DE102019118690A1 - probe head - Google Patents

Abstract

A probe head 100 comprises a micropositioner 110 and probes 120. The micropositioner 110 comprises an upper guide plate 111 and a lower guide plate 112, the upper guide plate 111 having first guide holes H1 and the lower guide plate 112 having second guide holes H2. A respective probe 120 passes through a corresponding first guide hole H1 and a corresponding second guide hole H2, the respective probe 120 comprising a probe main body 122 and a spring sleeve 125. The probe main body 122 has a probe tip 123 and a probe body 129, the probe body 129 being connected to the corresponding probe tip 123. The probe tip 123 has a first cross section 123S, at least part of the first cross section 123S being located in the corresponding second guide hole H2. The first cross section 123S has two opposite straight edges 1231 and two opposite curved edges 1232. The probe body 129 also has a second cross-section 129S, the second cross-section 129S being circular. A spring sleeve 125 comprises the probe main body 122 and has a connecting end 126, a spring section 127 and a free end 128, the respective spring section 127 being arranged between and connected to the corresponding connecting end 126 and the corresponding free end 128.

Description

Field of the Invention

The present invention relates to a probe head.

State of the art

The main function of the needle card is to bring the probes into direct contact with the solder pads or protrusions on the test object (e.g. non-packaged wafers, chips and dies), the aim of the measurement being the cooperation of the peripheral test machine with the Software control is achieved and defective products are sorted out. As a rule, a test signal is sent from the test machine to the test object via the needle card, and then a test result signal intended for analysis is sent back to the test machine by the test object via the needle card.

As a rule, a needle card has a probe head which is used to attach a certain number of probes. After a test has been carried out with the needle card, the probe tips that come into contact with the test object are normally cleaned regularly by the user.

Object of the invention

It is an object of the present invention to provide a probe head which prevents the probes from rotating relative to the micropositioner.

According to an exemplary embodiment of the present invention, a probe head comprises a micropositioner and a plurality of probes, the micropositioner comprising an upper guide plate and a lower guide plate, the upper guide plate having a plurality of first guide holes and the lower guide plate having a plurality of second guide holes, the respective second guide hole being rectangular , wherein a respective probe passes through a corresponding first guide hole and a corresponding second guide hole, wherein a respective probe comprises a probe main body and a spring sleeve, wherein a respective probe main body has a probe tip and a probe body, the respective probe body being connected to the corresponding probe tip, wherein the respective probe tip has a first cross section in the direction perpendicular to the central axis of the respective probe main body, at least a part of the The respective first cross section is located in the corresponding second guide hole, the respective first cross section having two opposite straight edges and two opposite curved edges, wherein a respective probe body has a second cross section in the direction perpendicular to the central axis of the respective probe main body, the respective second cross section being circular , wherein the respective spring sleeve comprises a probe main body and has a connecting end, a spring section and a free end, the respective spring section being arranged between and connected to the corresponding connecting end and the corresponding free end, the respective connecting end being fixed to the corresponding probe body is connected to form a protruding portion with the respective free end away from the corresponding probe tip.

According to an embodiment of the present invention, a needle card comprises a printed circuit board, a probe head and a space conversion frame. The probe head includes a micropositioner and a plurality of probes, the micropositioner comprising an upper guide plate and a lower guide plate, the upper guide plate having a plurality of first guide holes and the lower guide plate having a plurality of second guide holes, the respective second guide hole being rectangular, with a respective probe passing through a corresponding first guide hole and a corresponding second guide hole pass through, wherein the respective probe comprises a probe main body and a spring sleeve, wherein a respective probe main body has a probe tip and a probe body, the respective probe body being connected to the corresponding probe tip, the respective probe tip being relative to the corresponding probe body is located far from the circuit board, the respective probe tip in the direction perpendicular to the central axis of the respective probe main body Most cross-section, wherein at least a part of the respective first cross-section is in the corresponding second guide hole, the respective first cross-section having two opposite straight edges and two opposite curved edges, with a respective probe body in the direction perpendicular to the central axis of the respective probe main body has a second cross section, the respective second cross section being circular, the respective spring sleeve comprising a probe main body and having a connecting end, a spring section and a free end, the respective spring section being arranged between and connected to the corresponding connecting end and the corresponding free end , wherein the respective connection end is fixedly connected to the corresponding probe main body, the respective free end of the corresponding Probe tip is located, wherein the space conversion frame between the circuit board and the probe head is arranged and connected to them.

list of figures

• 1 eine schematische Ansicht, welche die Anwendung des Sondenkopfs 100 gemäß einem Ausführungsbeispiel der vorliegenden Erfindung zeigt;
• 2 eine teilweise vergrößerte Querschnittansicht des Sondenkopfs 100 gemäß 1;
• 3 eine Querschnittansicht entlang des Liniensegments M-M gemäß 2;
• 4 eine Querschnittansicht entlang des Liniensegments N-N gemäß 2.

The drawings used to explain the exemplary embodiments show:

• 1 is a schematic view showing the application of the probe head 100 according to an embodiment of the present invention;
• 2 a partially enlarged cross-sectional view of the probe head 100 according to 1 ;
• 3 a cross-sectional view along the line segment MM according to 2 ;
• 4 a cross-sectional view along the line segment NN according to 2 ,

Detailed description of the exemplary embodiments

Various exemplary embodiments of the present invention are disclosed below in the drawings. For the sake of clarity, many practical details are explained in the following description. However, it is to be understood that these practical details do not limit the invention. That is, in some embodiments of the invention, these practical details are not necessary. In addition, some of the conventional structures and elements in the drawings are shown in a simplified schematic manner to simplify the drawings. Features of different embodiments can be used interrelated, if possible in practice.

It's going on 1 Reference which is a schematic view showing the application of the probe head 100 according to an embodiment of the present invention. As in 1 shown is the probe head 100 about the room conversion rack 200 electrically with the circuit board 300 connected to a pin card 400 to build. The probe head is in practical applications 100 configured so that it is electrically connected to the test object (device under test, DUT for short) to carry out an electrical signal test on a test object.

It's going on 2 Reference is a partially enlarged cross-sectional view of the probe head 100 according to 1 shows. As in the 1 and 2 shown, in the present exemplary embodiment comprises the probe head 100 a micropositioner 110 and several probes 120 , As in 2 shown includes the micropositioner 110 an upper guide plate 111 and a lower guide plate 112 that are parallel to each other, with the upper guide plate 111 several first pilot holes H1 and the lower guide plate 112 several second guide holes H2 has, the position of the respective first guide hole H1 with the position of the corresponding second pilot hole H2 corresponds. A respective probe 120 goes through a corresponding first guide hole H1 the upper guide plate 111 and a corresponding second pilot hole H2 the lower guide plate 112 therethrough. Furthermore, a respective probe 120 a pair of flat surfaces 121 on, with the flat areas 121 are facing away from each other and at least partially in the corresponding second guide hole H2 the lower guide plate 112 are located.

It's going on 3 Reference is made to a cross-sectional view along the line segment MM according to 2 shows. As in 3 shown, the respective second guide hole is in the present embodiment H2 the lower guide plate 112 rectangular. In this way, the flat surfaces can 121 of the respective probe 120 and the corresponding second pilot hole H2 hinder each other. In that the flat areas 121 of the respective probe 120 and the corresponding rectangular second pilot hole H2 can interfere with each other, the rotation of the probes 120 relative to the lower guide plate 112 through the second guide holes H2 be limited, ie the probes 120 cannot be relative to the micropositioner 110 be rotated.

They usually collect after the pin card 400 has completed an electrical signal test or has performed an electrical signal test for a period of time, easily unwanted fragments at the end of the probes near the test object 120 on. As described above, the probes can 120 not relative to the micropositioner 110 rotated so that the probes 120 when the user is on the probes 120 accumulated fragments removed, relative to the micropositioner 110 can be fixed and thus the user the probes 120 can clean effectively. During the probe cleaning process 120 is the needle card 400 attached to the cleaning platform for probes. The needle card can be arranged on the cleaning platform for probes and used for probe cleaning 400 and move and move the probe cleaning platform, causing the probes 120 come into contact with the sandpaper and a translational or rotational movement is carried out on them, so that an interaction between the probes 120 and the sandpaper and thus the fragments of the probes 120 be removed with the sandpaper. If the probes 120 with the sandpaper in Coming into contact and being rotated is the interaction between the probes 120 and the sandpaper to a specific area rather than a wide area of the probes 120 limited, which means that probe cleaning is incomplete. Therefore, the rotation of the probes 120 relative to the lower guide plate 112 through the second guide holes H2 be limited. If the probes 120 can be cleaned, the above problem can be avoided and the efficiency of the probe cleaning can be improved.

As in the 2 and 3 shown comprises a respective probe 120 structurally a probe main body 122 and a spring sleeve 125 , A respective probe main body 122 has a probe tip 123 on, with at least a part of the respective probe tip 123 through a corresponding second guide hole H2 the lower guide plate 112 passes. A respective spring sleeve 125 includes a probe main body 122 , with the respective spring sleeve 125 a connection end 126 , a spring section 127 and a free end 128 has, the respective spring portion 127 between the corresponding connection end 126 and the corresponding free end 128 arranged and connected to these, the connecting end 126 the respective spring sleeve 125 for example by welding with the corresponding probe main body 122 is firmly connected, the free end 128 the respective spring sleeve 125 from the probe tip 123 of the corresponding probe main body 122 away. In practice, the fragments that occur during electrical signal testing mainly collect at the probe tips 123 the probe main body 122 on. To the quality and effectiveness of the needle card 400 The probe tips are usually maintained by the user 123 the probe main body 122 cleaned regularly.

As described above, at least part of the probe tip goes 123 of the respective probe main body 122 through the corresponding second pilot hole H2 the lower guide plate 112 through, with the flat surfaces 121 also at least partially in the corresponding second guide hole H2 located, ie the respective flat surfaces 121 are located on the corresponding probe tip 123 and are facing away from the corresponding probe tip 123 arranged as in the 2 and 3 shown.

In particular, a respective probe tip has 123 , as in 3 shown in the perpendicular to the central axis X of the corresponding probe main body 122 lying direction D a first cross section 123S , namely the in 3 shown cross section of the probe tip 123 , on. As in 3 shown, the respective first cross section 123S two opposite straight edges 1231 and two opposite curved edges 1232 on, the positions of the straight edges 1231 likewise are the positions at which the flat surfaces are 121 are located. In the present embodiment, the respective straight edges 1231 parallel to each other and the respective curved edges 1232 symmetrical, with the central axis X of the respective probe main body 122 the center of the corresponding curved edges 1232 is. The respective probe tip 123 is shaped so that the needle shape of the original respective first cross section 123S is flattened to a square-round shape by mechanical punching.

In particular, each has a second guide hole H2 the lower guide plate 112 , as in 3 shown, two opposite first inner walls 1121 and two opposing second inner walls 1122 on, with the respective first inner walls 1121 and the respective second inner walls 1122 are interconnected to the respective second guide hole H2 define. It should be noted that the distance L1 between the respective first inner walls 1121 larger than the distance L2 between the respective straight edges 1231 , but shorter than the maximum distance LF between the respective curved edges 1232 is. Therefore, if the probe tip 123 a respective probe 120 through the corresponding second pilot hole H2 goes through, the respective probe tip 123 only in one condition, namely that in which the corresponding flat surfaces 121 parallel to the corresponding first inner walls 1121 stand, through the corresponding second guide hole H2 be passed through.

In this way, through the second guide holes H2 the lower guide plate 112 rotating the probes 120 relative to the micropositioner 110 can be prevented, furthermore the directions of the flat surfaces 121 the probe tips 123 through the second guide holes relative to the micropositioner 110 can be limited, ie the arrangement directions in which the probes 120 on the micropositioner 110 are attached, due to the geometric sizes of the second guide holes H2 and the probe tips 123 can be preset.

As in 2 shown also has the connection end 126 the respective spring sleeve 125 in that direction D a width W on, the width W the maximum outer diameter of the corresponding section above 126a which is after the attachment of the respective connection end 126 with the corresponding probe main body 122 is, where is the width W of the respective previous section 126a larger than the corresponding second guide hole H2 is, ie the width is larger than the distance L1 between the respective first inner walls 1121 , the cross-sectional shape of the respective projecting section 126a is elliptical. It also points near the respective probe tip 123 located end face of the respective connection end 126 has an outer diameter, the outer diameter of the end surface also being greater than the distance L1 between the respective first inner walls 1121 is. In this way, through the lower guide plate 112 be prevented that the respective spring sleeve 125 through the corresponding second pilot hole H2 passes through to the effect of fixing the position and striking the probe tips 123 to achieve.

As in 2 shown also has the probe main body 122 a respective probe 120 a probe body 129 on, with the respective probe body 129 with the appropriate probe tip 123 is connected, the respective probe tip 123 relative to the corresponding probe body 129 far from the circuit board 300 away, with the connection end 126 the respective spring sleeve 125 firmly with the probe body 129 of the corresponding probe main body 122 connected is. If the respective spring sleeve 125 is not compressed is the length L3 the respective spring sleeve 125 longer than the length L4 of the corresponding probe body 129 so that the probe body 129 of the corresponding probe main body 122 when the respective spring sleeve 125 has its natural length, from the respective spring sleeve 125 is included.

As in 2 shown also has the probe body 129 of the respective probe main body 122 in that direction D a second cross section 129S on. It's going on 4 Reference is made to a cross-sectional view along the line segment NN , namely the second cross section 129S of a respective probe body 129 , according to 2 shows. As in 4 shown, is the second cross section in the present embodiment 129S of the respective probe body 129 circular. That is, the second cross section 129S of the respective probe body 129 has a different shape than the first cross section 123S the corresponding probe tip 123 ,

It'll open up again 2 Referred. In the present exemplary embodiment, the micropositioner comprises 110 also a middle guide plate 113 , with the middle guide plate 113 between the upper guide plate 111 and the lower guide plate 112 located. The top guide plate 111 and the middle guide plate 113 are stacked on top of each other. The first pilot holes H1 go through the top guide plate 111 and the middle guide plate 113 therethrough. In other words, the micropositioner includes 110 several guide plates, such as the upper guide plate 111 , the middle guide plate 113 and the lower guide plate 112 , In practical applications, the number of guide plates depends on the length of the spring sleeves 125 or the number of spring sections 127 from. In particular, each spring sleeve has 125 at least one spring section 127 on.

It should be noted that there is also a recording room A on the middle guide plate 113 facing side of the lower guide plate 112 is provided, the receiving space A with the first guide holes H1 and the second guide holes H2 is connected continuously and to accommodate the connection ends 126 the spring sleeves 125 serves. In the event that the first pilot holes H1 and the second pilot holes H2 are misaligned during processing, the recording room A a buffer space ready, in which the probes 120 can easily deform so that they can still pass through the first and second guide holes H1 and H2 can be carried out.

• (1) Dadurch, dass die planen Flächen der jeweiligen Sonde und das entsprechende rechteckige zweite Führungsloch sich gegenseitig behindern, kann die Drehung der Sonden relativ zur unteren Führungsplatte durch die zweiten Führungslöcher begrenzt werden, sodass die Sonden, wenn der Benutzer die auf den Sonden angesammelten Bruchstücke beseitigt, relativ zum Mikropositionierer fixiert werden können und somit der Benutzer die Sonden effektiv reinigen kann.
• (2) Durch die zweiten Führungslöcher der unteren Führungsplatte kann ein Drehen der Sonden relativ zum Mikropositionierer verhindert werden, wobei ferner die Richtungen der planen Flächen der Sondenspitzen durch die zweiten Führungslöcher relativ zum Mikropositionierer beschränkt werden können, d. h. die Anordnungsrichtungen, in denen die Sonden am Mikropositionierer angebracht sind, können durch die geometrischen Größen der zweiten Führungslöcher und der Sondenspitzen voreingestellt werden.

In summary, the technical solutions disclosed in the above exemplary embodiments of the present invention offer at least the following advantages:

• (1) Because the planar surfaces of the respective probe and the corresponding rectangular second guide hole interfere with each other, the rotation of the probes relative to the lower guide plate can be limited by the second guide holes, so that the probes when the user accumulates those on the probes Fragments can be removed, fixed relative to the micropositioner and thus the user can effectively clean the probes.
• (2) The second guide holes of the lower guide plate can prevent the probes from rotating relative to the micropositioner, and the directions of the plane surfaces of the probe tips can be restricted by the second guide holes relative to the micropositioner, that is, the arrangement directions in which the probes are located Micropositioners are attached, can be preset by the geometric sizes of the second guide holes and the probe tips.

Although the present invention is disclosed in the above-mentioned embodiments, they do not limit the present invention. All equivalent changes and modifications that can be made by a person skilled in the art in accordance with the description and drawings of the invention fall within the scope of the present invention.

LIST OF REFERENCE NUMBERS

100

probe head

110

micropositioners

111

upper guide plate

112

lower guide plate

1121

first inner wall

1122

second inner wall

113

middle guide plate

120

probe

121

flat surface

122

Probe main body

123

probe tip

123S

first cross section

1231

Straight edge

1232

curved edge

125

spring sleeve

126

connecting end

126a

previous section

127

spring section

128

free end

129

probe body

129S

second cross section

200

Space conversion frame

300

circuit board

400

probe card

A

accommodation space

D

direction

H1

first pilot hole

H2

second pilot hole

L1, L2

distance

L3, L4

length

LF

maximum distance

M-M, N-N

line segment

W

width

X

central axis

Claims (9)

Probe head (100) comprising: a micropositioner (110) comprising an upper guide plate (111) and a lower guide plate (112), the upper guide plate (112) having a plurality of first guide holes (H1) and the lower guide plate (112) having a plurality of second guide holes (H2), the respective second guide hole (H2) being rectangular, a plurality of probes (120), a respective probe passing through a corresponding first guide hole (H1) and a corresponding second guide hole (H2), a respective probe (120) comprising: a probe main body (122), wherein a respective probe main body has a probe tip (123) and a probe body (129), the respective probe body (129) being connected to the corresponding probe tip (123), the respective probe tip (123) being perpendicular has a first cross-section (123S) to the central axis (X) of the respective probe main body (122) lying direction (D), at least part of the respective first cross-section (123S) being in the corresponding second guide hole (H2), the respective first cross-section (123S) has two opposite straight edges (1231) and two opposite curved edges (1232), wherein a respective probe body (129) in direction (D) has a second cross section (129S), the respective second cross section (129S) being circular is and a spring sleeve (125), the respective spring sleeve comprising a probe main body (122) and having a connection end (126), a spring section (127) and a free end (128), the respective spring section (127) between the corresponding connection end (126 ) and the corresponding free end (128) and is connected thereto, the respective connecting end (126) being firmly connected to the corresponding probe body (129) to form a projecting section (126a), the respective free end ( 128) from the corresponding probe tip (123). Probe head after Claim 1 , in which a respective second guide hole (H2) has two opposite first inner walls (1121) and two opposite second inner walls (1122), the respective first inner walls (1121) and the respective second inner walls (1122) being connected to one another, the distance (L1) between the respective first inner walls (1121) is greater than the distance (L2) between the respective straight edges (1231), but is shorter than the maximum distance (LF) between the respective curved edges (1232). Probe head after Claim 2 , at which the respective connection end (126) in the perpendicular to the central axis (X) of the respective probe main body (122) lying direction (D) has a width (W), the width (W) being greater than the distance (L1) between the respective first inner walls (1121). Probe head after Claim 1 , in which the respective straight edges (1231) are parallel to each other. Probe head after Claim 1 , in which the respective straight edges (1231) are symmetrical. Probe head after Claim 1 , in which the respective projecting section (126a) has a width (W) in the direction (D), the width (W) being larger than the respective second guide hole (H2). Probe head after Claim 1 , in which the respective probe body (129), when the respective spring sleeve (125) has its natural length, is encompassed by the respective spring sleeve (125). Probe head after Claim 1 wherein the micropositioner (110) further comprises a central guide plate (113), the central guide plate (113) being located between the upper guide plate (111) and the lower guide plate (112). A needle card comprising: a printed circuit board (300), a probe head (100) comprising: a micropositioner (110) having an upper guide plate (111) and comprises a lower guide plate (112), the upper guide plate (112) having a plurality of first guide holes (H1) and the lower guide plate (112) having a plurality of second guide holes (H2), the respective second guide hole (H2) being rectangular, a plurality of probes (120), a respective probe passing through a corresponding first guide hole (H1) and a corresponding second guide hole (H2), a respective probe (120) comprising: a probe main body (122), a respective probe main body having a probe tip (123) and a probe body (129), the respective probe body (129) being connected to the corresponding probe tip (123), the respective probe tip (123) being relative to the corresponding probe body (129) is located far from the circuit board (300), the respective probe tip (123) having a first cross section (123S), at least part of the respective first cross section (123S) being located in the corresponding second guide hole (H2) , wherein the respective first cross section (123S) has two opposite straight edges (1231) and two opposite curved edges (1232), each respective probe body (129) having a second cross section (129S), the respective second cross section (129S) being circular is and a spring sleeve (125), the respective spring sleeve comprising a probe main body (122) and having a connection end (126), a spring section (127) and a free end (128), the respective spring section (127) between the corresponding connection end (126 ) and the corresponding free end (128) is arranged and connected to it, the respective connection end (126) being fixedly connected to the corresponding probe main body (122), the respective free end (128) being removed from the corresponding probe tip (123) lies, and a space conversion rack (200) disposed between and connected to the circuit board (300) and the probe head (100).

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