DE19823112A1 - Dielectric substrates for producing electrochemical electrodes - Google Patents
Dielectric substrates for producing electrochemical electrodesInfo
- Publication number
- DE19823112A1 DE19823112A1 DE1998123112 DE19823112A DE19823112A1 DE 19823112 A1 DE19823112 A1 DE 19823112A1 DE 1998123112 DE1998123112 DE 1998123112 DE 19823112 A DE19823112 A DE 19823112A DE 19823112 A1 DE19823112 A1 DE 19823112A1
- Authority
- DE
- Germany
- Prior art keywords
- glass
- layer
- zinc oxide
- metallization
- paste
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 title abstract description 20
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000011521 glass Substances 0.000 claims abstract description 20
- 239000011787 zinc oxide Substances 0.000 claims abstract description 14
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000001465 metallisation Methods 0.000 claims abstract description 9
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000004246 zinc acetate Substances 0.000 claims abstract description 7
- 229920002301 cellulose acetate Polymers 0.000 claims abstract description 4
- 239000000203 mixture Substances 0.000 claims abstract description 3
- 239000000919 ceramic Substances 0.000 claims abstract 2
- 239000010453 quartz Substances 0.000 claims abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract 2
- 238000000034 method Methods 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 claims description 4
- 230000004913 activation Effects 0.000 claims description 2
- 230000001235 sensitizing effect Effects 0.000 claims description 2
- 238000007669 thermal treatment Methods 0.000 claims 2
- 101100225582 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) nip-1 gene Proteins 0.000 claims 1
- 238000002425 crystallisation Methods 0.000 claims 1
- 230000008025 crystallization Effects 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
- 238000007639 printing Methods 0.000 abstract description 3
- 230000006911 nucleation Effects 0.000 abstract 2
- 238000010899 nucleation Methods 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 29
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 229910052763 palladium Inorganic materials 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000012266 salt solution Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical class [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000008151 electrolyte solution Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- -1 palladium ions Chemical class 0.000 description 2
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- 229910003849 O-Si Inorganic materials 0.000 description 1
- 229910003872 O—Si Inorganic materials 0.000 description 1
- 101150003085 Pdcl gene Proteins 0.000 description 1
- 206010070834 Sensitisation Diseases 0.000 description 1
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 1
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012824 chemical production Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013527 degreasing agent Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- MXZVHYUSLJAVOE-UHFFFAOYSA-N gold(3+);tricyanide Chemical compound [Au+3].N#[C-].N#[C-].N#[C-] MXZVHYUSLJAVOE-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- IUTCEZPPWBHGIX-UHFFFAOYSA-N tin(2+) Chemical class [Sn+2] IUTCEZPPWBHGIX-UHFFFAOYSA-N 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3607—Coatings of the type glass/inorganic compound/metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/27—Oxides by oxidation of a coating previously applied
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3668—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties
- C03C17/3671—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties specially adapted for use as electrodes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3697—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one metallic layer at least being obtained by electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/165—Multilayered product
- C23C18/1653—Two or more layers with at least one layer obtained by electroless plating and one layer obtained by electroplating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/1851—Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material
- C23C18/1872—Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material by chemical pretreatment
- C23C18/1886—Multistep pretreatment
- C23C18/1889—Multistep pretreatment with use of metal first
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/216—ZnO
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/11—Deposition methods from solutions or suspensions
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
- C03C2218/322—Oxidation
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- Chemical & Material Sciences (AREA)
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- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Chemically Coating (AREA)
- Electroluminescent Light Sources (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Description
Die Erfindung betrifft ein Verfahren zur Erzeugung einer hafifesten Trägerschicht für Palladiumkeime auf dielektrischen Substraten, insbesondere auf Glas. Durch die Anwendung dieses Verfahrens besteht die Möglichkeit, in nachfolgenden Schritten Metallschichtsysteme, beispielsweise zur Anwendung als elektrochemische Elektroden, aufzubauen.The invention relates to a method for producing a hafifär carrier layer for Palladium seeds on dielectric substrates, especially on glass. Through the application With this method, there is the possibility, in subsequent steps, of metal layer systems, for example for use as electrochemical electrodes.
Glas als Träger von Metallschichten oder Metallschichtkombinationen bietet vor allem
folgende Vorteile:
Glass as a carrier of metal layers or metal layer combinations offers the following advantages:
- - hohe Oberflächengüte der Metallschicht infolge geringer Rauhigkeit der Substratoberfläche,- High surface quality of the metal layer due to the low roughness of the Substrate surface,
- - Transparenz der nichtbeschichteten Substratgebiete,- transparency of the uncoated substrate areas,
- - bessere dielektrische und Isoliereigenschaften im Vergleich zu Kunststoffsubstraten.- better dielectric and insulating properties compared to plastic substrates.
Ein seit langem angewendetes Verfahren zur Metallisierung von Glas ist die Spiegelherstellung durch Reduktion von Silbersalzlösungen.A long-used process for metallizing glass is the manufacture of mirrors by reducing silver salt solutions.
In weiteren bisher bekannten Verfahren zur Vorbehandlung von Glassubstraten [1, 2, 3] zur
stromlosen Metallisierung dielektrischer Substrate werden Palladiumkeime auf der
Glasoberfläche unter Anwendung verschiedener Methode erzeugt, u. a. die folgende:
In other previously known methods for pretreating glass substrates [1, 2, 3] for electroless metallization of dielectric substrates, palladium nuclei are generated on the glass surface using various methods, including the following:
- - Behandlung mit einer Kreideaufschlämmung,- treatment with a chalk slurry,
- - Spaltung des Oxidnetzwerkes auf der Glassubstratoberfläche durch Einwirkung von alkalischen Lösungen und Schaffung von Metall-O-Si-Bindungen,- Cleavage of the oxide network on the glass substrate surface by the action of alkaline solutions and creation of metal-O-Si bonds,
- - Neutralisiation überschüssiger Alkalien durch Einwirkung saurer Medien, beispielsweise einer wäßrigen HCl-Lösung,- neutralization of excess alkalis by exposure to acidic media, for example an aqueous HCl solution,
- - Einwirkung von Zinn(II)-Salzlösung und Aktivierung der Substratoberfläche mit PdCl2-Lösung.- Exposure to tin (II) salt solution and activation of the substrate surface with PdCl 2 solution.
In [4] wird die Abscheidung einer stromlos abgeschiedenen Metallschicht auf Glas oder anderen Dielektrika durch Umwandlung einer Zinnoxidschicht in ein zweiwertiges Zinnsalz beschrieben, wobei das zweiwertige Zinn als Reduktionsmittel zur Erzeugung von Pd-Keimen aus Pd-Ionen genutzt wird.In [4] the deposition of an electrolessly deposited metal layer on glass or other dielectrics by converting a tin oxide layer into a divalent tin salt described, the divalent tin as a reducing agent for the production of Pd nuclei from Pd ions is used.
In [5] wird eine Lösung von Zinkacetat in Ethanol auf Substrate aufgesprüht, die auf 400°C erhitzt wurden. Es entsteht eine als Keimträger nutzbare Zinkoxidschicht, die für die Adsorption von Pd-Keimen eingesetzt wird. Die Pd-Ionen werden in einem Kupferbad ohne Stromfluß durch das vorhandene Reduktionsmittel in situ zu Palladium reduziert.In [5] a solution of zinc acetate in ethanol is sprayed onto substrates that are at 400 ° C were heated. This creates a zinc oxide layer that can be used as a germ carrier and is suitable for Adsorption of Pd seeds is used. The Pd ions are in a copper bath without Current flow through the existing reducing agent in situ reduced to palladium.
In [6] wird eine weitere Methode zur Metallisierung von Glas beschrieben. Zwischen Glasoberfläche und Metallschicht befindet sich dabei eine als Haftvermittler wirkende organische Polymerschicht. Somit erfolgt die Metallisierung nicht auf der Glas-, sondern auf der Kunststoffoberfläche. Another method for the metallization of glass is described in [6]. Between The glass surface and metal layer are those that act as adhesion promoters organic polymer layer. Thus, the metallization is not on the glass, but on the plastic surface.
Das z. B. aus der Spiegelherstellung bekannte Verfahren der stromlosen Abscheidung von Metallschichten aus Silbersalzlösungen führt zu Schichtdicken von max. 50-100 nm. Diese Schichten enthalten pinholes und sind nicht haftfest. Eine Übertragung dieses Verfahrens auf die erfindungsgemäße Aufgabenstellung, bei der mechanische Kräfte auf die Metallschicht einwirken und bei der ein ständiger Kontakt zu elektrolytischen Lösungen gegeben ist, ist deshalb nicht möglich.The Z. B. from the mirror production known methods of electroless deposition of Metal layers from silver salt solutions lead to layer thicknesses of max. 50-100 nm. This Layers contain pinholes and are not adhesive. A transfer of this procedure to the task according to the invention, in which mechanical forces on the metal layer act and where there is constant contact with electrolytic solutions therefore not possible.
Metallisierungsverfahren, welche auf den bekannten Methoden zur stromlosen Metallisierung von Glas beruhen, führen zu Schichten mit ungleichmäßiger Schichtdicke und geringer Haftfestigkeit, wodurch zur Rißbildung in der Metallschicht führende Spannungen begünstigt werden.Metallization processes based on the known methods for electroless metallization based on glass lead to layers with uneven layer thickness and less Adhesive strength, which favors stresses leading to the formation of cracks in the metal layer become.
Bisher bekannte Verfahren unter Benutzung oxidischer Zwischenschichten (SnO2, ZnO) erfordern einen hohen technologischen Aufwand (z. B. muß SnO2 in einer zusätzlichen Reaktionskammer aufgeheizt und mit Chlorgas behandelt werden) und sind damit kostenintensiv.Previously known processes using oxidic intermediate layers (SnO 2 , ZnO) require a high level of technological effort (e.g. SnO 2 has to be heated in an additional reaction chamber and treated with chlorine gas) and are therefore cost-intensive.
Verfahren, bei denen zur Erhöhung der Haftfestigkeit polymere Zwischenschichten (Photoresist) erzeugt werden, sind z. B. auf Grund von Quellungsvorgängen in elektrolytischen Lösungen als Träger von Metallschichten für elektrochemische Elektroden ungeeignet.Processes in which polymeric interlayers are used to increase the adhesive strength (Photoresist) are generated, for. B. due to swelling in electrolytic Solutions unsuitable as supports for metal layers for electrochemical electrodes.
Der Erfindung liegt die Aufgabe zugrunde, ein im Vergleich zu den bisher bekannten Methoden verbessertes Verfahren zur Sensibilisierung von dielektrischen Substraten, insbesondere Glas, zur stromlosen Abscheidung haftfester Metallschichten zu entwickeln.The invention has for its object a compared to the previously known Methods improved method for sensitization of dielectric substrates, especially glass, for the electroless deposition of adhesive metal layers.
Die Aufgabe wird gelöst, indem eine Paste aus 5 bis 20 g Zinkacetat, gemischt mit 1 l Essigsäure und 100 bis 150 g Celluloseacetat (Substitutionsrate: 40% Acetylgruppen), auf eine Glasoberfläche aufgetragen wird und die beschichtete Oberfläche danach auf 400°C erhitzt wird, wodurch ein Zinkoxidfilm gebildet wird. Dieser Zinkoxidfilm wird durch Einwirkung einer Palladiumchloridlösung aktiviert und kann danach stromlos metallisiert werden.The problem is solved by a paste of 5 to 20 g of zinc acetate mixed with 1 l Acetic acid and 100 to 150 g of cellulose acetate (substitution rate: 40% acetyl groups) a glass surface is applied and the coated surface is then heated to 400 ° C , whereby a zinc oxide film is formed. This zinc oxide film is made by exposure activated with a palladium chloride solution and can then be metallized without current.
Ein in einem alkalischem Heißentfetter hei 60°C behandeltes und mit Aceton gespültes
Glassubstrat wird mit einem 0,4 ... 0,6 mm dicken Film einer Paste folgender Zusammensetzung
bedruckt (Abb. 1):
A glass substrate treated in an alkaline hot degreaser at 60 ° C and rinsed with acetone is printed with a 0.4 ... 0.6 mm thick film of a paste of the following composition ( Fig. 1):
- - 1 l 96%ige Essigsäure p.a.- 1 l 96% acetic acid p.a.
- - 5 bis 20 g Zinkacetat p.a.- 5 to 20 g zinc acetate p.a.
- - 80 ... 150 g Celluloseacetat- 80 ... 150 g cellulose acetate
Das vorbereitete Glassubstrat wird zur Bildung eines Zinkoxidfilms (Abb. 2) in einen auf 400°C aufgeheizten Heizofen gebracht. Dort verbleibt es zwischen 30 und 60 Minuten ohne Anwendung eines Schutzgases. Das Abkühlen erfolgt langsam an stehender Luft.The prepared glass substrate is placed in a heating oven heated to 400 ° C to form a zinc oxide film ( Fig. 2). It stays there for 30 to 60 minutes without using a protective gas. The cooling takes place slowly in standing air.
Der Zinkoxidflm wird durch Eintauchen in eine Palladiumchloridlösung (pH = 2 ... 3) mit Palladiumionen aktiviert und danach gespült (Abb. 3). Anschließend wird er bei pH < 5 in einem Nickelbad mit einer Nickel-Phosphor-Schicht überzogen (Abb. 4).The zinc oxide film is activated by immersion in a palladium chloride solution (pH = 2 ... 3) with palladium ions and then rinsed ( Fig. 3). Then it is coated with a nickel-phosphor layer at pH <5 in a nickel bath ( Fig. 4).
Eine galvanische Goldschicht wird aus einem cyanidischen Goldbad auf der Nickel-Phosphor- Schicht abgeschieden.A galvanic gold layer is made from a cyanide gold bath on the nickel phosphor Layer deposited.
Der Vorteil der Erfindung besteht im geringen apparativen Aufwand zur Erzeugung einer haftfesten Keimträgerschicht zur stromlosen Metallisierung, einer gleichmäßigen Verteilung der Palladiumkeime und im Einsatz der Siebdrucktechnologie zur Sensibilisierung. Im Prozeß des Druckens entsteht bereits ein Keimträgerbild, welches eine durchgehende Additivtechnologie zum Aufbau des Metallschichtsystems erlaubt.The advantage of the invention is the low outlay in terms of apparatus for generating a Adhesive germ carrier layer for electroless metallization, an even distribution the palladium seeds and using screen printing technology to raise awareness. In process When printing, a germ carrier image is already created, which is a continuous one Additive technology allowed to build up the metal layer system.
[1] Khoperia, T. N.; et al.: Verfahren zur Herstellung eines Metallüberzuges auf Erzeugnissen
aus nichtmetallischen Stoffen. DD 113569 (1975); DE 24 48 148 (1976)
[2] Wein, S.: Nickel and Cobalt Films. Glasind. 40 (1959), S. 476-477, 498, 500-502.
[3] Hofmann, H.; Spindler, J.: Tagungsband 68, Galvanotechnik 1982, Herausgeber: KdT
Suhl, S. 151-160.
[4] Bogenschütz, August-Friedrich. Verfahren zum stromlosen chemischen Erzeugen einer
strukturierten Metallschicht. DE 42 20 621 A1. 1994.
[5] Yoshiki, Aleksandruk, Hashimoto, Fujishima: Electroless Copper Plating Using ZnO Ihm
Film Coated on a Glass Substrate, in Journal of the Electrochemical Society, Vol. 141,
No. 5, May 1994.
[6] Honma, H.; Koshio, T.; Hotta, S.; Watanabe, H.: "Fabrication of Nickel Film on a Glass
Disk By Electroless Nickel Plating". in Plating & Surface Finishing, 1995, S. 60 ff.[1] Khoperia, TN; et al .: Process for producing a metal coating on products made of non-metallic substances. DD 113569 (1975); DE 24 48 148 (1976)
[2] Wein, S .: Nickel and Cobalt Films. Glass ind. 40 (1959), pp. 476-477, 498, 500-502.
[3] Hofmann, H .; Spindler, J .: Tagungsband 68, Galvanotechnik 1982, publisher: KdT Suhl, pp. 151-160.
[4] Archer, August-Friedrich. Process for the electroless chemical production of a structured metal layer. DE 42 20 621 A1. 1994.
[5] Yoshiki, Aleksandruk, Hashimoto, Fujishima: Electroless Copper Plating Using ZnO Ihm Film Coated on a Glass Substrate, in Journal of the Electrochemical Society, Vol. 141, No. 5 May 1994.
[6] Honma, H .; Koshio, T .; Hotta, S .; Watanabe, H .: "Fabrication of Nickel Film on a Glass Disk By Electroless Nickel Plating". in Plating & Surface Finishing, 1995, p. 60 ff.
11
Träger
carrier
22nd
Zinkacetat-Paste
Zinc acetate paste
33rd
Zinkoxid-Schicht
Zinc oxide layer
44th
Keimschicht
Seed layer
55
Metallschicht
Metal layer
Abb.Fig.
1: Substrat mit strukturiert aufgedruckter Sensibilisierungspaste
1: Substrate with structured sensitizing paste
Abb.Fig.
2: Substrat mit Zinkoxid-Film
2: substrate with zinc oxide film
Abb.Fig.
3: Substrat mit in Zinkoxid-Film eindiffundierten Palladium-Ionen
3: Substrate with palladium ions diffused into the zinc oxide film
Abb.Fig.
4: Substrat mit auf ZnO-Film abgeschiedenem Nickel-Phosphor-Überzug4: substrate with nickel-phosphor coating deposited on ZnO film
Claims (4)
Priority Applications (1)
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DE1998123112 DE19823112A1 (en) | 1998-05-22 | 1998-05-22 | Dielectric substrates for producing electrochemical electrodes |
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Application Number | Priority Date | Filing Date | Title |
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DE1998123112 DE19823112A1 (en) | 1998-05-22 | 1998-05-22 | Dielectric substrates for producing electrochemical electrodes |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU731328B3 (en) * | 2000-03-02 | 2001-03-29 | Tyco Electronics Pty Limited | Electroplating |
WO2002099162A3 (en) * | 2001-06-04 | 2003-07-31 | Qinetiq Ltd | Patterning method |
WO2002099163A3 (en) * | 2001-06-04 | 2003-10-16 | Qinetiq Ltd | Autocatalytic coating method |
-
1998
- 1998-05-22 DE DE1998123112 patent/DE19823112A1/en not_active Withdrawn
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU731328B3 (en) * | 2000-03-02 | 2001-03-29 | Tyco Electronics Pty Limited | Electroplating |
WO2002099162A3 (en) * | 2001-06-04 | 2003-07-31 | Qinetiq Ltd | Patterning method |
WO2002099163A3 (en) * | 2001-06-04 | 2003-10-16 | Qinetiq Ltd | Autocatalytic coating method |
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