DE10256417A8 - Lichtbogenverdampfungsvorrichtung - Google Patents

Lichtbogenverdampfungsvorrichtung Download PDF

Info

Publication number
DE10256417A8
DE10256417A8 DE10256417A DE10256417A DE10256417A8 DE 10256417 A8 DE10256417 A8 DE 10256417A8 DE 10256417 A DE10256417 A DE 10256417A DE 10256417 A DE10256417 A DE 10256417A DE 10256417 A8 DE10256417 A8 DE 10256417A8
Authority
DE
Germany
Prior art keywords
evaporation device
arc evaporation
arc
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10256417A
Other languages
English (en)
Other versions
DE10256417A1 (de
Inventor
Hermann Dr. Curtins
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PVT PLASMA und VAKUUM TECHNIK
PVT PLASMA und VAKUUM TECHNIK GmbH
Original Assignee
PVT PLASMA und VAKUUM TECHNIK
PVT PLASMA und VAKUUM TECHNIK GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PVT PLASMA und VAKUUM TECHNIK, PVT PLASMA und VAKUUM TECHNIK GmbH filed Critical PVT PLASMA und VAKUUM TECHNIK
Priority to DE10256417A priority Critical patent/DE10256417A1/de
Priority to CN200380109150.6A priority patent/CN1742356A/zh
Priority to US10/537,087 priority patent/US20060137978A1/en
Priority to AU2003289933A priority patent/AU2003289933A1/en
Priority to JP2004556260A priority patent/JP2006508246A/ja
Priority to PCT/EP2003/013556 priority patent/WO2004051695A2/de
Publication of DE10256417A1 publication Critical patent/DE10256417A1/de
Publication of DE10256417A8 publication Critical patent/DE10256417A8/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE10256417A 2002-12-02 2002-12-02 Lichtbogenverdampfungsvorrichtung Withdrawn DE10256417A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE10256417A DE10256417A1 (de) 2002-12-02 2002-12-02 Lichtbogenverdampfungsvorrichtung
CN200380109150.6A CN1742356A (zh) 2002-12-02 2003-12-02 电弧蒸发器
US10/537,087 US20060137978A1 (en) 2002-12-02 2003-12-02 Arc evaporation device
AU2003289933A AU2003289933A1 (en) 2002-12-02 2003-12-02 Arc evaporation device
JP2004556260A JP2006508246A (ja) 2002-12-02 2003-12-02 アーク蒸着装置
PCT/EP2003/013556 WO2004051695A2 (de) 2002-12-02 2003-12-02 Lichtbogenverdampfungsvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10256417A DE10256417A1 (de) 2002-12-02 2002-12-02 Lichtbogenverdampfungsvorrichtung

Publications (2)

Publication Number Publication Date
DE10256417A1 DE10256417A1 (de) 2004-06-09
DE10256417A8 true DE10256417A8 (de) 2004-09-23

Family

ID=32308949

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10256417A Withdrawn DE10256417A1 (de) 2002-12-02 2002-12-02 Lichtbogenverdampfungsvorrichtung

Country Status (6)

Country Link
US (1) US20060137978A1 (de)
JP (1) JP2006508246A (de)
CN (1) CN1742356A (de)
AU (1) AU2003289933A1 (de)
DE (1) DE10256417A1 (de)
WO (1) WO2004051695A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5649308B2 (ja) * 2009-04-28 2015-01-07 株式会社神戸製鋼所 成膜速度が速いアーク式蒸発源及びこのアーク式蒸発源を用いた皮膜の製造方法
JP6403269B2 (ja) * 2014-07-30 2018-10-10 株式会社神戸製鋼所 アーク蒸発源

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3994795A (en) * 1973-07-31 1976-11-30 Federated Metals Corporation Sacrificial anode
US4673477A (en) * 1984-03-02 1987-06-16 Regents Of The University Of Minnesota Controlled vacuum arc material deposition, method and apparatus
DE9014857U1 (de) * 1990-10-26 1992-02-20 Multi-Arc Oberflächentechnik GmbH, 5060 Bergisch Gladbach Großflächige Kathodenanordnung mit gleichmäßigem Abbrandverhalten
FR2670218B1 (fr) * 1990-12-06 1993-02-05 Innovatique Sa Procede de traitement de metaux par depot de matiere, et pour la mise en óoeuvre dudit procede.
WO1997038149A1 (en) * 1996-04-08 1997-10-16 Ronald Christy Cathodic arc cathode
US7087143B1 (en) * 1996-07-15 2006-08-08 Semitool, Inc. Plating system for semiconductor materials
US6103074A (en) * 1998-02-14 2000-08-15 Phygen, Inc. Cathode arc vapor deposition method and apparatus
DE10126985A1 (de) * 2001-06-05 2002-12-12 Gabriel Herbert M Anordnung zur Stromzuführung für eine Kathode einer Lichtbogen-Verdampfungsvorrichtung

Also Published As

Publication number Publication date
AU2003289933A8 (en) 2004-06-23
WO2004051695A3 (de) 2004-11-11
CN1742356A (zh) 2006-03-01
US20060137978A1 (en) 2006-06-29
DE10256417A1 (de) 2004-06-09
AU2003289933A1 (en) 2004-06-23
JP2006508246A (ja) 2006-03-09
WO2004051695A2 (de) 2004-06-17

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Legal Events

Date Code Title Description
8181 Inventor (new situation)

Inventor name: CURTINS, HERMANN, DR., GREUCHEN, CH

8196 Reprint of faulty title page (publication) german patentblatt: part 1a6
8716 Sentence in annex german patentblatt annex 1a6
8139 Disposal/non-payment of the annual fee