DE1772680B2 - Verfahren zur photographischen herstellung von masken - Google Patents

Verfahren zur photographischen herstellung von masken

Info

Publication number
DE1772680B2
DE1772680B2 DE19681772680 DE1772680A DE1772680B2 DE 1772680 B2 DE1772680 B2 DE 1772680B2 DE 19681772680 DE19681772680 DE 19681772680 DE 1772680 A DE1772680 A DE 1772680A DE 1772680 B2 DE1772680 B2 DE 1772680B2
Authority
DE
Germany
Prior art keywords
masks
photographic production
photographic
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19681772680
Other languages
English (en)
Other versions
DE1772680A1 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE1772680A1 publication Critical patent/DE1772680A1/de
Publication of DE1772680B2 publication Critical patent/DE1772680B2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
    • G03C5/26—Processes using silver-salt-containing photosensitive materials or agents therefor
    • G03C5/29—Development processes or agents therefor
    • G03C5/315—Tanning development
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
    • G03C5/26—Processes using silver-salt-containing photosensitive materials or agents therefor
    • G03C5/40—Chemically transforming developed images

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
DE19681772680 1967-07-03 1968-06-19 Verfahren zur photographischen herstellung von masken Withdrawn DE1772680B2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US65080467A 1967-07-03 1967-07-03

Publications (2)

Publication Number Publication Date
DE1772680A1 DE1772680A1 (de) 1971-04-08
DE1772680B2 true DE1772680B2 (de) 1971-10-28

Family

ID=24610364

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19681772680 Withdrawn DE1772680B2 (de) 1967-07-03 1968-06-19 Verfahren zur photographischen herstellung von masken

Country Status (9)

Country Link
US (1) US3567447A (de)
BE (1) BE716951A (de)
CH (1) CH474159A (de)
DE (1) DE1772680B2 (de)
ES (1) ES355285A1 (de)
FR (1) FR1571723A (de)
GB (1) GB1210949A (de)
NL (2) NL162215B (de)
SE (1) SE355422B (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3834801A (en) * 1970-09-21 1974-09-10 Staley Mfg Co A E Reflective elements
US3884570A (en) * 1972-01-03 1975-05-20 Personal Communications Inc Reader for reflective background microrecords
US3897251A (en) * 1972-02-03 1975-07-29 Gte Sylvania Inc Process for utilizing a photoprinting article and method for making said article
US4108659A (en) * 1972-08-25 1978-08-22 European Rotogravure Association Method of engraving printing plates of forms by means of energy beams, especially laser beams
JPS5230848B2 (de) * 1973-10-09 1977-08-11
JPS532727B2 (de) * 1973-10-09 1978-01-31
US4113486A (en) * 1973-10-22 1978-09-12 Fuji Photo Film Co., Ltd. Method for producing a photomask
GB1493111A (en) * 1974-02-19 1977-11-23 Agfa Gevaert Production of photomasks
JPS5230850B2 (de) * 1974-10-07 1977-08-11
JPS51105821A (en) * 1975-03-14 1976-09-20 Fuji Photo Film Co Ltd Masukugazono keiseihoho
JPS6015055B2 (ja) * 1976-09-06 1985-04-17 富士写真フイルム株式会社 マスク画像の形成方法
GB2042200B (en) * 1979-02-14 1983-03-09 Drexler Tech Laser pyrographic reflective recording medium
US4314260A (en) * 1979-02-14 1982-02-02 Drexler Technology Corporation Laser pyrographic reflective recording layer in a carbon containing absorptive matrix
US4225659A (en) * 1979-04-10 1980-09-30 Drexler Technology Corporation Method for making thermochromic photomasks
US4278758A (en) * 1979-07-06 1981-07-14 Drexler Technology Corporation Process for making a reflective data storage medium
US4774164A (en) * 1987-04-06 1988-09-27 Tegal Corporation Chrome mask etch
GB8810483D0 (en) * 1988-05-04 1988-06-08 British Aerospace Imaging system
GB9811563D0 (en) * 1998-05-30 1998-07-29 Univ Dundee Improvements in and relating to photomasks
US8303756B2 (en) * 2004-12-07 2012-11-06 Lg Display Co., Ltd. Method for bonding a glass cap and mask for curing sealant

Also Published As

Publication number Publication date
FR1571723A (de) 1969-06-20
DE1772680A1 (de) 1971-04-08
ES355285A1 (es) 1969-12-01
US3567447A (en) 1971-03-02
CH474159A (de) 1969-06-15
SE355422B (de) 1973-04-16
NL162215C (de)
NL162215B (nl) 1979-11-15
BE716951A (de) 1968-12-02
NL6807307A (de) 1969-01-07
GB1210949A (en) 1970-11-04

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Legal Events

Date Code Title Description
E77 Valid patent as to the heymanns-index 1977
8339 Ceased/non-payment of the annual fee