DE102015106373A8 - Photoakustisches gassensormodul mit lichtemittereinheit und einer detektoreinheit - Google Patents

Photoakustisches gassensormodul mit lichtemittereinheit und einer detektoreinheit Download PDF

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Publication number
DE102015106373A8
DE102015106373A8 DE102015106373.5A DE102015106373A DE102015106373A8 DE 102015106373 A8 DE102015106373 A8 DE 102015106373A8 DE 102015106373 A DE102015106373 A DE 102015106373A DE 102015106373 A8 DE102015106373 A8 DE 102015106373A8
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DE
Germany
Prior art keywords
unit
photoacustic
sensor module
gas sensor
detector
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DE102015106373.5A
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English (en)
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DE102015106373B4 (de
DE102015106373A1 (de
Inventor
Horst Theuss
Alfons Dehe
Stefan Kolb
Rainer Schaller
Gottfried Beer
Sebastian Beer
Franz Jost
Günther Ruhl
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Infineon Technologies AG
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Infineon Technologies AG
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Priority to DE102015106373.5A priority Critical patent/DE102015106373B4/de
Priority to CN201610252273.4A priority patent/CN106066305A/zh
Priority to US15/136,469 priority patent/US10241088B2/en
Publication of DE102015106373A1 publication Critical patent/DE102015106373A1/de
Publication of DE102015106373A8 publication Critical patent/DE102015106373A8/de
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G01N29/2425—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics optoacoustic fluid cells therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/032—Analysing fluids by measuring attenuation of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases

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  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
DE102015106373.5A 2015-04-24 2015-04-24 Photoakustisches gassensormodul mit lichtemittereinheit und einer detektoreinheit Active DE102015106373B4 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE102015106373.5A DE102015106373B4 (de) 2015-04-24 2015-04-24 Photoakustisches gassensormodul mit lichtemittereinheit und einer detektoreinheit
CN201610252273.4A CN106066305A (zh) 2015-04-24 2016-04-21 包括光发射器单元和检测器单元的光声气体传感器模块
US15/136,469 US10241088B2 (en) 2015-04-24 2016-04-22 Photo-acoustic gas sensor module having light emitter and detector units

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102015106373.5A DE102015106373B4 (de) 2015-04-24 2015-04-24 Photoakustisches gassensormodul mit lichtemittereinheit und einer detektoreinheit

Publications (3)

Publication Number Publication Date
DE102015106373A1 DE102015106373A1 (de) 2016-10-27
DE102015106373A8 true DE102015106373A8 (de) 2016-12-22
DE102015106373B4 DE102015106373B4 (de) 2023-03-02

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DE102015106373.5A Active DE102015106373B4 (de) 2015-04-24 2015-04-24 Photoakustisches gassensormodul mit lichtemittereinheit und einer detektoreinheit

Country Status (3)

Country Link
US (1) US10241088B2 (de)
CN (1) CN106066305A (de)
DE (1) DE102015106373B4 (de)

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JP6136402B2 (ja) * 2013-03-15 2017-05-31 セイコーエプソン株式会社 センサーユニット、電子機器、および移動体
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DE102016103646B4 (de) 2016-01-22 2023-03-02 Infineon Technologies Ag Integriertes photoakustisches gassensormodul
DE102016221303A1 (de) * 2016-10-28 2018-05-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Knickbares substrat mit bauelement
DE102017130988B4 (de) 2017-12-21 2022-07-07 Infineon Technologies Ag Vorrichtungen und verfahren zur nutzung des photoakustischen effekts
US11287312B2 (en) 2018-05-09 2022-03-29 Advanced Semiconductor Engineering, Inc. Optical system and method of manufacturing the same
US10782270B2 (en) * 2018-07-16 2020-09-22 Infineon Technologies Ag Photoacoustic gas sensor package
DE102018120061A1 (de) * 2018-08-17 2020-02-20 Infineon Technologies Ag Ein Detektormodul für einen photoakustischen Gassensor
US11255824B2 (en) * 2018-11-08 2022-02-22 Infineon Technologies Ag Photoacoustic sensor module and assembly
US11143626B2 (en) * 2019-01-11 2021-10-12 Infineon Technologies Ag Photo-acoustic gas sensor with optimal reference path length
EP3693725B1 (de) * 2019-02-11 2021-04-07 Infineon Technologies AG Photoakustischer sensor
EP3550286B1 (de) 2019-04-17 2021-01-27 Sensirion AG Photo-akustische gassensorvorrichtung
EP3614126A1 (de) * 2019-05-17 2020-02-26 Sensirion AG Photo-akustische gassensorvorrichtung
JP6976991B2 (ja) * 2019-06-06 2021-12-08 Ｎｉｓｓｈａ株式会社 ２成分ガスの濃度比算出方法および検知対象ガスの濃度算出方法
EP3798607B1 (de) * 2019-08-09 2023-01-25 Sensirion AG Photo-akustische gassensorvorrichtungen
EP4191232A1 (de) 2019-08-22 2023-06-07 Infineon Technologies AG Detektorzelle für einen photoakustischen gassensor und photoakustischer gassensor
DE102019214478A1 (de) * 2019-09-23 2021-03-25 Infineon Technologies Ag Photoakustischer gassensor
DE102019134267A1 (de) * 2019-12-13 2021-06-17 Infineon Technologies Ag Photoakustische Detektoreinheit, photoakustischer Sensor und zugehörige Herstellungsverfahren
DE102019134279B3 (de) * 2019-12-13 2021-05-27 Infineon Technologies Ag Photoakustische Sensoren und MEMS-Bauelemente
EP4053540A1 (de) * 2021-03-05 2022-09-07 Sensirion AG Photo-akustische gassensorvorrichtung
CN113281261A (zh) * 2021-03-26 2021-08-20 安徽波汇智能科技有限公司 一种新型光声光谱气体传感器
DE102022201988A1 (de) 2022-02-25 2023-08-31 Zf Friedrichshafen Ag Fahrzeugvorrichtung und Fahrzeug
US20230333005A1 (en) * 2022-04-19 2023-10-19 Honeywell International Inc. Encapsulating of photoacoustic detector

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WO2004008113A1 (de) * 2002-07-12 2004-01-22 Abb Research Ltd Absorptionsspektrometer und entsprechendes messverfahren
EP1582857A1 (de) * 2004-04-02 2005-10-05 Siemens Building Technologies AG Photoakustischer Gassensor mit einer Strahleranordnung mit einem Reflektor, und Verfahren zur Optimierung der Kontur des Reflektors
DE102006048839A1 (de) * 2006-10-16 2008-04-24 Eads Deutschland Gmbh Photoakustische Gassensor-Vorrichtung mit mehreren Messzellen
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Also Published As

Publication number Publication date
US20160313288A1 (en) 2016-10-27
CN106066305A (zh) 2016-11-02
US10241088B2 (en) 2019-03-26
DE102015106373B4 (de) 2023-03-02
DE102015106373A1 (de) 2016-10-27

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