DE1765142A1 - Method for processing a resistive material layer on a cylinder support according to a helical path and electrical resistance produced after this processing - Google Patents

Description

Dipl.-ing. HOKbI a u l * 1765Η2

Godfather-nfcnwolt
Applicant: NX PHILIPS 'GLOEtLAMPENFABRIEKEN

File: PHK-2408 _ HET. 2400

Registration dated: April 80, 1968

vO / V.'G.

"Process for processing a" .. 'iderütandsiaatorialschicht on a cylinder bearing αοιι.ΆαΒ a screw line fSrmicon Bahn land after this processing heröOEtelltor electrical "Jiderctand" »

The; irfindun (; concerns a method for editing of an I / iderutandokSrperB, with a .'iderotandsschicht on a cylinder support made of icolier material, doscen linden Each provided with a connection cap and gona as a helical line ! Jahn iriderotandsrnmaterial is removed, biu of the electric smells Widorctand between the caps a prefixed word avf, and also relates to an electrical Tfiderutand with a on dioce '' ice boarbeiton UidorstandoBChioht,

} 3 occurs in the most widely used ancestor of this species the removal of the intermediate material length of the mentioned path by means of a fast rotating: 'chloifachoibe rait Doharfem Rand, which in Aohsriohtunc lan ^ a doa housed in a rotating holder Vii B tfin'lnkörporü f; owö £; t will. The ooo ancestor has the Hachioil, there

109827 / 0A69 BAD ORIGINAL

1765U2

-2- ran. 2408

Edges of the ground track are not sharp, but crumbly are, whereby the applicable minimum gradient is set, Furthermore, the resistance material should be over the The bottom surface of the hat ground in the carrier is smeared, Bodacs the resistance finally obtained is voltage sensitivity can be. Another method associated with this sole process The disadvantage is that you can use the helical path cannot be connected directly to an ifod cap, which means that the The change in resistance that can be achieved with grinding is less than with direct connection of the hat to an end cap.

In a further known method of the type mentioned above, in which the resistance material is applied to the layer by means of a If the focused electron bond is removed, these disadvantages occur not on »On the other hand, however, is that this process requires a relatively extensive apparatus and that the processing resistance bodies oamt the smocks for the production of the Electron beam must be housed in a vacuum. Ausoordem exists the danger that when using high acceleration tensions for the electron beam X-rays are generated and in which Carrier is injected with an electrical charge that causes damage the carrier surface can lead.

The invention aims to provide a method of the above Art to create in which the disadvantages of the two aforementioned methods are avoided.

The method according to the invention is characterized in that the resistance material is nittoIb along said path an electromagnetic focused on the resistive layer

109827/0469 BATH

1765U2

-3- "SE?. 24O0

The bundle of rays is removed with an energy of at least one icon watt, and this bundle is continuously emitted at a relative angle of the resistance layer above this bundle by a device for generating bundles by means of automatic immission. -Uno günatiGe Aueführungsform of traversed by the ^r; rfindun ^ is characterized in dasss the beam is produced in a Gasentladuiicoraum, <$ bt one from a mixture of carbon dioxide, nitrogen and at least one of the gases Ileliun and Ifaaserdanpf bystanders gas filling contains, wherein the wavelength of the i'trahlunt; in the bundle prahticoh is 10.0 / um, and furthermore the i "htladiui £; Eraun is closed by a naliesu the whole Cuerschiiittoimiehmendes Ponstor, since it is permeable to infrared radiation and k'lGicksQitiG Heflexionselonent.

It is noted that it is the case with the He rs telluric of Ilet al 1-Hautwideratflndon with very low tolerance is known into a on the inner wall of a glass tube avfeedampfte rotallechicht aunachet mecha: I have to cut a screw linear path, until a '..' iderotandstfert is reached, dor uia about C, 5.j niedriccr lies than the desired l'iderr.tandwert. Then on üide this acliraubenlinienfömicen lahi: by means of a periodic interrupted Utrahlunftsbundela, which with the help of an interraittierendarbeitci.dei: Device for generating radiation by stimulated Emission is received, fsow much T.etall evaporates until the 'Ride resistance value by less than the sulilcsice tolerance. desired deviates. In this manufacturing process of all-skin widorotonia remains that of a mechanical formation of the helical formation BaIm anliaftondo Γ oh part; continues to do the Application Ciineu intomittiorendoia iitrahluiifjsbfbidels oin rebordoci.cn

109827 / ri Z, 6 9
BATH ORIGINAL

1765H2

-4- HAT. 24O8

del * 'successive points of impact necessary if the ilaterial should be removed over an uninterrupted area. In the process according to the invention, in which a continuously emitted If a bundle is used, an uninterrupted part of the '.' Resistance material is automatically removed. Ilan -may therefore be a bigger one relative speed of movement of the focused beam and the Do not allow resistance to resistance than with an intermittent bundle for the production of an uninterrupted Bahr, would be possible.

g In the above-mentioned favorable embodiment can the gas discharge space with inlet and outlet spaces for the gas in Connected. As much as possible around the space for the necessary equipment To keep it small ^ a gas-tight closed one can be advantageous Gas discharge space can be used.

The invention also includes a device for performing the method described above. The device is characterized by a rotating holder for holding a resistance body to be processed, a gas-tight sealed gas discharge device for continuously generating an electromagnetic radiation bundle with a wavelength of about 10.6 μm by means of stimulated emission, which device is made from a mixture of carbonic acid, iJtickstoff and at least one of Gaee helium and ^T Jasserdampf yield Hendee gas contains and is provided with an exit window for the bundle, the permeable to infrared radiation and equilateral reflection element, and means for focusing the AustrittsbÜJidelB to be processed Widerstardsschicht a into the holder Incorporated resistance bodies and other smocks for such a relative movement doe BronnpunktoB

1 O 9 B 2 7 / O / »6 9

BAD ORIGH ^^ o 0 ** 1

1765H2

-5- "HOT. 2408

of the frets Ie and the '.iideratandskSrpers that the focal point t5bcr the The resistance layer describes a helical path,

The invention is explained in more detail with reference to some exemplary embodiments shown in the drawing. :,) b point

Fig. 1 schernaticch Ausftlhrungcforra a sum of a device processing a Widere tandekSrperG according to the "invention} Fig ^1, 2 toilveiao in view, partially in L & igüschnitt,

one produced by means of this device according to the invention Uiderotand;

Fig. 3 shows a similar device as Pie 1, but in a slightly different shape and across the direction of the fi ^: · 1 ge-G0hen.

In the embodiment to be described in Har.d of FIG of the procedure after the! '! rfindung, UiderotandskSrper 1, die je au :; a cylindrical square, preferably three-piece ceramic carrier (? ig, 2) beotohen that over the entire .jylinderoberfläclie with a liidorfctandcechicht 3 vmd with metal caps imprinted on the bark veroohen iut, Cbor a biogoanon Lchlaug 5 nacheif.ar:dor hollow, rotatable angoerdnoton Klomrnelouonton 13 and I4 one over a e.g. from an i-clock track 7 formed on a degree guide movable i'ler.imvorrichtung 6 f ^ ucted. The Klommvorriclitung 6 also consists of oinor with the guideway 7 auoarauenvirkondon tragi) latt (5 or .Jchlitlon 8, mounted on the bzv ;, the awei ir; oliorendo Ilnteru ttUzungou.'tulen 9 Bind, which ever in oinp metallene Hohlbuuhoo 1 '■ nüiiien,

In the Btjchoon 10 uind the clamp Le non to 13 and 14 stored so threateningly that:; c their ächßon in the direction of movement doa:; chlittur.B ο over the / "i.rungu track 7 mitoinan-ler in flight

10982 7/0469
BATH ORIGINAL

1765U2

-6- FHTT. 2408

the distance between their facing ends is smaller than the distance between them. fide rs t on the body 1 rait attached oid caps 4 The Klerameler.ente 13 and 14 lick themselves in ways not shown in detail from the outside, e.g. by means of control air supplied via sole level 15, in a radial inward opening and closing ^ a over the Hose 5, supplied by compressed air, resistance body 1 is moved centrally through the clamping element 13 until the front aide, which is guided by the oinar support platform 16, reaches the clamping element 14 and is stopped there from £ O3. This can be stopped, for example, because the Xlorooelemont 14 is provided with an inner crown which, when this clamping element is semi-open, limits the insertion of the flap, but lets the cap through when it is fully open, if "an" idoretand body is inserted once into the opening 'Lemnvorrlchtung is introduced, the clamping elements 13 and 14 are closed and set in rotation by a drive device, not shown. It is noticed that the drive only learns at terminal 13 and gong. In Pig. 1 shows the direction of rotation, seen from the left, in a clockwise direction. That with the device ;; oh i ^? ig. 1 executable method according to the invention bezwockt, from the S / idorstandeschicht 3 one in the .xleranvorrichtiuii; 6 absorbed / iderctandskörpora 1 in more advantageous iieice than biühor lSngo oinor screw line Ilmaterial, in such a way that the electrical resistance of the resistance layer between the end cap 4 of the i'bodyor receives an oinen vorbeotinmiton value. For this purpose, the device according to FIG. 1 contains an execution for continuous ^; ! rzougen oinea electromagnetic ßraybündolo 21 high fiiergio with oinur;. ^r eillonlong ot about 10.6 / um. Dio Wed; .direction 20 boatoht from a vBILig geeohlousenen 'Λ

109827/0469., ._... "

BAD ORIGIN ^ ' ^si ° ^US

1765U2

-7- " HE '. 24OÜ

tube 22 with a filling consisting of a gas mixture of carbonic acid, otiokstoff and at least one of the regions hydrogen and helium. Inside the line 22 are now electrodes 23 and 24, made of latin, the electrical connections of which are carried out through the cylinder part of the first line 22 made of quartz. This love is cji a Tjido by a L. (3 _L ; lich;.; T {jut reflective Ilohlspie ^ jel 2 ' ¹ J and on the other üide,'. Jtralilunf; sun part, £,!;. Aur half, durchiri:. 'Ci £; cn flaclion iJpio,; cl 26 veraohloscen. In dor inrichtunc 20 trird bei / liiEchlui'iS dor ..' electrodes 23 v.nd 24 c -zi an adjustable 3ρ; ϋΐηιηΐ £ Ώ— qv.elle 27 »which can deliver a ^ rannimf- of 20 to 3'- kV, through continuously coiled eniccion builds up a radiation field," .rodurch dai; r) ra ' cticc! i parallel ward 21 arises · 'Dieaes 7JUndel 21, uclchoD ei :: en ~; X-rchr.eoaer of 5 bits; 10 r.ir.i can have and a "hor ^ ie of at leastei: tos: noinicen , 2.3. 10 'has iiatt, i.'ird with te Ig of a flat i'pie ^ ela Lic: u; r''leninVorrichtunu β reflected towards and then transmit CINOR zH aro intriiicihen Ger:;. Aniun existing lens 29 with a focal length of 2 ,1. 5 cn su a en £; en 73Cndel 3 '^ ni with a smallest iKipchneucer from about 1.1' to 25Ο / un focussed. Ί3ϊο axis dicüeü JÜridelG iut erected on the axis of the '! Lcnniele .ente 13 and I4 ^; die nit / inti-P-eflcxionsechichton verßehe.io Idnce 2T kcu: n with the help of eii.or a: jdivisible '-'a; jcun _t '; 33 so ju: .. tiort to be, dan;:, -reiui -Irτ öchnittrisikt; ier er ".. ^r Ph :: t (: n Achrjcn:; trischon den 'Clemr: .- f) lor.; Enton 1> and 14, lie £ jt, the crwiliir.to: indcatii: rchmeuser Ίΰΰ Fokuc-! • ■ iorten. '. tb.-lo Lc }, () more or less:.: it darr, vom THindel je troffen'.;-; ^r 'oil dor ..ifjorütandccchicht 3 one in ("ie: lernnelemojrite avft'ononrnonen

109827 / ΠΛ69 BATH

-8- FHK. 2408

win after being fed through the hose 5 into the clamping device 6 "resistance body 1" is now taken from the bundle 30 - as follows processed. The sleigh good with a eoheraatisoh shown / intrioborr. mechanism 18 coupled, which this slide from an initial position in which the focused beam 30 on the pus the KlemmeIonent I4 outstanding part of the diesel »Klemne-le— mont fixed end cap doa i'idorEtandpkBrperß 1 directed is, with konotantor speed over the guide way 7 after left "moves, so that the resistance body 1 in direction of IClenone.leraent 14 is fattened by the focused bundle 30 Glcichnam.

Since the resistor BkSrper 1 simultaneously with the in the Beeches 10 rotating clamping elements 13 and I4 circulate, describes dai3 bundle 30 fiber the resistance body 1 a screw line, their fjtcication by the ratio between the rotational speed of the

f ■

IQemmelenente 13 and 14 and straight movement of the speed of the slide 8 go ^ cben iut. The material of the ligamentous layer 3 struck by the 3tindel absorbs from the bundle 30 ) ü; idol 30 conditional. The Iidkapi) en 4 are made of metal with a strength of 0.1 mm or greater, which is therefore large compared to the penetration depth of the bundle radiation. The cap, to which the bundle 30 is directed at the beginning of the processing, therefore absorbs little energy from the bundle, since it does not influence it, but as soon as the rolative movement of the resistance body is threatened; onübor dom TJÜudel 2> 0 lotatoroß leaves the appe, begins the

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local removal of the resistance layer. This local distance takes place via an internally lengthening, helical, narrow track 19 (see FIG. 2) adjoining the kappo in question A measuring bridge electrically connected to the Bucheon 10 is measured in a measuring device 32. This measuring device has non-illustrated, well-known gowns that deliver an indicator signal when a predetermined resistance value is reached To end the resistance layer 3 and at the same time to initiate further actions with the purpose of feeding a next resistance body 1 to the clamping device 6 via the hose 5.

The processing of the resistance layer 3 by means of the LVi ι do Ib 30 can be ordered in different ways, for example by completely or partially switching on the electrical supply of the device 20, as in I * 'ig. 1 by means of an electrical connection for a control signal between dom Jless device 32 and the Hpeicespannungsquollo 29 daryeatellt, 'or by intercepting doa bundles 30 baw, dec lündols 21 nibtolo oihos e.g. electromagnetically movable, the bundle radiation not or only limitedly permeable nchirraes. For the same purpose, an olektrisoh controllable light ear bank z, ^T3 ·, an Iferrzello, can be used, a third possibility iDt, tredor to set the direction of rotation 20 completely or partially out of the drive, nor to undo the bundle of radiation emitted from it, eondom through Tipping over of the mirror 28 or shifting in axial direction, "of the lens 29, for example, in Pig. 1 upwards, to ensure

109827/0469
BATH

-ίο- rrer. · 240O

The fact that the bundle 30, 3 or QB can still appear on the resistance body 1, is defocused at this point, because the aterial of the titanium layer 3 weighs so that the low energy density is no longer influenced The Ifeise shown is also used to reverse the movement of the slide 8, when it returns to the starting position shown, and further to open the two clamping elements 13 vend 14 "so that the just" machined resistance body I ^ is connected to the :: lcr.ont I4 connected flexible "chlaueh discharged vrird" at the same time, a next! Jiderstandskörper t'ber the Hchlauch 5 of the clamping device eye leads β and held in this. to anschlie3cend a same processing un'terworfo "to xrerden.

As a "Deispiol it can be mentioned that if the vfider-Etandsschioht 3 nvis a carbon layer deposited in the known way by the decomposition of a carbon hydrogen-bonded layer rait a narco of about 1000 X, with an Ihergie in the bundle 30 of about 25 * 7att in this resistance layer an uninterrupted, helical path 19 with a width of 150 to 200 μm can be formed at a speed of about 0.5 η per second, ie because the speed of the relative movement of the resistance layer 3 with respect to the focus locations Bundle 30 0.5 in per; 3ek »botragon. Kin rait of the device according to Pig. 1 processed UiderstandakSrpor 1 is shown in Fig. -uidGBchicht 3 before the bundle is ontfornt. Bio width of this web, lie ::, ^τ ί, 200 / tira botragen krum, is rogolbar dvrch .'Unstteilung dor

109827/0469
BATH

-11- - wed. 2408

Lens 20t ie by a more or less sharp focus of the bundle 30 on the substrate seal 3. The described method "offers the advantage that the edges of the remaining · part · of the resistance 3» which limit the Bahr. 19 are smooth. Furthermore the surface of the support 2 on the cleat of the web 19 is clean and smooth, the surface of the kersaiachen support 2 there is smooth and the molten material can cover the hangers just mentioned to some extent.All these factors work together to achieve a good reproducibility With the method and the favorable electrical properties of the resistor produced. As a result of the smooth shape of the edges delimiting the track 19, this track can be given a smaller slope than is permissible in known grinding methods given resistance, both by a larger sea change possible From the time it is opened, as well as through direct anchoring of the track 19 to an end cap, a large selection of resistors with different resistance values can be produced, as if the known grinding method is possible.

^. in contrast to the well-known process "to form a similar helical path in the Vidsrstandssohicht ■ part of a focused «! ZÜektronenstrohle offers the process After the invention versohiedone benefits ea do not need in Vaicuua to be worked on, considerably lower operating voltages are sufficient, which leads to less extensive equipment, and 'can use larger Ehorgis dichlcm without the occurrence of X-rays, thereby increasing the speed of processing can be, especially for the external production, valid int,

109827/0469 BADORlGfNAl _n

-12- FiHf. 2408

;, 3 aeigt schematieoh part of a device, which only in some details of the naoh Pig. 1 abveloat, where the same flexion parts are used for the corresponding parts. The rotatable clamps 13 and 14 are mounted on insulating 13hterstiunjunjearms 40 and 41, which are above a corner delimited by stanchions 42 and 43 across the axis The ViAsr tape bodies 1 lying plane can be rotated via a spindle 44 which is supported by the carriage 8. In one position of the support arms, the clamped-in ".ideretande body 1 is completely out of the 3Pr.deIo 30, in the other position this bundle is just focused on the Tiiderctantlcohicht 3. The processing of this Cohioht by the Iflrdol 30 can be done with this Device on Ghnliehe Uelse ends weadon, via at the device naoh Pig, 1. Another injury inside the Vervcr.dur ^; an electro-cognotic movement device coupled with the Unteretütssungsareen 45 »the mm Anseigesi ^ Tial des l ^r es3ger9ts 32 ge ο expensive is t, then the WiderstmidskOrper 1 gleiohcan vegklappt from the Mndel 30 in the Te «^ -. richtimg according Pig 3 eats dio device 20 is not parallel XAIT, condom transversely zmt Tciregun ge direction de * e Cohlittens arranged 0 the in Tic *.. 1 Spiogol marked with 20 is then dispensable.

"It is noted that, if the method described in the procedure, necessary relative movement of the bundle 30 and the resistance 1 is large in the aohorioht of the older nioht «u, dl · ·· unlike the above described by shifting the LinM 29 in the anticipated failure can take place, in which case the bottom 8 ns Plats "blriban can no longer be trained as a Gohlitten CTJiJS.

1098 2 7/0 / «69 '■

BATH

-13- ~ Hsr. 2408

As IIaterial for I, ^r iderßtandsschicht 3 carbon is already known. Baa ancestors according to the invention, however, are not restricted to this torial. The resistance layer 3 can consist of metal such as nickel or chromium nickel, as long as this metal layer is not too strong, sufficient absorption occurs, which in the case of thin layers is achieved by the surface of the carrier 2 being that of the On the other hand, the local "transmission capacity" and "icirriio conduction" must not be so great that they prevent the temperature necessary for the evaporation of all of the above. A chrome layer with a thickness of about 1000 S can be installed on the arifjö £ about 200 / ira wide metal-free balun; level L ^r oi3o aucgeaoichnet by means of a 3Ü? ^I dels 30 with a power of 30 watts and a dee bundle of about 0 , 5 η per i.'econd.

109827 / Qi69 BAD iÄ

Claims (1)

-14- HIT. 2408 3ΡΗϋΕ0? Γ3ι 1. Method for machining a resistor body, wherein of an oiror resistance layer on an insulating material consisting of 'ylindertr * i': he, each of which is provided with an Änoohlueskappe, ca-'lza a sohravbonlinionfbrinicen web of resistance material is removed until the electrical resistance between the ICapixm a vorlicotir.r. The last point shows that the resistance material along the mentioned path is removed from at least a few watts by at least a few watts, and this is not focussed on the liidor-Bt; rdcsc] Tu. Del at a relative Bowecun ^ the resistance layer tjogen over this Bur del from a "device for frets le raeugtmo by atimulated LnI" c-ion is continuously emitted, 2. Ancestors naoh Anspruoh 1 _f daduroh gekennaeichnet that the 3rd! jnd-ol is produced in a Qaa discharge space, which contains one of a: -oo Cronirch of carbonic acid, Gtiokstoff νααά at least one of the Gaco Folium and L ^r ar 10.6 / um eats, and largely the • ^: htladvnnaraum dvroh a fcnetor that occupies almost the entire transverse space, because infrared radiation is permeable and, '■■ loichiseitin IRefloxionnelenent, 3 »Ancestors according to Anopruoh 2, thereby ßkennaeichnet thatβ dor OaoontladunnBraum gas-tight voraohloncen iat. / .. ancestor after a previous ^ nepruoh, daduroh Okennsseiahnet that the resistance on the axif the IooliortrS ^ er niodorneeohliiOnem carbon.
*. Method according to one of the JuiaprQohe 1 to 3 »daduroh 109827/0469 BATH 1765U2 -15- «- Hfl · · 240ö characterized, that the resistor layer consists of a ketallic layer, ss.j, oiiier Kickel-Caromlogierung, with a strength of about 20 to 3000 X exists. 6. Method according to a preceding claim, thereby kernteiohnet that the beginning and end of the process a change of the bundle energy at the Ctelle deü '..ideratandakSrpere can be initiated. 7. Method according to one of the approaches 1 to 5, characterized in that the beginning and the linden tree of the preparation are accomplished by such a relative orientation dee '..' iderataiidsukörper & ocou Tiber doa 3ronnpunkt dee 3Ündele, daos between deia Pokuacieruiißutokuaaand doa Ijündele on dor 'liderEtandsa ^ a tlebercang occurs. 8. Proceedings according to one of the previous Anßprüoho, characterized in that immediately before dom removing the material from dor Vi'ideretar. layer through the bundle of the latter onto one of the lock caps Is judged. ^l j. Device to perform. of the procedure after a of the preceding claims, characterized by a rotating holder for receiving a ".." iderstandek8rper8 to be processed, a gas-tight, Vereciiloaeene Gaeentladueinriohtung xum by atimuliorte Uuieeion continuous ür ^ cu ^ on of an electromagnetic radiation effi £ S-btL: d * ls nit ll «NlSngo of about 10.6 yuB, which establishment contains an au» a uomiuoh from Koblenuaure,> Hickatoff and wonigstons one of the gas «: leliun and Wauoerdacpf botitehundes Gae and with a stepping out i'llr dao" .Undel eats, the TCr Infrared tr oh lunn DurchlEaBiß and (fieichzoi tig Kefloiionselemont lot, oovie Kittel 7.xm Pokiiesieren dea Ana tri ttabundels on the au bearbeiridprotandnöchlclit ρ in "jn irr holder" ufr ^ nonraonen 1 f 'υ j. ; Ί Ι η / r: ^ BATH 1765U2 -16- FJ ^. 2408 and other means for such relative movement dee Brennpunk tec doo bundles and de3 resistance bodies, box of the Focal point over the '»iderBtorulBBschicht oine helical · Railway boscnreiOt. 10.. Electric resistance emanating from an insulating door nit a connection cap each to the "Indon bectoht, voboi the Trüger old o'iner Widerstajid3cchioht stranded, from the coir.üsa the method according to oinen der / jieprüchc f bit 8 the material lSii ^ s oiner screw-bar , removed int. 1 09827/0469 BAD ORFOLNAL