DE102019201166A1 - Workpiece carrier for holding a component to be coated, use of such a workpiece carrier and device and method for coating a component - Google Patents

Abstract

The invention relates to a workpiece carrier (21) for holding at least one component (30) to be coated, with at least one first direction (40), which has a longitudinal direction (36) and runs in a direction perpendicular to the longitudinal direction (36), through a first limiting device (38). , in a second direction (44) running perpendicular to the longitudinal direction (36) and opposite to the first direction (40) by a second limiting device (46) opposite the first limiting device (38) and in a perpendicular to the directions (40, 44) and Limiting direction (58) running perpendicular to the longitudinal direction of extension (36) through an insert groove (34) bounded by a bottom (54), into which an edge region (48, 50) of the component (30) holds the component (30) on the workpiece carrier (32). can be pushed in along the longitudinal direction (36), at least one of the limiting devices (38, 46) and / or bottom (54) being at least one has a recess (60, 62, 64, 66, 67).

Description

The invention relates to a workpiece carrier for holding a component to be coated. In addition, the invention relates to the use of such a workpiece carrier. The invention also relates to an apparatus and a method for coating at least one component.

The WO 2015/193030 A1 discloses a device with a workpiece carrier and with a gas-tight lockable chamber. The workpiece carrier can be used in electronics production. In addition to means for holding during the transport of boards, the workpiece carrier can also comprise at least one electrode, the workpiece carrier being insertable into the chamber. Gas inlets and gas outlets are provided on the chamber.

In addition, the WO 2014/026967 A2 a method for protecting a component from corrosion is known.

The object of the present invention is to provide a workpiece carrier, a use of such a workpiece carrier and a device and a method so that at least one component, in particular an electrical or electronic component, can be coated particularly advantageously.

This object is achieved according to the invention by a workpiece carrier with the features of claim 1, by a use with the features of claim 9, by a device with the features of claim 10 and by a method with the features of claim 12. Advantageous refinements with expedient developments of the invention are specified in the remaining claims.

A first aspect of the invention relates to a workpiece carrier for, in particular temporarily and / or reversibly releasably, holding at least one component to be coated, for example by means of a low-pressure plasma. The component is preferably an electrical or electronic component, so that the component is preferably an electronic component. In particular, the component can be a circuit board. In particular, the component can be a printed circuit board, also referred to as a printed circuit board, circuit board or printed circuit, which is also referred to as a PCB (Printed Circuit Board) or PCBA (Printed Circuit Board Assembly). The component can thus preferably be a carrier for electronic components or for at least one electronic component.

The workpiece carrier has at least one insertion groove, which has a longitudinal direction of extension or runs longitudinally along this longitudinal direction of extension. In other words, the insertion groove extends in an elongated manner along the longitudinal direction of extension and in this case preferably in a straight line. The insertion groove is delimited in a first direction running perpendicular to the longitudinal direction of the insertion groove by a first limiting device. In a second direction perpendicular to the longitudinal direction of extension and opposite to the first direction, the insertion groove is delimited by a second delimiting device, the delimiting devices, in particular along a spacing direction coinciding with the first direction and with the second direction, being opposite one another and being spaced apart. Thus, the insertion groove is delimited on both sides by the delimiting devices along the spacing direction running perpendicular to the direction of longitudinal extension. In other words, the delimitation devices are, for example, side walls, through which the insertion groove is delimited on both sides along the spacing direction. In a limiting direction running perpendicular to the direction of spacing and perpendicular to the direction of longitudinal extension and thus perpendicular to the first direction and perpendicular to the second direction, the insertion groove is delimited by a bottom of the workpiece carrier. Alternatively or additionally, it is preferably provided that the insertion groove is open in an extension direction which is perpendicular to the direction of spacing and perpendicular to the direction of longitudinal extension and is opposite to the limiting direction. The limiting devices are formed, for example, in one piece with one another. For example, the limiting devices are at least indirectly, in particular directly, connected to the floor. For example, the limiting devices are connected to one another via the floor. In particular, the bottom can be formed in one piece with the limiting devices.

The component to be coated, in particular an edge region of the component to be coated, can be inserted into the insertion groove to hold the component on the workpiece carrier along the longitudinal direction. For example, since the insertion groove is open in the direction of extension, the component can, for example, in a state in which the edge region of the component is inserted into the insertion groove and thus received in the insertion groove, starting from the edge region in the direction of extension from and out of the insertion groove for example, extend downwards in the vertical direction. Since the insertion groove is also open, for example in the direction of extension, the edge region of the component can open inserted in a particularly simple manner into the insertion groove along the longitudinal direction of extension and, particularly after the component has been coated, can be pulled out of the insertion groove again.

When inserted into the insertion groove, the component, in particular the edge region, can be supported or supported at least indirectly, in particular directly, on the first delimitation device in the first direction and at least indirectly, in particular directly, on the second delimitation device in the second direction, so that by means of the Limiting devices excessive, in the first direction and in the second direction and relative to the workpiece carrier movements of the component can be prevented or avoided. As a result, the component can be held particularly securely on the workpiece carrier during coating and, for example, during transport, so that the workpiece carrier according to the invention can be used particularly advantageously for coating the component and for transporting the component.

In order to be able to coat the component particularly well in the aforementioned state, in which the edge region of the component is inserted into the insertion groove and thus is received in the insertion groove, at least one of the delimiting devices and / or the base has at least one recess. The recess preferably faces the insertion groove. This is to be understood in particular to mean that the recess is preferably arranged or formed on or on a side of the at least one limiting device or of the base facing the insertion groove.

It can be provided that the recess, in particular if it is a recess of the at least one delimitation device, is delimited in the respective direction by a wall section of the at least one delimitation device, but the wall section in the respective direction opposite end faces adjoining the recess the at least one limiting device is set back. In particular, if the recess is provided on the floor, it can be provided that the recess is delimited in the delimitation direction by a wall section of the floor, but the wall section of the floor is set back in the delimitation direction with respect to surface areas of the floor adjoining the recess . As a result, when the edge region is in contact with the end faces and / or the surface regions, in particular at the same time, it does not abut the wall section of the at least one delimitation device or the floor, but rather the edge region is spaced apart from the respective wall section.

It has proven to be particularly advantageous, however, if the respective recess is designed as a through opening which can be penetrated, for example, by the low-pressure plasma for coating the component. In other words, the recess is preferably designed as an open or unlimited through opening, so that the component can also be coated particularly advantageously in the region of the insertion groove.

In order to implement a particularly advantageous coating, it is preferably provided that the recess is arranged along the longitudinal direction between wall regions which follow one another along the longitudinal direction. If the recess is provided or formed on or in the at least one delimitation device, for example, the wall areas are wall areas of the at least one delimitation device. If the recess is provided or formed on or in the floor, the wall areas are wall areas of the floor. The recess is also called a recess.

The wall areas of the at least one delimitation device or of the base are spaced apart from one another along the longitudinal direction of extension. The edge region can be supported or supported on the wall regions in the first direction or in the second direction or in the limiting direction, in particular directly.

If the wall areas are, for example, components of the first delimitation device, then the edge area can be supported or supported in the first direction on the wall areas, in particular on their end faces facing the insertion groove, in particular directly. If the wall areas are, for example, a component of the second delimitation device, then the edge area can be supported or supported in the second direction on the wall areas, in particular on their end faces facing the insertion groove, in particular directly. If the wall areas are, for example, part of the floor, then the edge area can be supported or supported in the boundary direction on the wall areas, in particular on their surface areas facing the insertion groove, in particular directly.

The wall areas, in particular their respective end faces or surface areas facing the insertion groove, are, for example, along the first direction or along the second direction or along the delimiting direction at the same height, so that, for example, the wall areas are aligned with one another along the longitudinal direction. As a result, for example, the edge region can abut the respective wall regions at the same time.

However, since the recess is arranged between the wall regions along the longitudinal direction of extension, the at least one delimitation device or the base does not touch the edge region in the region of the recess if the edge region bears against the wall regions at the same time. This can ensure that the component is also adequately coated in the edge region and is thus provided with a coating in the desired manner.

The invention is based in particular on the following findings: A coating, for example a protective coating, of a component, for example a printed circuit board, generally pursues the goal of protecting the component, for example, as an electronic component, from, in particular, corrosive environmental influences such as moisture in later use or in a field application protect and thus prevent damage and failure of modules that are held on the component, for example. According to the state of the art, painting processes, parylene processes and plasma coating processes are used for this.

It is thus conceivable, for example, that the workpiece carrier is used to coat the component by means of a low-pressure plasma, in particular while the component is held by means of the workpiece carrier. The invention or the description of the invention thus relates above all to a plasma method for coating the component by means of a plasma, in particular by means of a low-pressure plasma. However, the previous and following explanations can easily be transferred to other coating processes such as painting processes, parylene processes or other processes and vice versa. When the component is coated, a coating, also referred to simply as a layer, is produced, in particular deposited, on the component or on a surface of the component, the coating having layer properties. One of the layer properties of the coating is, for example, protection, in particular corrosion protection, of the component, the function or property of the layer not being restricted or reduced to a protective function in the context of the invention. If the coating is produced, for example, by a plasma, in particular by a low-pressure plasma, the coating is also referred to as a plasma coating. Plasma coatings have a very wide range of applications for a large number of potential goods or components, such as decorative, optical, hydrophobic and / or hydrophilic layers. Compared to most painting processes or paint layers, plasma coatings are highly cross-linked and therefore much thinner, whereby a plasma coating can have a thickness of a few nanometers or micrometers. In addition, a plasma coating can be solvent-free. Due to the much lower material and cost requirements and at the same time much better environmental compatibility, plasma coatings or plasma processes for the production of plasma coatings can be seen as particularly progressive and future-oriented.

For example, the component is coated by a plasma polymerization and thus by a plasma, in particular by a low-pressure plasma. In the case of plasma polymerization, a layer is deposited on the surface of the component in the excited gas state, that is to say while the component is in the plasma, for example in the form of low-pressure plasma. In other words, layer deposition in the excited state, that is to say in the so-called plasma, is also referred to as plasma polymerization and usually takes place in low pressure (LP). The component to be coated is also referred to as a good or substrate. The low-pressure plasma is to be understood as a plasma in which there is a pressure which is lower than the atmospheric pressure, which is also referred to as the earth's atmospheric pressure. Thus, the pressure prevailing in the low-pressure plasma is substantially lower than 1,013 millibars, the pressure prevailing in the plasma being, for example, a factor of at least or at most 10,000 lower than the atmospheric pressure, that is to say 1,013 millibars.

The component to be coated is introduced, for example, prior to coating in a low-pressure reaction chamber (LP reaction chamber), the reaction chamber also being referred to as a recipient or coating chamber. This means that the component to be coated is arranged in the coating chamber. In the coating chamber, the component is then coated in the ignited plasma by fragmentation and deposition of chemical starting materials, which are also referred to as precursors. The guarantee of a ubiquitous and as homogeneous as possible layer deposition and possibly also plasma activation and cleaning of the surface of the component is particularly important for one The desired protective function is of great importance and represents a major process engineering challenge.

It is conceivable to use printed circuit board magazines, cassettes or workpiece carriers in order to transport components such as printed circuit boards. For process-related reasons, the coating chamber is usually just large enough to be able to insert a printed circuit board magazine with multiple, in particular eight, assemblies in such a way that each of the components to be coated, for example in the form of circuit boards, is located between two or more, in particular four, gas showers and two segments or plates of an electrode, where the layer-depositing plasma can form. Gas showers can be installed in the vertical direction both above and below. Gas outlets are at the top and bottom and can be controlled separately. This allows the reactor to flow in both vertical directions. The electrode can be plate-shaped, but alternatively or additionally, for example, curved U-tubes, perforated plates, etc. can be used as electrodes.

In terms of plant technology, two flow directions should be set (from top to bottom and in the opposite flow direction) in order to ensure a relative homogeneity of the layer deposition. However, workpiece carriers that are conventionally used represent a physical flow barrier, since conventional workpiece carriers are closed over a large area and are therefore impermeable to the plasma.

This results in a forced flow of the reactive gas particles in the plasma, in particular in the direction of a front door side and a wall side of the coating chamber behind it. A defined, vertical flow routing cannot usually be guaranteed properly. This can have a negative impact on the homogeneity of the layer deposition. Experiments have shown that if the delimitation devices and the floor extend continuously along the longitudinal direction and thus without interruption, so that the side walls formed by the delimitation devices and the floor are closed over a wide area, the deposition rate in the area of the side walls can approach 0 nanometers per second . This is unacceptable for a desired and, for example, protective function of the coating, but can be avoided by the invention.

It can be assumed that a fluid-dynamic boundary layer is formed on conventional contact surfaces of conventional, continuous workpiece carriers, in which the flow velocity in the immediate vicinity of the wall approaches zero and / or a kind of flow build-up occurs in conventional insertion grooves of conventional workpiece carriers, which causes inadequate layer separation . These are simplified models, since according to the current state of science such flows in plasma can only be simulated with great effort.

In summary, it can be stated that conventional workpiece carriers, for example in the form of magazines or cassettes, are designed for the transport of components such as printed circuit boards. The transport therefore represents an actual, original purpose of the conventional workpiece carriers. However, if such conventional workpiece carriers are now used to coat the components in a coating chamber, in particular by means of a plasma, it is usually possible for the conventional workpiece carriers to be used only for the transport of the components are aligned or designed, an adequate coating of the components cannot be guaranteed. The aim of the invention is now to constructively optimize a workpiece carrier in order to be able to guarantee a ubiquitous coating, for example as a protective coating by means of, in particular automated, plasma polymerization by means of a resulting flow optimization.

The workpiece carrier according to the invention enables on the one hand an advantageous and safe transport of the component. On the other hand, the workpiece carrier enables a particularly advantageous and at least almost complete coating of the component in a coating chamber, as a result of which the component can be coated or manufactured in a time and cost-effective manner. This enables short cycle times and high throughput rates to be achieved. Since the at least one limiting device and / or the base has the recess, an adequate coating can also be ensured in the edge region of the component in a short time, that is to say with only a short coating time, during which the component is in the coating chamber, so that short Cycle times can be represented. The two limiting devices and / or the base preferably each have at least one or more recesses.

The workpiece carrier according to the invention can be produced, for example, on the basis of a standardized transport cassette, in particular for printed circuit boards, so that such a transport cassette can be developed further to the workpiece carrier according to the invention. This allows the inventive Workpiece carriers can be created quickly and cost-effectively. In other words, for example, a standardized transport cassette can be developed further to the workpiece carrier according to the invention, so that the workpiece carrier can be used both for the actual purpose and thus for the transport of the component and for a perfect use in a system for coating the component. The respective recess, also referred to as a recess and, for example, designed as a through opening, functions, for example, as a channel through which the plasma or the precursors can flow. This also ensures that the edge area is adequately coated. In particular, a perfect and at least almost complete coating, in particular plasma coating, of the component can be ensured. In comparison to a conventional workpiece carrier, the workpiece carrier according to the invention is a flow-optimized workpiece carrier, since the plasma or the precursors can advantageously flow.

It has been shown to be particularly advantageous if the recess has a first length running along the longitudinal direction, the respective wall area having a respective second length running along the longitudinal direction. The first length is greater than the second length or at least one of the second lengths. As a result, the length of the wall regions running in the longitudinal direction of extension can be kept particularly small, so that the wall regions are designed, for example, as narrow webs. On the one hand, the webs can ensure adequate support and thus retention of the component. On the other hand, the recess along the longitudinal direction is so large that the edge area can also be advantageously coated.

The respective delimitation device and / or the base preferably has a plurality of recesses, via which the respective wall areas of the respective delimitation device or the base are spaced apart. The previous and following explanations for the respective first recess can also be readily transferred to the other recesses and vice versa.

It has proven to be particularly advantageous if, in particular when the recess is provided on the at least one delimitation device, the recess is open in the first direction and in the second direction and in the direction of extension, as a result of which the component can be coated particularly well. If the recess is provided on the floor, the recess is open, for example, in the limiting direction and in the direction of extension.

A further embodiment is characterized in that the workpiece carrier has at least one second insertion groove opposite the insertion groove in the installed position of the workpiece holder in the vertical direction. To hold the component on the workpiece carrier, a second edge region of the component opposite the edge region can be inserted into the second insertion groove along the longitudinal direction. The following and previous explanations for the first insertion groove can also be easily transferred to the second insertion groove and vice versa. The workpiece carrier assumes its installation position in the completely manufactured state and in the state arranged in the coating chamber. In particular, the workpiece carrier assumes its installation position while the workpiece carrier and the component held thereon are in the coating chamber and the component is coated.

The second insertion groove has a second longitudinal extension direction running parallel to the direction of longitudinal extent, the second insertion groove being delimited in the first direction by a third delimitation device and in the second direction by a fourth delimitation device opposite the third delimitation device. The previous and following explanations regarding the first limiting direction and / or the second limiting direction can also easily be transferred to the third limiting direction and / or the fourth limiting direction and vice versa.

The second insertion groove is delimited in a second delimitation direction running perpendicular to the first direction, perpendicular to the second direction and perpendicular to the second longitudinal direction and opposite to the delimiting direction by a second bottom of the workpiece carrier, the second delimitation direction being the direction of extension. The second insertion groove is preferably open in the first limiting direction. The third and / or fourth delimitation device and / or the second floor have at least one second recess, to which the previous and following explanations for the recess of the at least one delimitation device or the first floor can be transferred and vice versa. As a result, the component can also be coated particularly well in its second edge region.

The second recess is preferably along the second longitudinal direction between at least two second wall regions of the third or fourth Limiting device or the second bottom arranged, whereby the second wall areas are spaced apart from each other around the second recess along the second longitudinal direction. The second edge area can be supported in the respective direction or in the second limiting direction at least indirectly, in particular directly, on the respective second wall area. As a result, the component can be held particularly advantageously during transport and during coating.

The second insertion groove is open, for example, in the limiting direction and thus towards the first insertion groove, so that the edge regions can be inserted into the insertion grooves particularly easily along the longitudinal extension directions. Since, for example, during the coating of the component, the insertion grooves lie opposite one another in the vertical direction, the component can be supported in the vertical direction downwards on the second insertion groove, in particular on the second floor, during the coating. Thus, for example, the first limiting device and the second limiting device only function to support the component laterally and thus to hold it. As a result, the wall areas of the first and second delimitation device or of the first base can be made particularly small and the first recess along the longitudinal direction of extension particularly large, so that a particularly advantageous layer deposition and thus coating can be ensured.

It has therefore proven to be particularly advantageous if the second recess is larger than the first recess along the respective longitudinal direction.

In order to be able to coat the component particularly well, it is provided in a further embodiment of the invention that the second recess is designed as a through opening. The previous and following explanations for the respective first recess can easily be transferred to the respective second recess and vice versa.

A second aspect of the invention relates to the use of a workpiece carrier according to the first aspect of the invention. In use, the workpiece carrier is used to hold the component in a coating chamber by means of the workpiece carrier, while the component is coated in the coating chamber, in particular by means of a low-pressure plasma generated in the coating chamber. Advantages and advantageous configurations of the first aspect of the invention are to be regarded as advantages and advantageous configurations of the second aspect of the invention and vice versa. The workpiece carrier is, for example, a grooved plate or comprises at least one grooved plate. For example, the workpiece carrier comprises two grooved plates, which are opposite one another in the vertical direction, for example in the installed position of the workpiece carrier. The respective groove plate forms the respective insertion groove and, for example, a further groove directly adjacent to the respective insertion groove. During coating, the component is arranged, for example, in the insertion groove, while the adjacent groove is free. Walls delimiting the groove on both sides can also have at least one or more recesses in order to ensure a particularly advantageous coating.

A third aspect of the invention relates to a device for coating at least one component. The device comprises at least one coating device which has at least one coating chamber. The component to be coated can be arranged in the coating chamber. For example, a plasma, in particular a low-pressure plasma, for coating the component can be generated in the coating chamber by means of the coating device. The component is thus to be coated in the coating chamber by means of the coating device. The device according to the third aspect of the invention has at least one workpiece carrier arranged or to be arranged in the coating chamber according to the first aspect of the invention, the component being held or held in the coating chamber by means of the workpiece carrier. Advantages and advantageous configurations of the first aspect and the second aspect of the invention are to be regarded as advantages and advantageous configurations of the third aspect of the invention and vice versa.

It has proven to be particularly advantageous if the coating chamber is delimited by a housing of the device. The housing and the workpiece carrier are designed as separate components, the workpiece carrier being reversibly detachable and thus non-destructively arranged in the coating chamber. As a result, the workpiece carrier can be used both for a particularly advantageous transport of the component and for a particularly advantageous coating of the component. In particular, it is possible to arrange the component on the workpiece carrier before coating, whereupon the workpiece carrier is arranged in the coating chamber while the component is arranged and thus held on the workpiece carrier. After coating, the workpiece carrier and the component arranged and thus held there are removed from the coating chamber removed, whereupon the coated component can be transported by means of the workpiece carrier. The workpiece carrier thus enables particularly simple, time-saving and inexpensive handling of the component, both before and after the coating and during the coating of the component.

A fourth aspect of the invention relates to a method for coating at least one component, in the method the component is held in a coating chamber by means of a workpiece carrier according to the first aspect of the invention, while the component is held in the coating chamber, in particular by means of a low-pressure plasma generated in the coating chamber, is coated. Advantages and advantageous configurations of the first aspect, the second aspect and the third aspect of the invention are to be regarded as advantages and advantageous configurations of the fourth aspect of the invention and vice versa.

In order to be able to coat the workpiece particularly quickly and cost-effectively, it is provided in an advantageous embodiment of the invention that, prior to coating the component, the workpiece carrier is arranged in the coating chamber together with the component held on the workpiece carrier.

It has also proven to be particularly advantageous if, after the component has been coated, the workpiece carrier together with the component held on the workpiece carrier is removed from the coating chamber. Thus, the workpiece can be held on the workpiece carrier both before coating and after coating and during coating and can be handled advantageously by means of the workpiece carrier.

In order to be able to coat the component particularly quickly and cost-effectively, it is provided in a further embodiment of the invention that after the workpiece carrier and thus the component have been arranged in the coating chamber and before the workpiece carrier and thus the component have been removed from the coating chamber, the component has to be released Component of the workpiece carrier is omitted.

Further advantages, features and details of the invention result from the following description of a preferred exemplary embodiment and from the drawing. The features and combinations of features mentioned above in the description and the features and combinations of features mentioned below in the figure description and / or shown in the figures alone can be used not only in the respectively specified combination but also in other combinations or alone, without the scope of Leaving invention.

• 1 ausschnittsweise eine schematische Vorderansicht einer erfindungsgemäßen Vorrichtung zum Beschichten wenigstens eines Bauteils;
• 2 ausschnittsweise eine schematische Perspektivansicht einer Beschichtungskammer einer Beschichtungseinrichtung der Vorrichtung;
• 3 ausschnittsweise eine schematische Perspektivansicht eines erfindungsgemäßen Werkstückträgers; und
• 4 eine schematische Seitenansicht des zu beschichtenden Bauteils.

The drawing shows in:

• 1 Detail of a schematic front view of a device according to the invention for coating at least one component;
• 2nd excerpts from a schematic perspective view of a coating chamber of a coating device of the device;
• 3rd excerpts a schematic perspective view of a workpiece carrier according to the invention; and
• 4th is a schematic side view of the component to be coated.

In the figures, the same or functionally identical elements are provided with the same reference numerals.

1 shows a detail of a device in a schematic front view 10th for coating at least one component. The component can be a printed circuit board. Furthermore, the component can be an assembly which, for example, comprises at least or exactly one printed circuit board or printed circuit board which is equipped with at least one or more electronic components. In particular, the component or assembly can be designed as a PCB or as a PCBA. However, the previous and following explanations can easily be transferred to other components that can be coated or coated and vice versa.

Together with 2nd it can be seen that the device 10th at least or exactly one coating device 12th has, by means of which the component is to be coated. For this purpose, the coating device comprises 12th a housing 14 through which a coating chamber 16 the coating device 12th is limited. By means of the coating device 12th the component can be coated. In other words, by means of the coating device 12th and thus by means of the device 10th coated the component as part of a method for coating the component. The component is in the coating chamber 16 can be arranged or arranged. In other words, the component is in the coating chamber 16 arranged while the component in the coating chamber 16 is coated.

The coating facility 12th also has a door 18th on which is movable, in particular pivotable, and on the housing 14 is held. The door 18th is thus between one in 1 shown closed position and at least an open position relative to the housing 14 movable, in particular pivotable. The door locks in the closed position 18th the coating chamber 16 , which is also referred to as a low pressure chamber (LP chamber). In the open position, however, the door gives 18th the coating chamber 16 free, so that the respective component to be coated then enters the coating chamber 16 can be moved into it. In addition, the coated component can after a coating process, in the context of which the component by means of the coating device 12th is or was coated, from the coating chamber 16 moved out and thus removed.

Looks particularly good 2nd it can be seen that the housing 14 side walls 20 through which the coating chamber 16 is limited in the horizontal direction and along a spacing direction. The housing 14 also has a bottom 22 and a blanket 24th on, the coating chamber 16 in a horizontal direction upwards through the ceiling 24th and down through the floor 22 is limited.

The coating facility 12th also includes coating electrodes 26 which in the coating chamber 16 are arranged. By means of the coating electrodes 26 is or will be in the coating chamber 16 a plasma, preferably in the form of a low-pressure plasma, can be generated or generated for coating the component. The generated low pressure plasma forms in the coating chamber 16 an atmosphere in which the component is coated and thus provided by a layer deposition with a coating also referred to as a low-pressure plasma coating at least in a partial area, in particular at least predominantly or completely. The low-pressure plasma forms, for example, between the respective coating electrode 26 and a respective coating counter electrode, the coating counter electrode, for example, the component to be coated itself and / or one of the coating electrodes 26 different, additionally provided component of the coating device 12th is, the component or the coating counterelectrode preferably in the coating chamber 16 is arranged.

In addition, there are for example 16 line elements in the coating chamber 28 the coating device 12th arranged. For example, the respective line element 28 designed as a gas lance. For example, there could be 32 gas lances. Sixteen additional lower conduits, not shown, could be used to direct the flow from bottom to top.

About the line elements 28 can, for example, precursors in the coating chamber 16 , in particular into the low-pressure plasma, are introduced, in particular during the low-pressure plasma in the coating chamber 16 is generated. For example, the low-pressure plasma causes the aforementioned coating from the precursors to deposit on the component, in particular on its surface, as a result of which the component is coated, that is to say provided with the coating.

4th shows that in 4th with 30 designated component, which has an at least substantially planar extent. Adequate coating of the component 30th To be able to guarantee the component 30th Do not touch any other components flatly during coating, but at least almost freely in the coating chamber 16 stand or lie. The reason for this is that, for example, where the component 30th touched another component excessively, no coating can be formed.

Now around the component 30th particularly advantageous and at least almost completely in the coating chamber 16 To be able to coat is to coat the component 30th an in 3rd workpiece carrier recognizable in sections 32 used. The workpiece carrier 32 and the housing 14 are components formed separately from one another, so that the workpiece carrier 32 - in particular during the component 30th reversibly detachable on the workpiece carrier 32 is held - reversibly detachable in the coating chamber 16 can be moved into it. The workpiece carriers are in place during coating 32 and the component held on it 30th in the coating chamber 16 arranged. After coating, the workpiece carrier 32 and the coated component held on it 30th from the coating chamber 16 moved out. As will be explained in more detail below, the workpiece carrier enables 32 thus both a particularly advantageous transport and a particularly advantageous coating of the component 30th .

The workpiece carrier 32 is on the floor, for example 22 or on the ceiling 24th arranged and has at least one insertion groove 34 on. The slide-in groove 34 has one in 3rd with a double arrow 36 illustrated direction of longitudinal extension, with the workpiece carrier in the installed position 32 the direction of longitudinal extension is perpendicular to the vertical direction and perpendicular to the aforementioned direction of spacing. The workpiece carrier 32 assumes its installation position while the workpiece carrier 32 during coating in the coating chamber 16 is arranged.

The slide-in groove 34 is in a first direction running perpendicular to the direction of longitudinal extent and coinciding, for example, with the direction of spacing, through a first limiting device 38 limited, with the first direction in 3rd by an arrow 40 is illustrated. The aforementioned direction of spacing is, for example, in 3rd with a double arrow 42 illustrated. In a second direction running perpendicular to the longitudinal direction, opposite to the first direction and coinciding with the spacing direction, for example, which in 3rd by an arrow 44 is illustrated is the insertion groove 34 by a second limiting device 46 limited.

For coating the component 30th becomes an edge area, for example in the vertical direction of the upper or lower area 48 or 50 of the component 30th along the longitudinal direction in the insertion groove 34 inserted. As a result, the edge area can 48 respectively 50 in the first direction on the limiting device 38 and in the second direction on the limiting device 46 support at least indirectly, in particular directly, whereby the component 30th on the workpiece carrier 32 is supported or supported. The limiting device 38 has a first end face also referred to as a first end face 51 on that in the second direction of the slot 34 is facing. In other words, the slide-in groove 34 in the first direction through the face 51 limited. This can cause the edge area 48 respectively 50 in the first direction on the front 51 support at least indirectly, in particular directly. The limiting device 46 has a second end face, also referred to as a second end face 52 on which is in the first direction of the slot 34 is facing. This is the insertion groove 34 in the second direction through the face 52 limited. The edge area 48 respectively 50 can thus at least indirectly, in particular directly, in the second direction on the end face 52 support. The respective end face 51 respectively 52 preferably runs in a plane which runs at least substantially parallel to the direction of longitudinal extension.

The workpiece carrier 32 also has a bottom 54 on which the limiting devices 38 and 46 are interconnected. In particular, the limiting devices 38 and 46 in one piece with one another and / or in one piece with the bottom 54 be trained.

In a direction perpendicular to the direction of longitudinal extension and perpendicular to the direction of spacing and in 3rd by an arrow 56 The third direction illustrated and also referred to as the direction of extension is the insertion groove 34 open. In a direction opposite to the third direction (extension direction), in 3rd by an arrow 58 The fourth groove, illustrated and running perpendicular to the direction of spacing and perpendicular to the direction of longitudinal extent and also referred to as the limiting direction, is the insertion groove 34 through the floor 54 limited. In the installed position of the workpiece carrier 32 they fall through the arrows 56 and 58 illustrated directions along with the vertical direction. For example, is the workpiece carrier 32 on the ceiling 24th arranged, the third direction runs vertically downward, and the fourth direction runs vertically upward. Is the workpiece carrier 32 for example on the floor 22 arranged, the third direction runs in the vertical direction upwards, and the fourth direction runs in the vertical direction downwards.

Overall is out 3rd recognizable that the insertion groove 34 along the direction of spacing (double arrow 42 ) on both sides through the limiting devices 38 and 46 , especially through the end faces 51 and 52 , is limited.

Now to avoid the respective edge area 48 respectively 50 then when he's in the slot 34 is included, excessively flat at the limiting devices 38 and 46 rests so that the component 30th also in the border area 48 respectively 50 can be coated sufficiently, the respective limiting device 38 respectively 46 several recesses each 60 and 62 respectively 64 and 66 on, which is in the longitudinal direction of the insertion groove 34 are arranged one behind the other or in succession and spaced apart. Here are the recesses 62 and 66 arranged in mutual overlap or overlap, the recesses 60 and 64 , in particular along the spacing direction, are arranged in respective mutual overlap or overlap.

The respective recess 60 , 62 , 64 respectively 66 is in the longitudinal direction of the insertion groove 34 between respective, adjacent and along the longitudinal direction directly to the respective recess 60 , 62 , 64 respectively 66 adjoining wall areas 68a-c respectively 70a-c arranged so that the wall areas 68a-c respectively 70a-c in pairs around the respective recess 60 , 62 , 64 respectively 66 are spaced apart from each other along the longitudinal direction.

The edge area 48 respectively 50 is in the first direction or in the second direction on the wall areas 68a-c respectively 70a-c supportable or supported, however, the respective edge area 48 or 50 in the area of the respective recess 60 , 62 , 64 respectively 66 is free and not at the respective limiting device 38 respectively 46 is present.

In addition, the in 3rd shown embodiment, the respective recess 60 , 62 , 64 respectively 66 formed as a through opening which is open and free both along the spacing direction and in the third direction (extension direction). The respective recess is in the fourth direction (limiting direction) 60 , 62 , 64 respectively 66 for example through the floor 54 limited. Thus, the precursors or the plasma can flow particularly well through the through openings, so that both border areas 48 and 50 subsequent areas of the component 30th as well as the edge areas 48 and 50 themselves can be coated particularly advantageously. In other words, the recesses 60 , 62 , 64 and 66 allow an at least almost unimpeded gas flow during the coating, thereby the component 30th is at least almost completely coated. In experiments, edge effects with greatly increased layer formation could even be observed. Other system and process parameters such as an excitation frequency, plasma discharge characteristics, gas feed and gas extraction etc. can have an influence on the coating result. However, it was found that a flow of the reactive particles in the plasma has a serious influence on a desired, holistic coating of the component 30th has, with the flow-optimized workpiece carrier 32 an advantageous flow control and, as a result, an adequate coating of the component 30th can be realized. The workpiece carrier 32 can be used both for transport and for coating the component 30th are used, so that the component, which is also referred to as a workpiece 30th using the workpiece carrier 32 can advantageously be coated, for example, by low-pressure plasma polymerization.

Out 3rd can also be seen that the insertion groove 34 floor bounding in the limiting direction 54 at least one recess preferably designed as a through opening 67 , through which, for example, the plasma can flow. This allows the edge area 48 be coated particularly well.

Another advantage of the flow-optimized workpiece carrier 32 consists in particular in that a gas supply in the form of gas lances, gas showers, hoses or the like could also be attached outside the printed circuit board magazine. The workpiece carrier could be adjusted by adapting the electrode segments 32 are particularly densely populated, which enables a particularly high throughput and a particularly high efficiency of a system for coating components. However, this could also be spatially advantageous for large, three-dimensional components and thus also referred to as 3D components.

For example, several components simultaneously in the coating chamber 16 The workpiece carrier has the ability to coat 32 in addition to the slide-in groove 34 intended, additional slide-in grooves 72a-d on, with the insertion grooves 34 and 72a-d are arranged next to one another in particular along the spacing direction. The previous and following explanations of the slide-in groove can be used 34 easily on the other slide-in grooves 72a-d be transferred and vice versa.

• - Werkstückträger sowohl für ursprünglichen Zweck als auch für ein Beschichten, insbesondere ein Plasmabeschichten, einwandfrei verwendbar
• - Schichtabscheidung durch Niederdruck-Plasmapolymerisation vollständig beziehungsweise ubiquitär auf Gütern wie zum Beispiel PCBAs realisierbar
• - zielgerichtete Strömungsführung
• - einfache konstruktive Änderungen zur Strömungsoptimierung
• - für bereits vorhandene Werkstückträger nachrüstbar, wodurch Kosten besonders gering gehalten werden können
• - potentielle Platzersparnis durch vereinfachte Gaseinspeisung und somit potentiell höher bestückbare Träger und somit höherer Durchsatz
• - weiterhin hoch automatisierbares Verfahren realisierbar

In particular, the following advantages can be realized by the invention:

• - Workpiece carrier can be used perfectly for both the original purpose and for coating, in particular plasma coating
• - Layer deposition can be completely or ubiquitously realized on goods such as PCBAs by low-pressure plasma polymerization
• - targeted flow control
• - Simple design changes to optimize flow
• - Can be retrofitted to existing workpiece carriers, which means that costs can be kept particularly low
• - Potential space savings through simplified gas feed and thus potentially more loadable carriers and thus higher throughput
• - Highly automatable process still feasible

Reference list

10th

contraption

12th

Coating facility

14

casing

16

Coating chamber

18th

door

20

Side wall

22

ground

24th

ceiling

26

Coating electrodes

28

Line elements

30th

Component

32

Tool carrier

34

Slide-in groove

36

Double arrow

38

Limiting device

40

arrow

42

Double arrow

44

arrow

46

Limiting device

48

Edge area

50

Edge area

51

Face

52

Face

54

ground

56

arrow

58

arrow

60

Recess

62

Recess

64

Recess

66

Recess

68a-c

Wall area

70a-c

Wall area

72a-d

Slide-in groove

QUOTES INCLUDE IN THE DESCRIPTION

This list of documents listed by the applicant has been generated automatically and is only included for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Patent literature cited

• WO 2015/193030 A1 [0002]
• WO 2014/026967 A2 [0003]

Claims (15)

Workpiece carrier (21) for holding at least one component (30) to be coated, with at least one first direction (40), which has a longitudinal direction (36) and runs in a direction perpendicular to the longitudinal direction (36), through a first delimitation device (38), in a vertical direction to the longitudinal direction (36) and the first direction (40) opposite second direction (44) through a second limiting device (38) opposite the first limiting device (38) and in a direction perpendicular to the first direction (40), perpendicular to the second direction (44 ) and the limiting direction (58) running perpendicular to the longitudinal direction (36) through a bottom (54) delimited insertion groove (34) into which an edge area (48, 50) of the component (48) 50 for holding the component (30) on the workpiece carrier (32) 30) can be inserted along the longitudinal direction (36), at least one of the limiting devices (38, 46) and / or the bottom (54) whom has at least one recess (60, 62, 64, 66, 67). Workpiece carrier (32) after Claim 1 , wherein the recess (60, 62, 64, 66, 67) is designed as a through opening. Workpiece carrier (32) after Claim 1 or 2nd , wherein the recess (60, 62, 64, 66) is arranged along the longitudinal direction (36) between at least two wall areas (68a-c, 70a-c) of the at least one delimiting device (38, 46) or the bottom, whereby the wall areas (68a-c, 70a-c), on which the edge region (48, 50) can be supported in the respective direction (40, 44) or in the limiting direction (58), around the recess (60, 62, 64, 66, 67) are spaced apart from one another along the longitudinal direction (36). Workpiece carrier (32) after Claim 3 , wherein the recess (60, 62, 64, 66) has a first length running along the longitudinal direction (36) and the respective wall area (68a-c, 70a-c) has a respective second length running along the longitudinal direction (36), wherein the first length is greater than at least one of the second length. Workpiece carrier (32) according to one of the preceding claims, wherein the workpiece carrier (32) has at least one second insertion groove opposite the insertion groove (34) in the installed position of the workpiece holder (32) in which to hold the component (30) on the workpiece holder a second edge region (50, 48) of the component (30) opposite the edge region (48, 50) can be inserted along the longitudinal direction (36), wherein: - The second insertion groove has a second longitudinal extension direction running parallel to the longitudinal direction (36), in the first direction (40) by a third limiting device, in the second direction (44) by a fourth limiting device opposite the third limiting device and in a direction perpendicular to the first direction , perpendicular to the second direction and perpendicular to the second longitudinal direction and opposite to the limiting direction (58), the second limiting direction is delimited by a second floor; and - The third limiting device and / or the fourth limiting device and / or the second base has at least one second recess. Workpiece carrier (32) after Claim 5 , wherein the second recess is arranged along the second longitudinal direction between at least two second wall areas of the third or fourth delimitation device or the floor, whereby the second wall areas, on which the second edge area can be supported in the respective direction or in the second delimitation direction, by the second Recess are spaced from each other along the second longitudinal direction. Workpiece carrier (36) after Claim 6 , wherein the respective second recess along the respective longitudinal direction is larger than the respective first recess (60, 62, 64, 66). Workpiece carrier (32) according to one of the Claims 5 to 7 , wherein the respective second recess is designed as a through opening. Use of a workpiece carrier (32) according to one of the preceding claims, wherein the workpiece carrier (32) is used to hold the component (30) by means of the workpiece carrier (32) in a coating chamber (16) while the component (30) in the Coating chamber (16) is coated. Device (10) for coating at least one component (30), with at least one coating device (12) which has at least one coating chamber (16) in which the component (30) to be coated can be arranged and coated by means of the coating device (12) , and with at least one workpiece carrier (32) which can be arranged in the coating chamber (16) according to one of the Claims 1 to 8th The component (30) is to be held in the coating chamber (16) by means of the workpiece carrier (32). Device (10) after Claim 10 , wherein the coating chamber (16) is delimited by a housing (14), the housing (14) and the workpiece carrier (32) being designed as separate components, and the workpiece carrier (32) being reversibly detachable in the coating chamber (16 ) can be arranged. Method for coating at least one component (30), in which the component (30) by means of a workpiece carrier (32) according to one of the Claims 1 to 8th is held in a coating chamber (16) while the component (30) is coated in the coating chamber (16). Procedure according to Claim 12 The workpiece carrier (32) is arranged in the coating chamber (16) together with the component (30) held on the workpiece carrier (32) before the component (30) is coated. Procedure according to Claim 12 or 13 , After the component (30) has been coated, the workpiece carrier (32) is removed from the coating chamber (16) together with the component (30) held on the workpiece carrier (32). Procedure according to the Claims 13 and 14 , After the arrangement of the workpiece carrier (32) in the coating chamber (16) and before the removal of the workpiece carrier (32) from the coating chamber (16), the component (30) does not come loose from the workpiece carrier (32).

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