DE19632581A1 - Series evaporator for vacuum deposition systems - Google Patents

Abstract

In an in-line evaporator for belt-type deposition installations, which consists of a number of individual evaporators 6 which are heated by the passage of current and are held by supports 3, 4, 5, while the electrical supply lines 11 which in use have a coolant flowing through them of the second polarity are connected to bolt-shaped pressure members 10 which are guided in through openings 8, 9 in the supports in an insulated manner and are acted upon by spring elements 12 which operate approximately in the longitudinal extension of the evaporators 6 and press the head parts 13 of the pressure members 10 against those end faces of the evaporators 6 which are turned towards them, the pressure members 10 of the second polarity are held in the openings in the supports so as to be longitudinally displaceable in bushes (14,Fig 2) made of electrically insulating material, while the bushes are constructed as stepped pistons and the corresponding bores as stepped bores which in each case, together delimit one annular space (15,Fig 2) each, which can be acted upon by a pressure medium duct.

Description

The invention relates to a series evaporator for Vacuum deposition systems, in particular for belt processing steaming systems, consisting of several individual NEN, controllable in performance, by electricity passage heated Ver steaming, the supports from one over the entire length, electrically conductive capable support body are held and the supply towards the first polarity the support body is connected, while the Zulei second polarity with bolt-shaped, insulated through openings in the supports guided pressure members are connected.

A series evaporator is known (US 3,387,116), in which the trough-shaped evaporator boat between fixed, column-shaped supply line and one under spring tension, on one  second stationary supply line held and ge led thrust piece is clamped.

A series evaporator is also known at where the ends of the boats are each one A pair of cheeks are held, which are like a bite pliers hold the ends of the boat, the Clamping force of each pair of bolts of one Spring is applied (US 2,969,448).

These known devices have in particular the disadvantage that the replacement of the evaporator ship is time-consuming because of the exchange reduce the preload with the help of tools must be cleaned and the removal of the boat is inconvenient because it is difficult to access.

Finally, a series evaporator is known (DE 40 15 385), consisting of several, individually in the power controllable by continuity heated, on support-shaped electri vapors attached to the supply lines, whereby the support-shaped leads of one yourself over the entire length of the row evaporator stretching, electrically conductive support body ge are holding and the feed lines of a polar act electrically connected to the supporting body are while the other Po larity isolated ge through the support body leads and with insulated lead wires ten are connected, the through the support body with play, prop-shaped zu lines are loaded by spring elements,  which is approximately parallel to the longitudinal extension of the ver act steamer and the head parts of the supply lines to the end faces of the ver Press the steamer, the spring elements themselves electrically insulated from the supporting body hold and run or made of insulating material are formed and ver with these leads tied lead wires from a coolant flowed through conductors or as cooling hoses or cooling tubes are formed that lead to the Lei cables are laid in parallel and in chambers or channels that flow into the supply lines are provided.

The object of the present invention is to achieve reasons to create a series evaporator at which does not have the disadvantages of the known device are given and above all a particularly ra easy and unproblematic replacement of the Shuttle allowed.

According to the invention, this object is achieved by that the pressure members of the second polarity from Coolant flows through and in the openings of the Longitudinally adjustable supports in electrical bushings trically insulating material are kept, whereby the bushings as stepped pistons and the correspondie renden bores designed as stepped bores are, each together be an annulus limit that correspond to a pressure medium channel over which the respective annulus with pressure can be acted upon by the bolts the force of the spring shifts.  

Further embodiments and features are in the Claims described and identified in more detail draws.

The invention allows a wide variety of designs opportunities for; one of them is in the hanging drawing shown, the one Device for holding an evaporator Vacuum deposition system in side view and partially shows in section.

The series evaporator consists essentially of a support body 7 with three extending in the longitudinal direction of the evaporator bank supports 3 , 4 , 5 in the form of profile sections with approximately rectangular cross sections, a plurality of next to each other arranged evaporators, each with a boat 6 , 6 ',. . . , These boats are each offset by a dimension a to each other, the coolant hose connections 17 , 17 ',. . . , each of which is in a pressure member 10 , 10 ',. . . flows out, the tion with a Kühlboh 18 , 18 ',. . . is provided and the free En de or headboard 13 , 13 ',. . . an evaporator 6 ge conditions on a support 5 attached to the support member 19 , 19 ',. . . presses and compression springs 12 , 12 ',. . . , each on a with the pressure member 10 , 10 ',. . . connected collar 20 , 20 ',. . . apply and the head part 13 , 13 ',. . . of the respective pressure member 10 , 10 ',. . . in the direction of arrow A against the assigned boat 6 , 6 ',. . . to press.

Each pressure member 10 , 10 ',. . . is in pairs of sockets 14 , 14 ',. . . or 21 , 21 ',. . . made of electrically insulating material, which in turn in openings 8 , 8 ',. . . or 9 , 9 ',. . . are held in the supports 3 and 4 , the bushing held in the first support 3 each as a stepped piston 14 , 14 ',. . . is formed, the in a correspon- dingly shaped stepped bore 22 , 22 ',. . . sealingly slides and an annular surface 23 , 23 ',. . . forms, which is acted upon by a pressure medium (here compressed air) which is introduced into the respective annular space 15 via the channel 16 and each because a bore 24 in each support 3 .

During the coating process, the annular spaces 15 , 15 ',. . . relieved of pressure, so that the force of the compression springs 12 , 12 ',. . . each fully on the with the pressure members 10 , 10 ',. . . connected Kra gene 20 , 20 ',. . . rests and the pressure members the boat 6 , 6 ',. . . firmly against the stationary support members 19 , 19 ',. . . support.

In the case of exchange of the boats 6 , 6 ',. . . the pressure in the annular spaces 15 , 15 ',. . . so far increased in the direction of arrow B on the annular surfaces 23 , 23 ',. . . the stepped piston 14 , 14 ',. . . acting hydraulic (or pneumatic) forces the forces acting in the direction of arrow A of the springs 12 , 12 ',. . . overcome and the stepped piston 14 , 14 ',. . . and thus also the pressure members 10 , 10 ',. . . , with which the stepped piston 14 , 14 ',. . . each non-positively via the sockets 25 , 25 ',. . . and the snap rings 26 , 26 ',. . . are connected, move in the direction of arrow B so that the shuttle is relieved and can be removed or replaced from the evaporator bank.

Reference list

3 support
4 support
5 support
6 , 6 ' ,. . . Evaporator, boat
7 supporting body
8 opening
9 opening
10 , 10 ' ,. . . Pressure member
11 , 11 ' ,. . . Supply
12 , 12 ' ,. . . Spring element
13 , 13 ' ,. . . Headboard
14 , 14 ' ,. . . Bushing, stepped piston
15 , 15 ' ,. . . Annulus
16 pressure medium channel
17 , 17 ' ,. . . Coolant hose connection
18 , 18 ′ ,. . . Cooling hole
19 , 19 ' ,. . . Support member
20 , 20 ' ,. . . Collar, support ring
21 , 21 ' ,. . . Rifle
22 , 22 ' ,. . . Stepped bore
23 , 23 ′ ,. . . Piston surface, ring surface
24 , 24 ' ,. . . drilling
25 , 25 ' ,. . . Rifle
26 , 26 ' ,. . . Snap ring

Claims (1)

1. series evaporator for vacuum vaporization systems, in particular for belt steaming systems, consisting of several individual, controllable in the performance, heated by current passage, supported by supports ( 3 , 4 , 5 ) Ver evaporators ( 6 , 6 ',...), wherein the supports ( 3 , 4 , 5 ) are held by an electrically conductive support body ( 7 ) extending over the entire length and the lead of the first polarity is electrically conductively connected to the support body ( 7 ), while the leads ( 11 , 11 ',...) Of the second polarity are connected with bolt-shaped, insulated openings ( 8 , 9 ) in the supports which are passed through pressure members ( 10 , 10 ',...), The through the openings with play performed pressure members ( 10 , 10 ',...) are acted upon by spring elements ( 12 , 12 ',...), which act approximately in the longitudinal direction of the United steamer ( 6 , 6 ',...) and the head parts ( 13 , 13 ′,...) the pressure members ( 10 , 10 ',.. . ) to the facing end faces of the United steamer ( 6 , 6 ',...) Press, the Fe derelemente ( 12 , 12 ',...) Even electrically isolated from the support body ( 7 ) and guided or made of insulating Material are formed, characterized in that the pressure members ( 10 , 10 ',...) Of the second Po larity flowed through by the coolant and in the openings of the supports longitudinally displaceable in sockets ( 14 , 14 ',...) Made of electrically insulating Material are held, the bushes ( 14 , 14 ',...) Are designed as stepped pistons and the corresponding bores as stepped bores, each of which together define an annular space ( 15 , 15 ',...), Which with a Pressure medium channel ( 16 ) correspons through which the respective annular space ( 15 , 15 ',...) Can be acted upon with pressure medium, which moves the bolt against the force of the spring ( 12 , 12 ',...).