en active
Also Published As
Publication number | Publication date |
---|---|
TW520401B (en) | 2003-02-11 |
KR20010080437A (en) | 2001-08-22 |
WO2000029636A9 (en) | 2001-07-19 |
WO2000029636A3 (en) | 2000-09-08 |
JP2002530526A (en) | 2002-09-17 |
GB2359825A (en) | 2001-09-05 |
GB0112058D0 (en) | 2001-07-11 |
WO2000029636A2 (en) | 2000-05-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG83197A1 (en) | Improved copper target for sputter deposition | |
AU1826200A (en) | Method of making high-density, high-purity tungsten sputter targets | |
AU3386399A (en) | Luminescent compounds | |
AU4430399A (en) | Dual bucket assembly | |
AU4997597A (en) | Method for fabricating sputtering targets | |
AU3974799A (en) | Method for switching between multiple system hosts | |
AU2587699A (en) | Cathode arc vapor deposition | |
AU4677199A (en) | Multibinding inhibitors of topoisomerase | |
AU3079199A (en) | Receiver synchronizer using chirps sequences | |
AUPP796798A0 (en) | New compound | |
AU3459099A (en) | Release liner incorporating a metal layer | |
HK1042137A1 (en) | Dual titanium nitride layers for solar control | |
AU1168799A (en) | Sputter deposition | |
AU6463898A (en) | Transition metal metallacyclopentadienyl compounds | |
DE19983727T1 (en) | Improved tantalum-containing copper barrier layers using high purity tantalum targets for sputtering | |
AU2002365427A1 (en) | Textured-metastable aluminum alloy sputter targets | |
AU4695799A (en) | Method for inhibiting stains on aluminum product surfaces | |
AU3643099A (en) | Cathode blank for copper plating | |
AU2002228716A1 (en) | Sputtering target assemblies | |
AU7277398A (en) | Metallic slug for industrial ballistic tool | |
AU2923799A (en) | Target detection arrangement | |
AU3203099A (en) | Method for making multilayer thin-film electronics | |
AU1950899A (en) | Compounds for increased bioavailability | |
AU1112500A (en) | Methods for inhibiting diabetic complications | |
AU6256399A (en) | Solid phase quenching systems |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8139 | Disposal/non-payment of the annual fee |