DE10344113A1 - Vorrichtung und Verfahren zum Verbinden von Wafern - Google Patents
Vorrichtung und Verfahren zum Verbinden von Wafern Download PDFInfo
- Publication number
- DE10344113A1 DE10344113A1 DE10344113A DE10344113A DE10344113A1 DE 10344113 A1 DE10344113 A1 DE 10344113A1 DE 10344113 A DE10344113 A DE 10344113A DE 10344113 A DE10344113 A DE 10344113A DE 10344113 A1 DE10344113 A1 DE 10344113A1
- Authority
- DE
- Germany
- Prior art keywords
- joining wafers
- joining
- wafers
- wafers along
- corresponding method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
- H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
Abstract
Bei der Erfindung handelt es sich um eine Vorrichtung und ein entsprechendes Verfahren zum Verbinden von Wafern entlang ihrer korrespondierenden Oberflächen.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10344113A DE10344113A1 (de) | 2003-09-24 | 2003-09-24 | Vorrichtung und Verfahren zum Verbinden von Wafern |
US10/938,931 US20050064680A1 (en) | 2003-09-24 | 2004-09-11 | Device and method for bonding wafers |
KR1020040076207A KR20050030138A (ko) | 2003-09-24 | 2004-09-23 | 웨이퍼 부착을 위한 장치 및 방법 |
JP2004278474A JP2005101617A (ja) | 2003-09-24 | 2004-09-24 | ウェハー結合装置及びその方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10344113A DE10344113A1 (de) | 2003-09-24 | 2003-09-24 | Vorrichtung und Verfahren zum Verbinden von Wafern |
Publications (1)
Publication Number | Publication Date |
---|---|
DE10344113A1 true DE10344113A1 (de) | 2005-05-04 |
Family
ID=34306045
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10344113A Withdrawn DE10344113A1 (de) | 2003-09-24 | 2003-09-24 | Vorrichtung und Verfahren zum Verbinden von Wafern |
Country Status (4)
Country | Link |
---|---|
US (1) | US20050064680A1 (de) |
JP (1) | JP2005101617A (de) |
KR (1) | KR20050030138A (de) |
DE (1) | DE10344113A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8118290B2 (en) | 2006-06-02 | 2012-02-21 | Erich Thallner | Method for holding wafers and device for fixing two parallel arranged wafers relative to one another |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2091071B1 (de) * | 2008-02-15 | 2012-12-12 | Soitec | Verfahren zum Bonden zweier Substrate |
US20100089978A1 (en) * | 2008-06-11 | 2010-04-15 | Suss Microtec Inc | Method and apparatus for wafer bonding |
CN102237285B (zh) * | 2010-04-20 | 2016-05-18 | 台湾积体电路制造股份有限公司 | 晶片接合机 |
FR2963157B1 (fr) * | 2010-07-22 | 2013-04-26 | Soitec Silicon On Insulator | Procede et appareil de collage par adhesion moleculaire de deux plaques |
FR2972848A1 (fr) * | 2011-03-18 | 2012-09-21 | Soitec Silicon On Insulator | Appareil et procédé de collage par adhésion moléculaire avec minimisation de déformations locales |
FR2997224B1 (fr) * | 2012-10-18 | 2015-12-04 | Soitec Silicon On Insulator | Procede de collage par adhesion moleculaire |
KR102586083B1 (ko) * | 2022-07-15 | 2023-10-05 | 성균관대학교산학협력단 | 웨이퍼 본딩 방법 및 웨이퍼 본딩 시스템 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4404931A1 (de) * | 1993-02-16 | 1994-08-18 | Nippon Denso Co | Verfahren und Vorrichtung zum Direktverbinden von zwei Körpern |
US6180496B1 (en) * | 1997-08-29 | 2001-01-30 | Silicon Genesis Corporation | In situ plasma wafer bonding method |
DE10048374A1 (de) * | 1999-10-01 | 2001-04-12 | Max Planck Gesellschaft | Verfahren zum großflächigen Verbinden von Verbindungshalbleitermaterialien |
WO2001061743A1 (en) * | 2000-02-16 | 2001-08-23 | Ziptronix, Inc. | Method for low temperature bonding and bonded structure |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6146463A (en) * | 1998-06-12 | 2000-11-14 | Applied Materials, Inc. | Apparatus and method for aligning a substrate on a support member |
US6780759B2 (en) * | 2001-05-09 | 2004-08-24 | Silicon Genesis Corporation | Method for multi-frequency bonding |
KR100480819B1 (ko) * | 2002-03-20 | 2005-04-06 | 엘지.필립스 엘시디 주식회사 | 합착기 챔버의 크리닝 방법 |
US20030178145A1 (en) * | 2002-03-25 | 2003-09-25 | Applied Materials, Inc. | Closed hole edge lift pin and susceptor for wafer process chambers |
-
2003
- 2003-09-24 DE DE10344113A patent/DE10344113A1/de not_active Withdrawn
-
2004
- 2004-09-11 US US10/938,931 patent/US20050064680A1/en not_active Abandoned
- 2004-09-23 KR KR1020040076207A patent/KR20050030138A/ko not_active Application Discontinuation
- 2004-09-24 JP JP2004278474A patent/JP2005101617A/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4404931A1 (de) * | 1993-02-16 | 1994-08-18 | Nippon Denso Co | Verfahren und Vorrichtung zum Direktverbinden von zwei Körpern |
US6180496B1 (en) * | 1997-08-29 | 2001-01-30 | Silicon Genesis Corporation | In situ plasma wafer bonding method |
DE10048374A1 (de) * | 1999-10-01 | 2001-04-12 | Max Planck Gesellschaft | Verfahren zum großflächigen Verbinden von Verbindungshalbleitermaterialien |
WO2001061743A1 (en) * | 2000-02-16 | 2001-08-23 | Ziptronix, Inc. | Method for low temperature bonding and bonded structure |
Non-Patent Citations (1)
Title |
---|
ROBERDS,B.E., CHOQUETTE,K.D., GEIB,K.M., KRAVITZ, S.H., TWESTEN,R.D., FARRENS,S.N.: Wafer Bonding ofGaAs, InP and Si annealed without hydrogen for ad-vanced device technologies. In: Electrochemical Society Proccedings, Vol. 97-36, Seite 592-597 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8118290B2 (en) | 2006-06-02 | 2012-02-21 | Erich Thallner | Method for holding wafers and device for fixing two parallel arranged wafers relative to one another |
DE102006026331B4 (de) | 2006-06-02 | 2019-09-26 | Erich Thallner | Transportable Einheit zum Transport von Wafern und Verwendung einer Gelfolie in einer transportablen Einheit |
Also Published As
Publication number | Publication date |
---|---|
US20050064680A1 (en) | 2005-03-24 |
KR20050030138A (ko) | 2005-03-29 |
JP2005101617A (ja) | 2005-04-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
8130 | Withdrawal |