DE10236491B4 - Cleaning with CO2 and N2O - Google Patents
Cleaning with CO2 and N2O Download PDFInfo
- Publication number
- DE10236491B4 DE10236491B4 DE10236491A DE10236491A DE10236491B4 DE 10236491 B4 DE10236491 B4 DE 10236491B4 DE 10236491 A DE10236491 A DE 10236491A DE 10236491 A DE10236491 A DE 10236491A DE 10236491 B4 DE10236491 B4 DE 10236491B4
- Authority
- DE
- Germany
- Prior art keywords
- cleaning
- carbon dioxide
- cleaning agent
- nitrous oxide
- mixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06F—LAUNDERING, DRYING, IRONING, PRESSING OR FOLDING TEXTILE ARTICLES
- D06F43/00—Dry-cleaning apparatus or methods using volatile solvents
- D06F43/007—Dry cleaning methods
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06L—DRY-CLEANING, WASHING OR BLEACHING FIBRES, FILAMENTS, THREADS, YARNS, FABRICS, FEATHERS OR MADE-UP FIBROUS GOODS; BLEACHING LEATHER OR FURS
- D06L1/00—Dry-cleaning or washing fibres, filaments, threads, yarns, fabrics, feathers or made-up fibrous goods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Textile Engineering (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Carbon And Carbon Compounds (AREA)
- Extraction Or Liquid Replacement (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Reinigungsverfahren, dadurch gekennzeichnet, daß Kohlendioxid, das zumindest zeitweise Distickstoffmonoxid enthält, als Reinigungsmittel mit dem Reinigungsgut in Kontakt gebracht wird, dadurch gekennzeichnet, daß das Reinigungsmittel aus 5 bis 20 Vol.-% Distickstoffmonoxid (N2O), Rest Kohlendioxid (CO2) besteht und in gasförmiger Phase vorliegt.Cleaning process, characterized in that carbon dioxide, which at least temporarily contains nitrous oxide, is brought into contact with the items to be cleaned as a cleaning agent, characterized in that the cleaning agent consists of 5 to 20 vol .-% nitrous oxide (N2O), the remainder carbon dioxide (CO2) and is in the gaseous phase.
Description
Die Erfindung betrifft ein Verfahren zur Reinigung mit Kohlendioxid.The invention relates to a process for purification with carbon dioxide.
Bekannt ist die Trockenreinigung mit überkritischem Kohlendioxid (CO2). Solche Reinigungsverfahren sind beispielsweise in
Dem verdichteten Kohlendioxid werden üblicherweise Zusätze wie Tenside, Lösemittel oder andere Hilfsstoffe beigefügt. Diese zum Teil nicht flüchtigen Zusätze müssen von dem Reinigungsgut wieder entfernt werden, was in der Regel einen zusätzlichen Aufwand bedeutet.The compressed carbon dioxide is usually added with additives such as surfactants, solvents or other auxiliaries. These partly non-volatile additives must be removed from the cleaning material again, which usually means an additional expense.
Der Erfindung liegt die Aufgabe zugrunde, ein alternatives Reinigungsverfahren bereit zu stellen.The invention has for its object to provide an alternative purification process.
Gelöst wurde die Aufgabe durch ein Verfahren mit den in Anspruch 1 beschriebenen Merkmalen.The object has been achieved by a method having the features described in claim 1.
Bei dem Reinigungsverfahren werden Kohlendioxid und Distickstoffmonoxid mit dem Reinigungsgut in Kontakt gebracht. Vorzugsweise wird ein Gemisch von Kohlendioxid und Distickstoffmonoxid zum Reinigen eingesetzt.In the cleaning process, carbon dioxide and nitrous oxide are brought into contact with the items to be cleaned. Preferably, a mixture of carbon dioxide and nitrous oxide is used for cleaning.
Das Reinigungsverfahren dient beispielsweise zur Reinigung oder Behandlung von Textilien, textilartigen Stoffen (z. B. Non-wovens, Vlies, Filz), Folien, Kunststoffteilen, Metallteilen, Teilen aus Keramik, Verbundstoffen, Kunststofffaser, Naturfaser, Glasteilen oder Glasoberflächen, insbesondere zur Reinigung von strukturierten Oberflächen von Materialien wie Textilien oder ähnlichen Materialien und Formteilen.The cleaning method is used, for example, for cleaning or treating textiles, textile-like materials (for example non-wovens, fleece, felt), films, plastic parts, metal parts, parts made of ceramic, composite materials, plastic fiber, natural fiber, glass parts or glass surfaces, in particular for cleaning of structured surfaces of materials such as textiles or similar materials and molded parts.
Die Behandlung des Reinigungsgutes erfolgt vorzugsweise in geschlossenen Systemen unter Verwendung eines Gemisches von Kohlendioxid (CO2) und Distickstoffmonoxid (N2O) in gasförmiger Phase.The treatment of the cleaning material is preferably carried out in closed systems using a mixture of carbon dioxide (CO 2 ) and nitrous oxide (N 2 O) in the gaseous phase.
In dem Verfahren werden Kohlendioxid und Distickstoffmonoxid als Reinigungsmittel, insbesondere als Kombinationsreinigungsmittel zur gleichzeitigen, getrennten oder zeitlich abgestuften Anwendung eingesetzt.In the process carbon dioxide and dinitrogen monoxide are used as cleaning agents, in particular as combination cleaning agents for simultaneous, separate or graduated use.
Das Reinigungsmittel enthält Kohlendioxid (CO2) und Distickstoffmonoxid (N2O), das auch als Lachgas bezeichnet wird. Das Stoffgemisch aus Kohlendioxid (CO2) und Distickstoffmonoxid, hat einen N2O-Anteil von 5 bis 20 Vol.-%, Rest CO2 (zusammen 100 Vol.-%). Die Konzentrationsangaben (Vol.-%) beziehen sich auf die Konzentrationen der Komponenten des Stoffgemisches bei Normalbedingungen (1 bar absolut, 0°C).The cleaning agent contains carbon dioxide (CO 2 ) and nitrous oxide (N 2 O), which is also called nitrous oxide. The mixture of carbon dioxide (CO 2 ) and nitrous oxide, has an N 2 O content of 5 to 20 vol .-%, balance CO 2 (together 100 vol .-%). The concentration data (% by volume) refer to the concentrations of the components of the substance mixture under normal conditions (1 bar absolute, 0 ° C).
Das Reinigungsmittel wird als Gasgemisch, vorzugsweise als verdichtetes Gasgemisch, eingesetzt. Das Reinigungsmittel wird vorzugsweise wie übliche Kohlendioxid-Phasen bei der Trockenreinigung eingesetzt. Der Einsatz des Reinigungsmittels in überkritischem Zustand erfolgt beispielsweise wie in der
Das Reinigungsmittel kann ein oder mehrere Zusatzstoffe enthalten. In diesen Fällen sind die Zusatzstoffe in der Regel in sehr geringer Konzentration enthalten. Zusatzstoffe sind z. B. Tenside, oberflächenaktive Stoffe. Auch der Zusatz von anorganischen Lösemitteln wie Wasser oder organischen Lösemitteln wie Alkohole (z. B. Methanol, Ethanol, Propanol, Isopropanol) oder lineare oder verzweigte Kohlenwasserstoffe (z. B. Methan, Ethan, Propan, Isopropan, Butan, Hexan, Heptan) kann je nach Anwendungsfall in größerer (z. B. Prozentbereich wie 1 bis 10 Gewichtsprozent) oder kleinerer Menge (z. B. Spurenbereich oder ppm-Bereich wie 10 bis 1000 ppm; 1 ppm = 10–6 g pro g) vorteilhaft sein.The cleaning agent may contain one or more additives. In these cases, the additives are usually contained in very low concentration. Additives are z. As surfactants, surfactants. Also the addition of inorganic solvents such as water or organic solvents such as alcohols (eg methanol, ethanol, propanol, isopropanol) or linear or branched hydrocarbons (eg methane, ethane, propane, isopropane, butane, hexane, heptane) may be advantageous depending on the application in larger (eg percentage range such as 1 to 10 weight percent) or smaller amount (eg trace level or ppm range such as 10 to 1000 ppm, 1 ppm = 10 -6 g per g).
Bevorzugt werden Reinigungsmittel, die aus Kohlendioxid und Distickstoffmonoxid oder Kohlendioxid, Distickstoffmonoxid und einem oder mehreren Lösemitteln bestehen. Diese Reinigungsmittel hinterlassen keine Rückstände am Reinigungsgut. Die Zumischung von Distickstoffmonoxid zu Kohlendioxid verbessert die Reinigungsfähigkeit von Kohlendioxid, insbesondere überkritischem Kohlendioxid, außerordentlich.Preference is given to detergents which consist of carbon dioxide and dinitrogen monoxide or carbon dioxide, dinitrogen monoxide and one or more solvents. These detergents leave no residue on the items to be cleaned. The addition of nitrous oxide to carbon dioxide greatly improves the cleanability of carbon dioxide, particularly supercritical carbon dioxide.
Besonders vorteilhaft ist die Verwendung von Distickstoffmonoxid (N2O) bei der Trockenreinigung mit Kohlendioxid. Insbesondere wird die Trockenreinigung mit Kohlendioxid durch die Zudosierung von Distickstoffmonoxid verbessert.Particularly advantageous is the use of nitrous oxide (N 2 O) in the dry cleaning with carbon dioxide. In particular, the dry cleaning with carbon dioxide is improved by the metered addition of nitrous oxide.
Das Stoffgemisch für das Reinigungsmittel wird in der Regel als druckverflüssigte Phase in einem Druckgasbehälter bereit gestellt. Druckgasbehälter sind beispielsweise Druckgasflaschen, Druckgaspatronen (Kleinpatronen) oder Druckdosen.The mixture of substances for the cleaning agent is usually provided as a pressure-liquefied phase in a pressurized gas container. Compressed gas containers are for example compressed gas cylinders, compressed gas cartridges (small cartridges) or pressure cans.
Die Komponenten des Reinigungsmittels sind ungiftig, unbrennbar und physiologisch unbedenklich. Sie sind bereits im Medizin- und/oder Lebensmittelbereich etabliert.The components of the cleaning agent are non-toxic, incombustible and physiologically harmless. They are already established in the medical and / or food sector.
Vorteilhaft wird das Verfahren mit einer Verfahrensstufe zur Abtrennung von Verunreinigungen aus dem Reinigungsmittel während der Reinigung des Reinigungsgutes oder in einem vorangehenden oder nachfolgenden Verfahrensschritt kombiniert. Besonders vorteilhaft ist ein Kreislaufsystem, bei dem das Reinigungsmittel zwischen einer Reinigungseinrichtung für das Reinigungsgut und einer Reinigungseinrichtung für das Reinigungsmittel geführt wird. Beispielsweise wird das Reinigungsmittel zwischen den Einrichtungen kontinuierlich oder diskontinuierlich umgepumpt. Das Kreislaufsystem arbeitet z. B. mit flüssigem oder überkritischem Reinigungsmittel.Advantageously, the process is combined with a process stage for separating impurities from the cleaning agent during the cleaning of the cleaning material or in a preceding or subsequent process step. Particularly advantageous is a circulation system in which the cleaning agent is passed between a cleaning device for the cleaning material and a cleaning device for the cleaning agent. For example, the cleaning agent is circulated continuously or discontinuously between the devices. The circulatory system works z. B. with liquid or supercritical cleaning agent.
Die Reinigungseinrichtung für das Reinigungsmittel ist z. B. ein Filter, Adsorber oder Absorber, insbesondere eine oder mehrere Durchflußpatronen mit mindestens einem Reinigungsmaterial wie einem Filtermaterial, Adsorbermaterial oder Absorbermaterial. Das Reinigungsmaterial dient insbesondere zur Abtrennung von Verunreinigungen wie in dem Reinigungsmittel löslichen Stoffen, insbesondere Fett oder fettartigen Stoffen. Adsorbermaterial oder Absorbermaterial, auch Adsorptionsmittel oder Absorptionsmittel genannt, sind z. B. Aktivkohlen oder Polymerstoffe Kunststoffe, z. B. makroretikuläre Styrol-Copolymere). Geeignete Adsorptionsmittel oder Absorptionsmittel zur Bindung von Verunreinigungen wie Fett sind dem Fachmann bekannt. Die Regenerierung des Reinigungsmittels durch Abtrennung von Verunreinigungen mittels einer Reinigungseinrichtung bietet sich insbesondere an bei dem Einsatz von Reinigungsmitteln, die keine Additive wie Tenside oder andere nichtflüchtige Additive enthalten. Die Regenerierung des Reinigungsmittels z. B. in einem Kreislaufsystem ist vorteilhaft insbesondere bei Reinigungsmitteln, die aus Kohlendioxid und Distickstoffmonoxid bestehen.The cleaning device for the cleaning agent is z. As a filter, adsorber or absorber, in particular one or more Durchflußpatronen with at least one cleaning material such as a filter material, adsorber or absorber material. The cleaning material is used in particular for the separation of impurities such as substances soluble in the cleaning agent, in particular fat or fat-like substances. Adsorber or absorber material, also called adsorbents or absorbents are, for. B. activated carbons or polymer plastics, z. B. macroreticular styrene copolymers). Suitable adsorbents or absorbents for binding impurities such as fat are known to the person skilled in the art. The regeneration of the cleaning agent by separation of impurities by means of a cleaning device is particularly useful when using cleaning agents that contain no additives such as surfactants or other non-volatile additives. The regeneration of the detergent z. B. in a circulatory system is particularly advantageous for cleaning agents that consist of carbon dioxide and nitrous oxide.
Als Reinigungsmittel dienen z. B. vorgefertigte Gemische, insbesondere in Druckgasbehältern bereitgestellte Gasgemische, die z. B. aus Kohlendioxid und Distickstoffmonoxid bestehen, oder Gemische von Kohlendioxid und Distickstoffmonoxid, die vorort (in situ), in der Regel in dem Reinigungssystem (z. B. in oder an der Reinigungseinrichtung für das Reinigungsgut) erzeugt werden. Beispielsweise wird einem Kohlendioxidstrom kontinuierlich oder diskontinuierlich Distickstoffmonoxid zugemischt. Vorbestimmte Mengen von Distickstoffmonoxid werden z. B. über Steuereinrichtungen und Regeleinrichtungen und insbesondere steuerbare Ventile dem Kohlendioxid zudosiert. Die Dosierung von Distickstoffmonoxid erfolgt beispielsweise in einer oder mehreren Reinigungsphasen (Verfahrensschritten) des Reinigungsverfahrens.As a cleaning agent serve z. B. prefabricated mixtures, in particular provided in compressed gas tanks gas mixtures z. Example of carbon dioxide and nitrous oxide, or mixtures of carbon dioxide and nitrous oxide, the on-site (in situ), usually in the cleaning system (eg., In or on the cleaning device for the cleaning) are generated. For example, a carbon dioxide stream is added continuously or discontinuously dinitrogen monoxide. Predetermined amounts of nitrous oxide are z. B. via control devices and control devices and in particular controllable valves added to the carbon dioxide. The dosing of nitrous oxide takes place, for example, in one or more purification phases (process steps) of the purification process.
Überkritischem oder flüssigem Kohlendioxid wird z. B. mittels einer gesteuerten Dosiereinrichtung Distickstoffmonoxid zugeführt. Druck und Temperatur in dem System sind entsprechend zu wählen.Supercritical or liquid carbon dioxide is z. B. supplied by means of a controlled metering dinitrogen monoxide. Pressure and temperature in the system should be selected accordingly.
Claims (6)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10236491A DE10236491B4 (en) | 2002-08-09 | 2002-08-09 | Cleaning with CO2 and N2O |
EP03018106A EP1388376A3 (en) | 2002-08-09 | 2003-08-08 | Cleaning using CO2 and N2O |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10236491A DE10236491B4 (en) | 2002-08-09 | 2002-08-09 | Cleaning with CO2 and N2O |
Publications (2)
Publication Number | Publication Date |
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DE10236491A1 DE10236491A1 (en) | 2004-02-19 |
DE10236491B4 true DE10236491B4 (en) | 2012-05-03 |
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Application Number | Title | Priority Date | Filing Date |
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DE10236491A Expired - Fee Related DE10236491B4 (en) | 2002-08-09 | 2002-08-09 | Cleaning with CO2 and N2O |
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Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1989004858A1 (en) * | 1987-11-27 | 1989-06-01 | Battelle Memorial Institute | Supercritical fluid reverse micelle separation |
WO1994001512A1 (en) * | 1992-07-10 | 1994-01-20 | E.I. Du Pont De Nemours And Company | Azeotropic compositions of perfluoroethane, and trifluoromethane, or oxide, or nitrous oxide, or carbon dioxide, or fluoromethane |
DE4306645A1 (en) * | 1993-03-03 | 1994-09-08 | David Jackson | Method for cleaning, sterilising and implanting substrates by means of a high-energy compressed fluid |
DE4309734A1 (en) * | 1993-03-25 | 1994-09-29 | Akzo Nobel Nv | Process for cleaning hollow fibers |
DE4333221A1 (en) * | 1993-09-30 | 1995-04-06 | Deutsches Textilforschzentrum | Process for decolouring substrates made from plastic, in particular synthetic fibres |
WO1997016264A1 (en) * | 1995-11-03 | 1997-05-09 | The University Of North Carolina At Chapel Hill | Novel cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants |
EP0828021A2 (en) * | 1996-09-09 | 1998-03-11 | Air Liquide America Corporation | Continuous cleaning apparatus and method |
EP0836895A2 (en) * | 1996-10-16 | 1998-04-22 | International Business Machines Corporation | Residue removal by supercritical fluids |
WO1999056892A1 (en) * | 1998-05-06 | 1999-11-11 | Steris Corporation | Sub-critical fluid cleaning and antimicrobial decontamination sysstem and process |
DE19903243A1 (en) * | 1999-01-28 | 2000-08-03 | Linde Tech Gase Gmbh | Process for the purification of materials and/or surfaces is carried out using a liquefied and/or super critical gas as cleaning agent |
WO2002032593A1 (en) * | 2000-10-20 | 2002-04-25 | Commissariat A L'energie Atomique | Method, device and installation for cleaning contaminated parts, with a dense pressurised fluid |
-
2002
- 2002-08-09 DE DE10236491A patent/DE10236491B4/en not_active Expired - Fee Related
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1989004858A1 (en) * | 1987-11-27 | 1989-06-01 | Battelle Memorial Institute | Supercritical fluid reverse micelle separation |
WO1994001512A1 (en) * | 1992-07-10 | 1994-01-20 | E.I. Du Pont De Nemours And Company | Azeotropic compositions of perfluoroethane, and trifluoromethane, or oxide, or nitrous oxide, or carbon dioxide, or fluoromethane |
DE4306645A1 (en) * | 1993-03-03 | 1994-09-08 | David Jackson | Method for cleaning, sterilising and implanting substrates by means of a high-energy compressed fluid |
DE4309734A1 (en) * | 1993-03-25 | 1994-09-29 | Akzo Nobel Nv | Process for cleaning hollow fibers |
DE4333221A1 (en) * | 1993-09-30 | 1995-04-06 | Deutsches Textilforschzentrum | Process for decolouring substrates made from plastic, in particular synthetic fibres |
WO1997016264A1 (en) * | 1995-11-03 | 1997-05-09 | The University Of North Carolina At Chapel Hill | Novel cleaning process using carbon dioxide as a solvent and employing molecularly engineered surfactants |
EP0828021A2 (en) * | 1996-09-09 | 1998-03-11 | Air Liquide America Corporation | Continuous cleaning apparatus and method |
EP0836895A2 (en) * | 1996-10-16 | 1998-04-22 | International Business Machines Corporation | Residue removal by supercritical fluids |
WO1999056892A1 (en) * | 1998-05-06 | 1999-11-11 | Steris Corporation | Sub-critical fluid cleaning and antimicrobial decontamination sysstem and process |
DE19903243A1 (en) * | 1999-01-28 | 2000-08-03 | Linde Tech Gase Gmbh | Process for the purification of materials and/or surfaces is carried out using a liquefied and/or super critical gas as cleaning agent |
WO2002032593A1 (en) * | 2000-10-20 | 2002-04-25 | Commissariat A L'energie Atomique | Method, device and installation for cleaning contaminated parts, with a dense pressurised fluid |
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Publication number | Publication date |
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DE10236491A1 (en) | 2004-02-19 |
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