DE19823112A1 - Dielectric substrates for producing electrochemical electrodes - Google Patents

Dielectric substrates for producing electrochemical electrodes

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Publication number
DE19823112A1
DE19823112A1 DE1998123112 DE19823112A DE19823112A1 DE 19823112 A1 DE19823112 A1 DE 19823112A1 DE 1998123112 DE1998123112 DE 1998123112 DE 19823112 A DE19823112 A DE 19823112A DE 19823112 A1 DE19823112 A1 DE 19823112A1
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Prior art keywords
glass
layer
zinc oxide
metallization
paste
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DE1998123112
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German (de)
Inventor
Juergen Spindler
Winfried Vonau
Matthias Reinecke
Heiner Kaden
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Hochschule fuer Technik und Wirtschaft Dresden
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Hochschule fuer Technik und Wirtschaft Dresden
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Priority to DE1998123112 priority Critical patent/DE19823112A1/en
Publication of DE19823112A1 publication Critical patent/DE19823112A1/en
Withdrawn legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3607Coatings of the type glass/inorganic compound/metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/27Oxides by oxidation of a coating previously applied
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3649Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3668Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties
    • C03C17/3671Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties specially adapted for use as electrodes
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3697Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one metallic layer at least being obtained by electroless plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1646Characteristics of the product obtained
    • C23C18/165Multilayered product
    • C23C18/1653Two or more layers with at least one layer obtained by electroless plating and one layer obtained by electroplating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/1851Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material
    • C23C18/1872Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material by chemical pretreatment
    • C23C18/1886Multistep pretreatment
    • C23C18/1889Multistep pretreatment with use of metal first
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/216ZnO
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/11Deposition methods from solutions or suspensions
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/30Aspects of methods for coating glass not covered above
    • C03C2218/32After-treatment
    • C03C2218/322Oxidation

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  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Electroluminescent Light Sources (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

Dielectric substrates (1) are sensitized, prior to nucleation and metallization, by printing with a zinc acetate paste (2) and heat treating to form a zinc oxide layer (3). Substrates of glass, quartz, ceramic etc. are sensitized, prior to nucleation (especially with Pd nuclei) and metallization, by printing with a paste of 5-20 g zinc acetate (2) dissolved in a mixture of 1 l 96% acetic acid and 80-150 g cellulose acetate and then heat treating to form a zinc oxide layer (3).

Description

Anwendungsgebiet der ErfindungField of application of the invention

Die Erfindung betrifft ein Verfahren zur Erzeugung einer hafifesten Trägerschicht für Palladiumkeime auf dielektrischen Substraten, insbesondere auf Glas. Durch die Anwendung dieses Verfahrens besteht die Möglichkeit, in nachfolgenden Schritten Metallschichtsysteme, beispielsweise zur Anwendung als elektrochemische Elektroden, aufzubauen.The invention relates to a method for producing a hafifär carrier layer for Palladium seeds on dielectric substrates, especially on glass. Through the application With this method, there is the possibility, in subsequent steps, of metal layer systems, for example for use as electrochemical electrodes.

Stand der TechnikState of the art

Glas als Träger von Metallschichten oder Metallschichtkombinationen bietet vor allem folgende Vorteile:
Glass as a carrier of metal layers or metal layer combinations offers the following advantages:

  • - hohe Oberflächengüte der Metallschicht infolge geringer Rauhigkeit der Substratoberfläche,- High surface quality of the metal layer due to the low roughness of the Substrate surface,
  • - Transparenz der nichtbeschichteten Substratgebiete,- transparency of the uncoated substrate areas,
  • - bessere dielektrische und Isoliereigenschaften im Vergleich zu Kunststoffsubstraten.- better dielectric and insulating properties compared to plastic substrates.

Ein seit langem angewendetes Verfahren zur Metallisierung von Glas ist die Spiegelherstellung durch Reduktion von Silbersalzlösungen.A long-used process for metallizing glass is the manufacture of mirrors by reducing silver salt solutions.

In weiteren bisher bekannten Verfahren zur Vorbehandlung von Glassubstraten [1, 2, 3] zur stromlosen Metallisierung dielektrischer Substrate werden Palladiumkeime auf der Glasoberfläche unter Anwendung verschiedener Methode erzeugt, u. a. die folgende:
In other previously known methods for pretreating glass substrates [1, 2, 3] for electroless metallization of dielectric substrates, palladium nuclei are generated on the glass surface using various methods, including the following:

  • - Behandlung mit einer Kreideaufschlämmung,- treatment with a chalk slurry,
  • - Spaltung des Oxidnetzwerkes auf der Glassubstratoberfläche durch Einwirkung von alkalischen Lösungen und Schaffung von Metall-O-Si-Bindungen,- Cleavage of the oxide network on the glass substrate surface by the action of alkaline solutions and creation of metal-O-Si bonds,
  • - Neutralisiation überschüssiger Alkalien durch Einwirkung saurer Medien, beispielsweise einer wäßrigen HCl-Lösung,- neutralization of excess alkalis by exposure to acidic media, for example an aqueous HCl solution,
  • - Einwirkung von Zinn(II)-Salzlösung und Aktivierung der Substratoberfläche mit PdCl2-Lösung.- Exposure to tin (II) salt solution and activation of the substrate surface with PdCl 2 solution.

In [4] wird die Abscheidung einer stromlos abgeschiedenen Metallschicht auf Glas oder anderen Dielektrika durch Umwandlung einer Zinnoxidschicht in ein zweiwertiges Zinnsalz beschrieben, wobei das zweiwertige Zinn als Reduktionsmittel zur Erzeugung von Pd-Keimen aus Pd-Ionen genutzt wird.In [4] the deposition of an electrolessly deposited metal layer on glass or other dielectrics by converting a tin oxide layer into a divalent tin salt described, the divalent tin as a reducing agent for the production of Pd nuclei from Pd ions is used.

In [5] wird eine Lösung von Zinkacetat in Ethanol auf Substrate aufgesprüht, die auf 400°C erhitzt wurden. Es entsteht eine als Keimträger nutzbare Zinkoxidschicht, die für die Adsorption von Pd-Keimen eingesetzt wird. Die Pd-Ionen werden in einem Kupferbad ohne Stromfluß durch das vorhandene Reduktionsmittel in situ zu Palladium reduziert.In [5] a solution of zinc acetate in ethanol is sprayed onto substrates that are at 400 ° C were heated. This creates a zinc oxide layer that can be used as a germ carrier and is suitable for Adsorption of Pd seeds is used. The Pd ions are in a copper bath without Current flow through the existing reducing agent in situ reduced to palladium.

In [6] wird eine weitere Methode zur Metallisierung von Glas beschrieben. Zwischen Glasoberfläche und Metallschicht befindet sich dabei eine als Haftvermittler wirkende organische Polymerschicht. Somit erfolgt die Metallisierung nicht auf der Glas-, sondern auf der Kunststoffoberfläche. Another method for the metallization of glass is described in [6]. Between The glass surface and metal layer are those that act as adhesion promoters organic polymer layer. Thus, the metallization is not on the glass, but on the plastic surface.  

Kritik am Stand der TechnikCriticism of the state of the art

Das z. B. aus der Spiegelherstellung bekannte Verfahren der stromlosen Abscheidung von Metallschichten aus Silbersalzlösungen führt zu Schichtdicken von max. 50-100 nm. Diese Schichten enthalten pinholes und sind nicht haftfest. Eine Übertragung dieses Verfahrens auf die erfindungsgemäße Aufgabenstellung, bei der mechanische Kräfte auf die Metallschicht einwirken und bei der ein ständiger Kontakt zu elektrolytischen Lösungen gegeben ist, ist deshalb nicht möglich.The Z. B. from the mirror production known methods of electroless deposition of Metal layers from silver salt solutions lead to layer thicknesses of max. 50-100 nm. This Layers contain pinholes and are not adhesive. A transfer of this procedure to the task according to the invention, in which mechanical forces on the metal layer act and where there is constant contact with electrolytic solutions therefore not possible.

Metallisierungsverfahren, welche auf den bekannten Methoden zur stromlosen Metallisierung von Glas beruhen, führen zu Schichten mit ungleichmäßiger Schichtdicke und geringer Haftfestigkeit, wodurch zur Rißbildung in der Metallschicht führende Spannungen begünstigt werden.Metallization processes based on the known methods for electroless metallization based on glass lead to layers with uneven layer thickness and less Adhesive strength, which favors stresses leading to the formation of cracks in the metal layer become.

Bisher bekannte Verfahren unter Benutzung oxidischer Zwischenschichten (SnO2, ZnO) erfordern einen hohen technologischen Aufwand (z. B. muß SnO2 in einer zusätzlichen Reaktionskammer aufgeheizt und mit Chlorgas behandelt werden) und sind damit kostenintensiv.Previously known processes using oxidic intermediate layers (SnO 2 , ZnO) require a high level of technological effort (e.g. SnO 2 has to be heated in an additional reaction chamber and treated with chlorine gas) and are therefore cost-intensive.

Verfahren, bei denen zur Erhöhung der Haftfestigkeit polymere Zwischenschichten (Photoresist) erzeugt werden, sind z. B. auf Grund von Quellungsvorgängen in elektrolytischen Lösungen als Träger von Metallschichten für elektrochemische Elektroden ungeeignet.Processes in which polymeric interlayers are used to increase the adhesive strength (Photoresist) are generated, for. B. due to swelling in electrolytic Solutions unsuitable as supports for metal layers for electrochemical electrodes.

Aufgabetask

Der Erfindung liegt die Aufgabe zugrunde, ein im Vergleich zu den bisher bekannten Methoden verbessertes Verfahren zur Sensibilisierung von dielektrischen Substraten, insbesondere Glas, zur stromlosen Abscheidung haftfester Metallschichten zu entwickeln.The invention has for its object a compared to the previously known Methods improved method for sensitization of dielectric substrates, especially glass, for the electroless deposition of adhesive metal layers.

Lösungsolution

Die Aufgabe wird gelöst, indem eine Paste aus 5 bis 20 g Zinkacetat, gemischt mit 1 l Essigsäure und 100 bis 150 g Celluloseacetat (Substitutionsrate: 40% Acetylgruppen), auf eine Glasoberfläche aufgetragen wird und die beschichtete Oberfläche danach auf 400°C erhitzt wird, wodurch ein Zinkoxidfilm gebildet wird. Dieser Zinkoxidfilm wird durch Einwirkung einer Palladiumchloridlösung aktiviert und kann danach stromlos metallisiert werden.The problem is solved by a paste of 5 to 20 g of zinc acetate mixed with 1 l Acetic acid and 100 to 150 g of cellulose acetate (substitution rate: 40% acetyl groups) a glass surface is applied and the coated surface is then heated to 400 ° C , whereby a zinc oxide film is formed. This zinc oxide film is made by exposure activated with a palladium chloride solution and can then be metallized without current.

AusführungsbeispielEmbodiment

Ein in einem alkalischem Heißentfetter hei 60°C behandeltes und mit Aceton gespültes Glassubstrat wird mit einem 0,4 ... 0,6 mm dicken Film einer Paste folgender Zusammensetzung bedruckt (Abb. 1):
A glass substrate treated in an alkaline hot degreaser at 60 ° C and rinsed with acetone is printed with a 0.4 ... 0.6 mm thick film of a paste of the following composition ( Fig. 1):

  • - 1 l 96%ige Essigsäure p.a.- 1 l 96% acetic acid p.a.
  • - 5 bis 20 g Zinkacetat p.a.- 5 to 20 g zinc acetate p.a.
  • - 80 ... 150 g Celluloseacetat- 80 ... 150 g cellulose acetate

Das vorbereitete Glassubstrat wird zur Bildung eines Zinkoxidfilms (Abb. 2) in einen auf 400°C aufgeheizten Heizofen gebracht. Dort verbleibt es zwischen 30 und 60 Minuten ohne Anwendung eines Schutzgases. Das Abkühlen erfolgt langsam an stehender Luft.The prepared glass substrate is placed in a heating oven heated to 400 ° C to form a zinc oxide film ( Fig. 2). It stays there for 30 to 60 minutes without using a protective gas. The cooling takes place slowly in standing air.

Der Zinkoxidflm wird durch Eintauchen in eine Palladiumchloridlösung (pH = 2 ... 3) mit Palladiumionen aktiviert und danach gespült (Abb. 3). Anschließend wird er bei pH < 5 in einem Nickelbad mit einer Nickel-Phosphor-Schicht überzogen (Abb. 4).The zinc oxide film is activated by immersion in a palladium chloride solution (pH = 2 ... 3) with palladium ions and then rinsed ( Fig. 3). Then it is coated with a nickel-phosphor layer at pH <5 in a nickel bath ( Fig. 4).

Eine galvanische Goldschicht wird aus einem cyanidischen Goldbad auf der Nickel-Phosphor- Schicht abgeschieden.A galvanic gold layer is made from a cyanide gold bath on the nickel phosphor Layer deposited.

Darstellung der Vorteile der ErfindungPresentation of the advantages of the invention

Der Vorteil der Erfindung besteht im geringen apparativen Aufwand zur Erzeugung einer haftfesten Keimträgerschicht zur stromlosen Metallisierung, einer gleichmäßigen Verteilung der Palladiumkeime und im Einsatz der Siebdrucktechnologie zur Sensibilisierung. Im Prozeß des Druckens entsteht bereits ein Keimträgerbild, welches eine durchgehende Additivtechnologie zum Aufbau des Metallschichtsystems erlaubt.The advantage of the invention is the low outlay in terms of apparatus for generating a Adhesive germ carrier layer for electroless metallization, an even distribution the palladium seeds and using screen printing technology to raise awareness. In process When printing, a germ carrier image is already created, which is a continuous one Additive technology allowed to build up the metal layer system.

Literaturliterature

[1] Khoperia, T. N.; et al.: Verfahren zur Herstellung eines Metallüberzuges auf Erzeugnissen aus nichtmetallischen Stoffen. DD 113569 (1975); DE 24 48 148 (1976)
[2] Wein, S.: Nickel and Cobalt Films. Glasind. 40 (1959), S. 476-477, 498, 500-502.
[3] Hofmann, H.; Spindler, J.: Tagungsband 68, Galvanotechnik 1982, Herausgeber: KdT Suhl, S. 151-160.
[4] Bogenschütz, August-Friedrich. Verfahren zum stromlosen chemischen Erzeugen einer strukturierten Metallschicht. DE 42 20 621 A1. 1994.
[5] Yoshiki, Aleksandruk, Hashimoto, Fujishima: Electroless Copper Plating Using ZnO Ihm Film Coated on a Glass Substrate, in Journal of the Electrochemical Society, Vol. 141, No. 5, May 1994.
[6] Honma, H.; Koshio, T.; Hotta, S.; Watanabe, H.: "Fabrication of Nickel Film on a Glass Disk By Electroless Nickel Plating". in Plating & Surface Finishing, 1995, S. 60 ff.
[1] Khoperia, TN; et al .: Process for producing a metal coating on products made of non-metallic substances. DD 113569 (1975); DE 24 48 148 (1976)
[2] Wein, S .: Nickel and Cobalt Films. Glass ind. 40 (1959), pp. 476-477, 498, 500-502.
[3] Hofmann, H .; Spindler, J .: Tagungsband 68, Galvanotechnik 1982, publisher: KdT Suhl, pp. 151-160.
[4] Archer, August-Friedrich. Process for the electroless chemical production of a structured metal layer. DE 42 20 621 A1. 1994.
[5] Yoshiki, Aleksandruk, Hashimoto, Fujishima: Electroless Copper Plating Using ZnO Ihm Film Coated on a Glass Substrate, in Journal of the Electrochemical Society, Vol. 141, No. 5 May 1994.
[6] Honma, H .; Koshio, T .; Hotta, S .; Watanabe, H .: "Fabrication of Nickel Film on a Glass Disk By Electroless Nickel Plating". in Plating & Surface Finishing, 1995, p. 60 ff.

BezugszeichenlisteReference list

11

Träger
carrier

22nd

Zinkacetat-Paste
Zinc acetate paste

33rd

Zinkoxid-Schicht
Zinc oxide layer

44th

Keimschicht
Seed layer

55

Metallschicht
Metal layer

AbbildungenIllustrations

Abb.Fig.

1: Substrat mit strukturiert aufgedruckter Sensibilisierungspaste
1: Substrate with structured sensitizing paste

Abb.Fig.

2: Substrat mit Zinkoxid-Film
2: substrate with zinc oxide film

Abb.Fig.

3: Substrat mit in Zinkoxid-Film eindiffundierten Palladium-Ionen
3: Substrate with palladium ions diffused into the zinc oxide film

Abb.Fig.

4: Substrat mit auf ZnO-Film abgeschiedenem Nickel-Phosphor-Überzug4: substrate with nickel-phosphor coating deposited on ZnO film

Claims (4)

1. Verfahren zur Sensibilisierung von Trägern aus Glas, Quarz, Keramik o. ä. (1), wobei vor der Metallisierung eine Keimschicht mit Kristallisiationskeimen, insbesondere Pd-Keimen, erzeugt wird, dadurch gekennzeichnet, daß auf dem Substrat eine Paste aus 5 bis 20 g Zinkacetat gelöst in einem Gemisch aus 1 l 96%ige Essigsäure und 80 ... 150 g Celluloseacetat (2) aufgedruckt und durch thermische Behandlung in eine Zinkoxidschicht (3) umgewandelt wird.1. A method for sensitizing supports made of glass, quartz, ceramics or the like ( 1 ), wherein a seed layer with crystallization nuclei, in particular Pd nuclei, is produced before the metallization, characterized in that a paste of 5 to 20 g of zinc acetate dissolved in a mixture of 1 l of 96% acetic acid and 80 ... 150 g of cellulose acetate ( 2 ) are printed on and converted into a zinc oxide layer ( 3 ) by thermal treatment. 2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß die thermische Behandlung bei einer Temperatur von 390 bis 450°C ohne einen Trocknungs- oder Vorheizprozeß erfolgt.2. The method according to claim 1, characterized in that the thermal treatment at a temperature of 390 to 450 ° C without a drying or preheating process. 3. Verfahren nach den vorhergehenden Ansprüchen, dadurch gekennzeichnet, daß zur Bildung der Keimschicht (4) die Aktivierungslösung einen pH-Wert von 2,5 bis 3,5 aufweist und die Einwirkdauer 1 bis 5 Sekunden beträgt.3. The method according to the preceding claims, characterized in that to form the seed layer ( 4 ) the activation solution has a pH of 2.5 to 3.5 and the exposure time is 1 to 5 seconds. 4. Verfahren nach Anspruch 1 bis 3, dadurch gekennzeichnet, daß eine stromlos abgeschiedene Nickel-Phosphor-Schicht (5) erzeugt wird, auf welche galvanisch und/oder stromlos ein angepaßtes Metallschichtsystem aufgebaut wird (z. B. NiP 1 µm und Au 5 µm).4. The method according to claim 1 to 3, characterized in that an electrolessly deposited nickel-phosphor layer ( 5 ) is generated, on which galvanically and / or electrolessly an adapted metal layer system is built (z. B. NiP 1 micron and Au 5th µm).
DE1998123112 1998-05-22 1998-05-22 Dielectric substrates for producing electrochemical electrodes Withdrawn DE19823112A1 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU731328B3 (en) * 2000-03-02 2001-03-29 Tyco Electronics Pty Limited Electroplating
WO2002099162A3 (en) * 2001-06-04 2003-07-31 Qinetiq Ltd Patterning method
WO2002099163A3 (en) * 2001-06-04 2003-10-16 Qinetiq Ltd Autocatalytic coating method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU731328B3 (en) * 2000-03-02 2001-03-29 Tyco Electronics Pty Limited Electroplating
WO2002099162A3 (en) * 2001-06-04 2003-07-31 Qinetiq Ltd Patterning method
WO2002099163A3 (en) * 2001-06-04 2003-10-16 Qinetiq Ltd Autocatalytic coating method

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