DE112016003560T5 - Sensor manufacturing process and sensor - Google Patents

Abstract

A sensor manufacturing method is a method of manufacturing a sensor including a generator that generates a predetermined detection target, a detector that detects the detection target generated by the generator, and a moving body that performs motion in the region between the generator and the detector; contains. In the method, the generator and detector are formed by either bending or bending a substrate having a first portion having the generator installed thereon and a second portion having the detector installed thereon formed in an integrated manner are positioned opposite each other, causing the substrate and the moving body to make a relative movement in such a manner that the moving body enters the area between the generator and the detector.

Description

area

The present invention relates to a sensor manufacturing method and a sensor.

background

As far as the configurations of a rotary encoder are concerned, a configuration is known in which a case of a rotary encoder is a substrate on which a light emitting device that emits light is installed, and a substrate on which a light receiving device that emits that from the light emitting device Light is detected, installed, accommodates (eg Patent Literature 1).

List of citations

patent literature

• Patent Literature 1: Japanese Patent Laid-Open Publication No. 2001-027551

Summary

Technical problem

However, in the rotary encoder disclosed in Patent Literature 1, since the light emitting device and the light receiving device are provided on different substrates, positioning must be performed during assembly for the purpose of determining the relationship between the area irradiated by the light emitted from the light emitting device and the area in which the light is received by the light receiving device can be performed. In a case where misalignment occurs due to an error in positioning, there are times when the output of the light receiving device is not the same as the intended output, thereby resulting in instability in the detection accompanying the detection. In particular, when multiple light receiving devices are used, each misalignment causes a variation in the outputs of the light receiving devices, thereby resulting in instability in the detection accompanying the detection.

The above-mentioned problem related to the rotary encoder disclosed in Patent Literature 1 is not limited to the rotary encoders in which light is detected, but it is common among the sensors in which a generator having the detection target (e.g. Light), and a detector detecting the detection target generated by the generator is installed on separate substrates.

It is an object of one aspect of the present invention to provide a sensor manufacturing method and a sensor for facilitating positioning of a generator and a detector. Moreover, it is an object of one aspect of the present invention to provide a sensor manufacturing method and a sensor for facilitating ease of manufacture.

The solution to the problem

In order to solve the above-described problems, a sensor manufacturing method according to one aspect of the present invention is a sensor manufacturing method for a sensor comprising a generator generating a predetermined detection target, a detector detecting the detection target generated by the generator, and a moving body performs a movement in an area between the generator and the detector contains. The sensor manufacturing method includes: positioning the generator and the detector opposite one another either by bending or bending a substrate including a first portion having the generator installed thereon and a second portion having the detector installed thereon integrated in one Are formed manner; and causing the substrate and the moving body to perform relative movement in such a manner that the moving body enters the area between the generator and the detector.

Consequently, because the first portion having the generator installed thereon and the second portion having the detector installed thereon are provided on the substrate in an integrated manner, the simple task of bending or bending the substrate enables the positioning to be performed of the generator and the detector. This makes the positioning of the generator and the detector easier. Moreover, because the positioning can be carried out with more ease, the positioning process related to the positioning can be simplified. As a result, the production of the sensor becomes easier. Moreover, because the substrate and the moving body are caused to move relative to each other in such a manner that the moving body enters the area between the generator and the detector, it is possible to manufacture a sensor which senses the scanning related to the movement of the moving body using the generator and the detector installed on the substrate on which the first portion and the second portion are formed in an integrated manner.

In the sensor manufacturing method according to one aspect of the present invention, the A substrate connecting member connecting the first portion and the second portion, wherein the substrate and the moving body is caused to perform the relative movement in such a manner that the moving body enters the area from a side opposite to the connecting member.

Consequently, the space between the first portion and the second portion can be assigned with more ease using the connecting member. As a result, the target area for detection between the generator and the detector can be provided with more ease. Because the moving body is caused to enter the area from the side opposite to the connecting member, not only the positioning and the manufacture become easier but also the advantage that the connecting member is provided can be further used.

In the sensor manufacturing method according to one aspect of the present invention, after the bending or bending of the substrate, the first portion and the second portion are parallel to each other with a direction of relative movement of the substrate and the moving body along the first portion and the second portion.

Thus, the positional relationship between the generator installed in the first portion and the detector installed in the second portion can be adjusted based on the relationship between the first portion and the second portion formed in parallel with each other. For this reason, when the generator has directivity, both the positional adjustment for accommodating the detector within the generation range of the detection target generated by the generator and the configuration with respect to the positional angle in installing the generator and the detector on the substrate become easier. Moreover, by maintaining the direction of the relative movement of the substrate and the moving body along the first portion and the second portion, the reference to the direction of the relative movement can be determined more easily, and it can be made more difficult for the substrate and the moving body to move during the process Relative movement get in touch with each other. Consequently, it can be made more easily that the moving body enters the area.

In the sensor manufacturing method according to one aspect of the present invention, the moving body is a disc-shaped member supported on a shaft in a rotatable manner, wherein at least one of the first portion and the second portion has a notch to ensure that the shaft and the substrate does not make contact with each other while the moving body remains in the region between the generator and the detector.

Consequently, it becomes possible to prevent the substrate from making contact with the shaft, thus preventing a situation in which the movement of the shaft is obstructed.

In the sensor manufacturing method according to one aspect of the present invention, the substrate is attached to a first element that represents one of a plurality of elements that form a housing, and a second element that represents one of the plurality of elements that form the housing, and which supports the moving body and brings the first member closer to each other to assemble the housing and to cause the substrate and the moving body to move relative to each other so that the moving body enters the area between the generator and the detector.

Thus, at the same time, during the single process of assembling the housing, the moving body may be caused to enter the area between the generator and the detector. Moreover, during the assembly of the housing, the adjustment of the positional relationship between the moving body and the beams between the generator and the detector can also be determined according to the positional relationship between the first element and the second element. Consequently, according to the present aspect, the production becomes easier.

In the sensor manufacturing method according to one aspect of the present invention, after the first member and the second member are assembled, an entrance for the substrate as formed in the second member is covered by a cover member.

Consequently, the generator, the detector and the moving body can be sealed within the housing. Thus, according to the present embodiment, the scanning with respect to the movement of the moving body can be performed with more accuracy.

In order to solve the above-described problems, according to one aspect of the present invention, a sensor includes: a generator that generates a predetermined detection target; a detector that detects the detection target generated by the generator; a substrate on which the generator and the detecting are installed; a moving body that performs a movement in a region between the generator and the detector; and a Housing housing the generator, detector and motor body. The substrate has a first portion on which the generator is installed, and a second portion on which the detector is installed, which are formed in an integrated manner, has a curved or curved shape in such a manner that the Generator and the detector are positioned opposite each other. The housing includes a first member to which the substrate is attached, and includes a second member on which the moving body is installed. The sensor is assembled in such a manner that the second member and the first member are relatively moved in a predetermined direction and then abutted against each other. The predetermined direction is a direction that allows the moving body to enter the area between the generator and the detector.

Because the substrate has the first portion having the generator installed thereon and the second portion having the detector installed thereon provided in an integrated manner, the simple task of bending or bending the substrate makes it possible to perform the positioning of the generator and the detector. Consequently, it becomes possible to provide a sensor in which the positioning of the generator and the detection can be carried out with more ease. Because the positioning can be carried out with more ease, the manufacturing process can be simplified in terms of positioning. Consequently, it becomes possible to provide a sensor which can be manufactured with more ease. Further, because the substrate and the moving body are caused to perform the relative movement in such a manner that the moving body enters the area between the generator and the detector, it becomes possible to manufacture a sensor which senses the scanning related to the movement of the moving body using the generator and the detector installed on the substrate including the first portion and the second portion formed in an integrated manner. Moreover, as a result of using the sensor according to the aspect of the present invention, during the single process of assembling the housing, at the same time, the moving body may be caused to enter the area between the generator and the detector. Further, as a result of using the sensor according to the aspect of the present invention, the adjustment of the positional relationship between the moving body and the beams between the generator and the detector can be determined during assembly of the housing according to the positional relationship between the first member and the second member. Consequently, according to the aspect of the present invention, the production becomes easier.

In the sensor according to one aspect of the present invention, the housing includes a cover member for covering an entrance for the substrate, which is present after assembling the first member and the second member.

Consequently, the generator, the detector and the moving body can be sealed within the housing. Thus, according to the present embodiment, the scanning with respect to the movement of the moving body can be performed with more accuracy.

The beneficial effects of the invention

The sensor manufacturing method and the sensor according to one aspect of the present invention promote the positioning of the generator and the detector. Moreover, the sensor manufacturing method and the sensor according to one aspect of the present invention promote the manufacture of a sensor.

Brief description of the drawings

1 FIG. 12 is a graphical configuration diagram of a sensor according to an embodiment of the present invention; FIG.

2 is an external perspective view of the sensor;

3 Fig. 10 is an explanatory diagram for explaining an exemplary arrangement of a generator, an optical scale and a detector;

4 Fig. 10 is a block diagram of an optical encoder;

5 Fig. 12 is an explanatory diagram of an exemplary pattern of the optical scale;

6 Fig. 16 is a perspective view illustrating an example of a substrate;

7 Fig. 12 is a plan view illustrating an example of the substrate before being bent;

8th Fig. 12 is a graph illustrating an exemplary correspondence relationship between the arrangement of the circuit on the surface on which the generator and the detector are arranged and the configuration provided on the back side;

9 FIG. 12 is a perspective view of a body of a stator and an exemplary configuration disposed on the body; FIG.

10 FIG. 12 is a perspective view of an exemplary configuration disposed on a lower body of the stator; FIG.

11 Fig. 10 is a graph illustrating an exemplary positional relationship between the generator and the detector;

12 Fig. 10 is a graph illustrating an exemplary positional relationship between the generator and the detector;

13 Fig. 10 is a plan view illustrating an exemplary substrate prior to the circuit implementation;

14 Fig. 12 is a diagram illustrating an exemplary assembly of the stator for the purpose of arranging the optical scale in a target area for detection;

15 Fig. 12 is a diagram illustrating an exemplary assembly of the stator for the purpose of arranging the optical scale in the target area for detection;

16 Fig. 12 is an explanatory diagram for explaining an example of the detector;

17 Fig. 12 is an explanatory diagram for explaining an example of a first light receiver of the detector;

18 Fig. 12 is an explanatory diagram for explaining an example of a third photoreceiver of the detector;

19 Fig. 12 is an explanatory diagram for explaining the separation of the polarization components performed with the optical scale;

20 Fig. 12 is an explanatory diagram for explaining the separation of the polarization components performed with the optical scale;

21 Fig. 12 is an explanatory diagram for explaining the separation of the polarization components performed with the optical scale;

22 Fig. 10 is a functional block diagram of the optical encoder;

23 Fig. 12 is an explanatory diagram for explaining the rotation angle of the optical scale and the variation of the light intensity of the polarization component of each light receiver;

24 Fig. 12 is an explanatory diagram for explaining a relationship between the rotation angle of the optical scale and the Lissajous angle;

25 Fig. 12 is a diagram for explaining the generator;

26 Fig. 12 is a graph illustrating a relationship between an outgoing portion of the light from the generator and the positions of the detector and a shaft;

27 FIG. 10 is a flowchart for explaining an exemplary flow of the processes related to the manufacture of the sensor; FIG.

28 Fig. 12 is a diagram illustrating another example of the arrangement of a plurality of light receiving devices of the detector;

29 FIG. 12 is an external perspective view of a sensor in which a stator having a different outer shape than that in FIG 2 illustrated example is used;

30 Fig. 12 is a diagram illustrating the sensor mounted in a hole formed in a tabular member; and

31 FIG. 12 is a diagram illustrating an exemplary cross-sectional shape of an inwardly flattened portion. FIG.

Description of the embodiments

Hereinafter, an exemplary embodiment of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited in the embodiment by the description given below. Moreover, the constituent elements mentioned in the following explanation contain constituent elements that may be readily apparent to one skilled in the art and include equivalent constituent elements. Furthermore, the constituent elements described below can be suitably combined.

1 is a graphical configuration representation of a sensor 31 according to the embodiment of the present invention. 2 is a external perspective view of the sensor 31 , Consequently, represented 1 a schematic cross-sectional view according to 2 , 3 Fig. 10 is an explanatory diagram for explaining an exemplary arrangement of a generator 41 , an optical scale 11 and a detector 35 , 4 Fig. 10 is a block diagram of an optical encoder 2 , 5 Fig. 10 is an explanatory diagram of an exemplary pattern of the optical scale 11 , The sensor 31 contains the generator 41 generating a detection target represented by electromagnetic waves (eg, light); the detector 35 that by the generator 41 detected detection target detected over a target area for the detection; and a substrate 50 on which the generator 41 and the detector 35 are arranged. In the present embodiment, the sensor includes 31 further a rotor 10 and a stator 20 , The rotor 10 contains a wave 12 , which with a rotating machine, such. As a motor, coupled, and has a moving body (the optical scale 11 ) at an end portion of the shaft 12 is attached and which is arranged in a rotatable manner in the target area for the detection. Here is the target area for detecting the space between the generator 41 and the detector 35 , The generator 41 According to the present embodiment includes a light emitting device that emits light. The detector 35 According to the present embodiment, a light receiving device is the one generated by the generator 41 , which represents the light emitting device, receives emitted light. In particular, the detector contains 35 According to the present embodiment, four light receiving devices, namely, a first light receiver PD1 having a polarizing layer PP1, a second light receiver PD2 having a polarizing layer PP2, a third light receiver PD3 having a polarizing layer PP3, and a fourth light receiver PD4 having a polarizing layer PP4 has. To illustrate that the incident light 73 that the source light 71 represented by the generator 41 which is incident on the light receivers (first light receiver PD1 to fourth light receiver PD4) through which polarization layers PP1 to PP4 pass; are in 3 the polarization layers PP1 to PP4 are respectively separated from the first light receiver PD1 to the fourth light receiver PD4. In reality, however, the polarization layers PP1 to PP4 abut against the first light receiver PD1 to the fourth light receiver PD4, respectively.

6 Fig. 16 is a perspective view showing an example of the substrate 50 illustrated. 7 is a plane view, which is an example of the substrate 50 illustrated before it is bent. 8th FIG. 12 is a graph showing an exemplary correspondence relationship between the arrangement of the circuit on the surface on which the generator. FIG 41 and the detector 35 are arranged, and illustrates the configuration provided on the back. 9 is a perspective view of a body 21 of the stator 20 and an exemplary configuration attached to the body 21 is arranged. 10 FIG. 12 is a perspective view of an exemplary configuration attached to a lower body. FIG 22 of the stator 20 is arranged. The 11 and 12 are graphical representations illustrating an exemplary positional relationship between the generator 41 and the detector 35 illustrate. 13 Fig. 10 is a plan view illustrating an exemplary substrate prior to the circuit implementation. The 14 and 15 12 are diagrams illustrating an exemplary assembly of the stator 20 for the purpose of arranging the optical scale 11 in a target area for detection. 16 Fig. 10 is an explanatory diagram for explaining an example of the detector 35 , In the substrate 50 is a first section 51 at which the generator 41 is installed, in an integrated way with a second section 52 at which the detector 35 is installed, trained. As in the 6 and 7 is illustrated is the substrate 50 z. B. a single substrate, the semi-curved first section 51 and the circular second section 52 contains. The substrate 50 exists z. B. from flexible printed circuits (FPC) and has various circuits (eg 6 illustrated integrated circuit 60 ) including the generator 41 and the detector 35 that are attached to it. More specifically, the FPC is a flexible interconnect substrate in which z. B. an insulating material such. A polyimide film or a solder mask paint film serves as a base film; an adhesion layer and a conductor layer are formed on the base film; and portions excluding the terminals (including the soldered portions) between the portions in the conductor layer are covered by an insulating material. The conductor layer is an electrical conductor made of copper, wherein signal lines and power lines connected to the components such. B. different circuits, are provided according to their patterns on the conductor layer. However, a specific configuration of a flexible substrate which can be used for the present invention is not limited to the above example, and may be modified as necessary. Except for the detector 35 and the details 41 form various circuits, such. As the IC circuit 60 , z. A preamplifier AMP, a differential operation circuit DS, a filter circuit NR, and a multiplication circuit AP which will be described later 22 are illustrated. In the following explanation will be an area of the substrate 50 on which the generator 41 and the detector 53 are arranged as an upper side 50A while a surface on its opposite side as a back 50B is designated (see 8th ). Moreover, they are from the top 50A of the substrate 50 a top 51A of the first section 51 and a top 52A of the second section 52 distinguishable from each other. Furthermore, from the back 50B of the substrate 50 a back 51B of the first section 51 and a back 52B of the second section 52 distinguishable from each other.

In the substrate 50 is a tabular support member on the back of at least one of the surfaces of the first section 51 on which the electronic components including the generator 41 are arranged, and the surface of the second section 52 on which the electronic components including the detector 35 are arranged, fastened. The tabular support member maintains the surface on which the electronic components are disposed in a plane. More specifically, apart from the photodiodes (the first light receiver PD1 to the fourth receiver PD4) included in the light receiving devices, the components 61 on the surface (ie, the top 52A ) of the second section 52 on which the light receiving device is disposed, within the mounting area of the integrated circuit 60 on the back side 52B arranged as in 7 is illustrated. The components 61 represent other circuits on the surface (ie, the top 52A ) of the second section 52 on which the light receiving devices are arranged are arranged. More specifically contain the components 61 Circuit components, such. As an IC chip, a resistor and a capacitor. The IC circuit 60 is an integrated circuit in which z. For example, a Quad Flat No Leads Package (QFN) package is used. Thus, according to the present embodiment, the support member of the second section 52 an assembly of the integrated circuit (the IC circuit 60 ). One or more electronic components (such as the detector 35 and the components 61 ), on the second section 52 on which the assembly is mounted are located on the back side at the position of the assembly on the other side of the substrate 50 arranged. The type of the integrated circuit package is not limited to the QFN type. That is, any support structure that can function as the support member may be used to support the surface (eg, the top 52A of the second section 52 ), which is opposite to the surface on which the integrated circuit is arranged, to maintain in one plane. In the present embodiment, the components include 61 , such as Example, the other circuits including an IC chip, a resistor and a capacitor, on the top 52A of the second section 52 an assembly circuit connected to the wiring using the soldering, and a bare chip connected to the wiring using the wire bonding. However, this is merely exemplary, the configuration is not limited thereto. That is, either the package circuit or the bare chip may be used, or some or all of the circuits may use other types of packages.

As in 8th is a supporting substrate 65 on the back of the surface of the first section 51 according to the present embodiment, on which a light emitting device having a light emitting device disposed therein 41U has (see 25 ). The support substrate 65 is a tabular element having a semi-arcuate shape and z. B. the counter-arched shape of the first section 51 equivalent. More specifically, it is assumed that a toroidal (sheet-like) plate surface in which a circular hole having a diameter smaller than the diameter of the circular plate formed in the center of the circular plate is divided into two sections along the diameter , In this case, the first section 51 and the support substrate 65 a semicircular plate surface corresponding to one of the two divided sections. The support substrate 65 is z. B. made of a resin having insulating properties. Consequently, the support member of the first section 51 in the present embodiment, a tubular member having insulating properties and in conformity with the shape of the first portion 51 is shaped. The support substrate 65 According to the present embodiment, only one example of the support member that is not a circuit. However, the support member is not on the support substrate 65 restricted and can be changed appropriately.

The substrate 50 has a connection element 53 to connect the first section 51 and the second section 53 on. More specifically, the connecting element 53 z. B. between the first section 51 and the second section 52 provided and connects the outer circumference of the arc of the first section 51 and the outer circumference of the arch of the second section 52 as in the 6 and 7 is illustrated.

The connecting element 53 contains a wiring that connects to the generator 41 (or the detector 35 ) should be connected. In the present embodiment, the connecting element includes 53 Signal lines and power lines connected to the generator 41 are connected. More specifically, the wiring of the connecting element 53 z. B. as signal lines and power lines, which are implemented in an FPC. Although in the connecting element 53 according to the present embodiment, no circuit is installed, it is also possible components such. B. a circuit in the connecting element 53 to install.

As in the 6 and 7 is illustrated has the connector 53 According to the present embodiment, in a direction to an extension direction of the connecting element 53 between the first section 51 and the second section 52 is perpendicular and along the plate surface of the substrate 50 runs, a smaller width than that of the first section 51 and the second section 52 on.

The substrate 50 includes a harness section 54 that contains the wiring to the generator 41 and the detector 35 to connect. More specifically, the harness section 54 z. B. arranged so that it extends from the first section 51 and on the connecting element 53 extends opposite side, as in the 6 and 7 is illustrated. The harness section 54 contains the signal lines and the power lines to be connected to various circuits in the generator 41 , the detector 35 and the substrate 50 are installed. More specifically, the wiring is in the harness section 54 z. For example, as the signal lines and the power lines implemented in an FPC. In the present embodiment, the wiring of the generator 41 in the first section 51 , the connecting element 53 and the harness section 54 intended. Moreover, the wiring of the detector 35 in the second section 52 and the harness section 54 intended.

As in 1 is illustrated, the harness section 54 z. B. connected to a connector CNT. Here, the connector CNT is an interface for connecting the sensor 31 with other devices (eg, an arithmetic device 3 ). Consequently, the sensor 31 via the connector CNT with the arithmetic device 3 connected. That is, the harness section 54 works as the wiring for connecting different on the substrate 50 installed circuits with other devices (eg the arithmetic device 3 ). The harness section 54 can also components such. B. circuits installed therein have. The connector CNT may be omitted. In this case, the front end of the harness section 54 z. B. is provided as a terminal, which is inserted into the (not shown) connector, which is provided on the device, with which the sensor 31 to be connected.

The substrate 50 is arranged in such a way that the first section 51 and the second section 52 are parallel to each other. More specific is the substrate 50 in such a shape (the C-shape) bent as in the 1 and 6 It is illustrated that the generator 41 and the detector 35 are positioned opposite each other. In the present embodiment is at two bending positions 55a and 55b which are in the connecting element 53 are provided, the substrate 50 bent at right angles, leaving the top 50A facing the inside. That is, the substrate 50 is bent in such a way that both the first section 51 as well as the second section 52 with respect to the connecting element 53 form a right angle and that the first section 51 and the second section 52 are positioned opposite each other. This is the first section 51 and the second section 52 parallel to each other and are the generator 41 and the detector 35 positioned opposite each other. In the present embodiment, of the two bending positions 55a and 55b the bending position, which is closer to the first section 51 is located as the bending position 55a referred to, while the bending position, which is closer to the second section 52 is located as the bending position 55b referred to as.

The area of the first section 51 on which the generator 41 is installed, and the area of the second section 52 on which the detector 35 are installed on the same surface of the substrate 50 (ie, the top 50A ). If the area on which the generator 41 is installed, the area on which the detector 35 is positioned opposite, the positional relationship between the generator 41 and the detector 35 so that through the generator 41 generated detection target (eg the light) by the detector 35 is detectable, as in 3 and other figures. Moreover, the space between the generator corresponds 41 and the detector 35 which are positioned opposite each other, the target area for the detection.

In this way are in the substrate 50 the first paragraph 51 on which the generator 41 is arranged, the second section 52 on which the detector 35 is arranged, and the connecting element 53 that the first section 51 and the second section 52 connects, formed in an integrated way; the area (ie, the top 51A ) of the first section 51 on which the generator 41 is installed, and the area (ie, the top 52A ) of the second section 52 on which the detector 35 is installed by bending the substrate 50 at right angles to the two bending positions 55a and 55b are positioned parallel to each other and opposite each other. As in 7 are illustrated are a first axis LA, which is the bending axis at the bending position 55a and a second axis LB representing the bending axis at the bending position 55b represents, to each other parallel. Here, a bending axis corresponds to a central axis for the rotational movement of a portion (eg, the connecting member 53 ) with respect to the other section (eg the first section 51 or the second section 52 ), which exceeds the bending position (eg the bending position 55a or the bending position 55b ) when bending the substrate 50 , In the present embodiment, the first axis LA and the second axis LB are respectively present at positions that overlap the two bending lines that are the folding lines at the bending positions 55a and 55b in the substrate 50 are formed.

Moreover, the distance between a first point and the first axis LA is equal to the distance between a second point and the second axis LB, where the first point is the midpoint of generation by the generator 41 generated detection target in the plane before bending the substrate 50 while the second point is either the center of the detection area in which the detection target is through the detector 35 is detected, or the arrangement center of several detection areas of the detector 35 is. More specifically, a distance W1 is between a light emitting point 41S of the generator 41 according to the present embodiment and the bending line at the bending position 55a serving as the first axis LA equal to a distance W2 between a placement center S0 of the four light receiving devices including the first light receiver PD1, the second light receiver PD2, the third light receiving device PD2 and the fourth light receiving device PD4 of the detector 35 and the bending line at the bending position 55b serving as the second axis LB, as in 7 is illustrated. Here represents the light emission point 41S of the generator 41 the first point according to the present embodiment, while the arrangement center S0 represents the second point according to the present embodiment.

The first point and the second point are on the same line along the substrate 50 before its bending, this line intersects with the first axis LA and the second axis LB at right angles. Thus, the first point and the second point are on the same line orthogonal to the first axis LA and the second axis LB. More specifically, the light emission point 41S of the generator 41 and the locating center S0 exists on a straight line L1 at the bending positions 55a and 55b is orthogonal to the two bending lines, ie orthogonal to the first axis LA and the second axis LB, as in FIG 7 is illustrated.

The four light receiving devices are displayed at different positions in a given plane. The distance to a single point in the given plane is the same for each of the four light receiving devices. The four line segments connecting the single point to the respective centers of the light receiving areas of the four light receiving devices are at right angles to each other. More specifically, the four light receiving devices, namely, the first light receiver PD1, the second light receiver PD2, the third light receiver PD3, and the fourth light receiver PD4 of the detector 35 from a single point (the placement center S0) on the top 52A of the second section 52 of the substrate 50 arranged equidistantly. Moreover, they are on the top 52A the first light receiver PD1 and the third light receiver PD3 are arranged at point-symmetrical positions above the arrangement center S0, while the second light receiver PD2 and the fourth light receiver PD4 are arranged at point-symmetrical positions above the arrangement center S0. Moreover, in the present embodiment, the light receiving areas of the first light receiver PD1, the second light receiver PD2, the third light receiver PD3 and the fourth light receiver PD4 are identical in shape and dimensions. Furthermore, in the detector 35 the center of the light receiving area of the first light receiver PD1 and the center of the light receiving area of the third light receiver PD3 are arranged at a distance of 2W, the locating center S0 serving as the center; while the center of the light receiving area of the second light receiver PD2 and the center of the light receiving area of the fourth light receiver PD4 are arranged at a pitch of 2W, the locating center S0 serving as the center. In other words, the center of the light receiving area of each of the four light receiving devices including the first light receiver PD1 to fourth light receiver PD4 has the same distance W to the arrangement center S0. In the present embodiment, the distance W from the center of the light receiving area of each of the first light receiver PD1, the second light receiver PD2, the third light receiver PD3 and the fourth light receiver PD4 to the arrangement center S0 is larger than a width w of the first light receiver PD1, the second light receiver PD2, the third light receiver PD3 and the fourth light receiver PD4. If the x-axis is represented by a virtual axis passing through the center of the light receiving area of the first light receiver PD1, the arrangement center S0 and the center of the light receiving area of the third light receiver PD3, and if the y-axis is represented by a virtual axis, passing through the center of the light receiving area of the second light receiver PD2, the arranging center S0, and the center of the light receiving area of the fourth light receiver PD4; then the x-axis and the y-axis are on the top 52A of second section 52 orthogonal to each other. That is, on the top 52A of the second section 52 The center of the light receiving area of the first light receiver PD1 and the center of the light receiving area of the second light receiver PD2 form an angle θ1 therebetween equal to 90 °. Similarly, the center of the light receiving area of the second light receiver PD2 and the center of the light receiving area of the third light receiver PD3 form an angle θ2 therebetween equal to 90 °; the center of the light receiving area of the third light receiver PD3 and the center of the light receiving area of the fourth light receiver PD4 form an angle θ3 therebetween equal to 90 °; and the center of the light receiving area of the fourth light receiver PD4 and the center of the light receiving area of the first light receiver PD1 form an angle θ4 equal to 90 ° therebetween. In this way, the first light receiver PD1, the second light receiver PD2, the third light receiver PD3, and the fourth light receiver PD4 are in a conjoint manner at 90 ° from each other on the top side 52A arranged around the arrangement center S0, which serves as the center of the circle. Moreover, the xy plane containing the x-axis and the y-axis is orthogonal to a z-axis which is the light emission point 41S of the generator 41 with the arrangement center S0 connects. That is, if from the generator 41 along the z-axis direction from the top 52A is looked down, the light emission point overlaps 41S the arrangement center S0. That is, a line L2 (see 12 ), which are the normals of a given plane (eg the top 52A of the second section 52 ) passing through a single point (the arrangement center S0) passes through the center of the light emitting point 41S of the generator 41 therethrough. Consequently, the first light receiver PD1, the second light receiver PD2, the third light receiver PD3, and the fourth light receiver PD4 are from the light emitting point 41S of the light emitter 41 arranged equidistantly.

The detector 35 detects the changes in the detection target (eg, the electromagnetic waves of light) attributed to the changes in physical quantity in the target area for detection. The changes in physical size are z. B. attributed to the rotation of the moving body in the target area for the detection. More specific is z. As the optical scale 11 of the rotor 10 installed in the target area for detection, as in the 1 to 3 is illustrated. The sensor 31 performs the output according to the changes of the detection result of the detection target, that of the rotation of the optical scale 11 be attributed that represents the moving body. That is, the sensor 31 operates as a rotary encoder which detects the angular position of the rotary body of motion associated with the rotor 10 connected to transmit the rotational movement.

One of the first section 51 and the second section 52 is smaller than the other of the two. More specifically, the arcuate first section 51 the present embodiment z. B. has a diameter substantially to the diameter of the circular second portion 52 is completely the same as in the 6 and 7 is illustrated. The first paragraph 51 has a semi-circular shape in which a semicircular notch 51a is formed in the inner periphery of the semicircular FPC. That's why the first section 51 in the substrate 50 occupied area smaller than that through the second section 52 occupied area. The score 51a is designed to ensure that the shaft 12 and the substrate 50 do not make contact with each other.

The rotor 10 contains the optical scale 11 , which is disc-shaped, as in 5 is illustrated (or is polygonal). The optical scale 11 is z. B. made of silicon, glass or a high polymer material. The optical scale 11 , in the 5 is illustrated has a signal trace T1 formed on one of the plate surfaces. Moreover, in the rotor 10 the wave 12 attached to the other plate surface, which is different than the plate surface at which the optical scale 11 is appropriate. The optical scale 11 may have a gradient. If the angle of the gradient is small, there is no effect on the polarization separation in this case. The optical scale 11 According to the present embodiment, as an element that performs the movement in the target area for detection works between the generator 41 and the detector 35 exists and exerts an influence on the light. Although the optical scale 11 1, which represents the moving body according to the present embodiment, is a disk-shaped member supported on a shaft in a rotatable manner, it is merely exemplified, and its shape or the like can be suitably modified.

The stator 20 is made of a light-blocking element and circumscribes the bearings 26a and 26b , the wave 12 , the optical scale 11 attached to an end portion of the shaft 12 attached, and the detector 35 , Consequently, inside the stator 20 the optical noise can be kept low from the outside. The stator 20 according to the present embodiment operates as a housing for the substrate 50 and the element (the optical scale 11 ). The housing includes a first element to which any portion of the substrate 50 is attached, and a second element which supports the element in a movable manner. More specifically, the stator contains 20 the body 21 as the second element works, the lower body 22 acting as the first element and a cover 23 , The body 21 is a housing that holds the shaft 12 over the camps 26a and 26b supports in a rotatable manner. The inner circumference of the body 21 is on the outer rings of the bearings 26a and 26b attached while the outer circumference of the body 21 on the inner rings of the bearings 26a and 26b is attached. When the wave 12 because of a rotating machine, such. As a motor, rotates transmitted rotates the optical scale 11 together with the wave 12 about a rotation center Zr serving as the axis center. The body 21 has an opening 21a on, when attaching the lower body 22 that is attached to the substrate 50 is arranged on the body 21 is used. The substrate 50 is in such a way on the lower body 22 attached that from the second section 52 of the substrate 50 at least a portion of the surface on the side opposite the side on which the detector is located 35 is installed (ie, any portion of the back) against the lower body 22 abuts. More special is on the back 50B of the substrate 50 the IC circuit 60 as one in the sensor 31 contained component as described above. As in 10 is illustrated, the lower body 22 z. B. has a shape such that it covers the IC circuit from the outside on the back and against the circular outer periphery of the second portion 52 abuts. The connecting element 53 of the substrate 50 that is bent in the C-shape is on the lower body 22 attached and thus positioned, leaving it from the second section 52 stands upright. In this way is the second section 52 on the lower body 22 attached and thus is the substrate 50 in the present embodiment, on the lower body 22 attached. The cover 23 forms part of the cylindrical outer circumference of the stator 20 , The cover 23 is on the side of the opening 21a of the body 21 ie, on the one notch 21b in which the wiring harness section 54 from the lower body 22 extends, arranged opposite side. If the cover 23 attached to an assembly by assembling the body 21 and the lower body 22 gets to the opening 21a cover; make up the body 21 , the lower body 22 and the cover 23 the cylindrical stator 20 wherein it is the entry of the external optical noise into the interior of the stator 20 To block. In this way work the lower body 22 and the cover 23 as the lid of the body 21 which serves as the housing.

The area of the first section 51 on the side opposite the target area for the detection is connected to the second element (eg the body 21 ) connected. More specific is the area of the first section 51 on the opposite side of the target area for detection (ie, the back 51B ) via a tabular element (eg the support substrate 65 ) connected to the second element. More specifically, in the backing substrate 65 according to the present embodiment, an adhesive tape on both the surface facing the first section 51 abuts, as well as applied to the opposite surface. This tape is what is referred to as a double sided tape. Consequently, an area of the support substrate is 65 across the band with the surface (ie, the back 51B ) on the back of the first section 51 connected. Moreover, the other surface has an adhesive property, while a surface of the support substrate 65 with the first section 51 remains connected. The other area is over the band with the area of the body 21 where the wave is 12 from the body 21 extends and the lower body 22 is facing (which in the following explanation as an interface 21c is designated) connected. Consequently, one of the first section 51 and the second section 52 (In the present embodiment, the second section 52 ) on the first element (the lower body 22 ) attached. The area of the other portion (in the present embodiment, the first portion 51 ) on the side opposite the target area for the detection is with the body 21 connected. Because one surface of the tabular member (eg, the support substrate 65 ) with the surface (ie, with the back 51B ) of the other portion on the opposite side of the target area for the detection is also the other surface with the body 21 connected. The tabular element (eg, the support substrate 65 ) between the second element (eg the body 21 ) and the surface (eg the back 51B ) of the other (eg the first section 51 ) of the first section 51 and the second section 52 on the opposite side of the target area for detection desirably has more rigidity than the substrate 50 on.

In the present embodiment, the area of the first section is 51 on the opposite side of the target area for the detection via the support substrate 65 connected to the second element. However, this is only a specific example of the compound, and the compound is not limited to this example. Alternatively, z. B. the back 51B of the first section 51 using an adhesive or a tape (such as a double-sided adhesive tape) with the bonding surface 21c be connected. More specifically, for. For example, dots of the adhesive on multiple points near the outer circumference or on multiple points on the inner circumference of the support substrate 65 can be applied and then the support substrate 65 and the back 51B of the first section 51 can be point-fixed and can support the substrate 65 and the interface 21c point-fastened. Moreover, as the reinforcement used to solidify the adhesive as well another band can be used together in the point attachment.

In the case of using an adhesive, the adhesive may also be applied to the second element (eg the body 21 ) or on the surface of the other section of the first section 51 and the second section 52 with the surface located on the opposite side of the target area for detection; wherein only by the abutment of the second member against the other portion, the surface of the other portion on the opposite side of the target area for the detection with the second element can be connected. Consequently, it becomes easier to use the sensor 31 assemble.

As in 3 is illustrated, performs the optical scale 11 a relative movement with respect to the detector 35 , z. B. in an R-direction, when the shaft 12 of the rotor 10 rotates. As a result, the signal track T1 leads to the optical scale 11 a relative movement with respect to the detector 35 out. In the optical scale 11 A direction of polarization Pm of the polarizers in the plane is toward a predetermined direction and changes due to the rotation. The detector 35 can the incident light (the transmitted light) 73 as a result of the passage of the source light 71 that from the generator 41 is emitted through the optical scale 11 is received, and the signal track T1 of the in 5 illustrated optical scale 11 read.

The optical encoder 2 contains the sensor 31 and the arithmetic device 3 , As in 4 is illustrated are the sensor 31 and the arithmetic device 3 connected with each other. The arithmetic unit 3 is z. With a controller 5 the rotating machine, such. As a motor connected.

The optical encoder 2 detects the incident light 73 with the detector 35 where the incident light 73 that the source light 71 corresponds, through the optical scale 11 gone through and onto the detector 35 has fallen. The arithmetic device 3 calculates the relative position of the rotor 10 of the sensor 31 with respect to the detector 35 based on the detection signal of the detector 35 and outputs the relative position information as a control signal to the controller 5 the rotating machine, such. As a motor, from.

The arithmetic device 3 is a computer, such as A personal computer (PC), and includes an input interface 4a , an output interface 4b , a central processing unit (CPU) 4c , a read-only memory (ROM) 4d , a random access memory (RAM) 4e and an internal storage device 4f , The input interface 4a , the output interface 4b , the CPU 4c , the ROM 4d , the RAM 4e and the internal storage device 4f are connected by an internal bus. The arithmetic device 3 may alternatively be configured using a dedicated processing circuit.

The input interface 4a receives an input signal from the detector 35 of the sensor 31 and gives the input signal to the CPU 4c out. The output interface 4b receives a control signal from the CPU 4c and gives the control signal to the controller 5 out.

The ROM 4d saves programs, such as For example, the BIOS (the basic input-output system). The internal storage device 4f is z. For example, an HDD (a hard disk drive) or a flash memory and stores an operating system program or an application program. The CPU 4c uses the RAM 4e as the workspace and performs the in the ROM 4d or the internal storage device 4f stored programs to implement various functions.

The internal storage device 4f stores a database in which the polarization direction Pm due to the optical scale 11 in one of the output of the detector 35 appropriate manner is held. Further, the internal storage device stores 4f a database in which the distance D (see 12 ) between the light emission point 41S of the generator 41 and the placement center S0 (the detector 35 ) in one of the positional information of the optical scale 11 appropriate manner is held.

In the 5 illustrated signal trace T1 is formed by forming an array of thin metal wires g, which is referred to as a wireframe pattern on the in 1 illustrated optical scale 11 receive. On the optical scale 11 adjacent thin metal wires g are linearly parallel to each other and function as the signal trace T1. Consequently, the optical scale points 11 regardless of the source light 71 Irradiated position on the same polarization axis, wherein the polarization direction of the polarizers in the plane to a single direction.

The optical scale 11 which contains the thin metal wires g, which are referred to as a wireframe pattern, makes it possible to achieve an improvement in heat resistance as compared with a light-induced polarizing plate. Moreover, the optical scale indicates 11 locally also have line patterns that do not have intersecting sections. Consequently, the optical scale reaches 11 a high accuracy with fewer errors. Because the optical scale 11 also in a stable manner using a one-time exposure or the nanoprecipitation technique can continue to be produced. Consequently, the optical scale reaches 11 a high accuracy with fewer errors. Alternatively, a light-induced polarizing plate may be used as the optical scale 11 be used.

There are several thin metal wires g arranged without any intersection between them. The area between adjacent thin metal wires g is a passage area d through which a part of the source light 71 or the entire source light 71 can go through. When the width of the thin metal wires g and the gap between adjacent thin metal wires g, ie, the width of the thin metal wires g and the width of the passbands d, are set to be sufficiently smaller than the wavelength of the source light 71 from the generator 41 are; becomes the optical scale 11 capable of polarization separation of the incident light 73 of the source light 71 perform. Because of this, the optical scale contains 11 Polarizers having a uniform polarization direction Pm in the plane. In the rotation circumferential direction, the polarization axis of the incident light changes 73 that on the detector 35 is incident according to the rotation of the optical scale 11 , In the present embodiment, the change of the polarization axis with respect to a single rotation of the optical scale decreases 11 twice to or from.

In the optical scale 11 For example, the segments that have different directions of polarization need not be fine. Because the optical scale 11 Moreover, if the polarization direction Pm is uniform, there are no boundaries of the regions having different polarization directions Pm, thus making possible the disturbance in the polarization state of the incident light 73 which is attributed to the limits to keep low. The optical encoder 2 According to the present embodiment, achieving achieves a reduction in erroneous detection and achievement of a reduction in possibility of occurrence of noise.

17 Fig. 12 is an explanatory diagram for explaining an example of a first light receiver PD1 of the detector 35 , 18 Fig. 12 is an explanatory diagram for explaining an example of a third light receiver PD3 of the detector 35 , The generator 41 is z. B. a light emitting diode. As in 3 is illustrated, this is from the generator 41 emitted source light 71 through the optical scale 11 passing through it, taking it as the incident light 73 passes through the polarizing layers PP1, PP2, PP3 and PP4 before falling on the first light receiver PD1, the second light receiver PD2, the third light receiver PD3 and the fourth light receiver PD4. In the plane view from the direction of the z-axis; are the first light receiver PD1, the second light receiver PD2, the third light receiver PD3 and the fourth light receiver PD4 around the generator 41 arranged. The first light receiver PD1, the second light receiver PD2, the third light receiver PD3, and the fourth light receiver PD4 are equally spaced from the device center S0. This structure reduces the CPU load 4c which serves as the computer unit.

As in 17 is illustrated, the first light receiver PD1 includes a silicon substrate 34 , a light receiver 37 and a first polarizing layer 39a , As in 18 is illustrated, the third light receiver PD3 contains the silicon substrate 34 , the light receiver 37 and a second polarizing layer 39b , The silicon substrate 34 is z. B. an n-type semiconductor, the light receiver 37 is a p-type semiconductor and a photodiode may be formed by using the pn junction of the silicon substrate 34 and the light receiver 37 be configured. The first polarization layer 39a and the second polarization layer 39b may be formed of light-induced polarizing layers or a wire mesh pattern in which thin metal wires are arranged in parallel. The first polarization layer 39a separates a component in a first polarization direction from the incident light 73 that from the source light 71 on the in 3 illustrated optical scale 11 falls; while the second polarization layer 39b a component in a second polarization direction of the incident light 73 separates. Here, it is desirable that the polarization axis of the first separated light and the second separated light be relatively different by 90 °. This structure allows the CPU 4c the arithmetic device 3 to easily calculate the polarization angle.

Similarly, regarding the 17 and 18 the second light receiver PD2 the silicon substrate 34 , the light receiver 37 and the first polarization layer 39a , As in 18 In addition, the fourth photoreceptor PD4 includes the silicon substrate 34 , the light receiver 37 and the second polarization layer 39b , The silicon substrate 34 is z. B. an n-type semiconductor, the light receiver 37 is a p-type semiconductor and a photodiode may be formed by using the pn junction of the silicon substrate 34 and the light receiver 37 be configured. The first polarization layer 39a and the second polarization layer 39b may be formed of light-induced polarizing layers or a wire mesh pattern in which thin metal wires are arranged in parallel. The first polarization layer 39a separates a component in the first polarization direction from the incident light 73 on the in 3 illustrated optical scale 11 falls, from the source light 71 while the second polarization layer 39b a Component in the second polarization direction of the incident light 73 separates. Here, it is desired that the polarization axes of the first separated light and the second separated light are relatively different by 90 °. This structure allows the CPU 4c the arithmetic device 3 to easily calculate the polarization angle.

The first light receiver PD1, the second light receiver PD2, the third light receiver PD3, and the fourth light receiver PD4 each receive the light via the polarization layers PP1, PP2, PP3, and PP4, which isolate the corresponding components in the different polarization directions from the incident light 73 separate. For this reason, it is desirable that the polarization axis for separation by the polarization layer PP1 and the polarization axis for separation by the polarization layer PP2 be relatively different by 45 °. Moreover, it is desirable that the polarization axis for the separation by the polarization layer PP2 and the polarization axis for the separation by the polarization layer PP3 be relatively different by 45 °. Furthermore, it is desirable that the polarization axis for separation by the polarization layer PP3 and the polarization axis for the separation by the polarization layer PP4 be relatively different by 45 °. Moreover, it is desirable that the polarization axis for the separation by the polarization layer PP4 and the polarization axis for the separation by the polarization layer PP1 be relatively different by 45 °. This structure allows the CPU 4c the arithmetic device 3 to easily calculate the polarization angle.

The 19 to 21 are explanatory diagrams for explaining the separation of polarization components with the optical scale 11 is performed. As in 19 is illustrated, the incident light in the polarization direction Pm is through the signal track T1 of the optical scale 11 polarized. In 19 the foreign particles D1 and D2 are present in the detection area. The polarization direction Pm of the incident light can be expressed by using a light intensity PI (-) of the components in the first polarization direction and a light intensity PI (+) of the components in the second polarization direction. As has been described above, it is desirable that the first polarization direction and the second polarization direction are different by 90 ° and z. B. have a + 45 ° component and a -45 ° component with respect to a reference direction. In the 19 to 21 For example, the axis directions of the wire grid are illustrated as being parallel to the paper plane. However, if the axis directions of the wire grid are inclined at the same angle with respect to the paper plane, but the inclination angle is small, the inclination has no influence on the function of polarization separation. That is, even if the optical axis 11 is inclined with respect to the rotation axis, it works as a polarization separation element.

As in 20 is illustrated, the first light receiver PD1 detects the incident light via the first polarization layer 39a which separates a component in the first polarization direction from the incident light, therefore detecting the light intensity PI (-) of the component in the first polarization direction. As in 21 is illustrated, the third light receiver PD3 detects the incident light via the second polarization layer 39b which separates a component in the second polarization direction from the incident light, thus detecting the light intensity PI (+) of the component in the second polarization direction. Similarly detected as in 20 2, the second light receiver PD2 illustrates the incident light via the first polarizing layer 39a which separates a component in the first polarization direction from the incident light, thus detecting the light intensity PI (-) of the component in the first polarization direction. As in 21 is illustrated, the fourth light receiver PD4 detects the incident light via the second polarization layer 39b which separates a component in the second polarization direction from the incident light, thus detecting the light intensity PI (+) of the component in the second polarization direction.

22 is a functional block diagram of the optical encoder 2 , 23 Fig. 16 is an explanatory diagram for explaining the rotation angle of the optical scale 11 and the variation of the light intensity of the polarization component of each light receiver. As in 22 is illustrated, the generator emits 41 Light based on the reference signal, taking the optical scale 11 with the source light 71 irradiated. The incident light 73 as the transmitted light is passed through the detector 35 receive. The difference operation circuit DS performs a differential operation using the detection signal supplied from the detector 35 output and amplified by the preamplifier AMP. Here, the preamplifier can vary depending on the size of the output of the detector 35 be omitted.

The differential amplifier circuit DS obtains the light intensity PI (-) of the component in the first polarization direction (a first separate light) and obtains the light intensity PI (+) of the component in the second polarization direction (a second separate light). The outputs of the first light receiver PD1, the second light receiver PD2, the third light receiver PD3, and the fourth light receiver PD4 corresponding to the light intensity PI (-) and the light intensity PI (+), z. As the light intensities I1, I2, I3 and I4, respectively, according to the rotation of the optical scale 11 have shifted phases, as in 23 is illustrated.

• a. Vc = (I1 – I3)/(I1 + I3)(1)
• b. Vs = (I2 – I4)/(I2 + I4)(2)

According to equations (1) and (2), the difference operation circuit DS calculates from the light intensity PI (-) of the component in the first polarization direction and the light intensity PI (+) of the component in the second polarization direction a difference signal Vc and a difference signal Vs derived from the rotation of the optical scale 11 are dependent. The difference signal Vc corresponds to what is called the cosine component (cos component), while the difference signal Vs corresponds to what is called the sine component (sin component).

• a. Vc = (I1-I3) / (I1 + I3) (1)
• b. Vs = (I2-I4) / (I2 + I4) (2)

In this way, based on the light intensities I1 and I3, the difference operation circuit DS calculates the sum [I1 + I3] of the light intensities and the difference [I1 - I3] of the light intensities, dividing the difference signal Vc by dividing the difference [I1 - I3] of the light intensities Light intensities calculated by the sum [I1 + I3] of the light intensities. Moreover, the difference operation circuit DS calculates the sum [I2 + I4] of the light intensities and the difference [I2-I4] of the light intensities based on the light intensities I2 and I4, and transmits the difference signal Vs by dividing the difference [I2-I4] of the light intensities the sum [I2 + I4] of the light intensities is calculated. In the difference signals Vc and Vs calculated in accordance with the equations (1) and (2), respectively, there is no parameter caused by the light intensity of the source light 71 is influenced, the output of the sensor 31 the effect of the distance between the detector 35 and the optical scale 11 and the effect of the variability of the light intensity of the generator 41 can reduce. The difference signals Vc and Vs are functions of a rotation angle (hereinafter referred to as a polarization angle) β of the polarization axis of the optical scale 11 as the rotation angle of the optical scale 11 , However, if for controlling the amount of light of the light source in the generator 41 is provided to a constant amount of automatic power control (APC), the division described above does not have to be executed.

As in 22 is illustrated, the differential signals Vc and Vs are input to the filter circuit NR and subjected to noise removal. Then, in the multiplication circuit AP, an in 24 illustrated Lissajous pattern of the difference signals Vc and Vs calculated, wherein the absolute angle of the rotation angle of the rotor 10 who has turned from the initial position can be identified. The difference signals Vc and Vs are differential signals having the phase shift of λ / 4. Consequently, a Lissajous pattern is calculated with the cosine curve of the difference signal Vc taken along the horizontal axis and the sine curve of the difference signal Vs taken along the vertical axis; wherein the Lissajous angle is determined according to the angle of rotation. When the rotor 10 z. B. once turns, leads in 24 Lissajous pattern illustrated two rounds. The arithmetic device 3 has a function of storing information on whether the rotational position of the optical scale 11 within the range of 0 ° or greater to less than 180 °, or the rotational position of the optical scale 11 within the range of 180 ° or greater to less than 360 °. Thus, the optical encoder 2 are treated as an absolute encoder, which is the absolute position of the rotor 10 can calculate.

25 Fig. 12 is a diagram for explaining the generator 41 , The in 25 illustrated generator 41 is a light emitting element in which a light emitting device 41U , such as B. a light emitting diode is arranged. Alternatively, the light emitting device 41U have any other configuration. In particular, the light emission device 41U z. B. a laser source, such as. Example, a vertical cavity surface emitting laser, or a filament. The generator 41 contains a base substrate 41F , a penetrating conductive layer 41H embedded in a through-hole SH, an outer electrode 41P that with the penetrating conductive layer 41H is electrically connected, the light emitting device 41U attached to the base substrate 41F attached is a bonding wire 41W , which is the light emission device 41U conductive with the penetrating conductive layer 41H connects, an encapsulating resin 41M that the light emission device 41U protects, and a light blocking film 41R ,

The light blocking film 41R of the generator 41 has the function of a shutter to cause the source light 41 caused by the light emission device 41U is emitted within the range of an outgoing surface 41T is narrowed down. The outgoing surface 41T has no lens surface, the light distribution of the source light 71 the light distribution of a given angle 2θo with respect to the cross-section of the outgoing surface 41T having. The predetermined angle 2θo of the light distribution is from the generator 41 dependent. Although the angle 2θo z. B. is equal to 30 °, it may be set to greater than or less than 30 °.

The sensor 31 can from the generator 41 Use that has no lens attached to it. By setting the distance D between the light emission point 41S the light of the generator 41 and the placement center S0 (of the detector 35 ), so that it is short, the SN ratio can be improved. The distance W to each of the first light receiver PD1, the second light receiver PD2, the third light receiver PD3, and the fourth light receiver PD4 may be set in a range in which the light receivers can receive the light and the effect of the scattered light of the generator 41 can be reduced. This leads to an improvement in the measurement accuracy of the sensor 31 and the optical encoder 2 , Obviously it is also possible to use the generator 41 to use, which has a lens.

26 Fig. 12 is a graph showing a relationship between the outgoing portion of the light from the generator 41 and the positions of the detector 35 and the wave 12 illustrated. In the present embodiment, the light is that through the generator 41 generated detection target, passing it through the detector 35 is detected. The outgoing angle (the above-mentioned angle 2θo) of the source light 71 in the generator 41 can be set arbitrarily in the design. Consequently, it can be ensured that the connecting element 53 and the wave 12 are not included in the range, while the entire light receiving range for the detector 35 within the range of the outgoing angle of the source 71 is included as in 26 is illustrated. However, it is difficult to cause the source light 71 from the light emitting diode as a light source completely falls in the outgoing area, and hence to eliminate the leakage of light. Moreover, considering the reflected light and the like after the output of the light, moreover, it is difficult to prevent all of the other light (eg, the scattered reflection light) except the source light 71 into the detector 35 entry. In this regard, in the present embodiment, with the object of reducing the reflected light, antireflection treatment is applied to the surface of the substrate 50 on which the light emitting devices are installed applied. More specifically, as the antireflection treatment, it is possible to carry out a coating operation in which an antireflection material such as an antireflective material is used. For example, a black coating material having the light absorbing property at least on the surface under the plate surfaces of the substrate 50 on which the generator 41 and the detector 35 are arranged (ie, the top 50A ) is applied.

Taking into account the possibility of reflection of the light on the outer circumference of the shaft 12 In addition, the anti-reflection treatment can also affect the shaft 12 be applied. In this case, the sensor 31 configured so that he has a scale (the optical scale 11 ), which affects the light by being turned in the target area for detection, which is the space between the generator 41 and the detector 35 represents, and a rotary support element (the body 21 of the stator 20 ) that is the wave 12 which supports the scale in a rotatable manner and to which the antireflection treatment has been applied. More specifically, a plating process of a black oxide film or the above-mentioned coating separation may be used as the antireflection treatment on the outer circumference of the metal shaft 12 be executed. With the same idea, the anti-reflection treatment can be applied to the inner circumference of the stator 20 applied to the optical scale 11 and the substrate 50 houses.

In the following, regarding an in 27 illustrated a method of manufacturing the sensor 31 explained. 27 FIG. 13 is a flowchart for explaining an exemplary procedure of manufacturing the sensor 31 related processes. The following explanation is given about the operation processes that focus on the production worker and the machines operated by the production worker for manufacturing purposes. First, the substrate 50 formed in which the first section 51 , the generator arranged thereon 41 and the second section 52 , the detector arranged thereon 35 to be formed in an integrated manner (step S1). More specifically z. B. formed an FPC, which is the semi-curved first section 51 , the circular second section 52 , the connecting element 53 that the first section 51 and the second section 52 connects, and the wiring harness section 54 that is different from the first section 51 and on the connecting element 53 extends opposite side, contains, as in 13 is illustrated. In this process, the wiring, such. The signal lines and the power lines used in the later processes with different ones on the substrate 50 attached circuits are to be connected, formed on the FPC. Moreover, an antireflection treatment is applied to the top of the FPC. At this time, no antireflection treatment is applied to the terminal section, with which the wiring of the various circuits including the detector 35 to be connected. In this way, the method includes manufacturing the sensor 31 (of the optical sensor) according to the present embodiment, the process of forming the substrate 50 in which the first section 51 , the generator arranged thereon 41 and the second section 52 , the detector arranged thereon 35 to be formed in an integrated manner.

Subsequently, various components are attached to the substrate 50 appropriate. special is z. B. first the support substrate 65 with the back 51B of the first section 51 connected (step S2). Then for the purpose of installing the IC circuit 60 on the back side 52B of the second section 52 implemented different processes. More specific is the integrated circuit 60 on the back side 52B of the second section 52 installed according to the following processes: Soldering for the purpose of installing the IC circuit 60 on the back side 52B of the second section 52 (Step S3), implementation of the IC circuit 60 on the back side 52B of the second section 52 (Step S4), a reflow process by heating the backside 52B of the second section 52 is performed after the implementation in step S4, (step S5) and a check of the external appearance of the soldering of the back 52B of the second section 52 (Step S6). In this way, the method includes manufacturing the sensor 31 (the optical sensor) according to the present embodiment, the process of attaching tabular support members (the IC circuit 60 and the support substrate 65 ) on the backsides (ie, the backsides 51B and 52B ) facing the surfaces on which the electronic components (the tops 51A and 52B ), wherein the tabular support members are elements that maintain the surfaces on which the electronic components are installed in a plane, wherein the surfaces on which the electronic components are installed, the surface (ie, the top 51A ) of the first section 51 on which the electronic components including the generator 41 are installed, and the area (ie, the top 52A ) of the second section 52 on which the electronic components including the detector 35 are installed.

Subsequently, various processes for attaching the components on top 50A of the substrate 50 executed. More specifically, the components to which the wiring is to be connected by soldering, according to the following processes at the top 50A Attached: Soldering for the purpose of installing a part of the generator 41 and the components 61 on the top 51A of the first section 51 and installing the detector 35 on the top 52A of the second section 52 (Step S7), implementation of various circuits including the generator 41 and the detector 35 on the top 50A (Step S8), a reflow process by heating the top 50A is performed after the implementation in step S8, (step S9) and a check of the external appearance of the soldering of the top 50A (Step S10). Then the substrate becomes 50 cleaned (step S11). After cleaning the substrate 50 is a paste (for example, an Ag paste) for attaching a bare chip, which is part of the components 61 is, on top 50A plotted (step S12); the naked chip is installed (step S13); and the bare chip is fixed using the thermal curing (step S14). Then the bare chip and the wiring of the substrate 50 by wire bonding (step S15). After performing the wire bonding, a resin cured by ultraviolet light (UV curable resin) is applied to the surface 50A of the substrate 50 plotted (step S16); becomes a seal substrate (eg, a glass substrate) on the surface 50A disposed on which the UV-curable resin has been applied (step S17); and a UV curing operation is performed in which the UV curable resin is cured by the irradiation of ultraviolet light (step S18). In this way, the method includes manufacturing the sensor 31 (the optical sensor) according to the present embodiment, the process of installing the generator 41 at the first section 51 and installing the detector 35 in the second section 52 , If the area of the substrate 50 on which a tabular element (eg the support substrate 65 ), (ie, the back 50B ) here is considered the one surface are the generator 41 and the detector 35 on the other surface (the top 50A ) Installed. Moreover, one or more electronic components (eg the detector 35 and the components 61 ) on the top 52A of the second section 52 are installed within a range in which the assembly of the integrated circuit 60 on the back side 52B is arranged.

The wire bonding is z. B. Au wire bonding using gold wires. However, this is merely exemplary, wire bonding is not limited to this example, but can be suitably changed. Moreover, instead of using wire bonding, automated tape bonding (TAB) may be used, or a bare chip may be soldered as a flip chip to the wiring of the substrate.

Subsequently, the generator 41 and the detector 35 positioned opposite each other. More specifically z. B. the substrate 50 bent at two positions in such a way that the surface (ie, the top 51A ) of the first section 51 , on the generator 41 is installed, and the surface (ie, the top 52A ) of the second section 52 on which the detector 35 are installed, parallel to each other and opposite to each other (step S19). In this way, the method includes manufacturing the sensor 31 (of the optical sensor) according to the present embodiment, the process of bending the substrate 50 , which is a flexible substrate (FPC), in such a way that the surface (ie, the top 51A ) of the first section 51 on which the generator 41 is installed, and the area (ie, the top 52A ) of the second section, on the detector 35 is installed, are opposite each other.

As explained in the processes of steps S7 to S14, the method of manufacturing the sensor includes 31 (the optical sensor) according to the present embodiment, the process of installing the generator 41 in the first section 51 and installing the detector 35 in the second section 52 , It is desirable that: the first light receiver PD1 to fourth light receivers PD4 be located at different positions in a predetermined plane (eg, the top 52A ) are arranged; the distance (the distance W) is equal to a single point in the predetermined plane for each of the four light receiving devices; and the four line segments connecting the single point to the centers of the light receiving areas of the four light receiving devices are at right angles to each other. Moreover, it is desirable that after the substrate 50 the line L2, which is the normal of a given plane (the top 52A ) passing through a single point (the device center S0) through the center of the light emitting point 41S of the generator 41 passes. Furthermore, it is desirable that the generator 41 and the detector 35 are installed in consideration of the above points. More specifically, a first condition is to be satisfied, indicating that the first axis LA, which is the bending axis at the bending position 55a represents, and the second axis LB, the bending axis at the bending position 55b represent, are parallel to each other. Moreover, a second condition is to be fulfilled, which indicates that the distance (the distance W1) between the first axis LA and a first point, which is the center point for the generation for the generator 41 represents (eg the light emission point 41S ) in the plane before bending the substrate 50 is set so that it equals the distance (the distance W2) between the second axis LB and a second point which is either the center of the detection area in which the detector 35 the detection target detected, or the arrangement center of several detection areas of the detector 35 (eg, the arrangement center S0) is. Furthermore, a third condition is to be fulfilled, which indicates that the first point and the second point on the same device (eg, the straight line L1) that intersects the first axis LA and the second axis LB at right angles (or the first Axis LA and the second axis LB intersects in an increased manner) in which substrate is present before bending. In order to satisfy the first condition, the second condition and the third condition, the wiring of the generator becomes 41 and the detector 35 while forming the substrate 50 formed, the first axis LA and the second axis LB are determined, and the arrangement of the generator 41 and the detector 35 determined during their installation.

Subsequently, a housing (eg the stator 20 ) is formed (step S20). In particular, a housing is formed, which is a second element (eg the body 21 ) and a first element (eg the lower body 22 ) contains. The second element is an element that contains the element (eg the optical scale 11 ), which exerts an influence on the light by moving it in the target area for the detection, the space between the generator 41 and the detector 35 represents, supports in a moving way. The first element is an element on which a portion of the substrate 50 is attached. In the present embodiment, the cover 23 further as a component of the stator 20 formed, which is the housing of the substrate 50 and the optical scale 11 represents. However, here only one specific example of the housing is given, the housing not being limited to this example. Alternatively, the cover 23 z. B. with the lower body 22 be integrated. Moreover, the wave can 12 in the body 21 , which represents the second element, is a shaft on the outer periphery of which antireflection treatment has been applied. Moreover, in the stator 20 in which the substrate 50 and the optical scale 11 are to be housed, applied to the inner periphery of the anti-reflection treatment.

Subsequently, the process of assembling the sensor 31 (Step S21). The following is the explanation of the assembly-related process during the manufacture of the sensor 31 given. During the production of the sensor 31 become the substrate 50 and the moving body (eg, the optical scale 11 ) is relatively moved in such a manner that the moving body is in the area between the generator 41 and the detector 35 (ie, the target area for detection). Specifically, in the manufacture of the sensor 31 the substrate 50 and the moving body is relatively moved in such a manner that the moving body moves from one of the connecting member 53 opposite side into the area (the target area for the detection) occurs, as in the 14 and 15 is illustrated. In the substrate 50 is the connecting element 53 on the wiring harness section 54 opposite side on the other side of the second section 52 positioned. Thus, in the present embodiment, the substrate becomes 50 and the moving body is relatively moved in such a manner that the moving body is moved from the side of the wire harness 54 enters the target area for detection.

More specifically, with respect to a given plane (eg, the top side 52A of the second section 52 ) ensure that the first section 51 and the second section 52 of the curved substrate 50 and the disk surface of the optical scale 11 located along the given level. In this state, the stator becomes 20 that the optical scale 11 contains, and / or the substrate 50 moved in the direction along the given plane, leaving the optical scale 11 is arranged in the target area for the detection. On the cylindrical outer circumference of the stator 20 is z. B. at the position where the optical scale 11 is arranged, an opening (eg., The opening 21a ), through which the substrate 50 in the direction along the disk surface of the optical scale 11 can be used, wherein the entry of the substrate 50 in this opening to the positioning of the optical scale 11 in the target area for detection. In this case, the substrate becomes 50 from the side of the harness section 54 in the opening 21a used. Moreover, the semi-curved first section occurs 51 in the side of the optical scale 11 on the shaft 12 is present, while the circular second section 52 in the side of the optical scale 11 on the shaft 12 does not exist, enters.

In the present embodiment, the first section 51 and the second section 52 parallel to each other. The method of manufacturing the sensor 31 according to the present embodiment includes the process in which with the top 52A of the second section 52 as the default level of the stator 20 that the optical scale 11 contains, and / or the substrate 50 be moved in the direction along the given plane. Consequently, the direction of the relative movement of the substrate 50 and the moving body along the first section 51 and the second section 52 ,

The on the assembly during the production of the sensor 31 related process will be explained with reference to an actual example. First, the substrate 50 on the first element (the lower body 22 ), which represents one of several elements that surround the housing (the stator 20 ) of the sensor 31 form. Then the first element becomes close to the second element (the body 21 ), which is one of a plurality of elements that form the housing and that supports the moving body to assemble the housing and to cause the substrate 50 and the moving body perform relative movement in such a manner that the moving body enters the area between the generator 41 and the detector 35 entry. More specific is the second section 52 of the substrate 50 on the lower body 22 attached, as in 10 is illustrated. Then the lower body 22 at which the second section 52 is attached, and the body 21 in which the rotor 10 is arranged in a rotatable manner, arranged so that they have such a positional relationship that the first portion 51 , the second section 52 and the optical scale 11 are essentially parallel to each other and that the optical scale 11 in the target area for detection between the first section 51 and the second section 52 is positioned as in 14 is illustrated. That is, the first section 51 , the second section 52 and the optical scale 11 are arranged so that they have the positional relationship that they are along the given plane. In such a positional relationship, the body becomes 21 and the lower body 22 in such a way that the lower body 22 from the opening 21a of the body 21 moved in, moved closer to each other along the predetermined plane, causing them to abut against each other; consequently the body 21 and the lower body 22 assembled. The result is the optical scale 11 placed in the target area for detection. When the body 21 and the lower body 22 with the positional relationship in which the optical scale 11 in the target area for detection between the first section 51 and the second section 52 is positioned close to each other, it is here desirable that the support substrate 65 that with the back 51B of the first section 51 connected, and the connection surface 21c of the body 21 do not push against each other. Then, when assembling the body 21 and the lower body 22 by causing them to bump against each other, the lower body 22 closer to the interface 21c pushed so that the supporting substrate 65 and the interface 21c abut each other and are connected to each other. While in this assembling method, a surface of the tabular member (the supporting substrate 65 ) with the surface (eg the back 51B ) of the other section (eg the first section 51 ) on the opposite side of the target area for the detection; becomes the other surface of the tabular element with the second element (eg the body 21 ) connected. It is desirable that various specific details of the design, such as. B. the length of the connecting element 53 , the length of the extension of the shaft 12 on the side of the interface 21c and the thickness of the support substrate 65 are fixed to the assembly of the body 21 and the lower body 22 to enable, as has been described above. In this way, the method includes manufacturing the sensor 31 (the optical sensor) according to the present embodiment, the process of attaching a (eg, the second portion 52 ) of the first section 51 and the second section 52 on the first element (eg the lower body 22 ) and connecting the surface (eg the back 51B ) of the other section (eg the first section 51 ) of the first section 51 and the second section 52 which is on the opposite side of the target area for the detection, with the second element (eg the body 21 ).

The body 21 and the lower body 22 have the structure corresponding to the assembly process, in which the substrate 50 and the moving body (eg, the optical scale 11 ) are relatively moved, so that the moving body in the area between the generator 41 and the detector 35 (ie, the target area for detection). More specific is the lower body 22 an arcuate positioning portion 22a formed to cover the second portion of the arrayed substrate 50 rewrites. The positioning section 22a has a notch to allow the harness section 54 in the direction of the relative movement of the body 21 and the lower body 22 during assembly runs. As in the 10 and 15 is illustrated, moreover, the positioning section 22a also a notch at the position that the connecting element 53 corresponds to. An arcuate outer circumference 22b of the positioning section 22a has the shape along an inner circumference 21e an arcuate wall 21d of the body 21 which is the outside of the optical scale 11 covered, runs. For this reason, in the assembling process, a portion strikes an extending side of the harness portion 54 the outer circumference 22b of the positioning section 22a against the inner circumference 21e the Wall 21d of the body 21 at. This leads to the production of the positional relationship between the substrate 50 and the moving body, due to the optical scale 11 on the straight line L2 is present (see 12 ). In other words, the positioning section 22a and the wall 21d work as a positioning structure to enable the positional relationship between the substrate to be established 50 and the moving body (eg the optical scale 11 ). Moreover, the lower body points 22 with respect to a radial direction, the direction of expansion of the shaft 12 as the central axis serves, a stepped surface 22c configured to extend to the outside of the positioning section 22a extends. When the body 21 and the lower body 22 assembled, pushes the stepped surface 22c against a lower end 21f the Wall 21d of the body 21 at. As a result, with respect to the direction of expansion of the shaft 12 both the positional relationship between the body 21 and the lower body 22 as well as the positional relationship between the substrate 50 and the moving body (eg the optical scale 11 ) certainly. In other words, the lower body 22 , who is the positioning section 22a and the stepped surface 22c contains, and the lower body 21 who is the wall 21d includes working as a positioning structure to enable the positional relationship between the substrate to be established 50 and the moving body (eg the optical scale 11 ). In the present embodiment, the stepped surface 22c , the lower end 21f and the optical scale 11 along the direction of the relative movement of the body 21 and the lower body 22 positioned. Moreover, the lower body 22 in such a way on the substrate 50 provided that the top 52A along a stepped surface 55c runs (or to a stepped surface 55c is parallel). As a result of the structure of the body 21 and the lower body 22 also becomes the parallel relationship of the optical scale 11 to the first section 51 and the second section 52 produced. As a result of the score 51a moreover, make the wave 12 and the substrate 50 even after the body has been assembled 21 and the lower body 22 no contact with each other. This prevents a situation in which the rotation of the shaft 12 due to contact with the substrate 50 is hampered. In this way, in the method of manufacturing the sensor 31 according to the present embodiment, a notch (the notch 51a ) in the first section 51 formed to ensure that the shaft 12 and the substrate 50 make no contact with each other, while the moving body in the area between the generator 41 and the detector 35 remains.

After assembling the body 21 and the lower body 22 the harness section extends 54 from the notch 21b on the opening 21a of the body 21 opposite side is formed. Subsequently, when the cover 23 and the lower body 22 separate parts are the cover 23 attached to the opening 21a of the body 21 cover. That is, in the method of manufacturing the sensor 31 According to the present embodiment, after the assembly of the first member (the lower body 22 ) and the second element (the body 21 ) an entrance (the opening 21a ) for the substrate 50 formed in the second member by a cover member (the cover 23 ). In the 13 to 16 are some of the circuits, such. B. the detector 35 , not illustrated. In practice, however, there are various circuits including the detector 35 already installed.

When the connector CNT is already attached to the substrate 50 is installed, z. In the stage of positional adjustments of the body 21 and the lower body 22 before the relative movement of the body 21 and the lower body 22 , the positional relationship may be such that the front end of the harness section 54 already to the outside of the body 21 is exposed. As a result, during the relative movement of the body 21 and the lower body 22 for the purpose of effecting that the moving body in the area between the generator 41 and the detector 35 enters, prevents the connector CNT in the notch 21b is caught and passes through, and thus the assembly can be carried out in a favorable manner. The connector CNT may prior to assembly of the housing (the stator 20 ) on the substrate 50 be installed. Obviously, the connector CNT may also be installed after assembly of the housing.

In this way, the housing contains the sensor 31 the first element (the lower body 22 ) to which the substrate 50 attached, and the second element (the body 21 ) on which the moving body is arranged. The housing of the sensor 31 is assembled by relatively moving the second member and the first member in the predetermined direction to cause them to abut against each other. Here, the predetermined direction is the direction in which the moving body enters the area between the generator 41 and the detector 35 (ie, the target area for detection) can be brought in.

As described above, according to the present embodiment, the simple task of bending or bending the substrate enables 50 performing the positioning of the generator 41 and the detector 35 because the substrate 50 the first section 51 at which the generator 41 is installed, and the second section 52 at which the detector 35 is installed contains. In this way, according to the present embodiment, the positioning of the generator 41 and the detector 35 lighter. Moreover, because the positioning can be carried out easily, the positioning process related to the positioning can be simplified. Consequently, according to the present embodiment, the manufacture of the sensor becomes easier. Furthermore, it becomes possible to use the sensor 31 can perform the related to the movement of the moving body scanning, because the substrate 50 and the moving body are relatively moved in such a manner that the moving body enters the area between the generator 41 and the detector 35 occurs because of the generator 41 and the detector 35 on the substrate 50 are arranged, which is the first section 51 and the second section 52 which are formed in an integrated manner.

Moreover, as a result of the connecting element 53 the room with more ease between the first section 51 and the second section 52 be assigned to. For this reason, the target range for detection between the generator 41 and the detector 35 be easily created. Because the moving body of the connecting element 53 opposite side into the area (the target area for detection), not only the positioning and the manufacturing easier, but it can also be used the advantage that the connecting element 53 is available.

As a result of providing the first section 51 and the second section 52 So that they are parallel to each other, the positional relationship between the generator can continue 41 that at the first section 51 is installed, and the detector attached to the second section 52 is installed based on the relationship between the first section 51 and the second section 52 be set. Because of this, when the generator 41 has a directivity, both the position adjustment, around the detector 35 within the range of generation of the detection target by the generator 41 is detected as well as the position angle when installing the generator 41 and the detector 35 on the substrate 50 related design easier. Moreover, by keeping the direction of the relative movement of the substrate 50 and the moving body along the first section 51 and the second section 52 the reference to the direction of the relative movement can be determined with more ease, whereby it can be made more difficult that the substrate 50 and the moving body come into contact with each other during the relative movement. Consequently, it can be made more easily that the moving body enters the area (the target area for detection).

Further, as a result of forming a notch (eg, the notch 51a ) to make sure the shaft 12 and the substrate 50 make no contact with each other, while the moving body in the area between the generator 41 and the detector 35 stays, possible, to prevent the substrate 50 a contact with the shaft 12 and thus prevent a situation in which the movement of the shaft 12 is hampered.

As a result of assembling the housing by placing the first element (eg the lower body 22 ) and the second element (eg the body 21 ) are brought close to each other, and as a result of causing the substrate 50 and the moving body perform relative movement in such a manner that the moving body enters the area between the generator 41 and the detector 35 Moreover, during the single process of assembling the housing into the area between the generator, the moving body can be caused to move simultaneously 41 and the detector 35 entry. Furthermore, the adjustment of the positional relationship between the moving body and the beams between the generator 41 and the detector 35 also in accordance with the positional relationship between the first member and the second member during the Assembly of the housing to be determined. Consequently, the sensor can 31 can be easily produced according to the present embodiment.

Moreover, after assembling the first member and the second member, the entrance formed in the second member (eg, the opening 21a ) for the substrate by a cover member (eg the cover 23 ), so that the generator 41 , the detector 35 and the moving body may be sealed within the housing. Consequently, according to the present embodiment, the sensor 31 perform the related to the movement of the moving body scanning with more accuracy.

By causing the connecting element 53 the one with the generator 41 In addition, the wiring to be connected may include those with the generator 41 Wiring to be connected and the connecting element 53 be integrated with each other. This causes the connecting element 53 and the substrate 50 that have the wiring are compact.

Because the connecting element 53 has a width smaller than the first section 51 and the second section 52 is, can continue the dimensions of the substrate 50 compared to the case where the width of the substrate 50 that the first section 51 and the second section 52 over the connecting element 53 contains, kept evenly, be kept small. Consequently, the substrate can 50 be made with a lighter weight.

As a result of bending the substrate 50 In addition, at two positions, the target area for detection between the generator 41 and the detector 35 due to the bending of the substrate 50 be assigned to. Moreover, the bending position can be precisely defined.

Because the first section 51 smaller than the second section 52 is, can continue the first section 51 be made with a lighter weight. For this reason, the requirements for the connecting element 53 be kept simpler.

Because the substrate 50 (eg in a C-shaped way) is bent so that the generator 41 and the detector 35 In addition, each part of the substrate may be caused to be positioned opposite to each other 50 (eg the second section 52 ) along a plane in the stator 20 (eg, the flat portion of the lower body 22 ) runs. As a result, the handling of the sensor 31 become lighter while the sensor 31 is installed in the housing.

Because the substrate 50 is a flexible substrate, can continue with respect to the sequence of tasks, such. B. installing the components including the generator 41 and the detector 35 while the first section 51 and the second section 52 present in the same plane, and then processing the substrate 50 for the purpose of ensuring the target area for detection between the generator 41 and the detector 35 To run the sequence of tasks with more ease.

Moreover, the substrate contains 50 the harness section 54 that contains the wiring to the generator 41 and the detector 35 to connect. Consequently, the wiring can match the configuration of the sensor 31 that the generator 41 and the detector 35 contains, is to be joined together in the substrate 50 be included. That is, as a result of arranging the harness section 54 The cables need not be pulled one at a time from the components (such as the circuits) that require the wiring. Consequently, the substrate must 50 and the wiring can not be handled individually, thereby making it easier to use the sensor 31 to handle.

If the detector 35 Further, when the changes of the detection target detected in the target area for detection are attributed to the changes in the physical quantity, the object in which the physical quantity has changed may be used as the target for scanning by the sensor 31 be treated.

Because electromagnetic waves are the detection target (eg, that caused by the generator 41 emitted light); moreover, the changes in the target area for the detection can be detected according to the changes of the electromagnetic waves.

Because the changes in the physical quantity of the rotation of the moving body (eg., The optical scale 11 ), which is present in the target area for detection, may further include the rotational movement of the moving body as the target for scanning by the sensor 31 be treated.

One of the first section and the second section (eg, the second section 52 ) is also on the first element (eg the lower body 22 ), wherein the surface of the other portion (eg of the first section 51 ) on the opposite side of the target area for the detection with the second element (eg the body 21 connected is). That is, during assembly of the sensor 31 it is simply necessary for a section to be attached to the first element and that the surface of the other portion on the opposite side of the target area for the detection is connected to the second element. This makes the assembly of the sensor 31 lighter.

Further, only by using a tabular member having an adhesive property on both surfaces (eg, the support substrate 65 ) the surface of the other portion on the opposite side of the target area for the detection with the second element are connected. Consequently, the assembly of the sensor becomes 31 lighter.

Moreover, before assembling the housing (eg the stator 20 ) the tabular element (eg the support substrate 65 ) is attached to the surface of the other portion on the opposite side of the detection target area. Thus, in an integrated state of the tabular element and the substrate 50 the area of the other section and the second element are connected. Consequently, the assembly of the sensor becomes 31 lighter.

Furthermore, the four light receiving devices are at different positions in a given plane (eg, the top side 52A ) arranged; the distance (the distance W) is equal to a single point (the arrangement center S0) in the predetermined plane of each of the four light receiving devices; the four line segments connecting the single point to the centers of the light receiving areas of the four light receiving devices are at right angles (θ1 to θ4) to each other; and the normal (the line L2) of the given plane passing through the single point passes through the light emission point 41S of the generator 41 , Consequently, each light receiving device can be fixed so as to be the same distance from the light emitting device. This reduces the variability of the outputs accompanying the detection of the light by the light receiving devices. In this way, according to the present embodiment, the outputs of the light receiving devices can be stabilized to a greater extent.

At the areas on the back of the FPC (eg the backs 51B and 52B ) is also a support element for maintaining the surfaces on the opposite side (eg the topsides) 51A and 52A ) fastened in a plane. Consequently, the stress in a connector between the FPC and the electronic components installed on the FPC can be further reduced. As a result, the disturbances associated with the connector between the FPC and the electronic components installed on the FPC can be further reduced. This also increases with the normal operations of the sensor 31 Relative reliability. Moreover, because the stress on the connector can be reduced, the level of difficulty of installing the electronic components to the FPC can be reduced, and the electronic components can be more easily installed on the surfaces of the opposite side of the support member.

Furthermore, the assembly of an integrated circuit (eg the IC circuit 60 ), on the surface on the back (eg on the back 52B ) is used as the support member of the electronic components located on the surface on the opposite side (eg, the top 52A ) are installed. Because the integrated circuit is also one of the circuits that make up the sensor 31 Moreover, installing the circuits on both faces of the FPC allows more efficient use of the substrate dimensions. Consequently, the dimensions of the FPC can be reduced more easily with respect to the amount of required circuits. Consequently, the downsizing of the sensor 31 be achieved more easily due to the high integration of the circuits.

Because a tabular element, such. B. the support substrate 65 , which has insulating properties and that in accordance with the shape of the first section 51 In addition, the surface on which the electronic components are installed may be formed (eg, the top side 51A ) be supported by the support member comprehensively.

Moreover, the area of the first section 51 on which the generator 41 is installed (eg the top 51A ) and the area of the second section 52 on which the detector 35 is installed (eg the top 52A ) parallel to each other and opposite each other; the first axis LA and the second axis LB are parallel to each other; is the distance W1 between the first point (eg the light emission point 41S ) and the first axis LA equal to the distance W2 between the second point (eg, the placement center S0) and the second axis LB; and are the first point and the second point in the substrate 50 before bending on the same straight line (eg, the straight line L1) intersecting the first axis LA and the second axis LB at right angles (or intersecting the first axis LA and the second axis LB in an increased manner). Consequently, the first point and the second point are present on the same straight line (eg, the line L2) as the first section 51 and the second section 52 after bending the substrate 50 is orthogonal. For this reason can be effected with more accuracy that the generator 41 and the detector 35 facing each other, thus the output of the detector 35 can be further stabilized.

Furthermore, applying an anti-reflection treatment to the surface of the substrate reduces 50 on which the generator 41 and the detector 35 are arranged (ie, the top 50A ) the reflection of the light coming from the generator 41 is emitted from the substrate. This makes it possible to achieve the reduction of the output of the detector 35 , which is attributed to the detection of the reflected light, and consequently the output of the detector 35 can be further stabilized.

Moreover, applying an anti-reflection treatment to the shaft reduces 12 the reflection of the light coming from the generator 41 is emitted from the shaft 12 , This makes it possible to achieve a reduction in the output of the detector 35 , which is attributed to the detection of the reflected light, and consequently the output of the detector 35 can be further stabilized.

Because the sensor 31 As a rotary encoder operates, it will further be possible to determine the angular position of the angle of rotation of the rotary body of motion which is adjacent to the sensor 31 is coupled to detect.

28 Fig. 12 is a diagram showing another example of the arrangement of a plurality of light receiving devices of the detector 35 illustrated. As in 28 can be illustrated in the detector 35 the first light receiver PD1 to fourth light receivers PD4 having respective tetragonal polarization layers PP1 to PP4 at the four corners of a tetragonal array area 35A be arranged around the arrangement center S0. In this case, too, the four light receiving devices may be arranged equidistantly from the arrangement center S0, and the four line segments connecting the arrangement center S0 to the centers of the light receiving areas of the four light receiving devices may be at right angles to each other. Although the distance from the arrangement center S0 to each of the four light receiving devices is arbitrary; For example, when the distance is set to be a shorter distance, the four light receiving devices can cause the light to be in the state of smaller attenuation of the source light 71 from the generator 41 detect. The four light receiving devices may be in the second section 52 be installed separately. Alternatively, the detector can 35 in the second section 52 as an assembly in which the positional relationship between the four light receiving devices and the device center S0 is set in advance. As a result of implementing the assembly, the adjustment of the arrangement of the four light receiving devices becomes easier.

The first paragraph 51 and the second section 52 do not have to be parallel to each other. There may be some relationship between the first section 51 and the second section 52 be used so that the target area for detection between the generator 41 and the detector 35 can be assigned and that by the in the first section 51 installed generator 41 generated detection target by the in the second section 52 installed detector 35 is detectable. Consequently, the detailed arrangement of the first section 51 and the second section 52 be varied suitably.

Alternatively, the first section 51 and the second section 52 have a reverse relationship. That is, the first section 51 may be attached to the first element, wherein the surface (the back 52B ) of the second section 52 on the opposite side of the target area for detection may be connected to the second element. In this case, however, both the substrate 50 as well as the circuits (eg the components 61 ) on the substrate 50 Installed, a configuration in which the fault with the configuration of the housing (the stator 20 ) is taken into account, such. B. a configuration in which the shape of the second section 52 to the shape of the first section 51 is completely the same, according to the embodiment. Moreover, z. B. a notch, such as. The notch 51a that the lack of contact between the substrate 50 and the wave 12 ensures, according to the expansion range of the shaft 12 educated. If z. B. the shaft 12 so it goes through the optical scale 11 passes through and is present at a position extending over the first section 51 and the second section 52 extends, then the notch is in both the first section 51 as well as in the second section 52 educated.

The connecting element 53 can not contain the wiring. In this case, the connecting element supports 53 from the first section 51 and the second section 52 not on the lower body 22 fortified section. Moreover, one section need not be smaller than the other section. That is, the first section 51 and the second section 52 may be the same size or through the connecting element 53 supported section may be larger in size. Moreover, the stator can 20 or the other components a support for supporting at least one of the connecting element 53 or the first section 51 according to the present embodiment. Furthermore, the support may have a configuration (eg, an adhesive, an adhesive tape or a locking element, such as a Projection) for fixing at least one of the connecting element 53 or the first section 51 according to the present embodiment.

The bending positions 55a and 55b in the substrate 50 can not have fold lines formed thereon. Moreover, the bending position 55a and 55b to be bent after bending. In this case, the rotational center axis of the bending movement of the substrate represents the bending axis. In this case, however, the two bending positions (eg the bending positions 55a and 55b ) a completely same curved shape. In this case, moreover, the first point and the second point are on the same line running along the substrate before bending, the line intersecting the first axis and the second axis at right angles in an increased manner. The substrate 50 may be partially or fully curved to ensure that the generator 41 and the connecting element 35 are positioned opposite each other. In this case, instead of the bending process described earlier, a bending process is performed for molding the substrate into such a shape, wherein the shape of the substrate 50 is determined. More specifically, in the substrate 50 the part of the connecting element 53 or the whole connecting element 53 curved so that the generator 41 and the connecting element 35 are positioned opposite each other. However, the portion to be bent is not limited to this example and can be suitably changed.

The substrate is not limited to being a flexible substrate. The substrate in the present invention may be any substrate that allows the target area for detection to be located between the generator 41 and the detector 35 assign is the first section 51 in which the generator 41 which generates the detection target is installed, and the second section 52 in which the detector 35 , which can detect the detection target is installed, contains and the first section 51 and the second section 52 which are formed in an integrated manner. It can, for. For example, a substrate made of a material adhering to a portion undergoing treatment, e.g. The portion between the first portion and the second portion (eg, the connecting member) may be subjected to the treatment and bent or curved to cause the portion to be subjected to heat treatment first section and the second section are opposite each other. Alternatively, it is possible to use a rigid-flexible substrate having a non-easily deformable portion and an easily deformable portion. In this case, the non-easily deformable portion is used as the first portion and the second portion, while the easily deformable portion may be used as the portion between the first portion and the second portion (eg, as the connecting member). Thus, the first portion and the second portion may be caused to face each other.

The harness section 54 may be omitted. Alternatively, there may be two or more extending parts that function as wire harness sections. Moreover, the extending direction of the extending parts that work as the harness sections may be any direction, not by the positional relationship with the other configurations in the substrate 50 , such as B. the connecting element 53 , is restricted.

With respect to the relative movement of the moving body and the substrate 50 For example, one component may move closer to the other component, or both components may move closer together. More specifically, z. B. an element (eg the lower body 22 ) while the other element (eg the body 21 ) is held tight to cause the first member (the lower body 22 ) and the second element (the body 21 ) during assembly of the sensor 31 are close to each other. Alternatively, the relationship of the fixed element and the moving element may be reversed or both elements may be moved.

The specific pattern of the optical scale signal track T1 11 and the pattern of the polarization layers PP1 to PP4 included in the detector 35 are formed, can be changed suitably. The patterns are calculated considering a relationship between the pattern of the configuration (eg, the optical scale 11 ), which is provided in the target area for detection and which causes the polarization, and the pattern of the configuration (eg, the polarization layers) which transmits the light during the detection.

The configuration provided in the target area for detection is not on the optical scale 11 restricted, which is responsible for the polarization. Instead of using the optical scale 11 can z. For example, a tabular member having a hole or passage portion for transmitting the light or for selectively selecting the light in accordance with the rotation angle of the rotor may be used 10 pass. In this case, the changes of the rotation angle of the rotor appear 10 in the form of changes in the position and timing of the detection of the light by the detector. Here, the detector can not contain the polarization layers PP1 to PP4. When a signal indicating the position of the Detecting the light indicates is output from the sensor, then it is possible to determine the angular position of the rotating machine, which is connected to the shaft 12 is coupled to detect. Moreover, in this case, the detector need not contain the four light receiving devices. It can, for. For example, only a single light-receiving device may be used, or multiple light-receiving devices may be used. When a single light receiving device is used, it is desired that the distance W2 and the distance W1 be set to be equal while the distance from the center of the detection range of the detection target to be detected by the single light receiving device (ie the center of the light receiving area) and the second axis LB is treated as the distance W2. When multiple light receiving devices are used, it is desirable that the distance W2 and the distance W1 be set to be equal, while the distance between the arrangement center of a plurality of detection regions of the detector made of the light receiving device and the second axis LB is the distance W2 is treated.

The light emitting device of the generator 41 for emitting the light is not limited to a light emitting diode. Alternatively, the light emitting device may be a point light source or a surface light source. When the light emitting device is an area light source, the center of the light emitting area of the area light source is to the light emitting point 41S According to the embodiment described above, it becomes possible to define a straight line which passes through the center of the light emitting surface of the light emitting device and which runs along the direction in which the light emitting device and the light receiving devices are opposed to each other. While the straight line defined above as to the in 12 When the straight line L2 illustrated in FIG. 11 is treated equivalently, the arrangement of the four light receiving devices can be determined in a manner completely identical to the embodiment described above. That is, the arrangement of the four light-receiving devices can be determined in such a manner that they are equidistantly positioned from the straight line at different positions in a given plane orthogonal to the line, and that the four line segments representing the intersection between the straight line and the line connect predetermined plane with the centers of the light receiving areas of the four light receiving devices, at right angles to each other. The outgoing area 41T can instead of the light emission point 41S to be used as the middle.

In the embodiment described above, the components (the IC circuit 60 and the support substrate 65 ), which work as the support elements that cover the surfaces on which the electronic components are installed (ie, the tops 51A and 52A ) in one plane, both in the first section 51 as well as in the second section 52 arranged. However, these components need not be located in both sections. According to the arrangement of the components used on the FPC, in the present invention as the substrate 50 can be used, the support elements can be suitably changed and can be arranged either only on the first section or only on the second section. Moreover, a support member may also be provided in the connector 53 be arranged.

The electromagnetic waves representing the detection signal are not limited to being the light or the laser light emitted from a light emitting diode. That is, the electromagnetic waves that represent the detection target, invisible light, such. As infrared light or ultraviolet light, or may be X-rays. Alternatively, the detection target may be in the form of a magnetic force. In this case, the generator generates a magnetic field using the magnetic force. The detector performs the sampling by detecting the changes in magnetic force attributed to the changes in the physical quantity (e.g., the passage of an object) in the target area for detection. Because the magnetic force represents the detection target, the changes in the target area for detection can be detected from the changes of the magnetic force. Alternatively, in addition to the magnetic force, the electromagnetic waves sound waves including ultrasonic sound waves, ions such. Plasma, or cathode rays (e.g., electron beams). As long as the detection target is subjected to the changes due to the changes in the physical size of the configuration arranged in the target area for detection, any type of detection target may be used.

The physical quantity changes may occur due to the linear motion of a linear motion body present in the target area for detection. In this case, the linear motion of the linear motion body can be treated as the sensing target for the sensor. The sensor can also operate as a linear encoder. More specifically, the sensor operates as a linear encoder when the detector detects the changes attributed to the configuration (eg, a scale) that represents the linear relative motion within the target area for detection relative to the first section 51 and the second section 52 performs and performs the scanning with respect to the linear motion of this configuration. Thus, according to the present invention, the presence or absence of the movement of a linear motion body coupled to the encoder can be detected together with the detection of the position of the movement. As has been described above in the embodiment, when the moving body has a rotating body (which is at the end portion of the shaft 12 fixed optical scale 11 ), the section is close to the shaft 12 not in the area (the target area for the detection). Consequently, only a portion of the moving body enters the area. However, when the moving body is a linear motion body, at least a portion of the moving body naturally enters the area. In addition, depending on the possible range of motion for the linear motion body, the entire linear motion body may also enter the area (eg, pass the interior and exterior of the area). In this way, the moving body may be any element having at least a portion that moves in the area between the generator and the detector.

The shape of the stator 20 that works as the housing can be suitably changed. The following is regarding the 29 and 30 a sensor 31A explains in which a stator 20A is used, which has a different outer shape than that in 2 illustrated example.

29 is an external perspective view of the sensor 31A in which a stator 20A which has a different outer shape than in the 2 illustrated example is used. 30 is a graph showing the sensor 31A illustrated in a in a tabular element 100 trained hole 101 is appropriate. The stator 20A contains an extending section 70 , an inwardly flattened section 80 and an engaging portion 90 , More special are in the stator 20A the extending section 70 and the engaging portion 90 over the inwardly flattened section 80 positioned opposite each other, as in 29 is illustrated. That is, the extending section 70 extends on the engaging portion 90 opposite side over the inwardly flattened section 80 ,

The flattened inside section 80 fits in the hole 101 in which the sensor 31A is appropriate. More specifically, the inwardly flattened section 80 z. B. an outer periphery, against the inner circumference of the hole 101 abuts that in the element 100 is formed, in which the sensor 31A is appropriate. More specifically, the in 29 illustrated inwardly flattened section 80 of the sensor 31A an arcuate outer circumference extending along the inner circumference of the circular hole 101 runs. The arcuate outer circumference may form a complete circle or may have any section cut out in a straight line, as in FIG 29 is illustrated.

31 FIG. 12 is a graph showing an exemplary cross-sectional shape of the inwardly flattened portion. FIG 80 illustrated. If the hole 101 having the inner circumference forming a circular arc when z. B. the hole 101 has a circular shape, it is simply required that the diameter of the inwardly flattened portion 80 along the plane leading to the direction of expansion of the shaft 12 orthogonal, the inner diameter of the hole 101 corresponds, as in 31 is illustrated. When the inwardly flattened section 80 in the hole 101 fits, the position of the sensor 31A on the plate surface of the element 100 firmly. After fitting in the hole 101 abuts the outer periphery of the inwardly flattened portion 80 against the inner circumference of the hole 101 at. This will prevent in the direction along the plate surface of the element 100 the misalignment of the sensor 31A concerning the element 100 occurs.

The engaging section 90 has an outer diameter larger than the diameter of the hole 101 is. The extending section 70 has such an outer diameter that it passes through the hole 101 can go through. Although the extending section 70 through the hole 101 can pass through, therefore, the engaging portion 90 not through the hole 101 pass. The worker, the sensor 31A in the hole 101 of the element 100 attaches, moves the sensor 31A and the element 100 in such a way relative that the sensor 31A from the side of the extending section 70 in the hole 101 entry. Due to the relative movement of the extending section goes 70 through the hole 101 therethrough; becomes the inwardly flattened section 80 in the hole 101 fitted; and abuts the engaging portion 90 against the element 100 at. As a result of the abutment of the engaging portion 90 against the element 100 is the sensor 31A concerning the element 100 in the direction of expansion of the shaft 12 positioned.

The extending section 70 has a columnar outer shape and has an external thread on its outer periphery. More specifically, the outer periphery of the extending portion 70 screwed an external thread, with the direction of expansion of the shaft 12 serves as the central axis. The worker, the sensor 31 in the hole 101 of the element 100 fits, a nut, which has passed through a hollow screw, screwed with the extending portion 70 that is from the hole 101 extends, together. The mother 110 has an outer diameter larger than the diameter of the hole 101 is. As a result, lay the mother 110 and the engaging portion 90 the element 100 over the inwardly flattened section 80 a, and consequently the sensor 31A on the element 100 is attached.

In the direction of the extension of the shaft 12 is the inwardly flattened section 80 set so that it has a width that is smaller than the width of the element 100 is. This allows the external thread into the interior of the hole 101 be screwed. As a result, the element can 100 through the mother 110 and the engaging portion 90 be held more reliable, and consequently the sensor 31A more reliable on the element 100 can be attached.

The engaging section 90 has a kick-off section 91 up against a baffle 95 abuts on the element 100 is arranged, on which the sensor 31 is appropriate. More specific is the baffle plate 95 z. On the surface of the tabular element 100 on the side of the engaging portion 90 arranged as in the 29 to 31 wherein the tabular element 100 the one in the hole 101 attached sensor 31A having. The baffle 95 is z. B. a cuboid element 100 and is on the tabular element 100 attached. The kick-off section 91 is z. B. formed as a planar portion by cutting out any portion of the cylindrical outer periphery of the engaging portion 90 is obtained, so the abutting section 91 against the baffle 95 abuts. Moreover, the kick-off section 91 at a position other than the position of extension of the harness section 54 educated. More specific is z. B. the abutting section 91 on the cover 23 formed, which is positioned on the side, the position of the extension of the harness section 54 opposite.

At the time of screwing the nut 110 in the extending section 70 becomes a turning force on the extending portion 70 transfer. Because, however, the baffle 95 and the kick-off section 91 abut against each other, locks the baffle 95 the sensor 31A in the direction of rotation ascribed to the rotational force. This prevents the sensor 31A along with the nuts of the mother 110 rotates. The section where the kick-off section 91 and the baffle 95 against each other, is not limited to that he is even, and it can be suitably changed. As long as the stator 20A due to the abutment of the abutment section 91 and the baffle 95 is locked, thereby preventing the screws accompanying rotational movement, he serves the purpose.

As described above, the stator includes 20A the flattened inside section 80 , the engaging portion 90 and the extending section 70 , The extending section 70 has a columnar outer shape, has an outer thread on its outer periphery, and has such an outer diameter as to pass through the hole 101 can go through. This will allow the installation of the sensor 31A using a screw element, such. B. the mother 110 to be executed with more ease.

Moreover, the hole can 101 a circular hole, with the inwardly flattened section 80 may have an arcuate outer circumference, which is against the inner circumference of the circular hole 101 abuts. If in this case the engaging portion 90 the kick-off section 91 which is against the baffle 95 abuts, the sensor can be prevented 31A along with the nuts of the mother 110 rotates. This can be the attachment of the sensor 31A by screwing the nut 110 be carried out with more ease.

LIST OF REFERENCE NUMBERS

2

optical encoder

3

arithmetic means

5

controller

10

rotor

11

optical scale

12

wave

20, 20A

stator

21

body

22

lower body

23

cover

31, 31A

sensor

35

detector

41

generator

50

substratum

51

first section

52

second part

53

connecting member

54

Harness portion

60

IC circuit

65

support substrate

70

extending section

80

inside flattened section

90

engaging portion

91

abutting portion

95

baffle

100

element

101

hole

Claims (10)

A sensor manufacturing method for a sensor, comprising: a generator that generates a predetermined detection target, a detector that detects the detection target generated by the generator, and a moving body that performs motion in a region between the generator and the detector, the sensor manufacturing method comprising: positioning the generator and the generator Detector opposing each other either by bending or bending a substrate having a first portion having the generator installed thereon and a second portion having the detector installed thereon formed in an integrated manner; and causing the substrate and the moving body to perform relative movement in such a manner that the moving body enters the area between the generator and the detector. A sensor manufacturing method according to claim 1, wherein the substrate includes a connector connecting the first portion and the second portion, wherein the substrate and the moving body are caused to perform the relative movement in such a manner that the moving body enters the area from a side opposite to the connecting member. A sensor manufacturing method according to claim 1 or 2, wherein the first portion and the second portion after the bending or bending of the substrate are parallel to each other, wherein a direction of relative movement of the substrate and the moving body extends along the first portion and the second portion. A sensor manufacturing method according to any one of claims 1 to 3, wherein the moving body is a disk-shaped member supported by a shaft in a rotatable manner, wherein a notch is formed in at least one of the first portion and the second portion to ensure that the shaft and the substrate do not make contact with each other while the moving body remains in the area between the generator and the detector. A sensor manufacturing method according to any one of claims 1 to 4, wherein the substrate is attached to a first element representing one of a plurality of elements forming a housing, and a second member representing one of the plurality of members constituting the housing and supporting the moving body and bringing the first member closer to each other to assemble the housing and to cause the substrate and the moving body to move relatively, such that the moving body enters the area between the generator and the detector. A sensor manufacturing method according to claim 5, wherein, after the first member and the second member have been assembled, an entrance for the substrate as formed in the second member is covered by a cover member. A sensor comprising: a generator that generates a predetermined detection target; a detector that detects the detection target generated by the generator; a substrate on which the generator and the detecting are installed; a moving body that performs a movement in a region between the generator and the detector; and a housing housing the generator, the detector and the moving body, wherein the substrate a first section on which the generator is installed, and a second section on which the detector is installed, which are formed in an integrated manner, a curved shape or a curved shape in such a manner that the generator and the detector are positioned opposite to each other, and is arranged at such a position that the moving body is present in the area between the generator and the detector, and the housing includes a first member to which the substrate is attached, and a second member to which the moving body is installed. The sensor of claim 7, wherein the housing includes a cover member for covering an input to the substrate as formed in the second member. The sensor of claim 7 or 8, wherein the housing comprises: an inwardly flattened portion that fits into a hole formed in a member in which the sensor is mounted; an engagement portion having an outer diameter larger than a diameter of the hole; and an extending portion located on a portion opposite to the engagement portion Extending side over the inwardly flattened portion, wherein the extending portion has a columnar outer shape having on its outer periphery an external thread and having an outer diameter which is small enough to pass through the hole can. A sensor according to claim 9, wherein the hole is a circular hole, the inwardly flattened portion has an arcuate outer periphery abutting against an inner circumference of the circular hole, and the engagement portion has an abutment portion abutting against a baffle plate disposed on the member.

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