DE102022122315A1 - METHOD AND DEVICE FOR PRODUCING A SUPPORT STRUCTURE, SUPPORT STRUCTURE AND OPTICAL DEVICE WITH A SUPPORT STRUCTURE - Google Patents

Abstract

The present invention relates to a method for producing a support structure (10) for supporting at least one functional unit (20), preferably for an optical device, in a reaction space (30), comprising: providing a liquid medium (40) for shaping the support structure (10 ) during production and/or in a production state, preferably in a receiving device (53), which is designed to be half-open at least in sections; Moving the liquid medium (40) and producing a shaping surface (40.1) of the liquid medium (40), preferably by driving the receiving device (53) by means of a drive device (54) or by driving a device (1) which has a reaction space (30 ) comprises, in which the receiving device (53) is arranged; Providing a reaction material (W) to form the support structure (10), preferably by means of at least one inlet device (51), wherein the at least one inlet device (51) and the receiving device (53) are arranged at a distance from one another in the reaction space (30); Applying the reaction material (W) to the shaping surface (40.1); Building the support structure (10) using the applied reaction material (W). The invention further relates to a device (1) for producing the support structure (10), a support structure (10) and an optical device with at least one support structure (10).

Description

The present invention lies in the field of coating processes and relates to a device and a method for producing a support structure, a support structure and an optical device with a support structure.

Coating processes in the form of physical and chemical coating processes are known in numerous variants and applications from the prior art. For example, the term “physical vapor deposition” refers to a group of coating processes that take place in a vacuum environment. Here, a starting material is converted into the gaseous state of aggregation, i.e. into the gas phase, using physical processes and then led to a substrate or object to be coated. The gaseous starting material then condenses and a coating is formed on the substrate or on the object, which consists of the starting material in a solid state. Such methods are used, for example, in microelectronics and are used to coat, for example, electronic components made of semiconductor materials.

The so-called “chemical vapor deposition” refers to a group of coating processes in which a solid of gaseous starting material is deposited and formed on a surface of a substrate or an object due to chemical reactions. In other words, at least one chemical reaction takes place on the surface of the substrate or object. As a rule, a solid layer of the gaseous material is deposited at certain pressure and temperature conditions or in certain pressure and temperature ranges.

Coating processes are also known from the prior art patent literature.

In US patent application No. US 2003/0223135 A1 A method for producing a parabolic membrane mirror is described. A liquid contained in a cylindrical container is rotated across the cylindrical container to create a parabolic inverted mandrel. A quickly hardening, liquid polymer is then poured into the inverted mandrel in order to thereby form a substrate of the membrane mirror. After the substrate has cured, a reflective coating is formed by applying a curing and reflective substrate.

In US patent application No. US 2002/0126726 A1 A method for producing an optical membrane device (“MEMS membrane”) with an integral mirror and an optically curved surface is described. A silicon-based disk (“silicon wafer”) acts as a carrier, which is oxidized to form an insulating sacrificial/separating layer and further define an electrostatic cavity. A curved optical layer is applied to the sacrificial/separation layer by deposition through a silicon wafer material, which is then selectively removed. The formation of the curved surface can also be done by polishing or alternatively by etching.

From published European patent specification no. EP 1 672 394 B1 a process for producing a selective membrane from parylene is known. The method includes providing a container with a liquid, such as oil. The liquid and the rim of the container are covered with a homogeneous, continuous thin film of parylene using a low pressure deposition process. The layer of parylene forms the membrane and adheres to the container. After the layer is formed, the liquid is drained from the container, leaving the thin layer in its original location, thus forming a film of parylene stretched between the walls of the container. Micro-holes are then added to the film using laser ablation to form the selective membrane. The film can also be made porous using ion etching. The selective membrane serves as a filter for a gas or other fluid.

It is an object of the present invention to provide an improved method and an improved device for producing a support structure for supporting at least one functional unit, preferably in the form of an optically active coating or at least one optically active layer. Furthermore, it is an object of the present invention to provide a support structure for supporting the at least one functional unit, the preferably mechanical-structural and/or geometric properties of which are improved. It is also an object of the present invention to provide an optical device with such a support structure. It is a further object of the present invention to provide a mirror, in particular a parabolic mirror or spherical mirror or membrane mirror, with a predetermined focal length, as well as a method for producing the same.

The task is solved by the features of claims 1, 10, 13, 14, 19 and 20. Further embodiments and applications of the present invention emerge from the dependent ones Claims and are explained in more detail in the following description with partial reference to the figures.

According to a first general aspect, the present invention relates to a method for producing a support structure for supporting at least one functional unit, preferably for an optical device, in a reaction space, comprising: providing a liquid medium for shaping the support structure during production and/or in a production state , preferably in a receiving device which is designed to be half-open at least in sections; Setting in motion and/or moving the liquid medium and producing a shaping surface of the liquid medium, preferably by driving the receiving device by means of a drive device or by driving a device which comprises a reaction space in which the receiving device is arranged; Providing a reaction material to form the support structure, preferably by means of or via at least one inlet device, wherein the at least one inlet device and the receiving device are arranged at a distance from one another in the reaction space; Applying, preferably depositing, the reaction material onto the shaping surface; Building the support structure using the applied, preferably deposited, reaction material.

The method according to the present invention preferably represents a coating method in which the material of the coating and thus the reaction material forms the support structure. Furthermore, the method according to the present invention is characterized in that a liquid medium set in motion and thus a liquid serves as the form of the support structure to be produced. In particular, the moving surface of the liquid medium contributes to the shaping of the support structure in the course of its production using the reaction material.

Deposition preferably includes a direct and/or immediate transition or transfer of the reaction material from a gaseous state of matter into a solid state of matter. A liquid state of matter is therefore omitted.

With the present method, for example, a substantially rotationally symmetrical support structure can be formed from a reaction material, which is also essentially homogeneous over its entire extent, for example. The support structure can preferably be an arched or curved support structure. The support structure can be sufficiently dimensionally stable to support the at least one functional unit. The at least one functional unit can preferably be a coating or at least a layer and ensure a specific functionality. For example, the at least one functional unit can be a layer made of a light-reflecting metallic material, for example aluminum or gold.

The method according to the present invention can be characterized by further features, which are described in more detail below.

The reaction material can be formed as a gaseous and/or depositable reaction material, at least before the support structure is built. Additionally or alternatively, the reaction material can be formed as a solid reaction material, at least after the support structure has been built. The support structure produced can therefore preferably be characterized by defined geometric dimensions after production and, for example, have a substantially constant thickness. The reaction material in the sense of the present invention is preferably a reactive material which builds up the support structure only by applying, preferably depositing, onto the shaping surface, preferably continuously or preferably continuously. In other words, the reaction material during application and/or during construction is a self-reacting, preferably chemically reacting, material which builds up the support structure by generating chemical bonds. The reaction material is preferably a sublimable and/or resublimable material.

According to a further aspect of the present invention, the method may include: vaporizing, preferably by heating to a specific temperature or a specific temperature range, the reaction material and/or converting the reaction material from a solid state of matter into a gaseous state of matter, preferably in an evaporation device, and/or or pyrolyzing and thus dividing the reaction material, preferably in a pyrolysis device and at certain pressure and temperature conditions or in certain pressure and temperature ranges. The reaction material can be such that it sublimes under certain temperature conditions and/or pressure conditions, that is to say it changes or transitions from a solid state of matter directly into a gaseous state of matter and vice versa. The reaction material can be converted into a reactive material primarily through pyrolysis Condition must be brought to produce the supporting structure by building it accordingly.

Building the support structure can include: enriching, preferably adsorbing, the reaction material on the shaping surface, and/or generating chemical bonds in the reaction material, and/or building the support structure in the form of at least one layer and/or at least one membrane, which preferably has a has a substantially constant thickness and/or is essentially homogeneous.

Building the support structure by creating chemical bonds thus preferably includes solidifying the reaction material in order to achieve a defined or sufficient dimensional stability.

Setting in motion and/or moving the liquid medium may include: rotating the liquid medium or setting the liquid medium in rotation at an adjustable speed, preferably by means of the drive device and/or depending on at least one operating condition and/or geometric size of the support structure; and/or forming the shaping surface, which is curved or curved at least in sections, preferably paraboloid-shaped and/or concave and thus in the form of a paraboloid. Preferably, the speed (rotational/angular speed of the recording device and the liquid medium in the state in which the liquid medium has assumed the rotational speed of the recording device) is set depending on a focal length of the mirror to be produced. In other words, it can be provided: setting a speed, preferably rotational speed, of the recording device and/or the liquid medium depending on a focal length of a mirror to be produced, wherein preferably the liquid medium has essentially assumed the speed, preferably rotational speed, of the recording device. The rotational movement advantageously forms the at least partially curved or curved surface.

According to a further aspect of the present invention, the method may include: generating a negative pressure and/or preferably a vacuum in the reaction space at least before providing the reaction material, preferably by means of or via at least one outlet device and a pump device, the pump device being arranged outside the reaction space , and/or wherein the at least one outlet device and the receiving device are arranged at a distance from one another in the reaction space.

By generating negative pressure and preferably a vacuum, a reaction space can be provided which is, for example, essentially free of foreign substances. Furthermore, this can ensure a substantially uniform distribution of the reaction material in the reaction space.

By generating, preferably continuously generating, and/or providing a vacuum, preferably a high vacuum, in the reaction space, for example, an improved construction of the support structure is realized by the reaction material, preferably by deposition from the gaseous aggregate state.

It is possible for the method to comprise: directed distribution of the reaction material at at least one defined location in the reaction space, preferably in the direction of the shaping surface, preferably by means of at least one distribution device, the at least one distribution device being connected to the at least one inlet device. The distribution device can, for example, comprise at least one nozzle device and/or at least one guide device in order to direct the reaction material in a defined direction, at least in the area or on the distribution device.

According to a further aspect of the present invention, the method can include: detecting a geometric size, preferably a thickness, of the support structure during the application of the reaction material and / or construction of the support structure, preferably by means of at least one measuring device for detecting the geometric size, wherein the at least one Measuring device is arranged in the reaction space, and / or wherein the at least one measuring device and the recording device are arranged at a distance from one another in the reaction space.

This can, for example, ensure more or less continuous monitoring of the construction of the support structure. Depending on the detected thickness of the support structure, for example, the volume flow of the reaction material into the reaction space can be regulated or controlled.

It is possible for the method to comprise: setting at least one operating condition of the method, preferably by means of a control device, wherein the at least one operating condition comprises at least one of the following: a Temperature in the reaction space, a temperature of the reaction material before being provided into the reaction space, a pressure in the reaction space, a temperature of the liquid medium; a period of time for providing the reaction material, a volume flow of the reaction material, and/or a drive speed of the receiving device, and/or a volume flow of the reaction material.

According to a second general aspect, the present invention relates to a support structure for supporting at least one functional unit, preferably for an optical device, wherein the support structure is manufactured according to a method as disclosed herein, wherein the support structure is dimensionally stable at least in sections at least in the manufacturing state, and/or wherein the support structure is reversibly foldable and/or reversibly rollable.

In other words, the support structure can be folded and/or rolled up due to its geometric and/or mechanical-structural properties and can return to its original geometric shape after being unfolded or rolled out.

The support structure can, as already described, be formed at least in sections curved or curved, preferably paraboloid-shaped and thus in the form of a paraboloid, and / or the support structure can be formed from a reaction material which contains a parylene and / or at least a derivative based on a parylene. In other words, the reaction material can comprise at least one material from the group of poly-p-xylylenes and/or their derivatives.

Preferably, the at least one functional unit is formed on a concave surface of a curved or curved support structure such that the support structure and the at least one functional unit formed on it form a mirror, in particular a parabolic mirror, spherical mirror or membrane mirror, with a predetermined focal length.

The support structure can carry at least one functional unit, wherein the at least one functional unit comprises at least one coating or at least one layer which is essentially formed from a metallic material and/or from a light-reflecting material.

According to a third general aspect, the present invention relates to an optical device, preferably an optical telescope or an optical membrane mirror, with at least one support structure for supporting at least one functional unit, wherein the support structure is manufactured and/or designed as disclosed herein and wherein the at least one functional unit as disclosed and/or formed herein. The optical device can be used, for example, in a vacuum environment and/or in a low-temperature environment, for example in space.

The present invention relates, according to a fourth general aspect, to a device for producing a support structure for supporting at least one functional unit, preferably for an optical device, the device preferably being configured to carry out a method as disclosed herein, comprising: a reaction space which is formed by a reaction container is formed and in which the support structure can be produced; a receiving device for receiving a liquid medium for shaping or for shaping the support structure during production and/or in a manufacturing state, wherein the receiving device is arranged in the reaction space and/or is designed to be half-open at least in sections; at least one inlet device for providing a reaction material into the reaction space and forming the support structure, wherein preferably the at least one inlet device and the receiving device are arranged at a distance from one another in the reaction space; wherein the receiving device comprises a drive device or is coupled to a drive device in order to set and/or move a recorded liquid medium and so as to produce a shaping surface of the liquid medium, wherein the reaction space and/or at least the at least one inlet device is configured to apply the reaction material to the shaping surface in order to build the support structure through it.

The drive device can be configured to drive the recording device rotationally, that is to say rotatingly, at an adjustable speed, preferably depending on at least one operating condition when the device is in operation. The receiving device can be half-open, preferably half-open, cylindrical, plate-shaped or bowl-shaped. It is possible for the receiving device to be curved or curved at least in sections. The receiving device can have a circumferential edge or a circumferential edge, which serves to limit the amount and thus the volume of liquid medium absorbed. Preferably, a defined amount of liquid medium can be accommodated in the receiving device, so that the surface of the liquid medium during the movement of the receiving device and thus during the movement of the liquid medium essentially flush and / or substantially continuously on the circumferential edge or on the circumferential edge. This prevents, for example, the formation of undesirable curvatures on the support structure.

According to a further aspect of the present invention, it can be provided that the device comprises at least one bearing device for supporting the receiving device, wherein the at least one bearing device is configured for substantially vibration-free or sufficiently vibration-free mounting of the receiving device, preferably at least one magnetic bearing or at least one hydrostatic bearing , includes. As a result, for example, the quality of the support structure produced can be further improved since no or at least hardly any harmful disturbances can occur as a result of time-dependent mechanical loads during production.

It is possible for the device to comprise at least one barrier device for protecting the at least one storage device in order to prevent penetration of the reaction material into the at least one storage device, wherein the at least one barrier device encloses the at least one storage device and/or at least one labyrinth seal and/or at least includes a liquid seal.

According to a further aspect of the present invention, it can be provided that the device comprises a coating device for coating the support structure with a coatable material, that is to say a coating material, preferably based on a metallic material, in order to form the at least one functional unit on the support structure.

According to a fifth general aspect, the present invention relates to a method for producing a mirror, in particular a parabolic or spherical mirror, which has at least one support structure for supporting at least one functional unit, comprising: producing the support structure as disclosed herein, and applying or coating at least one Functional unit on a concave side of a curved or curved surface of the at least one support structure, wherein the at least one functional unit comprises at least one coating or at least one layer which is formed from a metallic material and/or from a light-reflecting material.

According to a sixth general aspect, the present invention relates to a mirror, preferably a parabolic or spherical mirror, which is preferably manufactured by the method as disclosed herein, comprising: at least one support structure, the at least support structure being manufactured and/or designed as disclosed herein, and at least one functional unit which is formed on a concave side of a curved or curved surface of the support structure, wherein the at least one functional unit preferably comprises a coating or at least one layer which is formed from a metallic material and/or from a light-reflecting material.

To avoid repetition, features that are aimed purely at the device according to the invention and/or disclosed in connection with it should also be considered disclosed in accordance with the method and can be claimed and vice versa.

The previously described exemplary embodiments and features of the present invention can be combined with one another in any way. Further or other details and advantageous effects of the present invention are explained in more detail below with reference to the attached figures.

• 1 ein erstes Ausführungsbeispiel der Vorrichtung zur Herstellung der Tragstruktur gemäß der vorliegenden Erfindung in einer schematischen Darstellung und in einer Schnittansicht;
• 2 einen Ausschnitt der Tragstruktur aus 1 (Ausschnitt Z in 1) in vergrößerter Darstellung;
• 3 ein Beispiel für eine Tragstruktur gemäß der vorliegenden Erfindung in einer schematischen Darstellung;
• 4 ein Ablaufdiagramm für ein Beispiel des Verfahrens zur Herstellung der Tragstruktur gemäß der vorliegenden Erfindung.

Show it:

• 1 a first embodiment of the device for producing the support structure according to the present invention in a schematic representation and in a sectional view;
• 2 a section of the supporting structure 1 (Detail Z in 1 ) in an enlarged view;
• 3 an example of a support structure according to the present invention in a schematic representation;
• 4 a flowchart for an example of the method for producing the support structure according to the present invention.

Identical or functionally equivalent components or elements are marked with the same reference numerals in the figures. To explain these, reference is also made in part to the description of other exemplary embodiments and/or figures in order to avoid repetition.

The following detailed description of the exemplary embodiments shown in the figures serves for further illustration or clarification and is not intended to limit the scope of the present invention in any way.

1 shows a first exemplary embodiment of the device 1 for producing the support structure 10 according to the invention or a mirror according to the invention with a predetermined focal length in a schematic representation. The device 1 is shown in a sectional view for illustrative purposes.

The device 1 comprises a reaction space 30. In the reaction space 30, under respective operating conditions, the support structure 10 can be produced from a reaction material W according to the method of the present invention as disclosed herein. The support structure 10 serves to support a functional unit 20, wherein the functional unit 20 preferably comprises a coating or at least one layer made of a light-reflecting material.

Below, the reaction material W and the device 1 are first described using the 1 and 2 described.

The reaction material W for forming the support structure 10 is preferably a depositable reaction material W. The reaction material is preferably a wine material or a mixture of several different materials, by means of which using and/or according to the principle of so-called chemical vapor deposition Deposition” - CVD) the support structure 10 can be formed. The reaction material W preferably has good dielectric properties and/or a low coefficient of thermal expansion and/or a low vapor pressure. The reaction material W preferably comprises at least one material from the group of poly-p-xylylenes and/or their derivatives (also referred to as “parylenes”).

To form the reaction space 30, the device 1 comprises a reaction container 50. The reaction container 50 delimits the reaction space 30 from an environment and/or from an atmosphere, so that corresponding operating conditions are changed in the reaction space 30 before and/or during the production of the support structure 10 , preferably set in a defined manner using a control system. In other words, the reaction container 50 isolates the reaction space 30 from the environment. This creates a reaction space 30 for producing the support structure 10, which can be set specifically, that is, in a defined manner, with regard to the operating conditions.

The reaction container 50 comprises at least a first container housing part 50.1 and a second container housing part 50.2 with a corresponding wall. Both the first container housing part 50.1 and the second container housing part 50.2 are essentially rotationally symmetrical and/or at least partially hollow cylindrical. A maximum and/or resulting inner diameter of the first container housing part 50.1 and/or the second container housing part 50.2 can be, for example, approximately 40 centimeters or more. It is possible for the container housing 50 to be designed in several parts and/or non-rotationally symmetrical. The first container housing part 50.1 and/or the second container housing part 50.2 can each be made of a metallic material and/or with insulation.

Preferably via a flange with a corresponding circumferential seal (in the 1 not marked for reasons of clarity), the two container housing parts 50.1 and 50.2 are connected to one another and sufficiently close off the reaction space 30. In other words, the second container housing part 50.2 can be dismantled from the first container housing part 50.1. The two container housing parts 50.1 and 50.2 together form a reaction vessel.

To avoid mechanical stresses, for example in the form of vibrations/oscillations or shocks, which could be introduced into the structure of the reaction container 50 and thus into the reaction space 30 and would disrupt the manufacturing process of the support structure 10, the device 1 can include at least one damping device 57 . The at least one damping device 57 is preferably arranged on a side (outside) of the bottom wall of the first container housing part 50.1 that is external to the reaction space 30 and can support the reaction container 50, for example, against a foundation or against a mounting structure and at the same time initiate or transmit mechanical loads as described above reduce or preferably avoid. This ensures, for example, a trouble-free manufacturing process of the support structure 10 in relation to external mechanical loads.

A receiving device 53 for receiving a liquid medium 40 is arranged within the reaction space 30. According to the invention, the liquid medium 40 and preferably the surface 40.1 of the liquid medium 40 is used in a specific state to shape the support structure 10 during production and/or in a production state of the support structure 10, which will be described in more detail below.

The receiving device 53 is designed to be half-open and thus ensures accessibility of the liquid medium 40, in particular the surface 40.1. The recording facility 53 is preferably essentially plate-shaped or essentially bowl-shaped and/or preferably in relation to an axis of rotation (see the dashed line in 1 ) essentially rotationally symmetrical. With respect to the present exemplary embodiment of the device 1 according to the present invention, the receiving device 53 is preferably designed as a turntable with an external and/or circumferential edge 53.2. The edge 53.2 delimits a surface 53.1 of the receiving device 53, which comes into contact with the liquid medium 40 and/or absorbs it. The surface 53.1 of the receiving device 53 is essentially curved and/or essentially curved, apart from a substantially annular section in the area of the edge 53.2. For example, the surface 53.1 can be designed, at least in sections, essentially in the form of a paraboloid. The receiving device 53, and preferably the peripheral edge 53.2, can, for example, have an inner diameter of approximately 30 centimeters or more. This allows a support structure 10 of, for example, at least approximately 30 centimeters in diameter or more to be produced. The surface 53.1 of the receiving device 53 is preferably essentially smooth. In an alternative exemplary embodiment of the present invention, it is possible for the receiving device 53 to have at least partially radially inwardly extending ribs and/or beads arranged on the surface 53.1, which serve to keep the liquid medium 40 in rotation as a result of a rotational movement of the receiving device 53 to move and thus move the liquid medium 40.

Preferably, the receiving device 53 comprises on its outer sides, that is to say on its outer surfaces, preferably at least away from the surface 53.1 of the recorded liquid medium 40, a coating which is not adhesive with respect to the reaction material W. For example, the receiving device 53 is coated with a paraffin or particularly preferably with polytetrafluoroethylene (abbreviated “PTFE”). In this context, it is possible that the inner sides of the container housing parts 50.1 and 50.2 and thus the respective inner surfaces of the container housing parts 50.1 and 50.2, as well as the components and elements of the device 1 within the reaction container 50, are also coated with a paraffin or preferably with polytetrafluoroethylene (abbreviated “PTFE”) are coated. This ensures, for example, that the reaction material W, which has been deposited or distributed in the reaction space 30 away from the liquid medium 40, that is to say away from the surface 40.1 of the liquid medium 40, can be removed in a simpler manner.

The receiving device 53 is rotatably and drivably mounted on an inner side of the bottom wall of the first container housing part 50.1 and thus within the reaction container 50 and can be set in motion in the course of producing the support structure 10 using regulation and / or control depending on at least one operating condition . For this purpose, the receiving device 53 can be connected by means of a drive device 54 or mounted on the drive device 54.

The drive device 54 can, for example, be designed as an electric motor or comprise an electric motor. Alternatively, the drive device 54 can be designed, for example, as a magnetic drive unit or comprise a magnetic drive unit which is driven by a moving magnetic field, preferably a rotating magnetic field, within the reaction container 50 or outside the reaction container 50.

The drive device 54 is preferably configured to provide a substantially constant rotational movement and thus a substantially constant rotational speed per time interval in the course of regulation and/or control over a defined period of time, in order to in turn use this to provide a substantially constant rotational movement of the recording device 53 guarantee. In other words, a substantially constant rotational speed n53 of the receiving device 53 is realized by means of the drive device 54. As already described above, the receiving device 53 serves, on the one hand, to receive the liquid medium 40. Here, the receiving device 53 includes the surface 53.1, which comes into contact with the liquid medium 40. Due to the rotational movement of the receiving device 53, the liquid medium 40 received therein is in turn set in motion. In other words, when the recording device 53 is driven, a rotating and thus moving liquid medium 40 is created, the resulting and/or idealized speed of which is in 1 is simply labeled “n40”.

A resulting axis of rotation of the receiving device 53 can be aligned and/or arranged essentially parallel to gravity, that is to say gravitational force. This is preferably ensured by a storage device 55 of the receiving device 53, which will be described in more detail below. Due to the rotational movement of the receiving device 53, the liquid medium 40 is at least partially “pushed” towards the edge 53.2 of the receiving device 53 due to its mass and thus acting centrifugal forces and a shaped shape is formed bending, arched or curved surface 40.1 of the liquid, moving medium 40, preferably essentially in the form of a paraboloid. The shape of the paraboloid depends in particular on the rotation speed n53. In particular, the rotation speed n53 (rotation/angular speed) is set depending on the focal length of a mirror to be produced with the device 1. In other words, the rotation of the mass of the liquid medium 40 in the receiving device 53 under the influence of gravity and centrifugal force as a result of the rotational movement results in a substantially parabolic surface 40.1 of the liquid medium 40 as a shaping surface 40.1 for the support structure 10 to be produced.

In an alternative exemplary embodiment of the present invention, it can be provided that instead of the receiving device 53, the device 1 and preferably the reaction container 50 together with the components and elements arranged within the reaction container 50 are set in a rotational movement. A resulting axis of rotation can be aligned and/or arranged essentially parallel to gravity, i.e. gravitational force.

The liquid medium 40 is preferably a liquid medium 40 with a comparatively high density and/or high viscosity. In this way, for example, mechanical loads or disturbances, preferably on the surface 40.1 for shaping the support structure 10, can be reduced or essentially avoided; on the other hand, the formation of the support structure 10 by the reaction material W on the surface 40.1 is simplified or facilitated, which will be discussed further below is described in more detail.

For example, the liquid medium 40 can be an ionic liquid, a liquid polymer, a paraffinic hydrocarbon or, for example, a polyphenyl ether in a liquid state. The liquid medium 40 can preferably have a low vapor pressure at room temperature, the room temperature in the sense of the present invention being approximately 293.15 Kelvin, that is approximately 20 degrees Celsius.

Within the reaction container 50, the receiving device 53 can preferably have a storage device 55, which reduces or preferably avoids mechanical loads in addition to or as an alternative to the at least one damping device 57 of the device 1. The bearing device 55 can, for example, be designed as at least one hydrostatic bearing or as at least one magnetic bearing, or comprise at least one hydrostatic bearing or at least one magnetic bearing. The working medium of the hydrostatic bearing can preferably be an oil or be based on an oil. In other words, the device 1 comprises a storage device 55 for supporting the receiving device 53, wherein the storage device 55 is configured for supporting the receiving device 53 in a substantially vibration-free manner.

In order to protect the storage device 55 in particular from penetration of the reaction material W and thus to avoid wear and/or damage to the storage device 55, the device 1 comprises a barrier device 56 for protecting the storage device 55. The barrier device 56 preferably encases the storage device 55 in such a way that contact with the reaction material W is avoided or is not possible. In other words, the barrier device 56 can be configured to seal off the storage device 55 from the reaction space 30. For this purpose, the barrier device 56 can comprise at least one labyrinth seal and/or at least one liquid seal. As a liquid barrier, the liquid seal can at least partially accommodate, for example, the reaction material W, which did not contribute to the formation of the support structure 10 and was distributed accordingly in the reaction space 30. The liquid of the liquid barrier can then, for example, be pumped out and removed in a simple manner from the interior of the reaction container 50, that is to say from the reaction space 30. It is understood that the barrier device 56 is configured to also protect the drive device 54 from the reaction material W.

To supply the reaction material W into the reaction space 30, the reaction container 50 of the device 1 and here the second container housing part 50.2 comprises at least one inlet device 51. The inlet device 51 is preferably spaced from the receiving device 53, that is to say arranged at a certain distance, around a substantially to ensure homogeneous distribution of the reaction material W in the course of producing the support structure 10. In order to achieve an improved distribution of the reaction material W in the reaction space 30 and towards the surface 40.1 of the liquid medium 40, a distribution device 100 can be located in the reaction space 30 at the inlet device 51 and thus in the interior of the reaction container 50 and with the inlet device 51 be connected, that is, fluid-mechanically connected. The distribution device 100 can, for example, be tubular and extend essentially in a straight line, for example, up to a certain length. The distribution device 100 can additionally or alternatively be curved at least in sections. The distribution device 100 has at least one inlet opening, preferably several inlet openings, through which the reaction material W can flow into the reaction space 30 at a specific point ST in the course of producing the support structure 10. The multiple inlet openings are in the distribution device 100 in 1 shown simply as black dots and not marked in detail. It is possible for the distribution device 100 to have, at least partially or entirely, valve devices and/or propeller devices instead of the inlet openings, which are used to change the kinetic energy of the reaction material W before and/or after entering the reaction space 30 and/or for a targeted distribution of the Contribute reaction material W in the reaction space 30.

Outside the reaction container 50, the inlet device 51 is fluid-mechanically connected to an evaporation device 60 and preferably to a pyrolysis device 70. The pyrolysis device 70 is fluid-mechanically arranged between the evaporation device 60 and the inlet device 51. The evaporation device 60 is used to heat and evaporate and in particular to sublime the reaction material W, i.e. to directly convert the reaction material W from a solid state of matter into a gaseous state of matter.

The reaction material W is based on or preferably, as already described above, comprises a material from the group of parylenes and can be processed, for example, according to the so-called Gorham process in order to form the support structure 10.

At the beginning of the production of the support structure 10, the reaction material W is preferably present in the evaporation device 60 as a solid, granular raw material. This raw material is also referred to as “dimer” and, from a chemical point of view, refers to largely stable “dimer molecules” of the reaction material W.

In the evaporation device 60, the reaction material W is preferably converted from the solid state into the gaseous state. In other words, the vaporization device 60 is configured to treat the reaction material W with heat so that the reaction material W sublimes. This can take place, for example, in a temperature range between approximately 120 degrees Celsius and approximately 180 degrees Celsius, at approximately one bar of ambient pressure. For this purpose, the evaporation device 60 has a correspondingly configured heating unit, which in 1 For reasons of clarity, it is not shown or marked. The reaction material W thus evaporates into a dimeric gas.

The pyrolysis device 70 is configured to pyrolyze the reaction material W and preferably the vaporized and/or gaseous reaction material W, that is to say to thermochemically split it and convert it into a highly reactive monomeric form. In other words, the pyrolysis device 70 comprises a high-temperature zone in order to generate so-called reactive monomers of the reaction material W from the gaseous reaction material W. The temperature in the pyrolysis device 70 can be, for example, approximately 690 degrees Celsius.

The reaction material W then enters the reaction space 30 of the reaction container 50 in an activated gaseous state via the inlet device 51.

In a further or alternative embodiment of the device 1, it is possible for at least one adjustable and/or controllable valve device to be arranged between the evaporation device 60 and the pyrolysis device 70, which is fluid-mechanically connected to the evaporation device 60 and to the pyrolysis device 70. The at least one valve device can be configured, in particular, to set the volume flow of the reaction material W in a defined manner depending on at least one operating condition and/or in the course of regulating and/or controlling the device 1. For example, the valve device can be used to regulate and/or control a so-called growth rate of the support structure 10 by enriching the reaction material W and preferably to start production of the support structure 10 at a defined rate, that is to say at a defined volume flow of reaction material W.

In an alternative embodiment of the device 1 according to the present invention, it is possible that, in addition to an inlet device 51, a second inlet device 51 or more than two further inlet devices 51 are formed on the reaction container 50 and here preferably on the second container housing part 50.2.

In addition to at least one inlet device 51, the device 1 according to the present invention comprises at least one outlet device 52. The outlet device 52 is formed on the reaction container 50 and here preferably on the first container housing part 50.1. In other words, the at least one outlet device 52 is on a side of the reaction container opposite the at least one inlet device 51 in relation to the receiving device 53 ter 50 arranged. Via the outlet device 52, a negative pressure and preferably a vacuum is generated in the reaction container 50 and thus in the reaction space 30 in the course of producing the support structure 10. The outlet device 52 is connected to a pump device 80 in the form of a vacuum pump. The pump device 80 is configured to generate a negative pressure and preferably a vacuum in the reaction container 50, that is to say in the reaction space 30. In other words, the pump device 80 is configured to sufficiently evacuate the reaction space 30 at least before and preferably during the production of the support structure 10, so that at least proper and/or intended functionality and safety of the device 1 for producing the support structure 10 is guaranteed. Thus, the reaction space 30 is, for example, largely or essentially freed from foreign substances that could disrupt production, that is, the manufacturing process and thus negatively influence the quality of the support structure 10. In addition, the continuous formation of a vacuum in the reaction container 50 ensures a substantially uniform and/or homogeneous distribution of the reaction material W over the shaping surface 40.1 of the moving liquid medium 40. For example, pressures of less than 100 Pascal, preferably less than 10 Pascal and particularly preferably less than 0.1 Pascal, can be formed in the reaction space 30 by means of the pump device 80. For further processing and/or machining of the produced support structure 10 in the form of coating the support structure 10 with a coating material B to form the functional unit 20, the pump device 80 can be configured to generate a pressure in the reaction space 30, which is preferably in a range between approx .0001 Pascal and approximately 0.001 Pascal.

Between the outlet device 52 and the pump device 80, a cooling device 130 is preferably arranged, which is fluid-mechanically connected to the outlet device 52 and to the pump device 80. The cooling device 130 is configured to cool the reaction material W emerging via the at least one outlet device 52, for example at less than -50 degrees Celsius, and to convert it into a solid state, so that the reaction material W is prevented from flowing further to the pump device 80, to penetrate into the pump device 80 and to wear and/or damage it. In other words, the cooling device 130 serves to protect the pump device 80 from the reaction material W.

The device 1 further comprises a coating device 120. The coating device 120 is preferably arranged on the second container housing part 50.2 and / or configured for introducing a coating material B into the reaction space 30 after the production of the support structure 10 in order to apply the coating material B to the support structure 10, that is, to coat the support structure 10 with the coating material B and thus to form the at least one functional unit 20 on the support structure 10. The functional unit 20 preferably comprises a coating or at least one layer made of a substantially metallic and/or light-reflecting material. Preferably, the coating material B to form the functional unit 20 comprises aluminum or an alloy based on aluminum. It is also possible that the coating material B preferably comprises gold or a gold-based alloy. So that the coating device 120 is not contaminated by the reaction material W during the production of the support structure 10 and / or clogged by depositing reaction material W, the coating device 120 includes a so-called shutter solution in the form of a closable aperture or a closable lid, which the coating device 120 opens and/or closes the reaction space 30. The aluminum can be applied as a coating material B in the reaction space 30 and under appropriately set operating conditions to the support structure 10 by evaporation and/or sputtering.

In order to realize the production of the support structure 10 and thus to carry out the method according to the present invention, the device 1 according to the present invention comprises a control device 110 for controlling and/or regulating at least respective components and elements of the device 1 as disclosed herein. In other words, the control device 110 serves for the defined setting of in particular the drive device 54, the evaporation device 60, the pyrolysis device 70, the pump device 80, and / or the cooling device 130 in the course of producing the support structure 10. The control device 110 is for control and / or control with the components and elements of the device 1 preferably connected via a signal communication network, which is used to transmit corresponding signals S and thus information (see the dashed lines in 1 ). In other words, the components and elements of the device 1 can be controlled and/or regulated at least before and/or during the production of the support structure 10. The regulation is characterized in particular by a closed path of action and preferably ensures that certain operating conditions, such as the respective temperature tures, rotational speeds and/or pressures, set essentially in a defined manner over a defined period of time, preferably essentially constant, in order to realize the manufacturing process of the support structure 10 as intended and/or properly.

So that a support structure 10 with defined and therefore desired dimensions, for example with a defined thickness 10.2 (see for example 2 ), can be produced by means of the device 1, the device 1 preferably comprises a plurality of measuring devices with respective sensors or sensor units for detecting respective operating conditions of the components and elements of the device 1 inside the reaction container 50 and outside the reaction container 50, as well as for detecting dimensions of the support structure 10, preferably at least before and during their manufacture. That's how it is 1 For example, the measuring device 90 for detecting geometric dimensions and / or the homogeneity of the supporting structure 10 being formed, for example the thickness 10.2 of the supporting structure 10, is arranged in the reaction space 30 and preferably on the second container housing part 50.2. The measuring device 90 is representative of other measuring devices of the device 1 according to the invention 1 shown, which are used to record at least one operating condition and / or at least one geometric dimension (growth rate) or physical property of the support structure 10, preferably at least before and during the production of the support structure 10.

In a further exemplary embodiment of the device 1, it is possible, for example, for the receiving device 53 to be connected to an adjusting device for adjusting the position and thus the position and/or the orientation of the receiving device 53 (not shown in the figures) within the reaction space 30 and/or is arranged on this. For this purpose, the adjusting device can, for example, comprise at least one actuable actuator unit in the form of a double-acting cylinder, which, by appropriate actuation using a working medium, is able to adjust and thus change the position of the receiving device 53 within the reaction space 30. Thus, for example, a distance between the receiving device 53 and the inlet device 53 and/or the distribution device 100 can be changed.

Furthermore, it is possible, for example, for the receiving device 53 to comprise an integrated cooling device, for example in the form of a spirally arranged line system, through which a cooling medium preferably flows at least during the production of the support structure 10, in order to set a specific temperature in the liquid medium 40 and to ensure the support structure 10 is built up.

It is possible that in a further exemplary embodiment of the device 1 according to the present invention, the device 1 comprises a plasma device for generating an ionized gas in order to process the support structure 10. This makes it possible, for example, to improve the quality of the support structure 10, that is, the quality of at least one layer of the support structure 10 and/or the surface 10.1 of the support structure 10. The plasma device is preferably arranged in the reaction space 30, that is to say within the reaction container 50 of the device 1. The ionized gas can include, for example, argon as a working medium.

The support structure 10 is formed by the solidifying reaction material W, which preferably changes from a gaseous state of matter into a solid state of matter by means of deposition and forms chemical bonds, which will be described in more detail below. The support structure 10 is preferably a support structure that is essentially rotationally symmetrical with respect to an axis of rotation and/or has sufficient dimensionally stability in order to support and/or carry the functional unit 20.

Preferably, a certain volume, that is, a defined amount of liquid medium 40, is accommodated in the receiving device 53, so that there is a substantially flush and/or continuous transition to the circumferential edge 53.2 of the receiving device 53, preferably during the rotational movement of the receiving device 53 and thus while moving the liquid medium 40.

2 shows a section of the support structure 10 1 (Detail Z in 1 ) in an enlarged view.

The liquid medium 40 wets the surface 53.1 of the receiving device 53 as a contact surface. On the surface 40.1 of the liquid medium 40 as a shaping surface for the reaction material W, the reaction material W is in turn deposited during the movement of the liquid medium 40, whereby the support structure 10 is formed from the deposited reaction material W with a corresponding thickness 10.2.

3 shows an example of a support structure 10 according to the present invention in a schematic representation, which carries a functional unit 20 in the form of a coating or at least a layer made of a specific material. The Functional unit 20 is preferably formed from a substantially metallic material and/or from a light-reflecting material by means of at least one coating process on the surface 10.1 of the support structure 10. The metallic and/or light-reflecting material can, for example, be aluminum or an alloy based on aluminum, as already described above.

The support structure 10 is formed essentially homogeneously across its dimensions from the solidified reaction material W. Furthermore, the support structure 10 has a substantially annular outer contour due to the manufacturing process. Overall, the support structure 10 has a substantially membrane-shaped design and is characterized by a curved shape. Furthermore, the support structure 10 can be designed to be essentially rotationally symmetrical with respect to an axis of rotation and have a substantially constant thickness 10.2 in the radial direction and in the circumferential direction. The thickness 10.2 of the support structure 10, together with a thickness 20.2 of the functional unit 20, which carries the support structure 10, can be, for example, 140 micrometers. The thickness 10.2 of the support structure 10 produced together with a thickness 20.2 of the functional unit 20 is, for example, in a range between approximately 100 micrometers and approximately 1000 micrometers.

4 shows a flowchart for an exemplary embodiment of the method for producing the support structure 10 according to the present invention.

Process steps are described below. The method for producing the support structure 10 can be carried out with the device 1 as disclosed herein. The description of components and elements of the device 1 according to the invention is therefore at least partially omitted in order to avoid repetition. In the following, particular emphasis will be placed on process sections of the process according to the invention.

In section S10, the method for producing the support structure 10 can begin with the provision of the liquid medium 40 for shaping the support structure 10 during the production of the support structure 10 and/or in a production state of the support structure 10 in a defined amount. The liquid medium 40 provided is, as already described above, accommodated in the rotatably drivable receiving device 53 and acts as a shaping structure for the production of the support structure 10 through an emerging, curved surface 40.1 of the liquid medium 40. Preferably located in the receiving device 53 a defined amount of liquid medium 40 provided, so that the surface 40.1 of the liquid medium 40 is essentially flush with a circumferential edge 53.2 of the receiving device 53, preferably during the operating state of the device 1, in which the liquid medium 40 is moved through the receiving device 53 (see also 1 ).

In section S10, the provision of the liquid medium 40 can take place or occur in parallel or in advance of the provision of a negative pressure and preferably a vacuum in the reaction space 30 by means of the pump device 80. As a result, for example, the formation of turbulent flows of the reaction material W in the reaction space 30 can be avoided or at least significantly reduced.

Preferably, outgassing of the liquid medium 40 can be provided in the course of or during the provision of the liquid medium 40 and when a corresponding pressure is generated. This avoids, for example, the later formation of bubbles in the liquid medium 40 and/or the occurrence of splashes in the liquid medium 40. As already described, the liquid medium 40 is preferably characterized by a comparatively high viscosity and/or by a comparatively high density and/or by a comparatively low vapor pressure.

In section S20, the liquid medium 40 is moved and thus set in motion by moving the receiving device 53. In other words, the liquid medium 40 and in particular the shaping surface 40.1 of the liquid medium 40 is set into a rotational movement or rotational movement via the receiving device 53. Preferably, a defined rotational speed n53 is set on the recording device 53 and the recording device 53 is operated at least for a period of time until a substantially identical resulting and/or idealized rotational speed n40 is established in the liquid medium 40 as the rotational speed n53 of the recording device 53. This Liquid medium 40 is preferably in a quasi-stationary (rotational motion) state in which, for example, no acceleration of particles (molecules) of the liquid medium 40 to a certain speed takes place.

In a further alternative embodiment of the device 1 according to the invention and the method according to the invention, it is possible that in section S20 instead of the receiving device 53, the reaction container 50 of the device 1 as a whole is in a rotary movement is offset in order to achieve a corresponding movement of the liquid medium 40 and in particular the shaping surface 40.1.

In section S30, the reaction material W is provided to form the support structure 10. The provision of the reaction material W in the reaction space 30 is realized in the device 1 via the at least one inlet device 51 and/or preferably the distribution device 100. Before being provided into the reaction space 30, the reaction material W can be brought into a reactive monomeric state by means of evaporation by heating in the evaporation device 60 and/or by pyrolysis in the pyrolysis device 70 and thus by means of splitting (“cracking”) and is preferably at the latest when entering the reaction space 30 in a reactive gaseous state.

The reactive physical state of the reaction material W preferably characterizes an operating condition, that is, a state in which the support structure 10 can be built on the moving, shaping surface 40.1 of the liquid medium 40. As already described, the reaction material W is preferably a depositable reaction material W from the group of poly-p-xylylenes and/or their derivatives (also referred to as “parylenes”). The reaction material W is distributed in the reaction space 30 accordingly.

In section S40, the reaction material W is applied to the shaping surface 40.1 of the moving liquid medium 40. Here, first particles of the reaction material W initially adhere to the surface 40.1 of the liquid medium 40 after the transition from the gaseous state of matter to the solid state of matter. As already described, the surface 40.1 of the liquid medium 40 serves as a shaping surface 40.1 for the support structure 10 to be produced as a result of the rotational movement of the liquid medium 40. The liquid medium 40 is preferably characterized by a resulting essentially constant speed n40 in relation to its movement.

In section S50, a build-up and thus a growth, preferably a continuous and/or steady build-up, of the support structure 10 takes place by particles of the reaction material W on already existing particles of the reaction material W on the surface 40.1. Building the support structure 10 can preferably include: enriching, preferably adsorbing, the reaction material W on the shaping surface 40.1 and/or on the reaction material W already present on the shaping surface 40.1 in a solid state, and generating chemical bonds in the reaction material W , that is, chemical bonds between particles (molecules) of the reaction material W. In other words, the support structure 10, that is, the enriched reaction material W, is built up and solidified in the form of at least one layer and/or at least one membrane made of the reaction material W.

Preferably, the enrichment and/or adsorption of the reaction material W at least partially relates to or includes a chemical vapor deposition of the reaction material W for producing the support structure 10. The support structure 10 produced is sufficiently dimensionally stable to support a functional unit 20. The support structure 10 is preferably dimensionally stable at least in sections in the manufactured state, and/or reversibly foldable and/or reversibly rolled up. Thus, the support structure 10 is able to assume or develop its original state, preferably the manufacturing state, after being folded and/or rolled up. This is ensured in particular by sufficient dimensional stability of the support structure 10.

It is understood that in section S50, a more or less continuous detection of the thickness 10.2 of the support structure 10 built up to a respective point in time by the measuring device 90 takes place parallel to the construction of the support structure 10. Detecting the geometric dimensions of the support structure 10 can be achieved, for example, using a spectral reflection method.

In order to build up, preferably deposit, the reaction material W on the surface 40.1 in a targeted manner, that is to say in a defined manner, the distribution device 100 can be coupled in a position-adjustable manner within the reaction space 30 with at least one actuable actuator device in order to control the position and/or the position of the distribution device 100 to the surface 40.1 and/or the recording device 53 to change.

In section S60, after the support structure 10 has been produced, the support structure 10, that is to say the surface 10.1 of the support structure 10, can be coated with a coating material B. The coating material B can take place via the coating device 120, preferably by evaporation and/or sputtering into the reaction space 30 and further onto the support structure 10, that is to say onto the surface 10.1 of the support structure 10 under appropriate operating conditions. Preferably there is a reaction in the reactor tion space 30, at least during the coating of the support structure 10 with the coating material W, a sufficient vacuum, which allows the formation of the coating and thus the functional unit 20 on the support structure 10. Furthermore, appropriate regulation and/or control of a valve device between the evaporation device 60 and the pyrolysis device 70 can also contribute to the formation of a defined thickness 10.2 of the support structure 10.

It is possible or it is understood that certain process sections can, for example, run in parallel in time, for example generating a negative pressure and / or a vacuum and evaporating and / or pyrolyzing the reaction material W. Furthermore, it is possible that in a first exemplary embodiment of the method, a first Process section takes place before a second process section and in a further, alternative exemplary embodiment of the method, the first process section takes place after the second process section. It goes without saying that respective or certain process sections can be combined with one another in any way, provided that this contributes to the formation of the support structure 10. For example, in one embodiment, the generation of a vacuum can begin before moving the liquid medium, while in a further alternative embodiment of the method according to the invention, the movement of the liquid medium can take place before the generation of a vacuum.

Thus, by the method according to the invention and/or by the device 1 according to the invention, a support structure 10 can be provided, which is designed to support a functional unit 20, the support structure 10 preferably having a substantially constant thickness 10.2 and/or a homogeneous distribution of the reaction material W, and is characterized by sufficient dimensional stability.

The support structure 10 may be configured together with the functional unit 20 as disclosed herein for use in and/or with an optical device. The present invention further relates to an optical device having at least one support structure as disclosed herein.

The optical device can be designed as an optical telescope or as an optical membrane mirror or can include an optical telescope or an optical membrane mirror.

The present invention is not limited to the embodiments described above. Rather, a large number of variants and modifications are possible, which also make use of the inventive idea and therefore fall within the scope of protection. Preferably, the present invention also claims protection for the subject matter and features of the subclaims independently of the referenced claims.

Reference symbol list

1

contraption

10

Support structure

10.1

Surface of the supporting structure

10.2

Thickness of the supporting structure

20

Functional unit

20.2

Thickness of the functional unit

30

reaction space

40

liquid medium

40.1

Surface of the liquid medium

50

reaction container

50.1

Container housing part

50.2

Container housing part

51

Entry facility

52

Exhaust device

53

Reception facility

53.1

Surface of the recording device

53.2

Edge of the recording device

54

Drive device

55

Storage facility

56

Barrier device

57

Damping device

60

Evaporation device

70

Pyrolysis device

80

Pumping device

90

Measuring device

100

Distribution facility

110

Control facility

120

Coating device

130

Cooling device

b

Coating material

n40

speed

n53

Speed (rotational/rotational/angular speed)

S

signal

W

reaction material

QUOTES INCLUDED IN THE DESCRIPTION

This list of documents listed by the applicant was generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• US 20030223135 A1 [0005]
• US 20020126726 A1 [0006]
• EP 1672394 B1 [0007]

Claims (20)

Method for producing a support structure (10) for supporting at least one functional unit (20), preferably for an optical device, in a reaction space (30), comprising: • Providing a liquid medium (40) for shaping the support structure (10) during production and/or in a production state, preferably in a receiving device (53), which is designed to be half-open at least in sections; • Moving the liquid medium (40) and creating a shaping surface (40.1) of the liquid medium (40), preferably by driving the receiving device (53) by means of a drive device (54); • Providing a reaction material (W) to form the support structure (10), preferably by means of at least one inlet device (51), wherein the at least one inlet device (51) and the receiving device (53) are arranged at a distance from one another in the reaction space (30); • Applying, preferably depositing, the reaction material (W) onto the shaping surface (40.1); • Building the support structure (10) using the applied, preferably deposited, reaction material (W). Procedure according to Claim 1 , wherein the reaction material (W) is formed as a gaseous and/or depositable reaction material (W) at least before the support structure (10) is built, and/or wherein the reaction material (W) is formed as a gaseous and/or depositable reaction material (W) at least after the support structure (10) is built solid reaction material (W) is formed. Procedure according to Claim 1 or 2 , comprising: evaporating, preferably by heating, the reaction material (W) and/or converting the reaction material (W) from a solid state of matter into a gaseous state of matter, preferably in an evaporation device (60), and/or pyrolyzing, preferably dividing, the reaction material (W), preferably in a pyrolysis device (70). Method according to one of the preceding claims, wherein building the support structure (10) comprises: • Enriching, preferably adsorbing, the reaction material (W) on the shaping surface (40.1), and/or • Creating chemical bonds in the reaction material (W), and/or • Building the support structure (10) in the form of at least one layer and/or at least one membrane, which preferably has a substantially constant thickness (10.1) and/or is essentially homogeneous. A method according to any one of the preceding claims, wherein moving the liquid medium (40) comprises: • Rotating the liquid medium (40) at an adjustable speed (n40), preferably by means of the drive device (54) and/or depending on at least one operating condition and/or geometric size of the support structure (10); and or • Forming the shaping surface (40.1), which is at least partially curved or curved, preferably paraboloid-shaped and concave. Method according to one of the preceding claims, comprising: • Generating a negative pressure and/or a vacuum in the reaction space (30) at least before providing the reaction material (W), preferably by means of at least one outlet device (52) and a pump device (80), the pump device (80) being outside the reaction space ( 30) is arranged, and/or wherein the at least one outlet device (52) and the receiving device (53) are arranged at a distance from one another in the reaction space (30). Method according to one of the preceding claims, comprising: • Directional distribution of the reaction material (W) at at least one defined point (ST) in the reaction space (30), preferably in the direction of the shaping surface (40.1), preferably by means of at least one distribution device (100), the at least one distribution device (100 ) is connected to the at least one inlet device (51). Method according to one of the preceding claims, comprising: • Detecting a geometric size, preferably a thickness (10.2), of the support structure (10) during the application of the reaction material (W) and/or construction of the support structure (10), preferably by means of at least one measuring device (90) for detecting the geometric size, wherein the at least one measuring device (90) is arranged in the reaction space (30), and/or wherein the at least measuring device (90) and the recording device (53) are arranged at a distance from one another in the reaction space (30). Method according to one of the preceding claims, comprising: • Setting at least one operating condition of the Method, preferably by means of a control device (110), wherein the at least one operating condition comprises at least one of the following: a temperature in the reaction space (30), a temperature of the reaction material (W) before being provided into the reaction space (30), a pressure in the reaction space (30), a temperature of the liquid medium (40); a period of time for providing the reaction material (W), a volume flow of the reaction material (W), and / or a drive speed of the receiving device (53). Support structure (10) for supporting at least one functional unit (20), preferably for an optical device, wherein the support structure (10) is produced according to a method according to at least one of the preceding claims, wherein the support structure (10) is dimensionally stable at least in sections at least in the production state is, and/or wherein the support structure (10) is reversibly foldable and/or reversibly rollable. Support structure (10). Claim 10 , wherein the support structure (10) is at least partially curved, preferably paraboloid-shaped, and / or wherein the support structure (10) is formed from a reaction material (W), which is a material from the group of poly-p-xylylenes and / or includes their derivatives. Support structure (10). Claim 10 or 11 , wherein the support structure (10) carries at least one functional unit (20), wherein the at least one functional unit (20) comprises at least one coating or at least one layer which is formed from a metallic material and/or from a light-reflecting material. Optical device, preferably an optical telescope or optical mirror, with at least one support structure (10) for carrying at least one functional unit (20) according to one of the preceding Claims 10 until 12 . Device (1) for producing a support structure (10) for carrying at least one functional unit (20), preferably for an optical device, wherein the device (1) is preferably configured, a method according to one of the preceding Claims 1 until 9 to be carried out, comprising: a reaction space (30), which is formed by a reaction container (50) and in which the support structure (10) can be produced; a receiving device (53) for receiving a liquid medium (40) for shaping the support structure (10) during production and/or in a manufacturing state, wherein the receiving device (53) is arranged in the reaction space (30) and/or at least partially half-open is trained; at least one inlet device (51) for providing a reaction material (W) into the reaction space (30) and forming the support structure (10), wherein preferably the at least one inlet device (51) and the receiving device (53) in the reaction space (30) are spaced apart from one another are arranged; wherein the receiving device (53) comprises a drive device (54) or is coupled to a drive device (54) in order to move a recorded liquid medium (40) and to produce a shaping surface (40.1) of the liquid medium (40), wherein the Reaction space (30) and / or at least the at least one inlet device (51) is configured for applying the reaction material (W) to the shaping surface (40.1) in order to build the support structure (10) through this. Device (1) according to Claim 14 , wherein the drive device (54) is configured to rotationally drive the receiving device (53) at an adjustable speed (n53), preferably depending on at least one operating condition when the device (1) is in operation. Device (1) according to Claim 14 or 15 , wherein the device (1) comprises at least one bearing device (55) for supporting the receiving device (53), wherein the at least one bearing device (55) is configured for vibration-free mounting of the receiving device (53), preferably at least one magnetic bearing or at least one hydrostatic bearing , includes. Device (1) according to Claim 16 , wherein the device (1) comprises at least one barrier device (56) for protecting the at least one storage device (55) in order to prevent the reaction material (W) from penetrating into the at least one storage device (55), wherein the at least one barrier device (56 ) which encloses at least one bearing device (55) and/or comprises at least one labyrinth seal and/or at least one liquid seal. Device (1) according to one of the preceding Claims 14 until 17 , wherein the device (1) comprises a coating device (120) for coating the support structure (10) with a coatable material (B), preferably based on a metallic material, in order to attach the at least one functional unit (20) to the support structure (10). to train. Method for producing a mirror, especially a parabolic or spherical one Mirror, which has a support structure (10) for supporting at least one functional unit (20), comprising: • Producing the support structure (10) according to one of Claims 1 until 9 , and • applying or coating at least one functional unit (20) on a concave side of a curved or curved surface (10.1) of the support structure (10), wherein the at least one functional unit (20) comprises at least one coating or at least one layer, which consists of a metallic material and / or made of a light-reflecting material. Mirror, preferably parabolic or spherical mirror, which is preferably according to the method according to Claim 19 is produced, comprising: a support structure (10), the support structure (10) according to one of Claims 10 until 12 is formed, and at least one functional unit (20) which is formed on a concave side of a curved or curved surface (10.1) of the support structure (10), wherein the at least one functional unit (20) preferably comprises a coating or at least one layer, which is formed from a metallic material and/or from a light-reflecting material.

Images