DE102021206477B4 - Hermetisch verkappte, optische Projektionsanordnung und Verfahren zum Herstellen derselben - Google Patents
Hermetisch verkappte, optische Projektionsanordnung und Verfahren zum Herstellen derselben Download PDFInfo
- Publication number
- DE102021206477B4 DE102021206477B4 DE102021206477.9A DE102021206477A DE102021206477B4 DE 102021206477 B4 DE102021206477 B4 DE 102021206477B4 DE 102021206477 A DE102021206477 A DE 102021206477A DE 102021206477 B4 DE102021206477 B4 DE 102021206477B4
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Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/18—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00317—Packaging optical devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0225—Out-coupling of light
- H01S5/02255—Out-coupling of light using beam deflecting elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0233—Mounting configuration of laser chips
- H01S5/02345—Wire-bonding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/03—Bonding two components
- B81C2203/031—Anodic bondings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/02208—Mountings; Housings characterised by the shape of the housings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0225—Out-coupling of light
- H01S5/02253—Out-coupling of light using lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4087—Array arrangements, e.g. constituted by discrete laser diodes or laser bar emitting more than one wavelength
- H01S5/4093—Red, green and blue [RGB] generated directly by laser action or by a combination of laser action with nonlinear frequency conversion
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Led Device Packages (AREA)
- Optical Couplings Of Light Guides (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102021206477.9A DE102021206477B4 (de) | 2021-06-23 | 2021-06-23 | Hermetisch verkappte, optische Projektionsanordnung und Verfahren zum Herstellen derselben |
| PCT/EP2022/066987 WO2022268870A2 (fr) | 2021-06-23 | 2022-06-22 | Dispositif de projection optique recouvert hermétiquement et procédé de production correspondant |
| EP22734955.2A EP4359845A2 (fr) | 2021-06-23 | 2022-06-22 | Dispositif de projection optique recouvert hermétiquement et procédé de production correspondant |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102021206477.9A DE102021206477B4 (de) | 2021-06-23 | 2021-06-23 | Hermetisch verkappte, optische Projektionsanordnung und Verfahren zum Herstellen derselben |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE102021206477A1 DE102021206477A1 (de) | 2022-12-29 |
| DE102021206477B4 true DE102021206477B4 (de) | 2023-01-12 |
Family
ID=82308145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102021206477.9A Active DE102021206477B4 (de) | 2021-06-23 | 2021-06-23 | Hermetisch verkappte, optische Projektionsanordnung und Verfahren zum Herstellen derselben |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP4359845A2 (fr) |
| DE (1) | DE102021206477B4 (fr) |
| WO (1) | WO2022268870A2 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102022134473A1 (de) | 2022-12-22 | 2024-06-27 | Pepperl+Fuchs Se | Scanner zum Nachweisen von Objekten in einem Überwachungsbereich |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100302513A1 (en) | 2009-05-29 | 2010-12-02 | Yoshitaka Takahashi | Projection-type image displaying apparatus |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008003345A1 (de) * | 2008-01-07 | 2009-07-09 | Robert Bosch Gmbh | Mikrospiegelvorrichtung und Herstellungsverfahren für eine Mikrospiegelvorrichtung |
| DE102008012384A1 (de) * | 2008-03-04 | 2009-09-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Deckel für Mikro-Systeme und Verfahren zur Herstellung eines Deckels |
| JP2014056199A (ja) * | 2012-09-14 | 2014-03-27 | Hitachi Media Electoronics Co Ltd | 走査型投影装置 |
| US10901216B2 (en) * | 2017-10-23 | 2021-01-26 | Google Llc | Free space multiple laser diode modules |
| US10714891B2 (en) * | 2018-07-06 | 2020-07-14 | Himax Technologies Limited | Projector, electronic device having projector and associated manufacturing method |
| EP4294767A1 (fr) * | 2021-02-19 | 2023-12-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Procédé de production d'un substrat de couverture, procédé de production d'un composant optoélectronique hermétiquement fermé et composant optoélectronique hermétiquement fermé |
-
2021
- 2021-06-23 DE DE102021206477.9A patent/DE102021206477B4/de active Active
-
2022
- 2022-06-22 WO PCT/EP2022/066987 patent/WO2022268870A2/fr active Application Filing
- 2022-06-22 EP EP22734955.2A patent/EP4359845A2/fr active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100302513A1 (en) | 2009-05-29 | 2010-12-02 | Yoshitaka Takahashi | Projection-type image displaying apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102021206477A1 (de) | 2022-12-29 |
| EP4359845A2 (fr) | 2024-05-01 |
| WO2022268870A2 (fr) | 2022-12-29 |
| WO2022268870A3 (fr) | 2023-03-23 |
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