DE19681500T1 - Interferometer mit Compound-Optik - Google Patents

Interferometer mit Compound-Optik

Info

Publication number
DE19681500T1
DE19681500T1 DE19681500T DE19681500T DE19681500T1 DE 19681500 T1 DE19681500 T1 DE 19681500T1 DE 19681500 T DE19681500 T DE 19681500T DE 19681500 T DE19681500 T DE 19681500T DE 19681500 T1 DE19681500 T1 DE 19681500T1
Authority
DE
Germany
Prior art keywords
interferometer
compound optics
optics
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19681500T
Other languages
English (en)
Other versions
DE19681500C2 (de
Inventor
Andrew W Kulawiec
James E Platten
John H Bruning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tropel Corp
Original Assignee
Tropel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tropel Corp filed Critical Tropel Corp
Publication of DE19681500T1 publication Critical patent/DE19681500T1/de
Application granted granted Critical
Publication of DE19681500C2 publication Critical patent/DE19681500C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
    • G01B9/02039—Shaping the wavefront, e.g. generating a spherical wavefront by matching the wavefront with a particular object surface shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE19681500T 1995-07-31 1996-07-24 Interferometer mit Compound-Optik und Messverfahren mit diesem Expired - Fee Related DE19681500C2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/509,161 US5793488A (en) 1995-07-31 1995-07-31 Interferometer with compound optics for measuring cylindrical objects at oblique incidence
PCT/US1996/012145 WO1997005448A1 (en) 1995-07-31 1996-07-24 Interferometer with compound optics

Publications (2)

Publication Number Publication Date
DE19681500T1 true DE19681500T1 (de) 1999-03-25
DE19681500C2 DE19681500C2 (de) 2000-04-20

Family

ID=24025546

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19681500T Expired - Fee Related DE19681500C2 (de) 1995-07-31 1996-07-24 Interferometer mit Compound-Optik und Messverfahren mit diesem

Country Status (5)

Country Link
US (1) US5793488A (de)
JP (1) JP3784415B2 (de)
DE (1) DE19681500C2 (de)
GB (2) GB2334345B (de)
WO (1) WO1997005448A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19602445A1 (de) * 1996-01-24 1997-07-31 Nanopro Luftlager Produktions Vorrichtung und Verfahren zum Vermessen von zwei einander gegenüberliegenden Oberflächen eines Körpers
US5719676A (en) * 1996-04-12 1998-02-17 Tropel Corporation Diffraction management for grazing incidence interferometer
US5889591A (en) * 1996-10-17 1999-03-30 Tropel Corporation Interferometric measurement of toric surfaces at grazing incidence
US5777738A (en) * 1997-03-17 1998-07-07 Tropel Corporation Interferometric measurement of absolute dimensions of cylindrical surfaces at grazing incidence
EP1103785A1 (de) * 1999-11-26 2001-05-30 Nova C.O.R.D. Ag Verfahren und Vorrichtung zur Ermittlung von Formveränderungen an torusförmigen Prüfobjekten
DE10195052B3 (de) * 2000-01-25 2015-06-18 Zygo Corp. Verfahren und Einrichtungen zur Bestimmung einer geometrischen Eigenschaft eines Versuchsgegenstands sowie optisches Profilmesssystem
DE10039239A1 (de) * 2000-08-11 2002-03-07 Bosch Gmbh Robert Optische Messvorrichtung
DE10303364A1 (de) * 2003-01-29 2004-08-05 Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg Vorrichtung zur Bestimmung des Höhenprofils eines Objekts
US7027145B2 (en) * 2003-06-24 2006-04-11 The Regents Of The University Of Michigan Reconfigurable surface finish inspection apparatus for cylinder bores and other surfaces
US7433058B2 (en) * 2004-07-12 2008-10-07 Solvision Inc. System and method for simultaneous 3D height measurements on multiple sides of an object
WO2008110239A1 (en) * 2007-03-15 2008-09-18 Carl Zeiss Smt Ag Diffractive component, interferometer arrangement, method for qualifying a dual diffraction grating, method of manufacturing an optical element, and interferometric method
US8018815B2 (en) * 2008-08-15 2011-09-13 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Micro-Fresnel zone plate optical devices using densely accumulated ray points
US8174695B2 (en) * 2008-08-15 2012-05-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Arrayed micro-ring spectrometer system and method of use
US8094306B2 (en) * 2008-08-15 2012-01-10 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Micro ring grating spectrometer with adjustable aperture
US8307528B2 (en) 2009-10-05 2012-11-13 Sonnax Industries, Inc. Low clearance machined part mating system
DE102013203211A1 (de) * 2012-06-15 2013-12-19 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferentiellen Abstandsmessung

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE215388C (de) *
DE106769C (de) *
DE233644C (de) *
GB1142702A (en) * 1965-06-15 1969-02-12 Nat Res Dev Interferometric examination of objects and materials
DD106769A3 (de) * 1972-01-04 1974-07-05 Verfahren und anordnung zur pr]fung beliebiger mantelfl[chen rotationssymmetrischer festk\rper mittels synthetischer hologramme
US3907438A (en) * 1973-06-22 1975-09-23 Gen Electric Contour measuring system for cylinders
US4436424A (en) * 1981-07-27 1984-03-13 Gca Corporation Interferometer using transverse deviation of test beam
US4391526A (en) * 1981-08-24 1983-07-05 Itek Corporation Interferometric surface contour measuring arrangement
US4606640A (en) * 1984-04-02 1986-08-19 The Perkin-Elmer Corporation Method and apparatus for optically testing cylindrical surfaces
US4678333A (en) * 1985-05-10 1987-07-07 Nicolet Instrument Corporation Double-pass optical interferometer
JPS62177421A (ja) * 1986-01-31 1987-08-04 Fuji Photo Optical Co Ltd 斜入射干渉計装置
US4653522A (en) * 1986-07-07 1987-03-31 Woodford Manufacturing Company Ground hydrant and method for operating same
US4791584A (en) * 1986-10-15 1988-12-13 Eastman Kodak Company Sub-nyquist interferometry
US4898470A (en) * 1988-07-12 1990-02-06 Eastman Kodak Company Apparatus and method for testing circular cylindrical or conical surfaces
US5041726A (en) * 1990-06-11 1991-08-20 Hughes Aircraft Company Infrared holographic defect detector
JP2619566B2 (ja) * 1990-11-20 1997-06-11 オ−クマ株式会社 光学式位置検出器
JPH04221704A (ja) * 1990-12-25 1992-08-12 Matsushita Electric Works Ltd 位相シフト斜入射干渉計
US5220403A (en) * 1991-03-11 1993-06-15 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
US5210591A (en) * 1991-08-02 1993-05-11 Hughes Aircraft Company Interferometric ball bearing test station
US5218423A (en) * 1991-09-27 1993-06-08 Hughes Aircraft Company Method and apparatus for generating a plurality of radiation beams from incident radiation in a multiple wavelength interferometer
US5268742A (en) * 1992-06-15 1993-12-07 Hughes Aircraft Company Full aperture interferometry for grazing incidence optics
JPH0611323A (ja) * 1992-06-26 1994-01-21 Minolta Camera Co Ltd 形状測定装置
US5526116A (en) * 1994-11-07 1996-06-11 Zygo Corporation Method and apparatus for profiling surfaces using diffractive optics which impinges the beams at two different incident angles
US5654798A (en) * 1995-01-19 1997-08-05 Tropel Corporation Interferometric measurement of surfaces with diffractive optics at grazing incidence

Also Published As

Publication number Publication date
GB2318425B (en) 1999-07-14
GB2318425A (en) 1998-04-22
JPH11510251A (ja) 1999-09-07
GB9909487D0 (en) 1999-06-23
US5793488A (en) 1998-08-11
DE19681500C2 (de) 2000-04-20
GB9800874D0 (en) 1998-03-11
JP3784415B2 (ja) 2006-06-14
GB2334345B (en) 2000-01-19
WO1997005448A1 (en) 1997-02-13
GB2334345A (en) 1999-08-18

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8607 Notification of search results after publication
8607 Notification of search results after publication
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee