DE102022129356A1 - Vacuum valve - Google Patents

Abstract

Vacuum valve with a valve body (2) with a valve seat (3), a valve plate (5) pivotably mounted via a pivot arm (4), a drive train (6) for the valve plate (5), by means of which the valve plate (5) can be moved from an open position into a closed position, wherein the drive train (6) has a rotary body (7) rotatable about an axis of rotation (X), and a drive (8) which is linked to the rotary body (7) in order to rotate the rotary body (7), wherein the drive train (6) is designed such that the valve plate (5) is in the open position when the rotary body (7) is in a first rotary position, the valve plate (5) is in an intermediate position when the rotary body (7) is in a second rotary position, the valve plate (5) is in the closed position when the rotary body (7) is in the third rotary position, and the drive train (6) is designed such that rotation of the rotary body (7) from the second rotary position to the third rotational position leads to an axial closing movement of the swivel arm (4) with respect to the rotation axis (X), by means of which the valve plate (5) is transferred into the closed position in which the valve plate (5) contacts the valve seat (3).

Description

The present invention relates to a vacuum valve according to the features of the preamble of claim 1.

• - einen Ventilkörper mit einem Ventilsitz,
• - einem über einen Schwenkarm schwenkbar gelagerten Ventilteller,
• - einem Antriebsstrang für den Ventilteller, mittels welchem der Ventilteller aus einer geöffneten Stellung in eine geschlossene Stellung bewegbar ist, wobei der Antriebsstrang einen um eine Drehachse drehbaren Drehkörper aufweist, sowie
• - einem Antrieb, der zum Drehen des Drehkörpers am Drehkörper anlenkt,

wobei der Antriebsstrang so ausgebildet ist, dass

• - sich der Ventilteller in der geöffneten Stellung befindet, wenn sich der Drehkörper in einer ersten Drehstellung befindet,
• - sich der Ventilteller in einer Zwischenstellung befindet, wenn sich der Drehkörper in einer zweiten Drehstellung befindet, und
• - sich der Ventilteller in der geschlossenen Stellung befindet, wenn sich der Drehkörper in der dritten Drehstellung befindet.

Such vacuum valves contain

• - a valve body with a valve seat,
• - a valve plate pivoted via a pivot arm,
• - a drive train for the valve plate, by means of which the valve plate can be moved from an open position to a closed position, wherein the drive train has a rotating body rotatable about a rotation axis, and
• - a drive which is connected to the rotating body to rotate the rotating body,

wherein the drive train is designed such that

• - the valve disc is in the open position when the rotary body is in a first rotary position,
• - the valve disc is in an intermediate position when the rotary body is in a second rotary position, and
• - the valve disc is in the closed position when the rotary body is in the third rotation position.

Vacuum valves with a valve plate, which are mounted on a swivel arm, are also called vacuum pendulum valves.

Such valves are characterized by a relatively simple design and therefore low-cost production.

However, the applicant has determined that seals of vacuum pendulum valves have a service life that can be improved in vacuum processes that contain aggressive process gases. This is because these seals are subjected to a double load, on the one hand by the aggressive process gases and on the other hand by the tribological loads during the opening and closing of the vacuum pendulum valve.

Also known in the prior art are vacuum valves of other types, wherein the opening and closing movements are divided into two separate movement phases, typically a phase in which a valve body is brought close to the valve seat and a phase in which the valve body is pressed against the valve seat.

However, such vacuum valves are much more complex and in many cases contain additional drives or a very complex drive train.

It would therefore make little sense to use these complex drive trains in a vacuum pendulum valve because this would negate the advantage of the vacuum pendulum valve of being particularly simple to design and manufacture.

The object of the present invention is therefore to provide a vacuum valve which, on the one hand, retains the simple basic structure of a vacuum pendulum valve - at least essentially - and which, on the other hand, causes a lower load on the seals.

This object is achieved by the features of claim 1, namely in that the drive train is designed such that rotation of the rotating body from the second rotational position to the third rotational position leads to an axial closing movement of the pivot arm with respect to the axis of rotation, by means of which the valve plate is transferred to the closed position in which the valve plate contacts the valve seat.

Due to the axial closing movement, the valve disk is contacted vertically or at least approximately vertically with the valve seat, which minimizes the tribological loads on the seals, so that even in vacuum processes with aggressive process gases, at least acceptable and, in many designs, greatly improved service lives of the seals can be achieved.

This is achieved by an additional rotating body which is integrated into the drive train in such a way that turning the rotating body from the second rotation position to the third rotation position allows a different type of movement of the swivel arm than pure rotation.

This results in a further advantage of the invention, namely that the vacuum valve according to the invention can be realized with only one drive - for example a pneumatic cylinder - although the pivoting movement and the axial closing movement of the pivot arm together with the valve plate are separated from each other.

In preferred embodiments of the invention, the valve plate is not only contacted with the valve seat, but a contact force is also exerted by means of which the valve plate is pressed onto the valve seat, thereby achieving a higher sealing The vacuum valve's integrity can be achieved by compressing the seals.

It should be noted that the invention can be implemented in such a way that the pivoting movement of the pivot arm together with the valve disk on the one hand and the axial closing movement on the other hand can be carried out sequentially. In other embodiments, a certain component of the pivoting movement can also occur during the axial closing movement.

In preferred embodiments, in the final phase of the closing movement there is only an axial movement, wherein the final phase is, for example, at least 2%, preferably at least 5% and particularly preferably at least 10% and/or.
25% and/or 50% of the stroke of the axial closing movement.

Particularly preferably, the final phase may include pressing the valve disk onto the valve seat.

Particularly preferably, the valve seat includes an opening geometry such that a fluid connection exists through the vacuum valve when the valve disk is in the open position.

In particularly preferred embodiments, the valve plate in the intermediate position overlaps the valve seat, in particular the opening geometry, at least partially, preferably completely, in an axial view of the opening geometry and/or the valve plate. It should be noted that the axis of this axial view is generally different from the axis of rotation of the invention because the valve plate is pivoted out of the overlapping intermediate position by means of the pivot arm in the open position.

In the intermediate position, the valve disk preferably does not yet contact the valve seat, so that the seals on the valve seat are protected and are only subjected to tribological stress when the actual closed position is present.

In the closed position, the valve disk contacts the valve seat. This preferably closes the opening geometry, thereby interrupting the fluid connection.

In particularly preferred embodiments, the valve plate can be rigidly and/or motion-lockingly connected to the swivel arm.

Preferred embodiments of the invention are defined in the dependent claims.

• - sich der Ventilteller in einer gesicherten Stellung befindet, wenn sich der Drehkörper in einer vierten Drehstellung befindet, und
• - ein Drehen des Drehkörpers von der ersten Drehstellung in die vierte Drehstellung zu einer in Bezug auf die Drehachse axialen Sicherungsbewegung des Schwenkarms führt, mittels welcher der Ventilteller in die gesicherte Stellung überführt wird, in welcher der Ventilteller den Ventilkörper des Vakuumventils kontaktiert.

In preferred embodiments, the drive train can be designed so that

• - the valve disc is in a secured position when the rotary body is in a fourth rotation position, and
• - rotation of the rotating body from the first rotational position to the fourth rotational position leads to an axial securing movement of the swivel arm with respect to the axis of rotation, by means of which the valve plate is transferred to the secured position in which the valve plate contacts the valve body of the vacuum valve.

In preferred embodiments, the secured position of the valve disk is located in a gap that can provide a certain degree of protection against aggressive process gases.

In particularly preferred embodiments, a control cam and an engagement element can be provided, wherein the control cam interacts with the engagement element in such a way that the rotation of the rotary body from the second rotational position to the third rotational position leads to the axial closing movement of the pivot arm with respect to the axis of rotation, by means of which the valve disk is transferred into the closed position.

This represents a particularly simple possibility to realize the function of the drive train according to the invention.

It can also be provided that the control cam interacts with the engagement element in such a way that the rotation of the rotary body from the first rotational position to the fourth rotational position leads to the axial securing movement of the swivel arm with respect to the axis of rotation, by means of which the valve disk is transferred to the secured position.

The control cam can preferably be a guide slot, for example in the form of an elongated hole, which preferably runs with an axial component in order to be able to realize the axial closing movement.

The engagement element, which interacts with the control cam, can, for example, be a bolt-shaped element, which interacts with the control cam, in particular the guide slot.

• - am niedrigsten Punkt an der Spitze der V-förmigen Grundform befindet, wenn sich der Drehkörper in der ersten Drehstellung und/oder der zweiten Drehstellung befindet, (geöffnete Stellung und Zwischenstellung)
• - an einem der oberen Enden der V-förmigen Grundform befindet, wenn sich der Drehkörper in der dritten Drehstellung befindet, (geschlossene Stellung) und/oder
• - an einem anderen der oberen Enden der V-förmigen Grundform befindet, wenn sich der Drehkörper in der vierten Drehstellung befindet, (gesicherte Stellung)

In particularly preferred embodiments, the control cam and/or the guide slot can have a V-shaped basic shape, wherein the engagement element

• - at the lowest point at the top of the V-shaped base when the rotation body is in the first rotation position and/or the second rotation position (open position and intermediate position)
• - located at one of the upper ends of the V-shaped base when the rotary body is in the third rotation position (closed position) and/or
• - at another of the upper ends of the V-shaped base shape when the rotating body is in the fourth rotation position (secured position)

In other embodiments, alternatively or in addition to the control cam, threaded surfaces can also be used, which convert a rotation of the rotating body from the second rotational position to the third rotational position into an axial movement.

The control cam can preferably be arranged on the rotary body. This can allow particularly simple embodiments because the rotary body can be used as an additional component, for example in comparison to a known vacuum pendulum valve, to pull the engagement element axially in order to realize the axial closing movement and/or the axial securing movement.

In other embodiments, the control cam can also be arranged, for example, on a shaft of the swivel arm or in the valve body or in a housing of the drive train of the vacuum valve.

As already mentioned, the swivel arm can be connected in a rotationally fixed manner to a shaft that can rotate about the axis of rotation.

In this case, it can be particularly preferably provided that the engagement element is connected to the shaft in a movement-locking manner. In the context of this document, the engagement element being connected to the shaft in a movement-locking manner can be understood to mean that a movement of the engagement element via a substantially rigid or other mechanical connection leads to a corresponding movement of the shaft. For example, in particularly preferred embodiments, an axial movement of the engagement element in cooperation with the control cam will lead to the axial closing movement of the swivel arm together with the valve plate.

In other embodiments, for example, the control cam can be arranged on a housing of the drive train or the valve body of the vacuum valve or on the shaft and the engagement element on the rotating body.

The rotary body can be designed in at least two parts, wherein a first rotary part body and a second rotary part body are motion-coupled in a form-fitting manner, preferably via a pin engaging in a groove.

The fact that the first rotary part body and the second rotary part body are coupled in terms of movement can be understood to mean that there is a coupling of the rotary positions (first, second, third and/or fourth). In preferred embodiments, the first rotary part body and the second rotary part body can also be coupled in the axial position along the axis of rotation.

In preferred embodiments, an axial position of the rotary body with respect to the valve body is fixed.

The control cam can preferably be arranged on the second rotating part body.

At least one spring element can be provided which axially preloads the pivot arm and/or the shaft - preferably against the direction of the axial closing movement.

Embodiments of this type may be particularly preferred because they make it easy to ensure that the pivot arm and/or the shaft rotate with the rotating body when the rotating body rotates from the first rotational position to the second rotational position, for example by pressing the engagement element onto that part of the (preferably V-shaped) control cam which does not realize the axial closing movement.

In this case, at least one spring element can preferably be supported on the rotating body.

Embodiments in which the at least one spring element preloads the pivot arm and/or the shaft in the direction of the axial closing movement are of course also conceivable in principle.

When rotating the rotating body from the second rotation position to the third rotation position, the drive can overcome the spring preload, which enables the axial closing movement.

The drive can overcome the spring preload when rotating the rotating body from the first rotation position to the fourth rotation position, which enables the axial locking movement.

A stop element can preferably be provided which determines a pivoting position of the pivot arm and/or the shaft about the axis of rotation, preferably inhibiting further rotation of the pivot arm and/or the shaft when the Rotating body is rotated from the second rotational position to the third rotational position.

In preferred embodiments, this pivoting position characterizes the intermediate position of the valve plate in which the valve plate overlaps the opening geometry of the valve seat.

Preferably, a further stop element can be provided which determines a further pivoting position of the pivot arm and/or the shaft about the axis of rotation, preferably inhibiting a further rotational movement of the pivot arm and/or the shaft when the rotary body is rotated from the first rotational position to the fourth rotational position.

In preferred embodiments, this further pivoting position characterizes a further intermediate position of the valve disk, in which the valve disk overlaps that part of the housing which the valve disk contacts in the secured position.

In particularly preferred embodiments, the engagement element can form a counterpart to the stop element.

In other words, a physical element (or several similarly designed physical elements), for example in the form of a bolt and/or connected to the shaft in a movement-locking manner, takes on the function of the engagement element in the control cam and the counterpart to the stop element, which defines the pivoting position of the pivot arm in the intermediate position (and preferably the closed position) of the valve disk.

In particularly preferred embodiments, the engagement element also forms the role of a counterpart to the further stop element, which defines the further pivoting position of the pivot arm in the further intermediate position (and the secured position) of the valve disk.

In other embodiments, a counterpart to the stop element and/or to the further stop element could be arranged separately from the engagement element, for example on the pivot arm and/or on the shaft.

The valve disk and/or the valve seat may have at least one seal which contacts the valve seat and/or the valve disk in the closed position and/or the open position.

This means that if the at least one seal is arranged on the valve plate, the at least one seal arranged on the valve plate contacts the valve seat.

The seal arranged on the valve plate can preferably contact the valve body in the secured position.

The drive can preferably be designed as a piston-cylinder unit, preferably as a pneumatic piston-cylinder unit.

The drive can be connected to the rotating body via an eccentric and the eccentric can have a slotted hole with which a drive element of the drive interacts.

Such embodiments are particularly simple in design and nevertheless allow reliable actuation of the valve disk in the open position, the intermediate position and the closed position as well as, if necessary, the secured position.

• 1a bis 1d verschiedene Darstellungen eines Ausführungsbeispiels der Erfindung in einer gesicherten Stellung,
• 2a bis 2d verschiedene Darstellungen eines Ausführungsbeispiels der Erfindung in einer Zwischenstellung,
• 3a bis 3d verschiedene Darstellungen eines Ausführungsbeispiels der Erfindung in einer geschlossenen Stellung,
• 4a und 4b eine Seitendarstellung und eine Explosionsdarstellung eines Antriebsstrangs eines Ausführungsbeispiels der Erfindung,
• 5a bis 5c verschiedene Darstellungen eines Ausführungsbeispiels der Erfindung im Bereich eines Antriebs sowie
• 6a bis 6c verschiedene Ansichten eines Ausführungsbeispiels der Erfindung.

Further details and advantages of the invention emerge from the figures and the associated figure description. Shown are:

• 1a to 1d various representations of an embodiment of the invention in a secured position,
• 2a to 2d various representations of an embodiment of the invention in an intermediate position,
• 3a to 3d various representations of an embodiment of the invention in a closed position,
• 4a and 4b a side view and an exploded view of a drive train of an embodiment of the invention,
• 5a to 5c various representations of an embodiment of the invention in the area of a drive and
• 6a to 6c different views of an embodiment of the invention.

1a shows a view from above of an embodiment of a vacuum valve 1 according to the invention. 1b shows the analog view from below.

Firstly, the valve body 23 and a valve opening can be seen, through which a fluid connection can be established through the vacuum valve 1 when the valve plate 5 is not in the closed position.

The valve plate 5 is mounted on a swivel arm 4 which can be pivoted about a rotation axis X.

By pivoting the pivot arm 4 around the axis of rotation X, the valve plate can be pivoted so that it overlaps the valve opening (see 2a to 2d and 3a to 3d ).

In 1c is a section through the plane AA through the vacuum valve 1 from 1a and 1b so that the drive train 6 is partially visible.

The swivel arm 4 is connected to a shaft 11 in a movement-locking manner.

In this embodiment, this is done via a screw that passes lengthwise through the shaft 11.

The shaft 11 is arranged concentrically with the axis of rotation X and can rotate about this axis of rotation X.

In this embodiment, the shaft 11 passes through the rotating body 7.

The rotating body 7 is arranged concentrically with the rotation axis X and can rotate about the rotation axis X.

In principle, embodiments are also conceivable in which the rotation axis X of the rotating body 7 does not correspond to the pivot axis of the shaft 11 and/or the pivot arm 4.

In this embodiment, the rotating body 7 is divided into two parts and has a first rotating body 12 and a second rotating body 13.

Spring elements 16 exert a spring load on the shaft 11, whereby the spring elements 16 are supported on the first rotating part body 16. The function of the spring elements 16 will be discussed a little further below.

In this case, several spring elements 16 are provided, which are evenly distributed around the shaft 11 and which are designed as spiral springs.

In the position of 1a to 1d the valve plate 5 is in a secured position, wherein the valve plate 5 contacts the valve body 2 in this position and the rotary body 7 is in the fourth rotary position.

1d shows a perspective view of the drive train 6 of the embodiment from the 1a to 1c .

What can be seen is a bolt-shaped engagement element 10 which is connected to the shaft 11 in a movement-locking manner and which interacts with a control cam 9. The control cam 9 and the engagement element 10 will also be discussed in more detail below.

It should also be mentioned that the engagement element 10 acts as a counterpart to the stop element 17, through the interaction of which the pivot position for the intermediate position and the closed position is defined by inhibiting a further rotational movement of the pivot arm 4 and/or the shaft 11 when the rotary body 7 is rotated from the second rotational position to the third rotational position.

The same applies to the engagement element 10 and the further stop 18, which, through their interaction, define the pivot position for the secured position by inhibiting further rotation of the pivot arm 4 and/or the shaft 11 when the rotary body 7 is rotated from the first rotation position to the fourth rotation position. The 1a to 1d , as mentioned, the secured position, with the rotating body 7 in the fourth rotational position.

2a to 2d are analogous to the 1a to 1d , whereby the valve plate 5 is in the intermediate position, whereby the valve plate 5 does indeed contact the valve seat 3 (see 1c ) but has not yet contacted it.

In this position, the rotating body 7 is in the second rotational position, wherein the engagement element 10 interacts with the stop element 17.

The positions between the 1a to 1d shown secured position and the one in 2a to 2d The intermediate positions shown are called open positions. This is also referred to 4a , which also shows an open position.

3a to 3d are analogous to those from the 1a to 1d or 2a to 2d, with the valve disk 5 in the closed position.

The seal 19 of the valve plate 5 contacts the valve seat 3, whereby a fluid connection through the valve opening 23 is prevented (with very high tightness).

The positions between the 2a to 2d shown intermediate position and the one in 3a to 3d The closed positions shown are also referred to as intermediate positions.

In the closed position, the rotary body 7 is in the third rotary position, wherein the engagement element 10 interacts with the stop element 17 as in the intermediate positions.

The axial movement of the shaft 11, the swivel arm 4 and the valve plate 5 is generated in this embodiment by the interaction of the engagement element 10 with the control cam 9, which in conjunction with the 4a and 4b described.

4a shows a side view of the drive train 6 embodiment from the previous figures. 4b shows an exploded view of the same.

The drive 8, in this embodiment a pneumatic piston-cylinder unit, is connected to the first rotating part body 12 via an eccentric 20.

For this purpose, a drive element is provided, which here is designed in the form of a bolt guided in a slot 21 on the eccentric 20.

The second rotating part body 13 is rotationally connected to the first rotating part body 12. This is done by a pin 15 which is arranged on the second rotating part body 13 and interacts with a groove 14 on the first rotating part body 12. Of course, embodiments are also conceivable in which the groove 14 and the pin 15 are arranged in reverse.

In this way, the drive 8 can bring the rotary body 7 into the first rotary position, the second rotary position, the third rotary position and the fourth rotary position as well as all rotary positions in between.

It can be seen that the control curve 9 is designed as a guide slot and V-shaped, with the lowest point at the tip of the V-shaped groove in 4a pointing downwards,

As already mentioned, the shaft 11 is preloaded via the spring elements 16 in the direction in which the lowest point of the control cam 9 points. In fact, “down” could be defined here by the direction in which the spring load acts on the shaft 11.

As already mentioned, the engagement element 10 is connected to the shaft in a movement-locking manner and interacts with the control cam 9, i.e. passes through the guide slot.

For easy connection of the bolt-shaped engagement element 10 with the shaft 11, the latter is guided through a radial bore in the shaft.

Due to the spring preload by the spring elements 16, the engagement element 10 is pressed to the lowest point of the control curve 9, whereby the shaft 11 rotates with the rotating body 7 as long as the engagement element 10 does not come into contact with the stop element 17 or the further stop element 18 (see 4a) .

If the rotary body 7 is now rotated into the second rotational position so that the valve plate 5 is in the intermediate position, the engagement element 10 comes into contact with the stop element and prevents further rotation of the shaft 11 and thus further pivoting movement of the pivot arm 4 and the valve plate 5.

If the rotating body 7 is now moved from this second rotational position (see 2a to 2d ) is rotated further into the third rotational position, the engagement element together with the shaft 11, the swivel arm 4 and the valve plate 5 is raised by the control cam 9, ie moved in the axial direction while overcoming the spring preload of the spring elements 16.

As soon as the end of the control curve 9 is reached, the rotary body 7 is in the third position and the valve disk is pressed against the valve seat by the aforementioned axial movement along the axis of rotation X (see 3a to 3d ).

In an analogous manner, the valve disk 5 is moved to the secured position (see 1a to 1d ) is raised when the engagement element 10 is rotated by means of the drive 8 from the first rotational position of the rotating body into the fourth rotational position.

5a to 5c show various representations of the embodiment from the previous figures in the area of the drive 8.

It can be seen that the pneumatic piston-cylinder unit is integrated into the valve body 2 of the vacuum valve 1, i.e. the valve body 2 itself forms the cylinder for the piston-cylinder unit.

6a to 6c are further illustrations of the embodiment from the previous figures, where the vacuum valve 1 in 6c is presented as a whole and in 6b is shown partially cut.

In alternative embodiments of the invention, for example, an element other than the engagement element 10 could be used as a counterpart to the Stop element 17 and/or the further stop element 18.

In further embodiments, for example, partial threads or the like could serve instead of a control curve and an engagement element to selectively convert the rotational movement of the rotary body 7 into an axial movement.

A basic aspect of the invention is that both a pivoting movement and an axial movement for the valve plate 5 can be realized by a single drive 8. Of course, embodiments with more than one drive are also conceivable in principle.

Legend

1

Vacuum valve

2

Valve body

3

Valve seat

4

Swivel arm

5

Valve plate

6

Drivetrain

7

Rotating body

8th

drive

9

Control curve

10

Engagement element

11

Wave

12

first turned part body

13

second rotary part body

14

Groove

15

cone

16

Spring element

17

Stop element

18

additional stop element

19

poetry

20

eccentric

21

Long hole

22

Drive element

23

Valve opening

X

Rotation axis

Claims (14)

Vacuum valve with - a valve body (2) with a valve seat (3), - a valve plate (5) pivotably mounted via a pivot arm (4), - a drive train (6) for the valve plate (5), by means of which the valve plate (5) can be moved from an open position to a closed position, wherein the drive train (6) has a rotary body (7) that can be rotated about an axis of rotation (X), and - a drive (8) that is linked to the rotary body (7) in order to rotate the rotary body (7), wherein the drive train (6) is designed such that - the valve plate (5) is in the open position when the rotary body (7) is in a first rotary position, - the valve plate (5) is in an intermediate position when the rotary body (7) is in a second rotary position, and - the valve plate (5) is in the closed position when the rotary body (7) is in the third rotary position, characterized in that the drive train (6) is designed such that rotation of the Rotating body (7) from the second rotational position to the third rotational position leads to an axial closing movement of the pivot arm (4) with respect to the axis of rotation (X), by means of which the valve plate (5) is transferred into the closed position in which the valve plate (5) contacts the valve seat (3). Vacuum valve after Claim 1 , characterized in that a control cam (9) and an engagement element (10) are provided, wherein the control cam (9) cooperates with the engagement element (10) such that the rotation of the rotary body (7) from the second rotational position into the third rotational position leads to the axial closing movement of the pivot arm (4) with respect to the axis of rotation (X), by means of which the valve plate (5) is transferred into the closed position. Vacuum valve after Claim 2 , characterized in that the control cam (9) is arranged on the rotating body (7). Vacuum valve according to one of the preceding claims, characterized in that the pivot arm (4) is connected in a rotationally fixed manner to a shaft (11) which is rotatable about the axis of rotation (X). Vacuum valve according to Claims 2 and 4 , characterized in that the engagement element (10) is connected in a movement-locking manner to the shaft (11). Vacuum valve according to one of the preceding claims, characterized in that the rotary body (7) is designed in at least two parts, wherein a first rotary part body (12) and a second rotary part body (13) are movement-coupled in a form-fitting manner, preferably via a pin (15) engaging in a groove (14). Vacuum valve according to one of the preceding claims, characterized in that at least one spring element (16) is provided which axially preloads the pivot arm (4) and/or the shaft (11) - preferably against the direction of the axial closing movement. Vacuum valve after Claim 7 , characterized in that the at least one spring element (16) is supported on the rotating body (7). Vacuum valve according to one of the preceding claims, characterized in that a stop element (17) is provided which determines a pivoting position of the pivot arm (4) and/or the shaft (11) about the axis of rotation (X), preferably inhibits a further rotational movement of the pivot arm (4) and/or the shaft (11) when the rotary body (7) is rotated from the second rotational position into the third rotational position. Vacuum valve according to Claims 2 and 9 , characterized in that the engagement element (10) forms a counterpart to the stop element (17). Vacuum valve according to one of the preceding claims, characterized in that the drive train (6) is designed such that - the valve plate (5) is in a secured position when the rotary body (7) is in a fourth rotary position, and - rotating the rotary body (7) from the first rotary position to the fourth rotary position leads to an axial securing movement of the pivot arm (4) with respect to the axis of rotation (X), by means of which the valve plate (5) is transferred to the secured position in which the valve plate contacts the valve body (2) of the vacuum valve (1). Vacuum valve according to one of the preceding claims, characterized in that the valve plate (5) and/or the valve seat (3) has at least one seal (19) which the valve seat and/or the valve plate (5) contacts in the closed position, wherein preferably the seal (19) arranged on the valve plate (5) contacts the valve body (2) in the secured position. Vacuum valve according to one of the preceding claims, characterized in that the drive (8) is designed as a piston-cylinder unit, preferably as a pneumatic piston-cylinder unit. Vacuum valve according to one of the preceding claims, characterized in that the drive (8) is linked to the rotary body (7) via an eccentric (20) and that an elongated hole (21) is present in the eccentric (20), with which elongated hole (21) a drive element (22) of the drive (8) cooperates.