DE1464422A1 - Object holder for electron microscopes - Google Patents

Description

Jir.-ing.Wilhelm ϋιϋοιυχ r ^ -C ^ "F% P Ui 3596 Fxcmkfuii / Main- · \ \} ^{T U} '^ Aeeooiated Eleotrioal Industriea Limited, London, England Object holder for electron microscopes

The invention relates to specimen holders in electron microecooks and in particular on object holders that contain devices that do win the object »

With such specimen holders, the specimen slide is best obtained because the specimen is in good thermal connection with an electrically conductive holder and that a current fleet through the holder, so that the holder and the object through Heat conduction. The current for the holder is about two lines suggests, and it becomes in the great number of these lines A magnetic field is induced by the current flowing in it.

When the electron microscope is working, an electron beam goes through the object while it is being received and electricity is flowing. That The field induced by the current can unite the electron beam to distract an amount that cannot be determined in the Toraue "

In order to prevent the deflection of the metal electron beam by this folder see below, one can, as is well known, shield the conductors around the Jelder absusohwäohen, but that is the case with some versions Object holder not always sweckmäfilg or miglioh

It is an object of the invention to improve such an object holder bu.

of the invention includes an object holder, which is in an Elektronmlkroskoo An electrically conductive door is used

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fir the object and two fat ones, which are isolated from®lfi * a4 * r u, - « tightly twisted in helical form «.lad uad Je ^ ?? · £ * lar iBit swsi connected to separate points of the carrier.

The carrier preferably let min Hets or grid au · electrically conductive material, whose wires gwiaohen a very good electrical and tt: x'isisoiier contact. Bas (litter can be cold-rolled, so that the desired good contact is created like the wires, or can be produced galvanically in the manner of a sueae aenhttngendezi grid.

The carrier can be connected to the ladder in such a way that it is easily "sucked out for cleaning and replacement"?!? can be"

In order that the invention may be better understood, reference is made to the legends Drawings shown the following!

Fig. 1 is a section through an axial plane of the object holder according to the invention;

Pig. 2 is a rare view of the object holder partially la Sonitt towards II In Pig. 1;

Pig. 3 is an exploded view the individual parts of the lower part of the object holder.

Pig. 4 is an aeeamt view of an electr-menalkroekones, the Selgt the object holder in the working position.

According to Pig, 1, 2 and 3, the object holder contains a hollow `` Jetallk'5rT> er 1, on the lower end of which two Hetallbaoken 2, 3 are attached, which hold the grid 4, which as a support for the Object serves. The lattice is connected to the lower andes of the two jaws by a structure of two claws 5 and 6 and a clamping ring 7, which is pushed over the gills. The inner surfaces of the gills fit closely to the outer surfaces of the jaws so that when the assembly is axially aligned with the jaws

809805/0555 BAD original

The jaws are pushed in, the clamps held in place will. The ends of the clamps each have lugs 8, 9 » which are printed against the ends of the baoken and the grid 4 Hold the gauges at the ends of the baoken.

The Baoken 2, 3 are separate from each other and are electric isolated from each other. The lower end of the body 1 possesses a protrusion 11 and an insulating washer 12 with a sensitive bore 13 lies at the end of the courier at. The provision 11 protrudes through the bore 13 and extends sioh into a circular recess that goes through the two semicircular Aueeparungen 14 »15» those in de · Baoken 2 » 3 are each included, is formed. The Baoken 2, 3 are attached to the body 1 by the 3 pins 16, which are in holes are attached by a suitable insulating adhesive. This construction ensures that the jaws firmly against the Are printed at the end of the Cairo, and that they sit precisely and from which the grain and from each other are isolated. You Baoken 2, 3 have semicircular cross-section and, take on their lower End in cross section. The sides of the jaws are only a millimeter apart, and the SDaIt «Wipe the BacKen In which the (litter 4 is attached, 1st after de-i hollow middle part of the body 1 hlijfausgeriohtet. The cheeks are aligned coaxially with the K'iroer and as short as possible made.

Un insulate the lower ends of the jaws, there is a flanged one H'Use 18 made of electrically insulating material «wipe the Stan: ring 7 and clamps 5 »6 so that these clamps apart to be isolated.

The K'roer 1 contains a longitudinally extending bore 19, the one at its upper end is closed by an anechoic cap is up and cum reaches the bottom of the camera · This hole 19 takes sswel flexible conductors 22, 23 on the lower one At the end of the brooks 2, 3 separately and at their upper

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· 'Deputy *? » "» ■: · <: the Klemideri if * <2 ^ separately connected and. The- (j Lt-C 'r'ind' /onciir.ar.di! • ng α ^{:. N} a »dor ^T > er * \ T i: \ .t ·.

Uer Ol «a * t, iaJ.töi. · Ie I In an itcmiftohen Boarung in a« Rah * · * ^ eIa ge r ·;. ·, #Enn he 1'λ si. »Aw El ih ^ rottermikrcnkop is used, OU: Bore ubklv.ladt, tightly the body 1, which« it B <ig * in 26, ia ' _r dvf-'λ HUi ir can be bent from a far frame

: .Jer above '.ie written-; [»C.Utr is suitable for use in eirrtffl Elektroneuirtikx ^ Htoop, as ee echematlsoh shown in Fig. 4 let. The Elek ^ TorummikroöVop contains a CehKuBe 31 »da» ovajr.uated can be a; Electron source 32, "white electro-

«.}. Nno? I
nenfayyiffme 33, 34 and a fluorescent Bildeohira 35. The object holder '56 is evischen the two Lineeneyeteeen. The object is attached to the carrier grid 4, and the electron beam 37 goes through the hollow grains 1 tlee holder and "weigh" the backs 2, 3 through, in order to then hit the object on the sitter. The electron beam continues and then strikes the fluorescent screen 35.

If you want to heat the object on the grid 4, the Kleatoea 24, ^ 5 on the holder with a power source Yerbun ^ en, and this current flows through the conductors 22, 23 and the jaws 2, 3 and through the grid 4 , as a result of which the grid and the object are heated through coloring. Since the conductors 22, 23 are tightly twisted with one another, the magnetic PtId, which is generated by the current flowing through the conductors, Changes to a minimum. The piers only have an indelible effect on the electron beam when it passes through a hollow body.

Fields are induced between the jaws 2, 3, from the dl · Baoken «o course like m-iglioh« lad, the fields are reduced to «to a minimum. Therefore, the object does not rerureaoht

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akliohe deflection of the electron beam

Really deals with a gate electrical conductivity swisehe »all Drmhten de · grids 4 and swisohen de «grids and the Baoken breathed, and dealt a good thermal conductivity swisohen .de «lattice and de« object and the lattice and dta Baoken, the lattice is made as flabby as it is. You can thereby achieve that either a galvanic leather base is formed on the grid, so that the wires are long enough, -> the duroh Cold walssn of a lattice in a known manner, so that the broths are swangluflg connected. With each of these types of production the wires of the grid are kept in close contact and kirnten not become a looker

Ba results in a good electrical and thermal contact between the Baoken and the grid and a very good thermal contact Contact swisohen de «grid and de« object and the cheeks. Since the electrical and thermal contact is constant, 1st Pfr • In a given current through the grid the infused and emitted We «· also constant. Therefore the temperature changes of the property.

If you brew grids from different materials, the temperature of the holder can be changed. For example, you kaan a Bereloh of 90 - 145 ° ⁰ O obtained if "benutst to a stainless atahlgitter and a Bereloh 90-120 ⁰ O if you benutet a Kuofergltter, for higher Te" neraturans * r * tohe know, for example, platinum or tungsten as Olter material can be used.

809805 / 0S55

Claims (7)

Claims Object holder ffJr an electron microscope that has an elekeoh. leading support. for the object and «white ladder, the are isolated from each other and each separated by swei Points are connected on the carrier, contains, d a d u r ο h marked that the ladder is not are. 2. Object holder naoh claim 1, which contains a part to the the carrier is fastened, which means that «·! without e t that a feedthrough goes through the part and that the ladder run through the bushing. \ 3. Object holder according to Ansor ^ ohen 1 and 2, characterized in that the carrier is a (litter au · electric and thermiaoh conductive material, the wires of which are in good electrical and thermal connection. χ 4. Object holder naoh claim 3, daduroh gekenneeiohnet, that the sitter is formed from individual wires and is cold-rolled after the assembly of the wires, • o that the desired good contact between the wires is achieved will. X'5. Object holder according to claim 3, thereby g e k β η π «• is worthwhile, that the grid galvanisoh in the manner of a hanging grate is knocked down * 6. Object holder according to claim 3, wherein the electrical connections between the ends of the conductors and the grid swlaohen MWl jaws are, thereby identified, that · 41 · jaws run essentially parallel »· and that there · Grid old the jaws connected by a detachable Kleanenvorriohtung 1st. - BATH ORIGINAL 809805/0555 7. object holder naoh claim 6, characterized g β k β η η «• lehnet, that the neaarorrlohtung "white clamps that the swel ends of the lattice in good contact old hold the jaws, can and contains a gill ring oiled by the XleaSe / ieoil, who can blind the clamps to the cheeks. β. Object holder according to claim 7, because the cleaves and the clamping ring form a structure made of electrically insulating material which forms the insulation between the clamping ring and the jaws. 809B05 / 0555