DE112021006586A5 - Bestimmung von Störungen eines Objektoberflächenverlaufs mit Hilfe farbiger Reflexionen - Google Patents

Bestimmung von Störungen eines Objektoberflächenverlaufs mit Hilfe farbiger Reflexionen Download PDF

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Publication number
DE112021006586A5
DE112021006586A5 DE112021006586.6T DE112021006586T DE112021006586A5 DE 112021006586 A5 DE112021006586 A5 DE 112021006586A5 DE 112021006586 T DE112021006586 T DE 112021006586T DE 112021006586 A5 DE112021006586 A5 DE 112021006586A5
Authority
DE
Germany
Prior art keywords
disturbances
determination
object surface
colored reflections
reflections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112021006586.6T
Other languages
English (en)
Inventor
Stefan Eickeler
Theresa Bick
Wolfgang Vonolfen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of DE112021006586A5 publication Critical patent/DE112021006586A5/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2509—Color coding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8829—Shadow projection or structured background, e.g. for deflectometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8845—Multiple wavelengths of illumination or detection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Signal Processing (AREA)
  • Image Processing (AREA)
DE112021006586.6T 2020-12-21 2021-12-20 Bestimmung von Störungen eines Objektoberflächenverlaufs mit Hilfe farbiger Reflexionen Pending DE112021006586A5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102020134509 2020-12-21
DE102020134509.7 2020-12-21
PCT/DE2021/101022 WO2022135635A1 (de) 2020-12-21 2021-12-20 Bestimmung von störungen eines objektoberflächenverlaufs mit hilfe farbiger reflexionen

Publications (1)

Publication Number Publication Date
DE112021006586A5 true DE112021006586A5 (de) 2024-02-22

Family

ID=79316628

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112021006586.6T Pending DE112021006586A5 (de) 2020-12-21 2021-12-20 Bestimmung von Störungen eines Objektoberflächenverlaufs mit Hilfe farbiger Reflexionen

Country Status (2)

Country Link
DE (1) DE112021006586A5 (de)
WO (1) WO2022135635A1 (de)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04106461A (ja) * 1990-08-28 1992-04-08 Mazda Motor Corp 表面欠陥検査装置
JP3312849B2 (ja) * 1996-06-25 2002-08-12 松下電工株式会社 物体表面の欠陥検出方法
JP2003042735A (ja) * 2001-08-01 2003-02-13 Minolta Co Ltd ３次元計測方法および装置並びにコンピュータプログラム
US7711182B2 (en) * 2006-08-01 2010-05-04 Mitsubishi Electric Research Laboratories, Inc. Method and system for sensing 3D shapes of objects with specular and hybrid specular-diffuse surfaces
WO2008044096A1 (en) * 2006-10-13 2008-04-17 Yeditepe Üniversitesi Method for three-dimensionally structured light scanning of shiny or specular objects
WO2018025389A1 (ja) * 2016-08-05 2018-02-08 エヌズエンタープライズ株式会社 不良箇所検出器具及び不良箇所検出方法
EP3715779B1 (de) * 2019-03-29 2022-10-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und vorrichtung zur bestimmung von verformungen an einem objekt

Also Published As

Publication number Publication date
WO2022135635A1 (de) 2022-06-30

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