DE112010005588A5 - Vorrichtung und Verfahren zur Erfassung von Schwingungen - Google Patents

Vorrichtung und Verfahren zur Erfassung von Schwingungen Download PDF

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Publication number
DE112010005588A5
DE112010005588A5 DE112010005588T DE112010005588T DE112010005588A5 DE 112010005588 A5 DE112010005588 A5 DE 112010005588A5 DE 112010005588 T DE112010005588 T DE 112010005588T DE 112010005588 T DE112010005588 T DE 112010005588T DE 112010005588 A5 DE112010005588 A5 DE 112010005588A5
Authority
DE
Germany
Prior art keywords
detecting vibrations
vibrations
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112010005588T
Other languages
English (en)
Other versions
DE112010005588B4 (de
Inventor
Jan Mehner
Jörg Schaufuß
Dr. Scheibner Dirk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of DE112010005588A5 publication Critical patent/DE112010005588A5/de
Application granted granted Critical
Publication of DE112010005588B4 publication Critical patent/DE112010005588B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/186—Vibration harvesters
    • H02N2/188—Vibration harvesters adapted for resonant operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0056—Adjusting the distance between two elements, at least one of them being movable, e.g. air-gap tuning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/06—Influence generators
    • H02N1/08—Influence generators with conductive charge carrier, i.e. capacitor machines
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/181—Circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
DE112010005588.2T 2010-05-26 2010-05-26 Vorrichtung und Verfahren zur Erfassung von Schwingungen Expired - Fee Related DE112010005588B4 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2010/003194 WO2011147430A1 (de) 2010-05-26 2010-05-26 Vorrichtung und verfahren zur erfassung von schwingungen

Publications (2)

Publication Number Publication Date
DE112010005588A5 true DE112010005588A5 (de) 2013-10-24
DE112010005588B4 DE112010005588B4 (de) 2014-10-30

Family

ID=43530615

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112010005588.2T Expired - Fee Related DE112010005588B4 (de) 2010-05-26 2010-05-26 Vorrichtung und Verfahren zur Erfassung von Schwingungen

Country Status (2)

Country Link
DE (1) DE112010005588B4 (de)
WO (1) WO2011147430A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012217510A1 (de) * 2012-09-27 2014-03-27 Siemens Aktiengesellschaft Schwingungsmessung eines schwingenden Objektes
CN105897047B (zh) * 2016-04-11 2018-01-05 西安交通大学 一种将连续位移转变为冲击载荷的梳子俘能器
JP2019033631A (ja) * 2017-08-09 2019-02-28 国立大学法人静岡大学 Ｍｅｍｓ振動素子、ｍｅｍｓ振動素子の製造方法および振動発電素子

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19808549B4 (de) * 1998-02-28 2008-07-10 Robert Bosch Gmbh Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur
US6430998B2 (en) * 1999-12-03 2002-08-13 Murata Manufacturing Co., Ltd. Resonant element
US6833687B2 (en) * 2003-04-18 2004-12-21 Agilent Technologies, Inc. Electromechanical power converter
DE102005050351A1 (de) * 2005-10-20 2007-04-26 Siemens Ag Vibrationsmesssystem
US20070214890A1 (en) * 2006-01-31 2007-09-20 Ranjan Mukherjee MEMS resonator using frequency tuning
US8272274B2 (en) * 2008-02-11 2012-09-25 Integrated Sensing Systems Inc. Microfluidic device and methods of operation and making

Also Published As

Publication number Publication date
DE112010005588B4 (de) 2014-10-30
WO2011147430A1 (de) 2011-12-01

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Legal Events

Date Code Title Description
R012 Request for examination validly filed
R409 Internal rectification of the legal status completed
R073 Re-establishment requested
R409 Internal rectification of the legal status completed
R074 Re-establishment allowed
R074 Re-establishment allowed
R012 Request for examination validly filed

Effective date: 20121026

R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee
R137 Publication of grant of patent cancelled