DE1621419A1 - - Google Patents

Info

Publication number
DE1621419A1
DE1621419A1 DE19671621419 DE1621419A DE1621419A1 DE 1621419 A1 DE1621419 A1 DE 1621419A1 DE 19671621419 DE19671621419 DE 19671621419 DE 1621419 A DE1621419 A DE 1621419A DE 1621419 A1 DE1621419 A1 DE 1621419A1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19671621419
Other versions
DE1621419B2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE1621419B2 publication Critical patent/DE1621419B2/de
Publication of DE1621419A1 publication Critical patent/DE1621419A1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/18—Acidic compositions for etching copper or alloys thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
DE19671621419 1966-02-03 1967-01-31 Mittel und verfahren zum aetzen von metallen insbesondere kupfer Pending DE1621419B2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US524836A US3407141A (en) 1966-02-03 1966-02-03 Dissolution of metal with acidified hydrogen peroxide solutions

Publications (2)

Publication Number Publication Date
DE1621419B2 DE1621419B2 (de) 1971-12-23
DE1621419A1 true DE1621419A1 (de) 1971-12-23

Family

ID=24090857

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19671621419 Pending DE1621419B2 (de) 1966-02-03 1967-01-31 Mittel und verfahren zum aetzen von metallen insbesondere kupfer

Country Status (4)

Country Link
US (1) US3407141A (de)
DE (1) DE1621419B2 (de)
FR (1) FR1515282A (de)
GB (1) GB1160314A (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3537926A (en) * 1967-06-19 1970-11-03 Lancy Lab Chemical brightening of iron-containing surfaces of workpieces
US3668131A (en) * 1968-08-09 1972-06-06 Allied Chem Dissolution of metal with acidified hydrogen peroxide solutions
US4174253A (en) * 1977-11-08 1979-11-13 Dart Industries Inc. Dissolution of metals utilizing a H2 O2 -H2 SO4 solution catalyzed with hydroxy substituted cycloparaffins
JPS58197277A (ja) * 1982-05-08 1983-11-16 Mitsubishi Gas Chem Co Inc 金属の化学的溶解処理液
US4401509A (en) * 1982-09-07 1983-08-30 Fmc Corporation Composition and process for printed circuit etching using a sulfuric acid solution containing hydrogen peroxide
GB8522046D0 (en) * 1985-09-05 1985-10-09 Interox Chemicals Ltd Stabilisation
EP0265578A1 (de) * 1986-10-30 1988-05-04 Jan-Olof Eriksson Zusammensetzung eines nicht abschleifenden Polier- und Reinigungsmittels und Verfahren zu ihrer Herstellung
US4859281A (en) * 1987-06-04 1989-08-22 Pennwalt Corporation Etching of copper and copper bearing alloys
US4875972A (en) * 1988-07-27 1989-10-24 E. I. Du Pont De Nemours And Company Hydrogen peroxide compositions containing a substituted oxybenzene compound
US4915781A (en) * 1988-07-27 1990-04-10 E. I. Du Pont De Nemours And Company Stabilized hydrogen peroxide compositions
GB8922504D0 (en) * 1989-10-05 1989-11-22 Interox Chemicals Ltd Hydrogen peroxide solutions
GB9117823D0 (en) * 1991-08-17 1991-10-09 Laporte Industries Ltd Hydrofluoric acid compositions
US6117250A (en) * 1999-02-25 2000-09-12 Morton International Inc. Thiazole and thiocarbamide based chemicals for use with oxidative etchant solutions
US6444140B2 (en) 1999-03-17 2002-09-03 Morton International Inc. Micro-etch solution for producing metal surface topography
US20030178391A1 (en) * 2000-06-16 2003-09-25 Shipley Company, L.L.C. Composition for producing metal surface topography
US20040099637A1 (en) * 2000-06-16 2004-05-27 Shipley Company, L.L.C. Composition for producing metal surface topography
JP3930885B2 (ja) * 2000-12-27 2007-06-13 荏原ユージライト株式会社 銅および銅合金用のマイクロエッチング剤
JP3930732B2 (ja) * 2000-12-27 2007-06-13 荏原ユージライト株式会社 銅および銅合金用のマイクロエッチング剤並びにこれを用いる銅または銅合金の微細粗化方法
JP3932193B2 (ja) * 2000-12-27 2007-06-20 荏原ユージライト株式会社 銅および銅合金用のマイクロエッチング剤並びにこれを用いる銅または銅合金の微細粗化方法
US6803354B2 (en) * 2002-08-05 2004-10-12 Henkel Kormanditgesellschaft Auf Aktien Stabilization of hydrogen peroxide in acidic baths for cleaning metals
CA2716144A1 (en) 2009-10-02 2011-04-02 University Of Windsor Method of surface treatment of aluminum foil and its alloy and method of producing immobilized nanocatalyst of transition metal oxides and their alloys
WO2011099624A1 (ja) * 2010-02-15 2011-08-18 三菱瓦斯化学株式会社 銅層及びモリブデン層を含む多層薄膜用エッチング液
KR102446132B1 (ko) * 2016-09-16 2022-09-22 닛산 가가쿠 가부시키가이샤 보호막 형성 조성물

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL113683C (de) * 1958-07-10
NL130705C (de) * 1961-06-22
BE657099A (de) * 1963-12-30
BE663291A (de) * 1964-05-04

Also Published As

Publication number Publication date
FR1515282A (fr) 1968-03-01
DE1621419B2 (de) 1971-12-23
GB1160314A (en) 1969-08-06
US3407141A (en) 1968-10-22

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