DE112009003127A5 - Modularer carrier - Google Patents
Modularer carrier Download PDFInfo
- Publication number
- DE112009003127A5 DE112009003127A5 DE112009003127T DE112009003127T DE112009003127A5 DE 112009003127 A5 DE112009003127 A5 DE 112009003127A5 DE 112009003127 T DE112009003127 T DE 112009003127T DE 112009003127 T DE112009003127 T DE 112009003127T DE 112009003127 A5 DE112009003127 A5 DE 112009003127A5
- Authority
- DE
- Germany
- Prior art keywords
- modular carrier
- modular
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008062123A DE102008062123A1 (de) | 2008-12-16 | 2008-12-16 | Modularer Carrier |
DE102008062123.4 | 2008-12-16 | ||
PCT/DE2009/001767 WO2010075841A1 (de) | 2008-12-16 | 2009-12-14 | Modularer carrier |
Publications (1)
Publication Number | Publication Date |
---|---|
DE112009003127A5 true DE112009003127A5 (de) | 2011-11-17 |
Family
ID=42045412
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102008062123A Withdrawn DE102008062123A1 (de) | 2008-12-16 | 2008-12-16 | Modularer Carrier |
DE112009003127T Withdrawn DE112009003127A5 (de) | 2008-12-16 | 2009-12-14 | Modularer carrier |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102008062123A Withdrawn DE102008062123A1 (de) | 2008-12-16 | 2008-12-16 | Modularer Carrier |
Country Status (5)
Country | Link |
---|---|
US (1) | US20110250039A1 (de) |
EP (1) | EP2359397A1 (de) |
CA (1) | CA2746693A1 (de) |
DE (2) | DE102008062123A1 (de) |
WO (1) | WO2010075841A1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2711978A1 (de) | 2012-09-24 | 2014-03-26 | Meyer Burger AG | Verfahren zur Herstellung von Wafern |
EP2711979A1 (de) | 2012-09-24 | 2014-03-26 | Meyer Burger AG | Wafer-Schneidsystem |
EP2720258A1 (de) | 2012-10-12 | 2014-04-16 | Meyer Burger AG | System zur Handhabung von Wafern |
US9117863B1 (en) | 2013-05-16 | 2015-08-25 | Seagate Technology Llc | Cassette configurations to support platters having different diameters |
EP2944444A1 (de) | 2014-05-16 | 2015-11-18 | Meyer Burger AG | Waferverarbeitungsverfahren |
US10020213B1 (en) * | 2016-12-30 | 2018-07-10 | Sunpower Corporation | Semiconductor wafer carriers |
CN116277347B (zh) * | 2023-03-07 | 2023-12-12 | 南通良禽佳木家居有限公司 | 一种防腐木材及其生产工艺及其木材浸泡装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3926305A (en) * | 1973-07-12 | 1975-12-16 | Fluoroware Inc | Wafer basket |
US4318749A (en) * | 1980-06-23 | 1982-03-09 | Rca Corporation | Wettable carrier in gas drying system for wafers |
JPS6085538A (ja) * | 1983-10-18 | 1985-05-15 | Nec Kansai Ltd | 半導体製造方法 |
US4817263A (en) * | 1986-06-19 | 1989-04-04 | W.R. Grace & Co. | Method of storing electrostatic discharge sensitive devices |
US4696395A (en) * | 1986-11-14 | 1987-09-29 | Northrop Corporation | Substrate container |
US5114018A (en) * | 1989-09-20 | 1992-05-19 | International Business Machines Corporation | Versatile product carrier |
US5657879A (en) * | 1996-02-05 | 1997-08-19 | Seh America, Inc. | Combination wafer carrier and storage device |
JP4855569B2 (ja) * | 2000-10-20 | 2012-01-18 | コーニング インコーポレイテッド | ガラス基板を梱包するための容器 |
US6845779B2 (en) * | 2001-11-13 | 2005-01-25 | Fsi International, Inc. | Edge gripping device for handling a set of semiconductor wafers in an immersion processing system |
US7121414B2 (en) * | 2001-12-28 | 2006-10-17 | Brooks Automation, Inc. | Semiconductor cassette reducer |
JP2003243496A (ja) * | 2002-02-15 | 2003-08-29 | Dainippon Printing Co Ltd | 基板収納ケース |
US7748532B2 (en) * | 2002-10-10 | 2010-07-06 | Seagate Technology Llc | Cassette for holding disks of different diameters |
TWI276580B (en) * | 2003-12-18 | 2007-03-21 | Miraial Co Ltd | Lid unit for thin-plate supporting container |
DE202007003416U1 (de) | 2007-03-04 | 2007-05-31 | Jonas & Redmann Automationstechnik Gmbh | Automatisierungscarrier für Substrate, insbesondere für Wafer zur Herstellung siliziumbasierter Solarzellen |
-
2008
- 2008-12-16 DE DE102008062123A patent/DE102008062123A1/de not_active Withdrawn
-
2009
- 2009-12-14 EP EP09808983A patent/EP2359397A1/de not_active Withdrawn
- 2009-12-14 WO PCT/DE2009/001767 patent/WO2010075841A1/de active Application Filing
- 2009-12-14 US US13/140,096 patent/US20110250039A1/en not_active Abandoned
- 2009-12-14 DE DE112009003127T patent/DE112009003127A5/de not_active Withdrawn
- 2009-12-14 CA CA2746693A patent/CA2746693A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20110250039A1 (en) | 2011-10-13 |
CA2746693A1 (en) | 2010-07-08 |
EP2359397A1 (de) | 2011-08-24 |
DE102008062123A1 (de) | 2010-06-17 |
WO2010075841A1 (de) | 2010-07-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |
Effective date: 20120703 |