DE102014222026B3 - Ultraschallmotor - Google Patents

Ultraschallmotor Download PDF

Info

Publication number
DE102014222026B3
DE102014222026B3 DE102014222026.2A DE102014222026A DE102014222026B3 DE 102014222026 B3 DE102014222026 B3 DE 102014222026B3 DE 102014222026 A DE102014222026 A DE 102014222026A DE 102014222026 B3 DE102014222026 B3 DE 102014222026B3
Authority
DE
Germany
Prior art keywords
rotation
axis
actuator
ultrasonic actuator
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102014222026.2A
Other languages
German (de)
English (en)
Inventor
Bernd Philips
Mathias Rosenkranz
Dieter Wienecke
Kurt Sinske
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Physik Instrumente PI GmbH and Co KG
Original Assignee
Physik Instrumente PI GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Physik Instrumente PI GmbH and Co KG filed Critical Physik Instrumente PI GmbH and Co KG
Priority to DE102014222026.2A priority Critical patent/DE102014222026B3/de
Application granted granted Critical
Publication of DE102014222026B3 publication Critical patent/DE102014222026B3/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
DE102014222026.2A 2014-10-29 2014-10-29 Ultraschallmotor Active DE102014222026B3 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE102014222026.2A DE102014222026B3 (de) 2014-10-29 2014-10-29 Ultraschallmotor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014222026.2A DE102014222026B3 (de) 2014-10-29 2014-10-29 Ultraschallmotor

Publications (1)

Publication Number Publication Date
DE102014222026B3 true DE102014222026B3 (de) 2016-02-18

Family

ID=55235189

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102014222026.2A Active DE102014222026B3 (de) 2014-10-29 2014-10-29 Ultraschallmotor

Country Status (1)

Country Link
DE (1) DE102014222026B3 (sv)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015113472B3 (de) * 2015-08-14 2017-01-26 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
US11204545B2 (en) 2020-01-16 2021-12-21 Taiwan Semiconductor Manufacturing Co., Ltd. EUV photo masks and manufacturing method thereof
WO2022069115A1 (de) * 2020-09-29 2022-04-07 Physik Instrumente (Pi) Gmbh & Co. Kg Antriebsvorrichtung

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19648726A1 (de) * 1996-11-12 1998-05-20 Piezosystem Jena Praezisionsju Piezoelektrisches Antriebselement
EP2200101A1 (de) * 2008-12-22 2010-06-23 Physik Instrumente (PI) GmbH & Co. KG Ultraschallmotor
DE102011082200A1 (de) * 2011-09-06 2013-03-07 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
EP2680334A1 (de) * 2012-06-28 2014-01-01 Leica Geosystems AG Piezo-Antrieb mit drehgelenkgelagertem Piezooszillator
DE102013204026A1 (de) * 2013-03-08 2014-09-11 Physik Instrumente (Pi) Gmbh & Co. Kg Aktoranordnung für einen Ultraschallmotor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19648726A1 (de) * 1996-11-12 1998-05-20 Piezosystem Jena Praezisionsju Piezoelektrisches Antriebselement
EP2200101A1 (de) * 2008-12-22 2010-06-23 Physik Instrumente (PI) GmbH & Co. KG Ultraschallmotor
DE102011082200A1 (de) * 2011-09-06 2013-03-07 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
EP2680334A1 (de) * 2012-06-28 2014-01-01 Leica Geosystems AG Piezo-Antrieb mit drehgelenkgelagertem Piezooszillator
DE102013204026A1 (de) * 2013-03-08 2014-09-11 Physik Instrumente (Pi) Gmbh & Co. Kg Aktoranordnung für einen Ultraschallmotor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015113472B3 (de) * 2015-08-14 2017-01-26 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
WO2017028840A1 (de) * 2015-08-14 2017-02-23 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
US10985674B2 (en) 2015-08-14 2021-04-20 Physik Instrumente (Pi) Gmbh & Co. Kg Ultrasonic motor and drive device
US11204545B2 (en) 2020-01-16 2021-12-21 Taiwan Semiconductor Manufacturing Co., Ltd. EUV photo masks and manufacturing method thereof
WO2022069115A1 (de) * 2020-09-29 2022-04-07 Physik Instrumente (Pi) Gmbh & Co. Kg Antriebsvorrichtung

Similar Documents

Publication Publication Date Title
EP1035426A2 (de) Vorrichtung zum Verschieben eines optischen Elementes entlang der optischen Achse
EP2973980B1 (de) Anordnung für einen ultraschallmotor
DE102008029275B4 (de) Lineareinheit
EP2754235B1 (de) Ultraschallmotor
DE102014222026B3 (de) Ultraschallmotor
EP0144707A1 (de) Führungseinrichtung für eine transportable Säge
DE102017106808A1 (de) Mit einem dezentral angetriebenen Zungenstangensitz versehene Lagebestimmungsanordnung
WO2019007463A1 (de) Gelenk
EP2692583B1 (de) Verstelleinrichtung für einen Kraftfahrzeugscheinwerfer
DE60219018T2 (de) Gelenkverbindung
EP3580844B1 (de) Piezomotor
DE112016003075T5 (de) Schneidvorrichtung und Schere
WO2022152351A1 (de) Winkelstellvorrichtung
DE3820085C1 (en) Microtome, especially ultramicrotome
EP3335309B1 (de) Ultraschallmotor
DE102019200943B4 (de) Elektromechanischer Linearantrieb
EP2674248B1 (de) Finishvorrichtung
DE102012010632B4 (de) Stellvorrichtung zur Ausführung einer Stellbewegung mittels einer Antriebsspindel und Anwendungssystem mit einer solchen Stellvorrichtung
DE102013201604B4 (de) Kippvorrichtung und Verfahren zum Kippen
AT516434B1 (de) Endbearbeitungsaggregat mit lageverstellbarer Kopiereinrichtung
DE202015100094U1 (de) Einstellbare Halterung für optische Komponenten
EP3095937B1 (de) Anbindung für ein ortsveränderbares torblatt
DE102022103015B4 (de) Halter für drei Elemente, Stelleinrichtungen, optisches Gerät und Verwendung
DE102011012388B3 (de) Justiervorrichtung
EP2503372B1 (de) Halterung für ein optisches Bauteil

Legal Events

Date Code Title Description
R012 Request for examination validly filed
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final