DE102017217304A1 - Method and device for transporting substrates - Google Patents

Abstract

The invention relates to a method and a device for transporting substrates (2), in particular for producing solar cells, wherein in a first transport step (TS1) a first carrier (C1) with a first number of substrates (2) into a packing position (PP ) is transported, wherein in a first step (AS1) at least a first substrate package (8) in the first carrier (C1) is provided, wherein in a second transport step (TS2) of the first carrier (C1) moves to a transfer position (TP) is in a second step, the at least first substrate package (8) from the first carrier (C1) in a first process boat (B1) and at least one further substrate package (8) from a process boat (B1, B2) in the first carrier (C1 ) is transported, wherein in a third transport step (TS3) of the first carrier (C1) is transported to an unpacking (EP), wherein in a third step (AS3), the at least one further Substratpak et (8) is unpacked.

Description

The invention relates to a method and a device for transporting substrates, in particular for the production of solar cells.

The production of solar cells from substrates usually requires the implementation of several production steps. Such production steps can be carried out in particular in so-called process furnaces. Et al So-called diffusion furnaces are known in which substrates, in particular their surfaces, are doped. However, there are also other manufacturing steps in which chemical and / or thermal changes of the substrate take place. These can also be performed in appropriate facilities, especially ovens.

It is necessary to transport unprocessed substrates to such devices for production as to transport them through these devices processed substrates from the corresponding device. For processing, ie for carrying out a production step, substrates are usually arranged in a so-called process boat. For a longer transport, e.g. However, between two different manufacturing facilities or for transport from / to a warehouse, this process boat is unsuitable. Therefore, the processed or unprocessed substrates are arranged for transport in so-called transfer carriers.

Therefore, it is necessary to transfer substrates from such a transfer carrier to a process boat or vice versa.

The EP 1 925 577 A1 discloses a method of forming stacks of unilaterally doped wafers, particularly solar wafers, and loading a process boat with wafer batches, in which a predetermined even number of wafers face up in the receiving slots of a transfer carrier to be clamped in a horizontal plane Stacking opening is provided in rows.

In the method disclosed in this document, the transfer carrier is fixed in a predetermined position, wherein in this fixed position a stacking step for forming a so-called back-to-back stack (BTB stack), a transfer step for transporting the BTB Stacks of the transfer carrier into the process boat, a further transfer step for transporting a further BTB stack from the process boat in the transfer carrier and an unpacking step for unpacking the now in the transfer carrier arranged BTB stack was performed.

A disadvantage of this method is the high amount of time it takes to load the process boat with BTB stacks or unload the process boat.

The technical problem therefore arises of providing a method and a device for transporting substrates, in particular for producing solar cells, which have a time for loading, in particular complete loading, of a process boat with substrates from carriers or for unloading, in particular complete unloading , from substrates of the process boat into carriers (t). Thus, a throughput of a device for processing substrates can be increased.

The solution of the technical problem results from the objects with the features of claims 1 and 10. Further advantageous embodiments of the invention will become apparent from the dependent claims.

In particular, in this disclosure, a substrate refers to a semiconductor blank. Substrates can be used in particular for the production of solar cells and e.g. be plate-shaped. Furthermore, substrates can have a rectangular, in particular square, base area.

Further, a carrier and a process boat respectively denote a container in which substrates can be placed in single position as well as in back-to-back position, e.g. in a so-called square position or in a so-called diamond position. The container may in this case be an open container, in particular an upwardly open container.

Carrier and process boats are known in the art, for example from the above-explained EP 1 925 577 A1 , Such a container may in particular comprise or form receiving means, eg slots, for receiving a single substrate, eg at edge portions. Preferably, a receiving means also allows the inclusion of multiple substrates, in particular the inclusion of a pair of substrates. Receiving means may be arranged adjacent to each other along a central axis / longitudinal axis of the container at a predetermined distance.

In contrast to the carrier, the process boat can be used to transport substrates to and / or in facilities for carrying out production or processing steps of the substrate, in particular in process plants such as furnaces. The process boat may be formed in particular of glass, quartz or ceramic. Further, a process boat can accommodate a greater number of substrates or substrate pairs than a carrier. Further For example, a process boat material may be different than a carrier material.

A pair of substrates denotes two adjacent substrates. In particular, an upper or lower side of a first substrate may rest against an upper or lower side of a second substrate of the substrate pair. In a BTB position (back-to-back position), the two substrates can overlap exactly.

A substrate package refers to an amount of at least one, preferably more than one, substrate pair, especially in the BTB position.

A reference coordinate system may include a vertical axis. The vertical axis may here be oriented parallel and opposite to a direction of a gravitational force. However, it is also conceivable that the vertical axis is oriented by a predetermined angle, for example an angle of 3 °, inclined to the direction of the gravitational force and opposite to this. Directional information such as "top", "bottom" can refer to this vertical axis. In particular, an upward movement may refer to a movement in the direction of the vertical axis. A downward movement may refer to a movement opposite to the direction of the vertical axis.
Further, the reference coordinate system may comprise a longitudinal axis, wherein the longitudinal axis may be oriented orthogonal to the vertical axis. Furthermore, the reference coordinate system can comprise a transverse axis. This can be oriented perpendicular to the longitudinal axis and perpendicular to the vertical axis. The longitudinal, transverse and vertical axes can form a Cartesian coordinate system.
A processing device is a device for carrying out a production step for producing a desired end product from the substrate. A processing device may in particular be a process plant.

A transport device for a carrier (carrier transport device) describes a device by means of which a transport movement of exactly one carrier or several carriers into different positions can be carried out. It may include all the facilities, means and elements necessary to carry out the transport of one or more carriers. Accordingly, a process water transport device (process boat transport device) describes a device by which a movement of exactly one process boat or multiple process boats can be performed. It may include all facilities, means and elements necessary to carry out transport steps of one or more process boats.

In the following, several transport movements of a carrier will be explained. Each of the transport movements of the carrier can take place along a predetermined trajectory. The trajectories may be different from each other. Preferably, a transport movement of the carrier is a linear movement. However, a transporting movement can also be a movement along a curved, e.g. be part-circular, trajectory. Further preferably, a movement direction of the movement is oriented parallel and in the direction of a longitudinal axis explained in more detail below. Alternatively, the movement may comprise a directional portion which is oriented parallel and in the direction of this longitudinal axis. Further preferably, the trajectories of the individual transport movements form subsections of a common trajectory, in particular a straight-line trajectory.

A packing device serves for carrying out a first working step, which will be explained below, and thus may comprise all the devices, means and elements which are necessary for this execution. The packing device can for this purpose one or more substrate removal device (s), e.g. a lifting comb or a plurality of lifting combs, a gripping device, e.g. include a suction comb. For this purpose, the gripping device can comprise, for example, at least one movable section. It is further possible that the packing device comprises at least one centering device for centering substrates and / or a fixing device for fixing the carrier in the pack position.

In this case, a transfer device serves to carry out a second work step, which will be explained in more detail below, and thus may include all devices, means and elements which are necessary for this implementation.

An unpacking device serves to carry out a third step, which will be explained in more detail below, and thus may include all the devices, means and elements which are necessary for this implementation. The unpacking device can in this case comprise at least one gripping device, in particular a suction gripping device, e.g. a suction comb, and at least one substrate (pair) removal means, e.g. a Aushebekamm, in particular designed as a suction cup Aushebekamm include. For this purpose, the gripping device can comprise, for example, at least one movable section. It is further possible that the unpacking device comprises at least one centering device for centering substrates or substrate pairs and / or a fixing device for fixing the carrier in the unpacking position.

Proposed is a method for transporting substrates, in particular for or in the manufacture of solar cells.

In a first transport step, a first carrier having a first number of substrates is transported to a packing position, e.g. by a carrier transport device. The transport into the packing position can take place from a starting position, the starting position being a different spatial position from the packing position. The movement can take place along a predetermined trajectory. For or in the implementation of the first transport step, the substrates may be arranged individually and not adjacent to each other in the carrier.

The first number here may be an even number in particular. The first number can be at least 2. It is possible that the first number 100 is. Of course, however, other numbers are possible. The longitudinal axis of a carrier in the packing position may be oriented parallel to the transverse axis.

In a first step, at least one first substrate package is provided or formed in the first carrier. The first step is carried out here, when the first carrier is in the packing position. It is possible for the first carrier to be centered and / or fixed in the packing position at least during the execution of the first working step. However, this is not mandatory.

The substrate package may comprise a number of pairs of substrates corresponding to half of the first number of substrates previously discussed. For example, is the first number of substrates in the carrier 100 , so may be provided in the first step substrate package 50 Include substrate pairs in BTB position. After carrying out the first working step, a substrate pair may be arranged in BTB position in a receiving means. The first step can be performed by the packing device.

In a second transport step, the first carrier is moved with the substrate package formed in the first step into a transfer position. The transfer position is a different spatial position from the pack position. The second transport step can be carried out by the previously explained carrier transport device or another carrier transport device for moving the first carrier.

In a second step, the at least one substrate package, which is arranged in the first carrier, is transported into a first process boat. Alternatively or cumulatively, at least one further substrate package is transported by the first process boat into the first carrier. After the second step, a substrate package is thus arranged in the first carrier, which was taken from a process boat. Further, in the first or in another process boat, a substrate package is arranged, which was taken from the first carrier. The second step may be performed by the transfer device.

In a third transport step, the first carrier is transported to an unpacking position. The unpacking position may differ from the transfer position. Furthermore, the unpacking position can also be different from the packing position. However, this is not mandatory. It is also conceivable that the unpacking position corresponds to the packing position. The movement can take place along a predetermined trajectory. The third transport step may be carried out by one of the previously explained carrier transport devices or another carrier transport device for moving the first carrier.

In a third step, the at least one further substrate package, that is to say the substrate package taken from a process boat and arranged in the first carrier, is unpacked. When unpacking, the substrates of the substrate package can be separated. In particular, the substrates of the further substrate package, which are arranged in the BTB position in the first carrier, can be offset from the BTB position into an individual position. By virtue of the third working step, substrates of a substrate pair can thus be separated from one another and then arranged individually and at a distance from one another in the first carrier. The unpacking can be carried out by means of an unpacking device. The third step is carried out here, when the first carrier is in the unpacking position. It is possible that the first carrier is fixed in the packing position at least during the execution of the third working step. However, this is not mandatory. The third step can be performed by the unpacker.

In a fourth transport step, the first carrier can be transported out of the unpacking position, for example by manual or automatic removal. In particular, the first carrier can be transported from the unpacking position into a removal position. This fourth transport step is optional.

The previously explained step sequence, which comprises the first transport step up to the third work step or fourth transport step, can form a carrier-specific step sequence. This step sequence can also be carried out for other carriers. This will be explained in more detail below.

By carrying out the transport steps and individual steps of the step sequence in mutually different layers of the first carrier results in an advantageous manner, the possibility that transport and / or operations of carrier-specific step sequences of multiple carriers simultaneously, ie at least partially simultaneously, can be performed if the multiple carriers are in mutually different positions. For example, the first step, the second step, and the third step may each be performed simultaneously for different carriers in different positions. Also, the first transport step, the second transport step, and the third transport step may be performed simultaneously for different carriers, respectively. Carrier-specific transport steps for different carriers can be carried out in particular only when carrier-specific work steps have been carried out. This reduces the time required to load and / or unload the process boat.

This advantageously results in a reduced period of time for loading and / or unloading a process boat, in particular for completely loading and / or unloading the process boat. This, in turn, advantageously enables a reduction in the production time of substrates since process boats can be transported more quickly to equipment for production. For example, it is possible to provide an increased throughput of e.g. Reach 10,000 to 11,000 substrates per hour.

In this case, the first working step may comprise all steps which are necessary in order to form a substrate package consisting of at least one substrate pair in BTB position from the substrates in individual position and to arrange them in the first carrier. Thus, the first working step may comprise one or more of the following sub-steps: transporting at least a first number of substrates from the carrier, gripping the substrates, changing a position and / or orientation of at least a part number of substrates, releasing the substrates, transporting at least one first part number of substrates into the carrier.

The change of position and / or orientation at e.g. a lift out of the carrier, e.g. can be performed by means of the gripper device, may include a pivoting of the substrates by 180 ° about the vertical axis. Furthermore, this change may include a movement of the substrates parallel to the vertical axis and / or parallel to the transverse axis, in particular a linear movement. In addition, but not necessarily, it is also possible that the substrates can be moved by means of the gripping device parallel to the longitudinal axis.

In a further embodiment, in the first working step, the first substrate package is arranged in a segment of the receiving volume for substrates available in the first carrier. For example, the available receiving volume of a carrier can be divided into a plurality, preferably two, segments. The segments can be arranged side by side along the longitudinal axis of the carrier. After performing the first operation, one of the segments, e.g. a first segment, the first substrate packet be arranged, in particular with substrates in BTB position, wherein in at least one further segment of the first carrier no substrates (more) are arranged. This segment can also be called a free segment. In such a free segment can subsequently, in particular in the second step, another substrate package, which was taken from the process boat, are arranged.

This results in an advantageous manner that in a carrier at least temporarily several substrate packages can be arranged. In particular, it is not necessary to completely empty a carrier prior to placement or prior to forming a substrate package in the carrier. As a result, a time period for loading and / or unloading a process boat is advantageously further reduced.

Furthermore, in a first sub-step of the second working step, the at least one substrate package arranged in the first carrier can be transported into a first process boat. Alternatively, in the first sub-step, a further substrate package, which is arranged in the process boat, can be transported from the first process boat into the first carrier.

In a further substep of the second working step, at least one further substrate packet can be transported from the first process boat into the first carrier or the first substrate packet from the first carrier into the first process boat.

Further, the second operation may include one or more of the following sub-steps: transporting substrates from the carrier or process boat, gripping the substrates, changing a position and / or orientation of at least a part number of substrates, releasing the substrates, forming substrate pairs, Transport of at least a first part number of substrates into the carrier or into the process boat.

The second step is carried out here, when the first carrier is in the transfer position. It is possible, but not mandatory, for the first carrier to be fixed in the transfer position during the execution of the second working step, for example by means of a suitable fixing device. Furthermore, the first process boat can be arranged in a loading and / or unloading position. It is possible, but not mandatory, for the first process boat to be fixed in the loading and / or unloading position during the execution of the second working step, for example by a fixing device. In the loading and / or unloading position, the process boat may be arranged, in particular along the transverse direction, at a distance from the first carrier in the transfer position.

The second step can be performed by the transfer device, which can move substrate packets in space.

In a further embodiment, in the second step, the first substrate package from the segment in which the first substrate package is arranged, in the first process boat, e.g. into a free segment of a multi-segment process boat. Alternatively, at least one further substrate package is transported by the first process boat into a segment, in particular the previously explained free segment or in the freed segment, of the first carrier's available carrier volume of the first carrier. As a result, a time period for loading and / or unloading a process boat is also advantageously reduced further.

In this case, the third working step may comprise all steps which are necessary in order to arrange the substrates of a substrate package in individual position in the first carrier. The third working step may in particular comprise one or more of the following sub-steps: transporting at least a first number of substrates from the carrier, gripping the substrates, separating the substrates of a substrate pair, changing a position and / or orientation of at least a part number of substrates, releasing the Substrates, transporting at least a portion of substrates into the carrier. A step sequence of the third working step can in this case be carried out inversely to the step sequence of the first working step.

The transport out of the carrier may in particular be a lift-out. The change of position and / or orientation, e.g. can be performed by means of the gripper device, may include a pivoting of the substrates by 180 ° about the vertical axis. Furthermore, this change may include a movement of the substrates parallel to the vertical axis and / or parallel to the transverse axis, in particular a linear movement. In addition, but not necessarily, it is also possible that the substrates can be moved by means of the gripping device parallel to the longitudinal axis. In particular, the number of substrates gripped by the gripping device can be moved into the individual position explained above.

In a further embodiment, the substrate package arranged in a segment of the carrier is unpacked in the third working step. After the second working step or after a sub-step of the second working step, in particular no substrates can be arranged in the segment occupied in the first working step with a substrate package. Thus, this pre-occupied segment may be a free segment of the first carrier prior to the third operation. In the third step then, in particular isolated, substrates can be arranged in this segment. This advantageously results in optimum utilization of the available receiving volume of a carrier, which in turn can further reduce the time required to load and / or unload a process boat.

In a preferred embodiment, the movement from the packing position to the transfer position and / or the movement from the transfer position to the unpacking position is a linear movement. Further preferably, a direction of movement of the movement from the packing position to the transfer position may be parallel or even concentric with the direction of movement of the movement from the transfer position to the unpacking position. However, it is also conceivable that the direction of movement of the linear movement from the packing position to the transfer position is different from the direction of movement of the movement from the transfer position to the unpacking position. This advantageously results in an easy-to-implement transport of carriers. In this case, the first carrier can be transported in the transport steps along the longitudinal axis, in particular in the direction of the longitudinal axis.

In a further embodiment, in the first transport step, a second carrier is transported from the pack position to the transfer position. In this case, therefore, the transport of the first carrier into the packing position takes place simultaneously for the transport of the second carrier from the packing position into the transfer position. Alternatively, but preferably cumulatively, a third carrier is transported from the transfer position to the unpacking position in the first transport step.

In a further preferred embodiment, in the second transport step of the carrier-specific step sequence of the first carrier of second carrier transported from the transfer position to the unpacking position. Alternatively, but preferably cumulatively, during this second transport step, a fourth carrier is transported to the packing position, in particular from a starting position.

In a further embodiment, in the third transport step of the carrier-specific step sequence of the first carrier, the fourth carrier is transported from the pack position to the transfer position and / or a fifth carrier to the pack position, e.g. from the starting position. Of course, the simultaneous transport of carriers can be carried out in such a way that a carrier is not transported to a position until the carrier preceding in the direction of transport has already left the position. The previously explained simultaneous transport steps advantageously result in a reduction of the time duration for loading and / or unloading a process boat.

In a further embodiment, a process boat is transported out of the loading and unloading position before or after the second work step of a carrier-specific step sequence. In particular, the process boat can be transported out of the loading and unloading position if it is completely loaded with substrate packages taken from carriers, in particular from different carriers. Furthermore, another process boat can then be transported to the loading and unloading position.

The further process boat can be an unloaded process boat. Preferably, however, the further process boat is a process boat in which substrate packages are arranged, which are to be reloaded into carriers.

The amount of substrates that can be placed in a process boat can be many times, e.g. a tenfold, the amount that can be arranged in a carrier. Thus, in a process boat, for example, 10 substrate packages can be arranged, which were taken from one or more carriers.

The transport of the process boat from and / or into the loading and unloading position can take place here by means of a process boat transport device. By means of this transport device, in particular, a position of process boats can be changed. The change in position can take place here with linear movements, for example parallel to the longitudinal axis and / or parallel to the transverse axis and / or parallel to the vertical axis. In particular, it is possible that a plurality of process boats can be transported simultaneously by means of the process-boat transport device. As a result, a production time for substrates can be shortened in an advantageous manner, since a plurality of process boats can be transported simultaneously to different processing devices or from different processing devices to the transfer device.

It is possible that the transport of a process boat from or into the loading and / or unloading position takes place simultaneously to a transport step of a carrier. This results in an advantageous manner, a further reduction of the loading and unloading.

In this case, the transport of a plurality of loaded process boats can take place by means of the previously explained process-boat transport device or another, different transport device. Even during this transport, a position, but preferably no orientation of the process boats, can be changed. For example, this movement may also comprise a movement parallel to the longitudinal axis and / or parallel to the transverse axis and / or parallel to the vertical axis.

Further proposed is a device for transporting substrates, in particular for transferring substrates from a carrier into a process boat or vice versa. In this case, the device is configured, in particular thus arranged and / or designed such that a method according to an embodiment described in this disclosure can be carried out by means of the device.

The device comprises at least one carrier transport device for moving a first carrier into a packing position, into a transfer position and / or into an unpacking position. It is also conceivable that the transport into the various layers can be carried out by different carrier transport devices. Furthermore, the device comprises at least one packing device for providing or forming a substrate package. Furthermore, the device comprises at least one transfer device for transferring substrate packets. Furthermore, the device comprises at least one unpacking device for unpacking a substrate package.

According to the invention, the packing device, the transfer device and the unpacking device are arranged along a movement trajectory for carriers at mutually different positions. In other words, a carrier can be transported to the packing position, the transfer position and / or the unpacking position by means of the at least one carrier transport device, the packing position being different from the transfer position and / or the transfer position being different from the unpacking position. Also, by means of the carrier Transport device (s) several carriers are transported at least partially simultaneously.

The at least one carrier transport device may in particular be designed as a conveyor belt or comprise a conveyor belt. Of course, other transport devices can be used.

The at least one carrier transport device and possibly also the other devices of the device can in this case be arranged such that a carrier can be transported at a predetermined angle, for example an angle of 3 °, inclined to a direction of the gravitational force. This may mean, in particular, that a central longitudinal axis of a carrier is inclined during transport at an angle other than 90 ° to the direction of gravity, in particular at an angle of 93 ° or 87 °.

The proposed device can advantageously carry out a method according to an embodiment described in this disclosure, the advantages of which have already been explained above.

In a further embodiment, the device comprises at least one process boat changing device for moving a process boat from a loading and / or unloading position. The process boat changer may also serve to move another process boat into the loading and unloading position. In particular, a linear movement of a process boat along one or more spatial axes can be carried out by means of this process-boat changing device. Also, multiple process boats can be transported simultaneously, especially between the reloading device and various process tools.

This results in an advantageous manner that the reloading of substrates can be continued as quickly as possible after a complete loading of a process boat with substrate packages from carriers. This in turn shortens advantageously a production time for substrates.

• 1 eine schematische Darstellung eines erfindungsgemäßen Verfahrens,
• 2 eine schematische Draufsicht auf eine erfindungsgemäße Vorrichtung in einem ersten Zustand,
• 3 eine schematische Draufsicht auf eine erfindungsgemäße Vorrichtung in einem zweiten Zustand,
• 4 eine schematische Draufsicht auf eine erfindungsgemäße Vorrichtung in einem dritten Zustand,
• 5 eine schematische Draufsicht auf eine erfindungsgemäße Vorrichtung in einem vierten Zustand,
• 6 eine schematische Draufsicht auf eine erfindungsgemäße Vorrichtung in einem fünften Zustand,
• 7 eine schematische Draufsicht auf eine erfindungsgemäße Vorrichtung in einem sechsten Zustand und
• 8 eine schematische Draufsicht auf eine erfindungsgemäße Vorrichtung in einem siebten Zustand.

The invention will be explained in more detail with reference to exemplary embodiments. The figures show:

• 1 a schematic representation of a method according to the invention,
• 2 a schematic plan view of a device according to the invention in a first state,
• 3 a schematic plan view of a device according to the invention in a second state,
• 4 a schematic plan view of a device according to the invention in a third state,
• 5 a schematic plan view of an apparatus according to the invention in a fourth state,
• 6 a schematic plan view of a device according to the invention in a fifth state,
• 7 a schematic plan view of a device according to the invention in a sixth state and
• 8th a schematic plan view of a device according to the invention in a seventh state.

Hereinafter, like reference numerals designate elements having the same or similar technical features.

1 shows a schematic sequence of a method according to the invention. Shown is a first carrier C1 which involves taking up substrates 2 in individual position as well as for receiving at least one substrate package 8th serves. A substrate package 8th can in this case one or more pairs of substrates 6 include. For the sake of clarity, not all substrates are 2 , Substrate pairs 6 and substrate packages 8th provided with a reference numeral.

A recording volume of the first carrier C1 for substrates 2 or substrate packages 8th includes a first segment SA and another segment SB , Here are both in the first and in the second segment SA . SB of the first carrier C1 substrates 2 arranged in individual position. The in the first and second segment SA . SB of the first carrier C1 arranged substrates 2 can be unprocessed substrates 2 be.

In a first transport step TS1 becomes the first carrier C1 with the substrates 2 in individual position from a starting position AP moved to a packing position PP. In a first step AS1 will be in the first carrier C1 a substrate package 8th educated. For this purpose, the substrates 2 in the first segment SA of the first carrier C1 are arranged, and the substrates 2 in the wider segment SB of the first carrier C1 are arranged, placed in a back-to-back position. In 1 is shown that the substrate package 8th in the further segment SB of the first carrier C1 is arranged. After the first step AS1 are not substrates 2 more in the first segment SA of the first carrier C1 arranged. The first step AS1 is carried out when the first carrier C1 in the packing position PP. In particular, the first carrier C1 fixed in the packing position PP and / or centered be, for example, by a corresponding fixing and / or centering device.

After completing the first step AS1 becomes the first carrier C1 in a second transport step TS2 from the packing position PP to a transfer position TP emotional. In a first step AS2a In a second step, this is done in the first step AS1 educated and in the wider segment SB of the first carrier C1 arranged substrate package 8th into a free segment SC a process boat SB transported. A recording volume for substrates 2 or substrate packages 8th of the process boat SB hereby comprises by way of example three segments SA . SB . SC , wherein in the first segment SA and in the second segment SB of the process boat SB substrate packages 8th are arranged. The in the first and second segment SA . SB of the process boat SB arranged substrate packages 8th can in this case already processed substrates 2 include. The choice of the segments for the assignment with substrates 2 or substrate pairs 6 in the carrier C1 and the process boat B1 is purely exemplary here. Of course, other segments in this carrier C1 and the process boat B1 be selected for the occupancy.

In a second step AS2B of the second step, this will be in the first segment SA of the process boat SB arranged substrate package 8th in the first, free segment SA of the first carrier C1 transported.

The second step is performed when the first carrier C1 in the transfer position TP located. In particular, the first carrier C1 in the transfer position TP fixed and / or centered, for example by a corresponding fixing and / or centering device.

After completing the second step, the first carrier becomes C1 in a third transport step TS3 in an unpacking position EP emotional. In a third step AS3 will that be in the first segment SA of the first carrier C1 arranged substrate package 8th unpacked.

For this purpose, the substrates 2 this substrate package 8th sporadically, being a part of these isolated substrates 2 then in the wider segment SB of the first carrier C1 and another part of these isolated substrates 2 in the first segment SA is arranged. The third step AS3 is carried out when the first carrier C1 in the unpacking position EP located. In particular, the first carrier C1 in the unpacking position EP fixed and / or centered.

After completion of the third step AS3 may be the first carrier C1 in a fourth transport step TS4 moved into a removal position NP.

2 shows a schematic plan view of a device 1 for transporting substrates 2 for transferring substrates 2 from carriers C1 , ..., C4 in a process boat B1 . B2 . B3 and vice versa. These substrates 2 may be formed as semiconductor blanks. substrates 2 may be formed in particular plate-shaped. The device 1 in particular serves for transport during the production of solar cells from the substrates 2 , In particular, by means of the device 1 substrates 2 from carriers C1 , ..., C4 in process boats B1 . B2 . B3 as well as substrates 2 of process boats B1 . B2 . B3 in carrier C1 , ..., C4 be reloaded (see also 3 to 8th ).

In 2 is shown in the first carrier C1 eight substrates 2 are arranged. Here are the substrates 2 individually, not adjacent to each other, in the first carrier C1 arranged. In particular, the substrates 2 not in a back-to-back (BTB) position in the first carrier C1 arranged. The number of eight substrates 2 is purely exemplary here. Of course, in a carrier C1 also more than the eight substrates shown 2 be arranged.

For example, substrates not yet processed by a process plant may be used 2 from carriers C1 , ..., C5 in a process boat B1 be reloaded and then in the process boot B1 be transported to and optionally in a process plant. A process plant can be designed, for example, as a diffusion furnace. Processed by a process plant, so processed substrates 2 can then in the process boats B1 . B2 . B3 from and to be transported from a process plant to the Vorichtl and there of the process boats B1 . B2 . B3 in carrier C1 , ..., C5 ,

The transhipment device 1 includes a carrier transport device 4 , which may be formed for example as a conveyor belt. The carrier transport device 4 can carrier C1 , ..., C5 move along a desired motion trajectory with a linear motion. In 1 is shown to be a first carrier C1 with a first number of substrates 2 in a starting position AP located. Dashed lines show a packing position PP, a transfer position TP and an unpacking position EP and a withdrawal position NP for carriers C1 , ..., C5 , By means of the carrier transport device 4 can carrier C1 , ..., C5 from the starting position AP in the packing position PP, from the packing position PP to the transfer position TP and from the transfer position TP in the unpacking position EP be transported. The movement between each position AP , PP, TP . EP Here is a linear movement.

Furthermore, the device comprises 1 a packing device 5 for providing a substrate package 6 in a carrier C1 , .., C5 (see 4 ). The packing device 5 will be explained in more detail below. Furthermore, the device comprises 1 a transfer device 7 for the transport of substrate packages 6 of substrate transport containers C1 , ..., C5 in process boats B1 . B2 . B3 and for transporting substrate packages 6 of process boats B1 . B2 . B3 in carrier C1 , ..., C5 , Also the transfer device 7 will be explained in more detail below.

Furthermore, the device comprises 1 an unpacking device 9 , wherein by means of the unpacking device 9 substrate packages 6 passing through the transfer device 7 from a process boat B1 . B2 . B3 taken and in a carrier C1 , ..., C5 are arranged, can be unpacked. Also the unpacking device 9 will be explained in more detail below.

In 2 is shown that the packing device 5 , the transfer device 7 and the unpacker 9 along a linear motion trajectory for carriers C1 , ..., C5 are arranged at mutually different positions.

Next is in 1 a longitudinal axis x and a transverse axis y a reference coordinate system shown. The longitudinal and transverse axis x . y may be orthogonal to each other. Not shown is a vertical axis which is orthogonal to the longitudinal axis x and orthogonal to the transverse axis y can be oriented and form a Cartesian coordinate system with them.

In 2 is further shown that the direction of movement of the movement of the carrier C1 , ..., C5 parallel to the longitudinal direction x is oriented. Further shown is that the substrates 2 in the first carrier C1 along a longitudinal axis of the first carrier C1 are arranged in individual position, wherein this longitudinal axis of the first carrier C1 parallel to the transverse direction y is oriented. In the individual position can be substrates 2 individually and along the longitudinal axis of the carrier C1 spaced from each other, so in particular not adjacent to each other, in the carrier C1 be arranged. A carrier C1 , ..., C5 can here recording means for receiving substrates 2 in individual position or for receiving substrate pairs 6 a substrate package 8th exhibit. A substrate pair 6 can be two substrates 2 include. In the BTB position are substrates 2 a substrate pair 6 full surface with surfaces, especially backs, to each other.

In 2 shown is a first process boat B1 who is in a loading and unloading position BEP located. Also shown is a second process boat B2 , In 6 is a third process boat B3 shown. The representation of the second and the third process boat B2 . B3 adjacent to the first process boat B1 This is purely schematic and serves to visualize the presence of other process boats B2 . B3 , These process boats B2 . B3 in particular only then in the loading and unloading position BEP moves when a process boat change occurs.

A process boat B1 . B2 . B3 can here recording means for receiving substrates 2 in individual position and of substrate pairs 6 exhibit or train. In the 2 to 8th is shown here in process boats B1 . B2 . B3 twelve pairs of substrates 6 along a longitudinal axis of the respective process boat B1 . B2 . B3 can be arranged. This number is purely exemplary. In particular, more than twelve pairs of substrates can 6 from a process boat B1 . B2 . B3 be recorded. Also shown is a process boat changer 10 ,

2 shows a state of the device 1 before carrying out a first transport step TS1 (please refer 1 ) of a method according to the invention for the transport of substrates 2 , In 3 is a schematic plan view of the in 2 illustrated device 1 after performing the first transport step TS1 , ie in particular in a second state, shown.

In the first transport step TS1 becomes the first carrier C1 from the starting position AP transported to the packing position PP. At the same time became a second carrier C2 with therein arranged in individual position substrates 2 to the starting position AP transported.

In 4 is a schematic plan view of the in 1 illustrated device 1 after performing a second transport step TS2 and a first step AS1 (please refer 1 ), in particular in a third state. In the first step AS1 becomes a first substrate package 8th in the first carrier C1 provided. The first step AS1 can in this case by the packing device 5 be performed when the first carrier C1 in the packing position PP.

The first substrate package 8th includes the substrates 2 which are arranged in BTB position. In particular, the first substrate package comprises 8th substrate pairs 6 from substrates 2 of the first carrier C1 ,

In 4 it can be seen that the first substrate package 8th from the packaging device 5 in another segment SB of the first carrier C1 is arranged, wherein in a first segment SA no substrates 2 are arranged. The total volume, which consists of the first and the second segment SA . SB that forms in the first carrier C1 Available uptake volume for substrates 2 , The Provision of a substrate package 8th in a first step AS1 by a packing device 5 was previously explained in detail.

After provision of the first substrate package 8th can in the second transport step TS2 the first carrier C1 in a transfer position TP to be moved. At the same time, the second carrier can continue C2 from the starting position AP be moved to the packing position PP. Next at the same time may be a third carrier C3 with therein arranged in individual position substrates 2 moved to the starting position AP become.

In 5 is a schematic plan view of the in 1 illustrated device 1 after carrying out a first substep AS2a a second step (see 1 ), in particular in a fourth state. In the first step AS2a of the second step, the first substrate package 8th from the first carrier C1 in a first process boat B1 , especially in a free segment SC one in the first process boat B1 available receiving volume, transported. This can also be done as a hassle of the first substrate package 8th be designated. The transport of the first substrate package 8th from the first carrier C1 in the first process boat B1 can through the transfer device 7 respectively.

Shown is that the first carrier C1 after this first step AS2a no substrates 2 contains more. The before the first step AS2a in the first carrier C1 in the form of substrate pairs 6 arranged substrates 2 are after the second step in the first process boat B1 arranged.

Shown is that in the first process boat B1 available recording volume completely with substrate pairs 6 in the form of substrate packages 8th is filled, in particular from carriers C1 in the first process boat B1 were transported. The first process boat B1 is here in a loading and unloading position BEP , After complete loading of the first process boat B1 with substrates 2 from carriers C1 a process boat change can take place. This may be the first process boat B1 from the loading and unloading position BEP be moved out. Next can be a second process boat B2 in the loading and unloading position BEP to be moved. This change can be made by a process boat changer 10 be performed.

The one from the carriers C1 , ..., C5 into the process boats B1 . B2 . B3 transported substrates 2 can be unprocessed substrates 2 be, ie substrates 2 for which one or more processing steps have not yet been carried out.

The substrates 2 from the process boats B1 . B2 in the carrier C1 , ..., C5 can be transported, in particular processed substrates 2 be, ie substrates 2 for which at least one or more predetermined manufacturing steps have already been performed.

In 6 is a schematic plan view of the in 1 illustrated device 1 after carrying out a second substep AS2B of the second step (see 1 ), in particular in a fifth state. In the second sub-step AS2B of the second step can then another substrate package 8th from the second process boat B2 , which is now in the loading and unloading position BEP located in the first carrier C1 , in particular in the free, first segment SA , be transported. Here, in particular, it is shown that substrate pairs 6 substrates 2 in BTB position, that of the second process boat B2 in the first carrier C1 were transported, in particular by the transfer device 7 , Next is in 6 a third process boat B3 represented, with already processed substrates 2 loaded in BTB position.

It is alternatively possible, in the first sub-step AS2a of the second step Substrates 2 from a process boat B1 . B2 . B3 in the first carrier C1 , in particular in its free, first segment SA , to transport. Then you can in the second step AS2B the second step in the further segment SB arranged substrate pairs 6 in the process boat B1 . B2 . B3 be transported, in particular in the segment of the process boat B1 . B2 . B3 in which the immediately before in the carrier C1 transported substrates 2 were arranged. In this case, the explained process water change before the first sub-step AS2a or after the second sub-step AS2B be performed.

Time parallel to the second step can for the second carrier C2 the first step AS1 be performed. Therefore, in 6 shown that in the wider segment SB the second carrier C2 a substrate package 8th is arranged, which consists of substrates 2 was formed in the second carrier C2 were arranged.

In 7 is a schematic plan view of the in 1 illustrated device 1 after performing a third transport step TS3 (please refer 1 ), ie in particular in a sixth state. In the third transport step TS3 becomes the first carrier C1 with the therein in the form of a substrate package 8th arranged substrates 2 from the transfer position TP in an unpacking position EP transported. Also in the third transport step TS3 becomes the second carrier C2 with a arranged therein substrate package 8th from the packing position PP to the transfer position TP transported. Next is the third carrier C3 from the starting position AP transported to the packing position PP. Also in the third transport step is a fourth carrier C4 with therein arranged in individual position substrates 2 to the starting position AP transported.

In 8th is a schematic plan view of the in 2 illustrated device 1 after performing a third step AS3 (please refer 1 ), in particular in a seventh state. In the third step AS3 then becomes the substrate package 8th in the first carrier C1 which consists of substrate pairs 6 exists and substrates 2 includes, unpacked. The unpacking can be done by the unpacking device 9 be performed. In this third step AS3 become the substrates 2 the substrate pairs 6 that before the third step AS3 in BTB position in the first subsegment SA of the first carrier C1 were separated from this BTB position and then in individual position in the first carrier C1 arranged. After the third step AS3 are in both subsegments SA . SB of the first carrier C1 substrates 2 arranged in individual position.

During the third step AS3 can at least partially simultaneously a first step AS1 for the substrates 2a_C3 , ..., 2d_C3 of the third carrier C3 , which is in the packing position PP, are performed. At the same time, a second step or at least one sub-step AS2a . AS2B for substrates 2 the second carrier C2 who is in the transfer position TP is to be performed.

After the third step AS2 can be the first carrier in the seventh step C1 from the unpacking position EP in a removal position EP (please refer 1 ) be transported. This can be done in a fourth transport step TS4 respectively. Furthermore, in the seventh step, in particular during the fourth transport step TS4 , the second carrier C2 from the transfer position TP in the unpacking position EP , the third carrier C3 from the packing position PP to the transfer position TP , the fourth carrier C4 from the starting position AP in the packing position PP and a fifth carrier with arranged in individual position substrates 2 to the starting position AP be transported.

LIST OF REFERENCE NUMBERS

1

Device for transporting substrates

2

substratum

4

conveyor belt

5

packer

6

substrate pairs

7

transfer device

8th

substrate package

9

Entpackeinrichtung

10

Process boot changer

AP

starting position

BL

Pack position

TP

transfer position

EP

Entpackposition

BEP

Loading and unloading position

x

longitudinal direction

y

transversely

SA

first segment

SB

another segment

SC

another segment

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• EP 1925577 A1 [0005, 0012]

Claims (11)

Method for transporting substrates (2), in particular for producing solar cells, wherein in a first transport step (TS1) a first carrier (C1) with a first number of substrates (2) is transported to a packing position (PP), wherein in one at least one first substrate stack (8) is formed in the first carrier (C1), wherein in a second transport step (TS2) the first carrier (C1) is moved into a transfer position (TP), wherein in a second step the at least first substrate packet (8) is transported by the first carrier (C1) into a first process boat (B1) and at least one further substrate packet (8) is transported by a process boat (B1, B2) into the first carrier (C1) third transport step (TS3) of the first carrier (C1) is transported to an unpacking (EP), wherein in a third step (AS3), the at least one further substrate package (8) is unpacked. Method according to Claim 1 , characterized in that the movement from the packing position (PP) to the transfer position (TP) and / or the movement from the transfer position (TP) to the unpacking position (EP) is a linear movement. Method according to one of the preceding claims, characterized in that in the first transport step (TS1), a second carrier is transported from the packing position (PP) to the transfer position (TP) and / or a third carrier from the transfer position (TP) to the unpacking position (TP). EP) is transported. Method according to one of the preceding claims, characterized in that in the second transport step (TS2) the second carrier is transported from the transfer position (TP) to the unpacking position (EP) and / or a fourth carrier is transported to the packing position (PP). Method according to one of the preceding claims, characterized in that in the third transport step (TS3), the fourth carrier is transported from the packing position (PP) to the transfer position (TP) and / or a fifth carrier to the packing position (PP). Method according to one of the preceding claims, characterized in that in the first working step (AS1), the first substrate package (8) in a segment (TV1) of the in the first carrier (C1) available receiving volume for substrates (2) is arranged. Method according to Claim 6 , characterized in that in the second step the first substrate package from the segment (TV1) into a process boat (B1, B2, B3) and / or at least one further substrate package from a process boat (B1, B2, B3) into a segment (TV1, TV2) of the recording volume available in the first carrier (C1). Method according to Claim 7 , characterized in that in the third step, the substrate package (8) arranged in the segment (TV1, TV2) is unpacked. Method according to one of the preceding claims, characterized in that a process boat (B1, B2, B3) is transported from a loading and unloading position (BEP) before or after the second working step of a carrier-specific step sequence. Device for transporting substrates (2), wherein the device (1) has at least one carrier transport device (4) for moving a carrier (C1, ..., C4) into a packing position (PP), into a transfer position (TP) and or in an unpacking position (EP), at least one packing device (5) for providing a substrate package (8), at least one transfer device (7) for transferring substrate packages (8) and at least one unpacking device (9) for unpacking a substrate package (8) characterized in that the packing device (5), the transfer device (7) and the unpacking device (9) along a movement trajectory for the carrier (C1, ..., C4) are arranged at mutually different positions. Device after Claim 10 , characterized in that the device (1) at least one process boat changing device (10) for moving a process boat (B1, B2, B3) in and / or from a loading and / or unloading position (BEP).

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