DE19882644T1 - Kryopumpe mit selektiver Kondensation und Entfrostung - Google Patents

Kryopumpe mit selektiver Kondensation und Entfrostung

Info

Publication number
DE19882644T1
DE19882644T1 DE19882644T DE19882644T DE19882644T1 DE 19882644 T1 DE19882644 T1 DE 19882644T1 DE 19882644 T DE19882644 T DE 19882644T DE 19882644 T DE19882644 T DE 19882644T DE 19882644 T1 DE19882644 T1 DE 19882644T1
Authority
DE
Germany
Prior art keywords
cryopump
defrosting
selective condensation
condensation
selective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19882644T
Other languages
English (en)
Inventor
Jun Michael J Eacobacci
Stephen R Matte
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Publication of DE19882644T1 publication Critical patent/DE19882644T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S62/00—Refrigeration
    • Y10S62/921—Chlorine

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Drying Of Semiconductors (AREA)
DE19882644T 1997-08-28 1998-07-23 Kryopumpe mit selektiver Kondensation und Entfrostung Withdrawn DE19882644T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US91968597A 1997-08-28 1997-08-28
US08/978,463 US5819545A (en) 1997-08-28 1997-11-25 Cryopump with selective condensation and defrost
PCT/US1998/015205 WO1999011931A1 (en) 1997-08-28 1998-07-23 Cryopump with selective condensation and defrost

Publications (1)

Publication Number Publication Date
DE19882644T1 true DE19882644T1 (de) 2000-08-24

Family

ID=27129777

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19882644T Withdrawn DE19882644T1 (de) 1997-08-28 1998-07-23 Kryopumpe mit selektiver Kondensation und Entfrostung

Country Status (7)

Country Link
US (1) US5819545A (de)
JP (1) JP2001515176A (de)
KR (1) KR100560650B1 (de)
DE (1) DE19882644T1 (de)
FR (1) FR2775026B1 (de)
GB (1) GB2342697B (de)
WO (1) WO1999011931A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6116032A (en) * 1999-01-12 2000-09-12 Applied Materials, Inc. Method for reducing particulate generation from regeneration of cryogenic vacuum pumps
JP4301532B2 (ja) * 1999-10-21 2009-07-22 キヤノンアネルバ株式会社 クライオポンプの再生方法
US6510697B2 (en) 2001-06-07 2003-01-28 Helix Technology Corporation System and method for recovering from a power failure in a cryopump
FR2840232B1 (fr) * 2002-05-30 2004-08-27 Cit Alcatel Piege cryogenique a regeneration rapide
JP4517595B2 (ja) * 2003-06-26 2010-08-04 東京エレクトロン株式会社 被処理体の搬送方法
EP1780414B1 (de) * 2003-06-27 2008-08-13 Helix Technology Corporation Automatisierung der Sicherheits-Regenerierung bei einer Kryopumpe
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
JP5084794B2 (ja) * 2009-07-22 2012-11-28 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの監視方法
JP5669658B2 (ja) * 2011-04-11 2015-02-12 住友重機械工業株式会社 クライオポンプシステム、圧縮機、及びクライオポンプの再生方法
JP6124776B2 (ja) 2013-12-02 2017-05-10 住友重機械工業株式会社 コールドトラップ
JP6351525B2 (ja) 2015-03-04 2018-07-04 住友重機械工業株式会社 クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法
CN111989487B (zh) * 2018-04-25 2022-11-18 住友重机械工业株式会社 低温泵、低温泵系统及低温泵的再生方法
KR102063822B1 (ko) * 2018-06-08 2020-01-08 한국알박크라이오(주) 크라이오펌프 재생 장치 및 크라이오펌프 재생 방법
JP7455040B2 (ja) * 2020-10-05 2024-03-25 住友重機械工業株式会社 クライオポンプおよびクライオポンプの再生方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4910965A (en) * 1984-06-29 1990-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
US4679402A (en) * 1986-08-11 1987-07-14 Helix Technology Corporation Cooling heat exchanger
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
JPH03258976A (ja) * 1990-03-08 1991-11-19 Mitsubishi Electric Corp 真空装置における真空の再生方法
DE59101463D1 (de) * 1990-11-19 1994-05-26 Leybold Ag Verfahren zur regeneration einer kryopumpe sowie zur durchführung dieses verfahrens geeignete kryopumpe.
US5261244A (en) * 1992-05-21 1993-11-16 Helix Technology Corporation Cryogenic waterpump
US5375424A (en) * 1993-02-26 1994-12-27 Helix Technology Corporation Cryopump with electronically controlled regeneration
US5483803A (en) * 1993-06-16 1996-01-16 Helix Technology Corporation High conductance water pump
JPH07208332A (ja) * 1994-01-07 1995-08-08 Anelva Corp スパッタリング装置におけるクライオポンプ再生方法
US5513499A (en) * 1994-04-08 1996-05-07 Ebara Technologies Incorporated Method and apparatus for cryopump regeneration using turbomolecular pump

Also Published As

Publication number Publication date
KR100560650B1 (ko) 2006-03-16
JP2001515176A (ja) 2001-09-18
GB2342697B (en) 2001-10-24
US5819545A (en) 1998-10-13
FR2775026A1 (fr) 1999-08-20
WO1999011931A1 (en) 1999-03-11
KR20010023421A (ko) 2001-03-26
GB0002961D0 (en) 2000-03-29
GB2342697A (en) 2000-04-19
FR2775026B1 (fr) 2005-11-11

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: B01D 7/00 AFI20051017BHDE

8139 Disposal/non-payment of the annual fee