DE102012101979A1 - Producing relative movement between mobile elements against each other and against base, comprises performing relative movement between mobile elements corresponding to factor for motion distribution of relative movements of mobile elements - Google Patents

Abstract

Producing a relative movement between at least two mobile elements (11) against each other and against a base (10), comprises performing the relative movement between the mobile elements corresponding to a factor for motion distribution of the relative movements of the mobile elements against the base and/or with respect to upstream mobile elements, where data transmitted in base and/or upstream moving elements and motion tasks adjusted corresponding to mass of the moving elements, in its course over time in amount of identical drive reaction forces in the base cancel each other. Independent claims are also included for: (1) an apparatus for performing the above method, comprising at least two largely rigid- and light elements with respect to each other and are movable relative to a base, where the rigid- and light elements are designed such that they provide drive reaction forces required for generating a network motion to their movement, and which are movably arranged with respect to the base such that the drive reaction forces formed immediately in the base are introduced at the current location and in the current direction during the movement and the kinematic chain is immediately closed for generating the network motion and to compensate with suppressed vibration excitation of the base; and (2) a control technical process for carrying out the above method, comprises controlling the movement of the mobile elements by separate cascaded position control loops with lower speed- or speed control loop, lower-power-, torque-, acceleration- or current control loop, where each control loop, which is valid for the respective mobile element and the respective direction of motion, receives values of at least one control parameter, which is determined by analytical calculations or optimization calculation.

Description

The invention relates to a method and a device for generating a relative movement between two or more relative to each other and relative to a base movable elements of a moving device and a control engineering arrangement for implementing this method.

The generation of precise and rapid relative movements of elements to a reference point is the prerequisite for the majority of industrial manufacturing processes. This includes in particular the machining of workpieces with machine tools and similar motion-guided machine systems (for example, in the semiconductor industry) as well as the handling of workpieces with handling equipment. Usually, the relative movement between the workpiece (WST) and the tool reference point or end effector point - also referred to as "Tool Center Point" (TCP) - is considered. The main challenge in today's industrial production is the further increase in productivity while ensuring at least consistently high quality of the machined workpieces. The measures to increase productivity are diverse and therefore intervene at various points in the process chains. Examples include the complete machining on a machine tool, such as turning, milling and drilling on a machining center, or the reduction of unproductive non-productive times, for example when changing tools in the machine tool, called. Since these measures are often largely exhausted according to the prior art, the further increase in productivity can only be achieved by increasing the dynamics of the process-guiding movement devices. The generic term dynamic comprises the motion quantities speed v, acceleration a and acceleration change (jerk) r of the relative movement between TCP and workpiece.

The problem is that the increase in dynamics, in particular acceleration and jerk, are accompanied by increased drive forces and force increase rates. This increases, on the one hand, the power required for the generation of motion according to P = F * v, which as a result of conversion losses (for example in the electric drive itself or in braking resistors) can result in an absolute additional energy requirement per manufactured workpiece. In addition, the structural components, but in particular the racks of the movement devices are stimulated by the magnitude increased drive reactions (reaction forces and reaction moments) and steeper force increases to stronger vibrations. These propagate via the kinematic chain to the TCP and are imaged by the machining process in the workpiece, which means a reduction in quality. The solution approaches known from the prior art for increasing the dynamics of motion-guided machine systems in accordance with the preservation or improvement of the movement accuracy and thus the quality of the machined workpiece are set out below and evaluated.

A long-practiced solution for reducing vibration excitation is limiting the dynamics of the motion-guided machine systems. By acceleration, but especially by Jerkbegrenzung the frequency content in the drive force signal is shifted towards lower frequencies (analogous to the low-pass filtering), which causes less excitation of structural vibrations. However, the dynamics limitation is in competition with the achievable productivity and also reduces the contour accuracy. Low dynamic limits are therefore no longer up-to-date.

Furthermore, it has long been known from the prior art that the position of the introduction of force on a moving assembly has a significant influence on the achievable by the movement device movement quality. If the drive force acts outside the center of gravity of the moving assembly, a tilting moment arises as a result of the lever distance of the center of mass to the force introduction point. This causes a vibration of the assembly in their guides or even the vibration excitation of the supporting assembly (for example, the machine frame). The drive in the center of mass is therefore to be kept in the best possible way in highly dynamic motion devices. For this purpose, increasingly parallel drives (for example, gantry arrangement in milling machines) are used, which allow compliance with the force application in the center of gravity even with variable position of the resulting center of mass.

Redundant axle arrangements have been known for some time. In the first applications, there was still a separate movement of the redundant axes, so for example an axis with a large space for movement to cover the working space, which is fixed, while a precise axis with limited range of motion is used for local positioning. Such applications are known in particular from semiconductor manufacturing. The next stage of development is redundant axis arrangements in which the axes become synchronous. This sets a distribution of the target movement on the axes ahead. An early application example is the non-circular machining (non-circular turning). The high-frequency motion components are executed, for example, by a highly dynamic piezoelectric actuator with a limited travel, while the low-frequency motion components are generated by the conventional feed unit. In this application, the distribution of the motion components is performed by a Fourier transformation.

In the publication US 5 798 927 A A redundant axle arrangement consisting of a slow Cartesian movement device (for example a cross table) and a unit for highly dynamic deflection of a high-energy beam (eg load beam, electron beam or ion beam) is described. In this case, a positioning operation (point-to-point movement) is divided between the slow moving device and the highly dynamic beam deflecting unit. Semi-sinusoidal ramps are used as the movement profile between the nominal positions. The division of the positioning movement is carried out by filtering the time Sollweg signal. Thus, the desired path of the slow movement device is obtained, for example, by low-pass filtering, the desired path of the beam deflection unit from the difference between the output signal and the filtered signal. Such a redundant axle arrangement allows highly dynamic positioning movements throughout the work area. At the defined positions, processing (eg on a semiconductor) is then carried out by means of the high-energy beam. Other methods extend this in the document US 5 798 927 A presented principle on continuous movements (train journey). For very "light" tools, such. As a deflectable laser beam by means of mirrors or deflectable by means of a coil assembly electron beam, such redundant axle arrangements represent the ideal solution for significantly increasing the dynamics.

Similar solutions have been developed for various laser processing systems, with the advent of fiber lasers or the use of larger laser power, the use of beam deflection units (galvanometer drives and deflection mirrors) no longer makes sense. In addition, the laser processing of thicker materials requires a jet entrance normal to the surface of the workpiece. This led to the development of various redundant Cartesian kinematics, as well as different approaches to the distribution of motion. Since the highly dynamic additional axes of the beam-processing machines with increasing beam power are getting heavier and also highest accelerations and jerks are required, it comes again to the excitation of the machine structures by the drive reaction forces and moments.

A solution for this is in the document EP 1 724 054 A1 the example of a laser processing system (load beam cutting or laser beam welding) presented. To reduce or ideally complete extinction of the drive reaction forces are balancing weights (in the document EP 1 724 054 A1 also called "counterweight units") opposite to the direction of movement of the tool-carrying auxiliary axes accelerated. The balancing weights have their own controlled drives and, in total, have the same mass as the tool-carrying module (payload). Payload and balancing weights receive identical motion specifications, so that a substantially identical state of motion (characterized by the time course of path s, speed v, acceleration a and jerk r) sets. This ideally produces oppositely directed drive reaction and friction forces of the same amplitude, which compensate each other in the assembly carrying the useful and compensating masses. This technique, known as "force compensation", was initially developed for other motion devices for high dynamic and high precision motion generation (e.g., for rapid positioning of a beam filter as used in x-ray computer tomographs or hard disk access mechanisms).

One in the publication EP 0 523 042 A1 described movement device converts the force compensation for in-plane movement. For this purpose, two, each above and below a fixed assembly movably mounted and equally heavy plates by means of electric direct drives (for example, electro-dynamic drives) with the same Sollwegvorgabe moved opposite. In the fixed assembly, the resulting drive reaction forces cancel. In addition to the movement in the X and Y directions, the arrangement also permits the rotation of the moving plates about the vertical axis Z. The applications behind the method relate to the highly dynamic and precise positioning of the smallest components with respect to a reference point. Examples include Scanning Electron Microscopy, lithography, robotic assembly and automatic electronic circuit testing. The presented embodiment with plate-shaped moving assemblies also makes it possible to lay the line of action of the resulting drive forces in the center of mass. This eliminates tilting moments in the moving assemblies, which further increases the quality of movement. In the publication EP 0 523 042 A1 However, the utilization of the resulting between the upper and lower plate relative movement is not considered.

In order to reduce the travel distances required for the force compensation, it is advantageous if the balancing weights are many times greater than the useful masses. Another, in the publication DE 10 2004 057 062 A1 The approach described reduces the path of the compensation masses by modifying the frequency spectrum included in the compensation force. For this purpose, the desired force of the drive of the useful mass (hereinafter also referred to as useful drive) is filtered with a bandpass and the drive of the compensation mass (hereinafter referred to as compensation drive) supplied as a target force specification. The low frequencies contained in the driving force (up to about the lower limit frequency f _{G of} the bandpass) and the concomitant rigid body movement of the compensation drive are thereby greatly reduced. High frequencies (up to the upper limit frequency f _G + f _{B of} the bandpass filter) are also filtered out in order to avoid excitation of the current control loop due to high-frequency interference.

This process, known as pulse compensation, was described in "Comparative Investigation of Methods for Reducing Frame Excitation by Machine-Tool Axes driven by Linear Machine" [ Müller, Jens: Comparative investigation of methods for reducing the frame excitation by linear motor-driven machine tool axes. Dissertation, TU Dresden, 2009. ISBN 978-3-86780-109-6 examined. In "Pre-setpoint Calculation for Pulse Compensation of Linear Direct Drives" [ Grossmann, Knut; Müller, Jens; Peukert, Christoph: Pre-setpoint calculation for the pulse compensation of linear direct drives. ZWF 106 (2011) 5, pp. 352-356 ] an approach for generating the compensation force signal from the Sollwegvorgabe the Nutzantriebes or payload was also explained. Although force and pulse compensation offer considerable potential for reducing the vibration-inducing drive reaction forces, they are accompanied by significant additional design and control overhead. In addition, the additional moving, not involved in the movement generation equalization masses mean an increase in energy consumption with the same dynamics.

In "Comparative Investigation of Methods for Reducing Frame Excitation by Linear Motor-Driven Machine Tool Axes" [ Müller, Jens: Comparative investigation of methods for reducing the frame excitation by linear motor-driven machine tool axes. Dissertation, TU Dresden, 2009. ISBN 978-3-86780-109-6 ], the method of jerk decoupling was also investigated. The principle corresponds to the pipe return for guns and has been adapted for use in machine tools. The drive reaction force is first transmitted to a movable decoupling slide, which is fixed by means of spring and damper elements on the subordinate assembly (usually the machine frame). The arrangement of spring, mass of the decoupling carriage and damper corresponds to a mechanical low-pass - the reduced excitation of the machine structure is thus achieved analogously to Jerkbegrenzung. For close-to-machine realization of the jerk decoupling various other arrangements have been developed. Although the jerk or impulse decoupling can reduce the structure excitation, but requires the same dynamics, a higher energy input due to the energy dissipation in the damper. In addition, the design complexity increases due to the components and assemblies required for decoupling, which do not actively contribute to the generation of motion in the kinematic chain. The derivation of the drive reaction forces on a frame-independent basis was also considered but is classified as less practicable.

In the publication CZ 298 615 B6 and "New Principles for Design of Highly Dynamic Machine Tools" Bubak, A .; Soucek, P .; Zelený, J .: New Principles for Design of Highly Dynamic Machine Tools, In: Proceedings of the International Conference ICPR-17, Blacksburg, Virginia, USA. 08/2003 .] is presented as a "floating principle" method for generating movement by the introduction of a driving force between two relative to each other and relative to the machine frame movable - "floating" - mounted assemblies. The kinematic chain from the workpiece to the TCP is closed between the two moving machine assemblies. The moving assemblies must be centered relative to the machine frame. This is done in the simplest case, a spring in the document CZ 298 615 B6 another drive is preferred with weakly adjusted position and speed control loop. The machine frame or the base is - except for the forces applied to center the moving assemblies - virtually free of drive reaction forces. However, in this form of power decoupling, the excitation transferred to the machine base is of minor importance. Since the kinematic chain is closed to the TCP on the relatively moving assemblies, they must realize sufficient distances and open spaces to each other. This makes it difficult, especially in multiaxial arrangements, to meet the requirements for high static and dynamic rigidity of the assemblies - the moving assemblies become frame-like. For large distances of the driving force introduction to the center of gravity of the moving assemblies, it may thus come to the known vibration problems by a torque excitation. Accordingly, the "floating principle" is predominantly suitable for a uniaxial one Movement device with a highly dynamic main feed motion and, if necessary, further feed movements.

According to the prior art, various methods are available for increasing the dynamics of motion-guided machine systems while retaining or improving the quality of movement. The known method has in common that a reduction of the vibration excitation can be achieved with the same dynamics only with increased design complexity and increased energy consumption. An exception is the one in the document CZ 298 615 B6 presented "floating principle", with an advantage over the known method is expected only in a uniaxial motion device. Likewise, redundant axle arrangements with a sufficiently low dynamic axis weight (especially when deflecting a virtually massless high-energy jet) offer advantages in terms of reduced energy input with increased dynamics and at least constant motion quality.

The invention therefore has the object to provide a method for producing a precise one- or multi-dimensional relative movement between two or more relative to each other and relatively movable relative to a base elements and a device therefor and a control method for controlling the device, wherein the movable elements in minimal vibration excitation can be moved by the mechanical reactions to the base with high dynamics.

The object of the invention is achieved by methods for generating a relative movement between two or more relative to each other and relative to a base movable elements. The relative movement between the movable elements is composed of the relative movements of the movable elements relative to the base and / or to upstream movable elements in accordance with a factor which is essentially formed by the mass ratio of the movable elements. The motive forces transmitted in the base and / or in the upstream movable element and as a result of the movement specifications corresponding to the masses of the movable elements substantially identical over time, essentially cancel each other out in the base. Essentially opposite relative movements relative to the base or to the upstream movable element are concerned. The base is initially a substantially immovable relative to the outer cover assembly that is as stiff as possible in the directions of movement, which must be equated with the dominant directions of the power flow. The basis is also to be regarded as a movable element compared to other subordinate assemblies.

The movement specifications are Sollweg s, target speed v, target acceleration a and target pressure r respectively over time. The base is a substantially immovable relative to the outer cover assembly, but can also be formed by a relation to other subordinate assemblies movable element. This is particularly the case when additional or redundant axes are generated by one or more additional movable elements on a base movable member. Then, the method according to the invention is both suitable for compensating for the reaction forces in the movable element to be considered as a secondary base, in particular if more than one movable element of the second or a higher level moves there. In addition, however, it is also intended to detect the reaction forces as a whole, which cause the movable elements of all levels, by the method according to the invention and to control or control the relative movements of all movable elements in all planes.

The control is thus carried out over several movable elements, so for example when two additional axes on the elements (in particular normal to the direction of movement of the elements) move and the adhesion does not take place directly over the base, but the forces go a little way on the moving elements have to.

In this case, the movement of the auxiliary axes (which are effective, for example, in the normal direction) takes place in accordance with the method according to the invention.

According to the invention, a redundant axle arrangement is constructed such that a relative or useful movement arises between at least two elements which are movable relative to a base, when these elements essentially move in opposite directions (relative to the base). For this purpose, the elements are controlled in accordance with the method according to the invention in such a way that identical driving force-time courses are formed, as a result of which the drive reaction forces acting on the base essentially cancel each other out (force compensation). The method is also called "kinematically coupled force compensation" designated. The kinematic variables, so s target path _to or x _is to rated speed v _Soll, target acceleration a _to and set jerk r _is to the movable elements are dependent on the ratio of the masses by a formal context K _m and the dynamics K set _D of the movable elements (See Equations 1 and 2, respectively, for two movable elements). Equations 1, 2 and 3:

According to Equation 3, substantially identical force-time profiles result for the driving forces of the movable elements, which approximately cancel each other out in the base. As a result, the vibration excitation of the machine structure (base and movable elements) is greatly reduced, which increases the quality of motion.

In principle, given a set of k moving elements, the desired curves for the motion variables path s, velocity v, acceleration a, and jerk r, or the corresponding motion-generating physical variables, for example a force F, a motor current i or a pressure p, according to the equations 4 depending on the respective sizes effective on the other movable elements. In this case, a multiplicity of further parameters P, such as, for example, gear ratios, force constants, time constants or general transfer functions, may be relevant for determining the quantities of motion or other variables. Equations 4: s _k (t) = f (t, m ₁ ... m _j , s ₁ ... s _j , P ₁ ... P _z ) v _k (t) = f (t, m ₁ ... m _j , v ₁ ... v _j , P ₁ ... P _z ) a _k (t) = f (t, m ₁ ... m _j , a ₁ ... a _j , P ₁ ... P _z ) r _k (t) = f (t, m ₁ ... m _j , r ₁ ... r _j , P ₁ ... P _z ) F _k (t) = f (t, m ₁ .. m _j , F ₁ ... F _j , P ₁ ... P _z ) i _k (t) = f (t, m ₁ ... m _j , i ₁ ... i _j , P ₁ .. P _z ) p _k (t) = f (t, m ₁ ... m _j , p ₁ ... p _j , P ₁ ... P _z )

Depending on the size of the moving masses or inertias, it is possible to significantly reduce the kinetic energy to be applied to the motion generation relative to the movement of a single axis (a single mass-moving element movable with respect to the base). This is reflected directly in the drives to be provided by the drives, which can be significantly reduced in an advantageous embodiment of the invention. For explanation, reference is made to equation 5. Thus, for example, with two moving elements with m ₁ = m ₂ = m and v ₁ = v ₂ = ½v with respect to the movement of a single mass m with the speed v half of the kinetic energy. Considering the driving power according to Equation 6, for the example introduced, (m ₁ = m ₂ = m, v ₁ = v ₂ = ½v and therefore a ₁ = a ₂ = ½a) one also obtains half of the initial value (movement of a single Mass m with the speed v and the acceleration a) reduced total drive power. Equations 5 and 6:

Likewise, the electrical losses (current heat) in the drives can be significantly reduced if according to the inventive method a plurality of drives is involved in the movement generation. The required forces and - proportional to these - the motor currents decrease. Since the motor current according to equation 7 square in the electrical power loss can enter this, as well as in the drive dissipated energy, compare equation 8, be significantly reduced. The drive can thus be dimensioned smaller (lower mechanical power and lower power loss). Equations 7 and 8:

The mechanical losses according to Equations 9 and 10 can also be reduced in an arrangement with several drives involved in the relative movement generation. This follows from the friction force, which is generally proportional to the speed, of the guide systems known from the prior art. If, for example, two movable elements are involved in generating a relative movement, the path covered by the frictional elements remains the same, whereas a lower frictional force must be overcome as a result of the lower speed. Equations 9 and 10:

Compared with the prior art, the method according to the invention offers the potential for further increasing the quality of movement in conjunction with a reduced power and energy requirement for the generation of movement. The design effort for a movement device is not higher than the design effort for the realization of the known in the prior art method for reducing the vibration excitation motion-guided machine systems.

It has proved advantageous to divide the motion specifications onto the moving elements before or during the execution of the movement by means of analytical calculations and by a constant or variable factor. The factor used is preferably a mass factor.

Further advantages result if the distribution of the movement specifications on the movable elements before or during the execution of the movement is based on an optimization calculation and takes place by means of a constant or variable factor. It is also possible to generate specifications for the setpoint speed, setpoint acceleration and setpoint pressure or setpoint current or other physical setpoint values which are associated with the motion generation for the respective movable elements.

It is furthermore advantageous if the constant or variable factor for the movement distribution is adapted to the system parameters that are variable or immutable during the movement and relevant to the characteristics of the drive reaction forces acting on the base during the execution of the movement and / or in advance of the movement execution to increase the motion quality becomes. The adjustment of the movement distribution is thus carried out process-current according to the mass ratio or other relevant for the expression and effect of the driving forces system parameters. As relevant, variable system parameters, for example, the masses of the moving elements, while moving variable disturbing forces, such as friction forces during movement variable gain factors of the control circuits or the drives in question.

As a factor of motion distribution, a mass factor is preferably used, but the use of other system parameters or physical quantities is provided.

Also advantageous is a method in which an independent motion control of the movable elements with each other and / or the movable elements relative to the base without force compensation and / or without a kinematic coupling of the movements of the movable elements is possible. This is especially important for slow movements such as infeed or feed movements, but also for changing tools or workpieces.

It is envisaged that two or more, relative to each other and relative to a base movable, as stiff as possible and light elements derive the drive reaction forces required for their movement in the base, so that the drive reaction forces as completely as possible extinguish in the base. there the base is a substantially immovable relative to the outer cover assembly or formed by a relation to other subordinate assemblies movable element. A change in the location or the direction of the introduction of reaction force to the base may be possible during the movement, for example in an application of the method according to the invention in a coupling gear. The base is preferably designed to be as stiff as possible in the directions of movement which are to be equated with the dominant directions of the force flow. The same applies to the moving elements, especially if they serve as the basis for a moving element of a second or higher level.

Further advantages result if the driving forces acting on the movable elements and derived in the base are adjusted to each other in their time course in such a way that the resulting residual force derived from the base minimizes and / or selectively modifies the resulting residual vibrations introduced into the base become. In particular, according to the invention, the relative motion to be generated between the movable elements with each other or between the movable elements and the base to be generated in the base has a motion profile with limited speed, limited acceleration and finite jerk. Prior to the execution of the motion, a modification of the motion profile to improve the motion accuracy or increase the compensation quality is permitted. Furthermore, the forces acting on the movable elements and derived in the base driving forces are adjusted by appropriate control and regulatory measures each other in their time course, so that the residual power remaining in the base is minimized or selectively changed in terms of their frequency content

Advantageously, a relative movement between the movable elements substantially in a direction of movement and this movement is superimposed by relative movements in one or two other degrees of freedom of movement, the drive and guide system allows movement in these other degrees of freedom of movement.

It is also favorable if the relative movement between the movable elements takes place essentially in two directions of movement and this movement of relative movements can be superimposed in a further degree of freedom of movement, wherein the drive and guidance system makes it possible to move in this further degree of freedom of movement.

The relative movement is, for example, a planar movement or a rotational-translatory movement. This can be superimposed by a limited in their amplitude relative movement, which is generated by the inventive arrangement of a plurality of drives (parallel drive), in a further or more degrees of freedom. It is advantageous if a drive, measuring and control and / or regulating system permits control of these additional degrees of freedom of movement.

It has furthermore proved to be advantageous if one or more additional and / or redundant degrees of freedom of movement are added to the one or more degrees of freedom of movement by at least one additional movement device mounted on at least one of the movable elements or by additional adjusting elements introduced in the kinematic chain. These additional degrees of freedom and directions of movement are preferably realized by patch (serial) axes or by additional small movements, for example in the connections to the guide. In a preferred embodiment, these movement devices are adjusting devices with the smallest adjustment paths (eg piezoactuators) which generate the movement directly, alternatively via a kinematic transformation (lever) or in other ways known from the prior art. The additional degrees of freedom of movement are thus caused in this embodiment by Mikrostellachsen. This can be realized so that on a guide shoe, a piezoelectric actuator is applied and so a limited rotation or over the lever for TCP also a shift can be achieved.

Advantages also accrue from an embodiment in which the movable elements are supported substantially immovably by guide systems which provide the degrees of freedom of movement and are substantially immobile in the additional coordinate directions. This safe guidance with high accuracy of movement is possible.

It is furthermore advantageous if the movable elements are movable exclusively relative to the base or relative to the base or relative to an outer cover and relative to one another. Thus, their movement relative to a defined reference point is possible with the result of a very safe, controllable and high-quality motion control. Due to the different variants there is also a high degree of flexibility in the choice of the reference point.

Preferably, one to six degrees of freedom of movement will be provided. This can be realized with manageable control effort, the majority of motion tasks.

It is also favorable if a relative stiffness between the movable elements or / and at least one movable element and the base, which is insufficiently applied by a guide system, is compensated by a control system, provided that the arrangement of the drives means the generation of a drive force or a drive torque This direction of movement allows and the return of the current state of motion in this direction of movement can be realized by measuring systems. The guide systems provide the required degrees of freedom of movement of the movable members with respect only to the base or to the base and relative to each other. Furthermore, the guide systems provide the required degrees of freedom of movement as an alternative to an external cover. In the excess coordinate directions, the movable elements are substantially immovably supported, whereby the relative rigidity between the movable elements can be generated by the control system. As suitable for this form of movement are, among others, especially translation, rotation, planar motion, planar-rotational movement and translational-rotational movement in question. The drives include both the main motion drives and additional control elements for other than the main motion motion axes.

Benefits also arise in particular from the fact that in at least one of the axes of motion or at least one additional axis, one or more methods are used for reducing the vibration excitation by the drive reaction forces. This is preferably done by the use of a force-compensated or jerk-decoupled partial kinematics, for example in the Z direction, or in other directions of movement, so in this embodiment, on one side, for example only on the tool side. As a suitable method for reducing the vibration excitation preferably jerk limitation, force compensation, pulse compensation, jerk decoupling or impulse decoupling are provided. This applies to all levels, including a moving base, to which compensation procedures are also applicable.

It also brings advantages if the measurement of at least one of the values actual position, velocity, acceleration and jerk takes place exclusively relative between the movable elements and at the tool reference point (TCP), wherein a device for returning the movable elements in their zero position relative to the base is provided (this is for example a spring). A measurement at the tool reference point (TCP) also includes measurements that are close to or as close as possible to the TCP, especially since this describes a virtual point in space and is not physically accessible to a measurement in any case. Deviations between the actual TCP and the measuring point are advantageously taken into account by the controller. When measuring relatively between the movable elements, the measured signal is divided with the factor used for the distribution of the desired movement (preferably the mass factor) or by other suitable means, for example inverse structural models or multi-body models. When using a common superordinate control circuit for a plurality of movable elements can be dispensed with a division of the relatively measured value between the movable elements.

It is particularly favorable if the measurement of at least one of the values current position, speed, acceleration and jerk takes place exclusively between a movable element relative to the base or between a substantially stationary and independent from the base reference point and the respective movable element.

Alternatively, the measurement of at least one of the current position, velocity, acceleration, and jerk values occurs between both movable elements and base or a substantially stationary and base independent reference point, and relative between the movable elements, optionally with a distribution of the relative between the moving elements measured signal takes place.

It has been found that it is particularly advantageous if the handling of tools and a machining of workpieces, the moving elements in the inventive device approach different stations in which the processing or handling takes place, wherein the movable elements by means of a management and Drive system in the device revolve or removed from the device and can be fed again. The movable elements are then preferably handled in the form of a workpiece pallet, for example in a circuit and the device according to the invention can be operated in this embodiment in the manner of a tact line. The moving elements are preferably equipped with its own drive to move from station to station, alternatively they are moved by external drive means.

The object of the invention is further achieved by a device for carrying out a method according to the invention, comprising two or more, relative to each other and relative to a base movable, in itself substantially rigid and light elements. These are designed to divert the drive reaction forces needed to move them and produce a resultant payload into the base. They are further arranged so as to be moveable relative to the base, so that the driving reaction forces in the base, which can be introduced at the current location and in the current direction, are substantially equal in the base and in the suppressed vibration excitation of the base. The kinematic chain for generating the useful movement is closed immediately, so on the shortest possible way. In this case, a force curve over z. B. cantilevered, dynamically soft elements, which is too far away from the site of action of the useful movement avoided.

The base is a substantially immovable relative to the outer cover assembly, it can also be formed by a relation to other subordinate assemblies movable element. The base is designed so that it allows the relative movement of the movable elements in such a way that the derivative of the reaction forces in the shortest path and thus takes place immediately.

It is favorable if the base is designed to be as stiff as possible in the directions of movement which are to be equated with the dominant directions of the force flow. A change of the location and / or the direction of the reaction force introduction to the base during the movement, for example in an application of the method according to the invention in a coupling gear, is possible.

A device is considered advantageous in which the movable elements are designed for a predominantly linear or planar movement. Also advantageous is a device in which the movable elements are designed for a predominantly rotary or rotary-translatory or rotary-rotary movement as cylindrical or spherical, rigid in the directions of movement elements or rod structures. The movable elements are as stiff as possible in the directions of movement and designed for example as a plate-shaped movable elements or rod structures for a predominantly linear or planar movement or as cylindrical elements or corresponding rod structures for a predominantly rotary or rotational translational movement. The movable elements preferably have additional design features for reinforcement (eg ribs, rods or tie rods) in the directions of movement as well as other than the directions of movement.

It has also proven to be advantageous if the connection of the base to the underlying structure has a jerk decoupling. This learns its preferred practical embodiment, especially with the decoupling of the immovable base of the foundation. For this purpose, the base is connected by suitable spring and damper means elastic and damping with the ground or one or more subordinate assemblies. The connection of the base to the subordinate structure can also be formed by a jerk decoupling, consisting of an additional or formed by the base jerk decoupling slide and spring and damper means.

Advantageous is an embodiment in which the drive of the movable elements relative to the base takes place substantially in the center of mass of the respective movable element. As a drive arrangement is preferably a parallel drive into consideration. Furthermore, the drive of the movable elements relative to the base by mechanically translating drive systems (for example, ball screw drive, pinion and rack, timing belt drive, differential toothed belt drive, cable or Bowden cables) or non-mechanically translating direct drives (for example, synchronous linear motors, asynchronous linear motors, electrodynamic linear drives, also called "Voice Coil "or linear stepper motors or fluidic drives, eg hydraulics and pneumatics) are provided. Another category of embodiments of the invention relates to planar drives composed of the last-mentioned drive types (for example, planar asynchronous drive, planar synchronous drive, planar stepping motor) or corresponding multi-coordinate drives, as are used in the prior art, for example for realizing a rotary-translatory movement. The attack of the drive is essentially as required by the prior art in the present device in the preferred embodiments, in or near the center of gravity of the respective movable element, including in an alternative embodiment, a plurality of drives of the above Species between each movable element and the base can be applied (parallel drive).

It is particularly advantageous if at least one movable element has at least one additional movement device with at least one further movable element or at least one additional and / or redundant degree of freedom of movement is provided by at least one additional positioning element introduced into the kinematic chain. This results in additional degrees of freedom and directions of movement of the device according to the invention by patch (serial) axes or by additional small movements, for example in the connections to the guide. In a preferred embodiment, the additional movement devices are designed as adjusting devices with the smallest adjustment paths (eg piezoactuators). These generate the movement directly or via a kinematic transformation (lever).

It is also advantageous if guide systems are provided which provide the movable elements with the required degrees of freedom of movement, the guide systems exclusively between the movable elements and the base, between the movable elements and the base and at the same time relatively between at least two movable elements or between acting on the movable elements and an external reference point and the guide systems are substantially immobile in the other coordinate directions. It is thus to distinguish between relative guidance (between the elements of a plane) and absolute guidance (across planes to the base or to the outer reference), which are realized by guide systems. The guide systems preferably provide one to six degrees of freedom of movement only relative to the base, relative to the base, and relative to where, accordingly, the movable elements are mutually movable. In the other, the supernumerary coordinate directions they are substantially immobile, wherein the relative stiffness between the movable elements can be generated by the control system, provided that the guide system in the associated degree of freedom no or only insufficient rigidity realized and the arrangement of the drives generation a driving force or a drive torque in this direction of movement permits and the return of the current state of motion in this direction of movement can be realized by measuring systems. As movement types to be influenced are preferably translation, rotation, planar motion, planar-rotational motion, translational-rotational movement into consideration.

Particularly advantageous is at least one measuring device, the measurement of the current position and / or the speed, the acceleration, the jerk exclusively relative between the movable elements and the tool reference point (TCP), exclusively between a movable element relative to the base, between a in Substantially stationary and base independent reference point and the respective movable element and / or can be done both between movable elements and base and relative between the movable elements. When measuring only relative between the movable elements, means are provided for returning the movable elements in their zero position relative to the base. In the measurement relative between the movable elements, a division of the measured signal is provided with the factor used for the distribution of the desired movement. The factor also includes suitable means, in particular suitable physical parameters and system parameters, as they are mentioned several times in the description of the method according to the invention.

It has proven to be particularly favorable if at least one of the movable elements and / or the base has at least one means for receiving a workpiece and / or tool and / or means for deflecting radiation, wherein the required relative movements for machining, positioning and Handling between tool and workpiece or alternatively to the deflection of radiation as a relative movement between each two or more movable elements and / or one or more movable elements and the base arise. Preferred is a device with effective in one or more degrees of freedom of movement mechanically translating drive, such as rack drive, spindle drive or coupling gear, not mechanically translating drive as linear direct drive or fluidic drive (hydraulics, pneumatics).

In this case, the movable elements preferably have clamping devices for receiving workpieces or tools, or workpieces and tools are assigned to the base, wherein the required for machining, positioning, handling, relative movements between tools and workpieces as a relative movement between two or more movable Elements or one or more movable elements and the base arise. As a machining method, preferably abrasive machining methods (eg, chip forming) or applying or additive manufacturing methods are provided. Likewise, the use for camera guides, for example, for monitoring of manufacturing processes, for micro-processes as provided in semiconductor manufacturing. In addition, the leadership of high-energy radiation, such. B. laser, electron beam. The moving elements have means for Distraction of high-energy radiation (eg laser radiation), which are arranged such that a defined deflection of the high-energy beam is effected by a relative movement of the movable elements relative to one another or with respect to the frame. The beam preferably remains in its original perpendicular direction during deflection, alternatively it undergoes deflection from the original perpendicular direction, and additional means associated with the movable elements and or base for focusing the beam and providing additional process functionality (eg, cutting gas supply). can be used.

Furthermore, handling devices, milling cutters, turning tools, broaching tools, impact tools, grinding wheels or grinding pencils, camera optics, water jet or sand blasting, to name but a few fields of application, can be used in conjunction with the device according to the invention, especially the movable elements and the base.

Likewise, a workpiece carrier concept is provided according to which the movable elements have means for receiving workpieces or tools, or workpieces and / or tools may be assigned to the base, wherein the movable elements in the processing device can approach several stations in order to perform different processing, To carry out measurements, manipulations or similar actions, to pick up or replace workpieces and / or tools. Not in all stations in this case the inventive method must be realized.

A particularly advantageous practical application of the device according to the invention can be realized with a processing method having at least one dominant degree of freedom of movement which can be used highly dynamically. This can be done in many ways on state-of-the-art machines or modified systems. In particular, a use in a press (linear motor press, crank press, screw press), when surface grinding, planing or non-circular turning and opening and closing of shared tools (for example, pressure or injection molding) is provided. Further areas of application are two or more equal, highly dynamic degrees of freedom of movement, such as those required in metal-cutting production processes (eg milling), separating production processes (eg laser processing), generative production processes (eg laser sintering).

Particularly promising is a device according to the invention, in which a deflection and / or modification of radiation by means of optical elements can be realized in such a way that the deflection and / or modification of the radiation by at least two movable elements or in interaction with the base. For this purpose, the movable elements or the base are equipped with optical elements such as mirrors, lenses or optical gratings.

The object of the invention is also achieved by a control method for carrying out a method according to the invention for producing a relative movement between two or more relative to each other and relative to a base movable elements, wherein the control of the movement of the movable elements by separate, cascaded Lageregelkreise with unterlagertem speed - or speed control loop, lower-level force, torque, acceleration or current control loop takes place. Of these, a variant is preferably used depending on the structure of the drive. Each control loop receives the values of at least one reference variable which are valid for the respective movable element and the respective direction of movement and have been determined by analytical calculations or optimization calculations. The control receives the determined, time course of movement and, alternatively, additionally the course of desired speed, target acceleration or desired current or a corresponding physical command variable, also the target pressure or a corresponding physical command variable as a target specification.

It is also envisaged to apply the control technique to other motion-generating physical quantities, e.g. B. for fluid drives such as hydraulic or pneumatic drives.

It is advantageous if a position or a position and speed control for each two or more movable elements in a movement direction associated with the elements by one for all movable elements effective, higher-level position control loop or position and speed control loop is advantageous. Advantageously, the distribution of the desired speeds in the higher-level position control loop according to the mass ratio of the movable elements. Equally favorable is the alternative distribution of the desired currents in the higher-level position and velocity control loop corresponding to a drive factor which results from the electrical parameters of the participating drive systems of the movable elements, so that essentially the same force-time characteristics of the movable elements result. Alternatively, another factor of a physical size is the basis of the regulatory process.

It is to distinguish between the distribution of the desired speed and the distribution of the desired currents. The speed is divided according to the factor for the distribution of movement, preferably the mass ratio, the current is essentially a factor of +/- 1 (for two elements and the same force constant) taken into account. As a factor, a drive factor is preferably provided which results from the electrical parameters of the participating drive systems of the movable elements. When dividing the current, therefore, the parameters of the two drive systems involved are relevant in the first place, so that essentially the same force-time characteristics result.

The position or position and speed control is carried out for each two or more movable elements in a movement or drive direction associated with the elements by one for both elements effective, higher-level position or position and speed control loop, while the control of the final drives by separate , subordinate speed and acceleration or current control loops (superordinate position controller) or by separate, lower-level acceleration or current control loops (higher-level position and speed control loop). The distribution of the desired speeds (higher-level position control loop) or the setpoint currents (higher-level position and speed control loop) is carried out according to an analytically or otherwise determined factor (eg mass ratio).

Further details and advantages of the invention and advantageous embodiments of the method according to the invention, the device according to the invention and the control and regulation method according to the invention are illustrated by the figures. Show it:

1A a block diagram of an embodiment of the method according to the invention;

1B a schematic diagram of an embodiment of a uniaxial movement device according to the invention;

2A to 2C : in each case a block diagram of an embodiment of the method according to the invention for the distribution of the desired movement (desired trajectory) to the movable elements;

3 FIG. 2 is a diagrammatic representation of a typical course of the driving force and its adaptation for machine tools and handling devices; FIG.

4A : A perspective view of an embodiment of a movement device according to the invention with electromechanical spindle drive

4B a perspective exploded view of an embodiment of a movement device according to the invention with electromechanical spindle drive;

5A a perspective view of an embodiment of a movement device according to the invention with a dominant degree of freedom of movement;

5B a perspective exploded view of an embodiment of a movement device according to the invention with a dominant degree of freedom of movement;

6A a perspective view of an embodiment of a movement device according to the invention with a dominant degree of freedom of movement and two other controllable degrees of freedom of movement;

6B : An exploded perspective view of an embodiment of a movement device according to the invention with a dominant degree of freedom of movement and two further controllable degrees of freedom of movement;

7A a perspective view of an embodiment of a movement device according to the invention for the realization of a planar movement;

7B a perspective exploded view of an embodiment of a movement device according to the invention for the realization of a planar movement;

8A a perspective view of an embodiment of a movement device according to the invention for the realization of a planar movement with parallel drive in a direction of movement;

8B a perspective exploded view of an embodiment of a movement device according to the invention for the realization of a planar movement with parallel drive in a direction of movement;

9A a perspective view with hidden edges of an embodiment of a movement device according to the invention for the realization of a rotary-translatory movement;

9B a perspective exploded view with hidden edges of an embodiment of a movement device according to the invention for the realization of a rotary-translatory movement;

10A a perspective view of an embodiment of a movement device according to the invention for the realization of a rotary-translatory movement;

10B a perspective exploded view of an embodiment of a movement device according to the invention for the realization of a rotary-translatory movement;

11A a perspective view with hidden edges of an embodiment of a movement device according to the invention for the realization of a rotary-rotary motion;

11B a perspective exploded view with hidden edges of an embodiment of a movement device according to the invention for the realization of a rotary-rotary motion;

12A a perspective view with hidden edges of an embodiment of a movement device according to the invention for the realization of a rotary-rotary motion;

12B a perspective exploded view with hidden edges of an embodiment of a movement device according to the invention for the realization of a rotary-rotary motion;

13A a perspective view of an embodiment of a movement device according to the invention with a dominant degree of freedom of movement and in each case a serially arranged additional axis on each movable element;

13B : an exploded view of an embodiment of a movement device according to the invention with a dominant degree of freedom of movement and in each case a serially arranged additional axis on each movable element;

14 a schematic diagram of an embodiment of a uniaxial movement device according to the invention, which has a relative guidance system between the movable elements;

15 a perspective view of an embodiment of a movement device according to the invention with a dominant degree of freedom of movement and in each case a serially arranged additional axis on each movable element and balancing masses;

16 a block diagram of an embodiment of a method according to the invention for controlling the movement of a movement device according to the invention with its own cascaded control circuits for each movable element;

17 a block diagram of an embodiment of a method according to the invention for controlling and regulating the movement of a movement device according to the invention with a higher-level position control loop for both movable elements;

18 a block diagram of an embodiment of a method according to the invention for controlling and regulating the movement of a movement device according to the invention with a higher-level position and velocity control loop for both movable elements;

19 a perspective view of an embodiment of a movement device according to the invention for the realization of a separating or reshaping manufacturing process (punching);

20 a perspective view of an embodiment of a movement device according to the invention for the realization of a separating manufacturing process (surface grinding);

21 a perspective view of an embodiment of a movement device according to the invention for the realization of a separating manufacturing process (planing);

22 a perspective view of an embodiment of a movement device according to the invention for the realization of a separating manufacturing process (non-circular turning);

23A a perspective view of an embodiment of a movement device according to the invention for deflecting a high-energy beam;

23B an exploded view of an embodiment of a movement device according to the invention for deflecting a high-energy beam;

24A : A plan view of an embodiment of a movement device according to the invention with a hydraulically driven coupling mechanism (toggle lever) in the closed position;

24B a top view of an embodiment of a movement device according to the invention with a hydraulically driven coupling mechanism (toggle lever) in the open position;

25A : A plan view of an embodiment of a movement device according to the invention with an electromechanically driven coupling mechanism (toggle lever) in the closed position;

25B : A top view of an embodiment of a movement device according to the invention with an electromechanically driven coupling mechanism (toggle lever) in the open position;

26A a top view of an embodiment of a movement device according to the invention with an electromechanical drive (spindle drive) in the open position; and

26B : A plan view of an embodiment of a movement device according to the invention with an electromechanical drive (spindle drive) in the closed position.

die Dynamik der beweglichen Elemente 11, 12 festgelegt. Die Gleichung 11 und 1A beschränken sich dabei nicht auf die Relativbewegung zwischen ausschließlich zwei Elementen 11, 12. Außerdem können Relativbewegungen zwischen einer Mehrzahl von Elementen bzw. Bewegungsachsen AX₁ bis AX_i, beispielsweise wenn mehrere Werkzeuge gleichzeitig an einem Werkstück im Eingriff sind (so entsteht beispielsweise s_{TCP_2i}), oder Relativbewegungen zwischen einem oder mehreren Elementen gegenüber der Basis 10 (beispielsweise s_{TCP_Bj} zwischen A_Xj und der Basis 10) erzeugt und für den Prozess bzw. die Handhabung genutzt werden. Es gilt dann im Wesentlichen die Gleichung 12. 1A shows a block diagram of an embodiment of the method according to the invention. The relative between tool (this is for example the first moving element 11 or the movement axis AX ₁ assigned) and workpiece (this is, for example, the second movable element 12 or the movement axis AX ₂ assigned) to be generated Sollweg s _{soll_TCP_12} is forwarded to the web splitting BAT and the drive controllers ATR a corresponding motion-generating physical quantity (for example, a motor current i _should in direct electrical drives) determined and passed on to the drives of the participating axes of motion AX _i , In the railway division is for two moving elements 1 and 2 according to equation 11:

the dynamics of the moving elements 11 . 12 established. The equation 11 and 1A are not limited to the relative movement between only two elements 11 . 12 , In addition, relative movements between a plurality of elements or movement axes AX ₁ to AX _i , for example, when multiple tools are simultaneously engaged on a workpiece (for example, s _{TCP_2i} ), or relative movements between one or more elements relative to the base 10 (For example, s _{TCP_Bj} between A _Xj and the base 10 ) and used for the process or handling. It is then essentially the equation 12.

According to the invention, the complete or at least partial extinction of the drive reaction forces in the base 10 by the kinematic coupling (ie a superimposed movement) of at least two movable elements 11 . 12 reached. The mathematical relationship used to distribute the motion may differ from Equation 11 or Equation 12. Other formal relationships for the distribution of movement are also conceivable, for example by means of transfer functions, by iterative optimization methods or in another way.

Equation 12 (m moving elements in the positive direction of movement, n moving elements in the negative direction of movement):

There may also be other moving elements 11 . 12 be introduced into the system, which are not in the kinematic chain and only serve to increase the compensation quality (for example, AX _k ). The motion specifications for these elements then continue to satisfy, for example, Equation 12 and Equations 4, respectively, or may be generated by other methods known in the art for reducing the structure excitation, such as active and adaptive vibration damping techniques.

1B shows a schematic diagram of an embodiment of a simple, uniaxial movement device according to the invention with movement in the X direction. The facility has a guidance system 18 for guiding the moving elements 11 . 12 opposite the base 10 , To the abstraction of the vibrational ability of the base 10 in itself, this becomes elastic and damping (c _B , B _B ) via a spring-damper element 9 to the foundation 7 coupled.

The drive is exemplified by an electric linear direct drive 15 consisting of the example in the moving elements 11 . 12 fastened primary parts 13 (preferably a coil system) and at the base 10 attached secondary parts 14 (preferably permanent magnets) provided. For the sake of clarity, the illustration of the control and regulating devices and measuring systems has been omitted here. In addition, the dominant natural frequency of the elastic frame by the elastic with c _B and damping with b _B against the foundation 7 fixed mass m _{B of} the base 10 abstracted. In real arrangements, a large number of relevant natural frequencies and associated natural vibration modes always occur.

In 1B is the emergence of Nutzbewegung example as a relative movement of two movable elements 11 . 12 (AX ₁ and AX ₂ ), further elements AX _i to AX _k according to 1A were not shown in the interest of clarity. The useful movement x _TCP at the tool reference point TCP results as a difference of the movement quantities (path s or x, velocity v, acceleration a, jerk r) of the movable elements 11 . 12 AX ₁ and AX ₂ . It is irrelevant whether the movements (x ₁ or x ₂ ) of the elements 11 . 12 Absolutely, so opposite to the foundation 7 (For example, x _abs1 or x _abs2 ), or relative to the base 10 (For example, x _rel1 , x _rel2 ) are detected. Accordingly, the measurement of the motion quantities can be absolutely opposite to the foundation 7 , relative to the base 10 or relative between the moving elements 11 . 12 respectively. The measuring methods can also be meaningfully combined with each other.

In 1B an incomplete compensation of the dynamic drive _{reaction forces} (F _{B_1} and F _{B_2} ) is shown. There remains a small residual force F _{residual_B} , which is the base 10 stimulates minimal vibrations. The illustrated movable elements 11 . 12 should, as well as the base 10 to be as stiff and light as possible.

2A to 2C each show a block diagram 91 . 92 . 93 an embodiment of the method according to the invention for the distribution of the desired movement (desired trajectory) on the movable elements.

In the 2A to 2C is an example of two movable elements, the distribution of the moving variables to be realized and other target variables on the electrical direct drives of these elements shown. The nominal path s _{soll is} used as a representative of the motion variables. ST denotes a target trajectory generator, BAT a path splitting, SP a memory, ATR a drive controller and AX an axis, the motion control and drive of a movable element 1 or 2 , But it may equally be the derivatives of the desired path by time (speed v, acceleration a and jerk r) and their correspondences for rotational movements (rotation angle φ, angular velocity φ., Angular acceleration φ .. and angular pressure φ ...).

Likewise, other setpoints, such as setpoint currents i and voltages U, which are mentioned here as representative of the motion-generating physical variables, can be calculated in advance. In 2A and 2 B First, the motion quantities in the desired trajectory generator ST are generated. This may be part of the higher-level control device (for example, a CNC controller). In 2A the desired trajectory is generated, if necessary intermediately stored (intermediate memory not shown) and directly in the path division BAT into the target trajectories of the axes AX ₁ (s _soll1 ) and AX ₂ (s _soll1 ) divided and stored in a memory SP ₁ and SP ₂ . The generation of the desired trajectories of the individual axes thus takes place before the execution of the movement. At runtime, according to a discrete-time or discrete clocking (in 2a to 2C are the discrete-time clocking with the time step t _i shown) the respective _{target size} (s _soll1 (t _i ), s _soll2 (t _i )) passed from the memory to the drive controllers ATR ₁ and ATR ₂ for the current step. These in turn generate, for example, a desired current (i _soll1 (t _i ) or i _soll2 (t _i )) which causes the mechanical movement of the axes AX ₁ and AX ₂ via the drive. According to the state of the art, position-controlled axle drives can be used for this purpose.

The representation of the feedback of the measuring signals has been omitted for reasons of clarity. Depending on the drive principle, other physical variables than the current can also occur as output variables of the drive controllers.

In 2 B the movement division takes place during the execution of the movement with the clock t _i . For this purpose, the desired trajectory from the generator ST may have been stored in advance in a memory SP. The movement division BAT retrieves the current target amount of movement s _soll (t _i) from memory and divides it into the target movement amounts of the drive controllers ATR ₁ and ATR ₂ (s _set1 (t _i), s _soll2 (t _i)) to which it in turn Target currents i _soll1 (t _i ) or i _soll2 (t _i ) generate the cause in the axle drives a driving force or a drive torque and thus enable the axes AX ₁ and AX ₂ in motion. In 2C a possible intermediate step of the optimization OPT of the desired movement s _{soll is} introduced, which contributes to the further improvement of the motion quality. The optimization is independent of the movement splitting method (before or during the movement) and can be based on different methods.

In 2A . 2 B and 2C The adjustment of the movement splitting factors is also shown. For example, the mass factor K _m or K _m (t _i ) during the movement is adapted to changing conditions (eg reduction of a mass involved in the motion generation as a result of an erosive machining process). This adaptation can again take place before or during the execution of the movement. Other parameters of the control (eg gain factors, filter parameters, etc.) can also be adapted. With the timely adjustment of the parameters, Equation 11 changes accordingly to give Equation 13:

For machine tools and similar motion devices usually jerk and acceleration-limited motion profiles, such as the known 7-segment profile used. Other dynamics-limited motion profiles may also be used as the motion constraint for the movement on the TCP or the individual relatively moving elements. As an example, sinusoidal velocity profiles, as they are often used in positioning applications, called. Other methods for limiting the dynamics, such as low-pass filtering or masking certain frequency ranges in the motion specification, for example by means of a fast Fourier transform (FFT) or bandpass filtering, are also permissible.

3 shows a diagram representation of a typical for machine tools and handling equipment course of acceleration with the corresponding driving force and their approximation. The deviating from each other, for example, as a result of different engine power constants or deviating friction ratios force curves (solid and dashed line) are equalized by the inventive coupling of the corresponding control circuits (for example, current control circuits). In this way, the compensation quality of the force compensation can be further increased, of course, the kinematic constraints are met.

The basic principles of the power line in the base or movable elements are shown below. In the simplest embodiment of the adhesion is achieved in a rod-shaped base. The drive reaction forces are then forwarded mainly as tensile and compressive forces F. It is advantageous in this embodiment that rod-shaped components having a sufficiently large cross section have a high tensile and compressive rigidity. In addition, rod-shaped components under ideal centric loading in the center of gravity experience only a change in length in their axial direction.

Also advantageous is the power line as a thrust F, for example in a plate or in a compact body. The body undergoes a deformation corresponding to a parallelogram. As in the power line as tensile / compressive force F high stiffness can be achieved even with distributed load attack and power line over shear force thrust.

When rotating a force line F as a torsional (torsional shear stress) is advantageous. There is only a rotation of the ends of the body against each other if the resulting torsional moment acts in the center of gravity of the cross section. In general, compact cross sections or closed circular cross sections can realize a high rigidity against shear forces or torsional moments. In addition, the deformation is essentially in the direction of the attacking load. A power line as Torsionsschubspannung is also possible in curved components (eg spherical shells).

Unfavorable is considered a traction F, which causes bending moments. While the traction is essentially realized by tensile forces, resulting from the force application outside the neutral fiber, a bending moment. This leads to the deformation of the base (bending beam) outside the direction of the force and thus normal to the direction of movement. Even less favorable is the power dissipation over bent bending beam. As a result of the larger lever distances, significant bending moments arise here, which predominantly contribute to the vibration excitation of the structure.

As an alternative to a mechanically zwangläufigen spindle drive for each two movable elements and separate spindle drives can be used for the movable elements. A corresponding movement device 149 , for example, a servo screw press, is in 4A shown. 4B shows the exploded view 4A , By the arrangement of three each by means of electric motor 154 driven spindle drives 153 rotating spindle, non-rotating spindle nut, the movable elements can be tilted in addition to the feed movement in the X direction and within certain limits around the Y and Z axis. This requires the leadership system 158 to allow a movement in these degrees of freedom. The moving elements 151 and 152 carry the forming tools - eg stamp 140 and die 141 , In the present example, the base is formed by two plates tensioned by tie rods, whereby an immediate adhesion between the drives is achieved. The presented machine concept offers the advantages associated with the embodiment according to the invention with regard to achievable dynamics, possible energy savings and the extensive compensation of the dynamic and process loads. In addition, a modular machine concept is created, whereby the base can be adapted (eg by using shorter or longer tie rods) to other processes and tool dimensions. It is also easy to replace the drive systems. Advantageously, the in 4A and 4B illustrated embodiment, in particular in a horizontal arrangement whereby a weight compensation completely eliminated.

In addition to the in 4A respectively. 4B illustrated embodiment, such motion systems can be constructed in other arrangements of the drives. So can the moving elements 151 . 152 also be aligned in a row (the tips of the triangular moving elements then point in the same direction). The drive is also possible with driven spindle nuts. It is particularly advantageous if, in the case of a drive with driven spindle nuts, in each case a continuous spindle anchored in the base is used for driving a plurality of movable elements. The non-rotating spindle then forms part of the base. The introduced by the driven spindle nuts in the non-rotating spindle forces close in this by the shortest route as pure tensile and compressive forces. Such an embodiment thus achieves a maximum rigidity and an immediate adhesion in the base with little effort for the frame components.

5A shows a perspective view of an embodiment of a movement device according to the invention 1 with a dominant degree of freedom of movement X, a dominant direction of movement. 5B shows a perspective exploded view. The base 10 the movement device 1 resting on a base 8th which with the foundation 7 connected is. In the present example, the drive of the plate-shaped movable elements takes place 11 . 12 by means of ironless electric linear direct drives 15 , Preferably designed as a permanent magnet synchronous motors. These each consist of a primary part 13 (here exemplified potted motor windings) and a secondary part 14 (eg magnets and iron yoke). In 5A and 5B are the secondary parts 14 pieced executed.

The movement device 1 has a leadership system 18 , preferably in the form of profiled rail roller guides, consisting of guide carriage 17 and guide rails 16 , On the representation in the embodiment of existing control and regulating devices and measuring systems for position, speed and acceleration measurement has been omitted for reasons of clarity.

In the present embodiment is assumed by mechanically non-translating drives (electrical linear direct drives). In principle, the method can be applied to any type of drive system for both translational, rotary or combined movements. By way of example, ball screw drives, rack drives, friction wheel drives, belt drives or differential toothed belt drives and cable pull drives may be mentioned as examples for the mechanically translating drive systems. Pneumatic or hydraulic drives can also be used. As an example of electric drive systems may be mentioned synchronous or asynchronous linear motors, linear or rotary stepper motors and electrodynamic drives (also referred to as "voice coil") listed. The drives can be effective in one or more degrees of freedom of movement. Such multi-coordinate drives can be realized, for example, as electrical asynchronous motors for a planar motion generation. Even planar stepper motors are known.

In 5A The adhesion is essentially as tensile / compressive force on the secondary parts 14 which alternatively can be made of one piece. The attack of the driving force on the moving elements 11 . 12 takes place in the example in the plane of the center of gravity of the respective element 11 . 12 , whereby advantageously the formation of tilting moments is reduced. The moving elements 11 . 12 are in 5A and 5B shown as plate-shaped elements. These are characterized by a high rigidity in the direction of movement, here X, from. However, other embodiments would also be conceivable, for example bar structures or compact movable elements. In addition, the movable elements may also have design features to increase their rigidity - such as struts, ribs, tie rods or the like - have.

In addition to movement devices according to the invention, each having one drive per movable element, it is also possible to implement devices with a plurality of drives on each movable element. In the 5A and 5B shown movement device 1 has for example a parallel arrangement of two linear direct drives 15 on every moving element 11 . 12 , By differential control, it is thus possible to allow a further degree of freedom of movement - the rotation of the carriage about the vertical axis φ _Z - within certain limits and to selectively control. For this purpose, the guides must have sufficient flexibility for this additional degree of freedom of movement. For this example, solid joints can serve as joints (not shown). Such additional degrees of freedom of movement can be used particularly advantageously for the correction of movement errors, such as those resulting from thermal expansion or bending, for example.

6A shows a perspective view of an embodiment of a movement device according to the invention 1 with a dominant degree of freedom of movement X and two further controllable degrees of freedom of movement φ _y , φ _z . There are three linear direct drives each 15 . 15 ' . 15 '' on every moving element 11 . 12 shown.

6B shows an exploded perspective view of an embodiment of a movement device according to the invention 1 with a dominant degree of freedom of movement X and two further controllable degrees of freedom of movement φ _y , φ _z . In the exploded view are joints 19 For example, solid-state joints, visible to the moving elements 11 . 12 allow to move in two other degrees of freedom φ _y , φ _z defined. These are the rotation about the vertical axis Z and the rotation about the transverse axis Y. With sufficient flexibility of the joints 19 the stiffness in the additional rotational degrees of freedom of movement φ _y , φ _{z is} limited only by the control. Prerequisite is the measurement of the rotation in the additional degrees of freedom of movement φ _y , φ _z , which also from the measurement signals of several (in the example, preferably three each on the linear direct drives 15 . 15 ' . 15 '' arranged) linear measuring systems can be derived. The application of the method according to the invention to the controllable by the parallel drive additional degrees of freedom is possible.

The movement device according to the invention 1 can also be realized for more than one dominant degree of freedom of movement. The figures 7 to 12 show some examples of such moving devices with more than one dominant degree of freedom of movement.

7A shows a perspective view of an embodiment of a movement device according to the invention 2 to realize a planar movement, 7B shows an exploded perspective view of this. The movement device 2 consists essentially of the base 20 , the opposite two plate-shaped movable elements 21 . 22 are arranged. As a management system 28 serve cross-shaped profile rail roller guides, consisting of guide rails 26 and carriages 27 , At the base 20 are the secondary parts 24 of the linear motor (magnets segmented) as Linear motor drive 25 attached, with each movable element 21 . 22 two abutments 24 (according to the two sub-movement directions above and below the base 20 ) assigned. The secondary parts 24 are wider than those on the moving elements 21 . 22 fastened primary parts 23 of the linear direct drive 25 , As a result, same magnetic conditions remain even with a shift of the respective primary part 23 obtained transversely to its feed direction. As an example of a machining is a movably mounted milling spindle in the Z direction 45 , alternatively also grinding spindle, at the top, the second movable element 22 , as well as a workpiece 29 with indicated machining contour at the bottom, the first moving element 21 arranged.

The drive of the moving elements 21 . 22 takes place essentially in the two lines of action, which are in the resulting center of mass of the respective element 21 . 22 to cut. This causes the excitation of dynamic tilting moments by the linear direct drives 25 avoided. The useful movement is the sum of the relative movements of the two elements 21 . 22 opposite the base 20 , About the base 20 the adhesion is realized by a power transmission as a shear force thrust. A measuring system is not shown in the interest of clarity. The measuring system is in a preferred embodiment in the running as a profile rail roller guides guide systems 28 integrated. In the present arrangement, the stiffness in the directions of movement is determined only by the drives and their regulation. The leadership systems 28 prevent in the example the rotation about the vertical axis Z and define the position of the moving elements 21 . 22 in the Z direction.

8A shows a perspective view of an embodiment of a movement device according to the invention 3 for realizing a planar movement with parallel drive in a direction of movement and a base 30 , The components essentially correspond to those of 7 , However, the present movement device has a parallel drive in the X and Y axis, as for each movable element 31 . 32 two primary parts each 33 . 33 ' and two abutments 34 . 34 ' are used, so that for each direction of movement on each moving element 31 . 32 a linear direct drive 35 . 35 ' is available. As a result, with variable position of the center of mass (for example, different arrangement of the workpieces 39 opposite the milling spindle 45 ) the resulting driving force is always kept in alignment with the center of gravity. Furthermore, such a parallel drive allows a further degree of freedom, for example the rotation (φ _Z ) about the vertical axis Z, to be controlled. In the 8th shown carriages 37 would have to do this in cooperation with the guide rails 36 as a management system 38 allow a rotation about its vertical axis Z. Alternatively, the arrangement would be with a hydrostatic guide, a magnetically biased air bearing or a similar, effective only in the Z direction guide system 38 conceivable. In conjunction with a non-contact, two-dimensional measuring system, the device can then also control the rotational degree of freedom φ _Z about the vertical axis Z in a limited range.

8B shows an exploded perspective view of an embodiment of a movement device according to the invention described above 3 for realizing a planar movement with parallel drive in one direction of movement.

9A shows a perspective view with hidden edges of an embodiment of a movement device according to the invention 4 for the realization of a rotary-translatory movement and 9B an exploded perspective view of this. The illustration of drive and guide elements and measuring, control and control devices has been omitted in the interests of clarity. For this purpose, the systems known from the prior art can be adapted.

As a base 40 serves in the example a hollow cylinder. In this move two cylindrical moving elements 41 . 42 each in a rotational and a translatory degree of freedom φ _Z , Z. A milling spindle 45 on the upper moving element 42 or a workpiece clamping table 43 with grooves on the lower moving element 41 illustrate the emergence of the relative movement at the TCP. In the example are milling spindle 45 and workpiece table 43 each associated with an additional serial movement axis XY. In the case of a rotational movement φ _Z , the superimposition of the relative movements according to the invention to the useful movement takes place at the TCP, while the drive torques (torsional moments) acting in opposite directions on the base take the form of a torsional shear stress in the base 40 be directed and pick up. With a movement of the moving elements 41 . 42 in the Z direction, the opposing driving forces are also in the base 40 initiated and forwarded as tensile / compressive forces until they pick up. The movement in the Z-direction thus also adds up.

10A shows a perspective view of an embodiment of a movement device according to the invention 5 for the realization of a rotational-translatory movement, 10B shows this an exploded perspective view. In the illustrated embodiment, the base 50 formed by a cylindrical component, the movable elements 51 . 52 correspond to cylindrical components with a bore. The first moving element 51 has a workpiece clamping table, the second movable element 52 a milling spindle 45 on. According to the movement device 4 out 9 occur the moment or adhesion and the superposition of relative movements to the useful movement.

11A shows a perspective schematic representation with hidden edges of an embodiment of a movement device according to the invention 6 for the realization of a rotational-rotational movement, 11B shows the corresponding exploded view. The illustration of drive and guide elements as well as measuring, control and control devices was also omitted here in the interest of clarity. For this purpose, the systems known from the prior art are also adaptable.

As a base 60 serves in the example a spherical shell (simplified without separation shown). In the volume corresponding to a ball and enclosed by the spherical shell, the two moving elements move 61 . 62 , These each correspond to a spherical segment. The movements of the moving elements 61 . 62 add in turn as a result of the arrangement according to the invention at the (virtual, not shown) tool reference point TCP to Nutzbewegung. The resulting drive torques on the inside in the spherical shell (base 60 ), substantially forwarded as a torsional shear stress, and eventually cancel each other out. To clarify the superimposition of the relative movements on the TCP are again a milling spindle 45 or a workpiece table 63 shown. The milling spindle 45 realizes an additional degree of freedom of movement by means of a serially arranged movement axis, whose direction in the defined coordinate system from the position of the second movable element 62 depends.

12A shows a perspective view with hidden edges of an embodiment of a movement device according to the invention 6 ' for the realization of a rotational-rotational movement, 12B the associated exploded view. In the example the basis becomes 60 ' also formed by a spherical shell.

The inner, tool-carrying movable element 62 ' with the milling spindle 45 corresponds to a sphere segment. The milling spindle guided in it 45 has an additional degree of freedom of movement, in the position shown approximately Z. The outer movable element 61 ' corresponds in the example of a spherical shell. It carries as in the previous examples a workpiece table 63 , As previously discussed, the superposition of the motions at the TCP and the initiation and cancellation of the drive reaction forces or moments in the base occurs 60 ' , Notwithstanding the in 11 In the example shown, the drive reactions are respectively on the inside and on the outside of the base 60 ' forming spherical shell initiated.

13A shows a perspective view of an embodiment of a movement device according to the invention 1 with a base 10 and a dominant degree of freedom of movement and a respective serially arranged additional axis on each movable element 11 . 12 with an exploded view in 13B for better understanding. Here is the in 5 introduced inventive movement device 1 represented with a dominant degree of freedom X. The components again correspond to those 5 ,

In addition, the in 13 shown movement device 1 in each case via an additional translatory movement axis in the Y and Z directions. These two movement axes are in the example by means of guidance systems 76 . 76 ' , Preferably profiled rail roller guides, consisting of guide carriage 75 . 75 ' and guide rails 74 . 74 ' , and are guided by a ball screw 71 . 71 ' driven. The drive motors of the screw drives and measuring, control and control devices are not shown in the interests of clarity.

Although the additional movement axes Y and Z do not meet the requirements for high dynamics, they are suitable as delivery axes or for the realization of movements with less dynamics. The dominant uniaxial motion device X out 5 is due to the additional axes Y ', Z' to a full triaxial movement device. In this case, the main axis X realizes the highly dynamic movement necessary for the process, while the two additional axes Y ', Z' execute feed movements with low dynamics and without the requirement for force compensation. According to the prior art, other drive systems for the additional axes X ', Y' are provided.

As an alternative to additional axes arranged serially on the movement means according to the invention, movement axes with limited travel, for example piezo actuators or magnetic bearings with adjustable air gap, are provided for realizing additional degrees of freedom of movement. As an example, the in 6B directed to visible solid-state joints. If these are replaced, for example, by piezoactuators which are effective in the Z direction, two additional degrees of freedom of movement φ _X , φ _Y result with the rotation of the movable elements about the X and Y axes.

14 shows a schematic diagram of an embodiment of a uniaxial movement device according to the invention 1' which have a relative guidance 77 between the moving elements 11 . 12 features. This is the off 1B known movement device X taken and modified. The drive of the moving elements 11 . 12 is preferably also done by electrical linear direct drives 15 ,

Deviating from 1B becomes the guide of the second moving element 12 ' exclusively as a relative guide 77 opposite the first movable element 11 ' realized. Such an arrangement may be advantageous for the flow of force between the movable elements 11 ' . 12 ' be because fewer guide elements are needed. In addition, the absolute guidance 78 opposite the base 10 be designed so that they do not unwanted moment effects or tilting vibrations on or in the moving elements 11 ' . 12 ' transfers. Should be in such an arrangement the base 10 swing, this vibration would hardly affect the moving elements 11 ' . 12 ' , which by means of a relative guide 77 very stiff against each other, transferred. Thus, the quality of movement in the movement device according to the invention 1' be increased again. In principle, relative and absolute guidance systems can be used 77 . 78 can be combined arbitrarily. However, at least one of the moving elements must 11 ' . 12 ' about an absolute guide 78 opposite the base 10 or an outer cover (not shown).

For the arrangement of the measuring systems 79 . 80 . 82 Motion detection offers the same possibilities as for the design and arrangement of guidance systems. So in the simplest case, the data acquisition relative to the base 10 through a measuring system 80 realized. However, the vibrations of the base can 10 in itself or with respect to the outer cover 81 , prefers a foundation 7 , can be coupled into the control loop, which can reduce the movement accuracy.

As an alternative, there is the possibility with respect to the outer cover 81 to measure, which, however, usually with increased effort for the measuring system 82 connected is. According to the relative guidance described above 77 offers the measurement between the moving elements 11 ' . 12 ' at. The relevant amount of motion is detected directly and hardly parasitic vibrations are coupled into the control loop. To reference the position on the base 10 however, at least one measuring system remains to be obtained 80 . 82 opposite the base 10 or the outer cover 81 required. For exclusive measurement between the moving elements 11 ' . 12 ' otherwise they would inevitably become an end position on the basis of the never exactly fulfilled equilibrium of forces 10 drift. In the sense of improving the quality of movement, a combination of different measuring systems is also possible. The too 14 For a degree of freedom of movement explained relationships are in principle transferable to a device according to the invention with a plurality of degrees of freedom of movement and various measurement principles.

15 shows a perspective view of an embodiment of a movement device according to the invention 1'' with a dominant degree of freedom of movement X and a serially arranged additional axis on each movable element 11 '' . 12 '' as well as additional balancing weights. These are the in 5 introduced and in 13 preferably two additional translational axes Y ', Z' extended movement device 1 , which is taken up again here and extended by means for compensating for the drive reaction forces introduced by the additional axes Y ', Z'.

These are two symmetrical to the ball screw 71 arranged balancing weights 83 used. The drive (not shown) of the balancing weights 83 For example, it can be realized by direct electrical drives, mechanically translating drives or other drive systems known in the art. By means of known methods such as force compensation or pulse compensation, the drive reaction forces introduced by the additional axis into the respective movable element can be compensated or minimized. According to the known state of the art, other methods, such as the jerk decoupling of the additional axes, can be used for this purpose.

In a further preferred embodiment of the movement device according to the invention 1 is the force compensation in conjunction with the kinematic coupling of the relative movement relative to the respective underlying movable element 11 . 12 applied. For explanation will be on 8th directed. As an extension to the example in 8th illustrated embodiment, the workpiece is also movably mounted in the Z direction and provided with its own drive including measuring, control and control devices (not shown). This makes it possible in the example to extend the inventive method to the movement in the Z direction. The relative movement in the Z-direction at the tool reference point TCP now arises as a result of the opposite relative movements of the milling spindle 45 and workpiece 39 out 8th , The frictional connection takes place in the example in each case via the movable element 31 . 32 and its absolute guidance in the base. In the base, the drive reaction forces cancel in the Z direction. According to the variants described above, the adhesion can also directly between the moving elements 11 . 12 via a relative guide 77 or an outer cover 81 according to 14 respectively.

16 shows a block diagram of an embodiment of a method according to the invention for controlling the movement of a movement device according to the invention with a separate cascaded control loop for each movable element. The input signal from the trajectory generator (ST in 2 ) generated target trajectory x _{should be} at the tool reference point TCP. This is divided according to the ratio of the masses K _{m of} the moving elements involved in the motion generation and as desired path x _soll1 or x _soll2 to the movable elements associated control circuits 84 . 85 passed. In the example, a cascaded controller structure is used, although in principle other controller arrangements known from the prior art (multi-variable controllers, model-based controllers or the like) can also be used.

The control deviation x _W1 and x _W2 (also referred to as drag distance) is first determined from the predetermined desired movement variables x _set1 and _set2 and x the current measured actual distance x _IST1 and _IST2 x. This control deviation is multiplied by the respective speed _{amplification} factor K _V1 or K _V2 , from which the _desired speed _{specification} v _soll1 or v _soll2 results. From the respective target speed setting, the pre-controlled velocity specification _vorst1 v or v _vorst2 and the measured actual speed v _{IST1 ist2} and v is the velocity deviation _w1 or _w2 v v calculated and passed to the proportional-integral speed regulator. This evaluates the control deviation with a proportional amplification factor K _P1 or K _P2 as well as the _{reset time} T _N1 or T _N2 relevant for the weighting of the integral _component and generates the setpoint for the current _controller i _soll1 or i _soll2 . From the target specification, the pilot-operated target current i _vorst1 or i _vorst2 and the measured actual current i _IST1 or i _ist2 the respective deviation from the reference current i _w1 and i is calculated _w2 and from the proportional-integral current regulator with the amplification factor K _Pi1 or K _Pi2 and the _{reset time} T _Ni1 or T _Ni2 evaluated. The current output by the current controller (actually a voltage is generated, but for simplicity the circuit diagram can also be specified for the current) is delayed in time by the electrical time constant T _el1 or T _{el2 of} the motor. The motor current i _ist1 or i _ist2 and the motor force _constant K _Mot1 or K _Mot2 results in the effective drive force, which at the respective moving mass m ₁ or m _{2 of} the movable element to a relative acceleration a _rel1 and a _{rel2 relative} to the base leads. By integration, the relative velocity v _rel1 or v _rel2 and the relative _paths x _rel1 and x _{rel2 relative} to the base result from the relative acceleration.

In the _exemplary embodiment, the simplification is based on identical electrical time constants T _el1 and T _el2 and motor force constants K _Mot1 and K _Mot1 . For position and current controller also equal amplification factors are required. This results in the governor parameters for the speed controller according to Equation 14 from the required equilibrium of forces: K _P2 = K _P1 · K _m and equation 15:

Particularly preferred is the use of a device for equalizing the driving forces, which is introduced into the control loop (see KE in 16 respectively. 3 ). This is necessary if the electrical parameters of the drives are not identical or unforeseeable disturbing forces occur. In 16 the detection of the actual speed and the actual distance is relative between the respective movable element and the base.

17 shows a block diagram of an embodiment of a method according to the invention for controlling and regulating the movement of a movement device according to the invention with a higher-level position control loop 87 for both moving elements. In 17 an alternative method for controlling and regulating the movement of a movement device according to the invention is shown. The input from the trajectory generator (ST in 2 ) generated target trajectory x _soll 86 at the tool reference point TCP. The control circuit shown in the example is also based on a cascaded position, speed and current controller. In principle, however, any other controller structures can be used.

Notwithstanding the in 16 shown control loop is in 17 a higher-level position controller 87 used with the gain K _V. This _is acted upon in the embodiment shown with the measured between the two moving elements actual path x _is . As a result, parasitic vibrations arising in the base are not coupled into the position control loop, which improves the quality of movement. In addition, only one position control parameter needs to be set.

After the position controller to divide the determined target speed v _soll is performed or the target path x _to (for the speed feedforward control) according to the mass ratio K _m. The subsequent controller structure corresponds to the off 16 , The actual speed v _is also measured as a relative speed between the two moving elements and divided according to the mass ratio to the two speed controller. Alternatively, a speed measurement relative to the base would be possible. Also, the current actual path could be compared with the base measured, added and used as an input signal for the higher-level position controller.

einen Strom i_Zentr aus der bekannten Motorkraftkonstante K_Mot, einer virtuellen Federsteifigkeit zur Zentrierung c_Zentr und der aktuellen Entfernung des jeweiligen bewegten Elementes zur zentrierten Position Δx_zentr.In addition, the controller structure shown here has a functionality ZENTR for centering the movable elements relative to the base. This function determines, for example, according to equation 16

a current i _center from the known motor force constant K _Mot , a virtual spring stiffness for centering c _center and the current distance of the respective moving element to the centered position .DELTA.x _centr .

18 shows a block diagram of an embodiment of a method according to the invention for controlling and regulating the movement of a movement device according to the invention with a higher-level position and velocity control loop 88 for both moving elements. Thus, another alternative method for controlling and regulating the movement of a movement device according to the invention is shown. In turn, the input from the trajectory generator (ST in 2 ) generated target trajectory x _soll 86 on the TCP. The control circuit shown in the example is again based on a cascaded position, speed and current controller. In principle, however, any other controller structures can be used.

Deviating from 17 Both position (K _V ) and velocity controllers (K _P , T _N ) are designed as higher-level controllers. The measurement of the actual path and the actual speed is again relative between the movable elements, whereby other measuring arrangements are possible. The setpoint current i _soll determined by the speed controller is _distributed to the two drives by means of two factors K _{Korr_i1} and K _{Korr_i2} . In the example, this is the factor -1 or +1. In principle, elements for the correction of deviating electrical time constants (for example, PT ₁ elements, dead time elements) can also be inserted at this point in order to equalize the desired force profiles. In addition, the functionality KE in the exemplary in 17 and 18 controller arrangements are integrated.

In the figures 19 to 26 For example, various applications of the method according to the invention in connection with corresponding movement devices are shown.

19 shows a perspective view of an embodiment of a movement device according to the invention 1 for the realization of a separating or transforming manufacturing process, here punching or cutting. The representation goes thereby of the in 5 shown movement device 1 and extends this by one module 100 for the realization of a forming or separating machining process. Facilities for the handling of the sheet metal strip or the stamped or formed parts were not shown.

The inserted module 100 consists of carrier plates 101 containing a cutting punch (hidden) and a cutting die 102 wear. These cut, for example, a blank from a sheet metal blank 103 out. In the present arrangement deep drawing operations could also be performed with a thermoforming tool optionally used instead of the cutting tool. In the application of the method according to the invention eliminates the time-consuming decoupling required in particular for linear motor presses from the foundation, since the dynamic forces as well as the process forces (especially the cutting impact) almost completely in the base 10 be compensated. In addition, the energy consumption and the drive power for the motion generation are reduced.

By realized in the example horizontal arrangement of the direction of movement also eliminates a weight balance or the press drive must apply no permanent force against the force of gravity. In the arrangement presented by way of example, a plurality of such linear motor presses could be stacked on top of each other for linking several process steps. The example of a linear motor press presented, for example, horizontal arrangement of a press drive can be equally transferred to various other types of drives. In particular, this also includes the mechanically translating (for example spindle drives, eccentric drive, multi-link drive) typically used in presses, as well as hydraulic drive systems.

20 shows a perspective view of an embodiment of a movement device according to the invention 1 for the realization of a separating manufacturing process, here flat grinding. This is the off 13 known three-axle movement device 1 to a module 110 extended for machining (surface grinding). A table 111 at the rear moving element 12 takes the workpiece 113 on while on the front moving element 11 the grinding spindle 112 with the grinding wheel 114 is attached.

In the X direction, the inventive method is used. It enables highly dynamic reversal processes (overflow and direction reversal of the grinding wheel), whereby the machine structure is only minimally excited to oscillate. The two other axes of motion are needed for small feed movements during the process and must therefore achieve only a low dynamics.

21 shows a perspective view of an embodiment of a movement device according to the invention 1 for the realization of a separating manufacturing process, here planing, wherein the arrangement similar to that in 20 is. The grinding spindle was made by a planing tool 115 replaced, as used for example for the production of very fine structured surfaces.

22 shows a perspective view of an embodiment of a movement device according to the invention 1 for the realization of a special separating manufacturing process, the non-circular turning. This is the off 13 known movement device 1 adapted for out-of-round turning by the front moving element 11 a turning tool 118 , the rear moving element 12 in a recording the rotary spindle 116 with the workpiece 117 wearing. The dominant direction of movement of the device corresponds to the radial delivery on the workpiece. In this direction, the inventive method is used to ensure a sufficient quality of movement in the required highly dynamic Umsteuervorgängen. The additional movement axes in turn serve as delivery axes.

23A shows a perspective view of an embodiment of a movement device according to the invention 4 ' for a translatory movement for deflecting a high-energy jet, 23B the exploded view for this. The movement device 4 ' serves to deflect high-energy radiation, for example laser radiation.

These are two sliding mirrors 122 . 123 in the cylindrical base 125 arranged. The base 125 itself can be opposite to the outer relation 124 be twisted so that the movement device 4 ' in its entirety can cover an annular work area. The two mirrors 122 . 123 in the example are set at + 45 ° or -45 ° opposite the horizontal. The inner mirror 122 is arranged so that it is the beam from above 121 always hits and is reflected at an angle of 90 °. Will now be the inner mirror 122 to the center of the base 125 shifted, then the beam 121 reflected in a lower level. This shifts the on the outer mirror 123 reflected beam 121 further from the center of the base 125 away (radially outward). Will the outer mirror 123 moved radially outwards, followed by the outer mirror 123 vertically down reflected beam 121 this movement. Consequently, by an opposite movement of the illustrated mirror assembly of the double travel relative to the movement of only one mirror can be realized.

In addition, in this movement according to the inventive method, a compensation of the basis 125 acting dynamic drive reaction forces achieved. The device can also be designed so that the rotational moment of inertia of the entire arrangement does not or only slightly changes due to the opposing movement of the elements. Thus, such an arrangement shown by way of example is predestined for use in highly dynamic additional axes of laser processing systems.

In principle, other movement devices according to the invention can also be used for deflecting high-energy beams. By way of example, let the rotary-rotationally movable device be made 11 The milling spindle and workpiece table would have to be replaced by mirrors and openings would have to be provided for the entry and exit of the beams.

24A shows a plan view of an embodiment of a movement device according to the invention 127 with a hydraulically driven coupling gear 130 , here a toggle, in closed position and 24B in open position. Thus, the method according to the invention is based on this movement device 127 applied shown.

According to the invention, the relative movement results on the two-part tool 134 For example, the die for injection molding, from the sum of the oppositely directed relative movements of the movable elements 128 . 129 opposite the base 132 , The drive cylinder 133 are arranged in the example so that the adhesion in the base 132 done by the shortest route. Alternatively, however, other arrangements are provided. The device shown in the example can be used for example in injection molding. In such machines, on the one hand, there is the requirement for a low process time, to be equated with a high degree of dynamics when opening and closing the two-part tool 134 , here the matrix. On the other hand, large static holding forces must be applied in the process, which is why highly translating coupling gear, such as toggle gear, are used. In this application, the method according to the invention offers the potential for reducing the dynamic load peaks acting on the machine structure in conjunction with increased dynamics, equivalent to a higher output.

25A shows a plan view of an embodiment of a movement device according to the invention 127 ' with an electromechanically driven coupling mechanism 130 (Toggle) in the closed position and 25B in the open position, one to the in 24 illustrated embodiment similar variant is shown. In contrast to 24 However, one with a Riemenvorgelege 136 provided electromechanical spindle drive 131 (Here, by way of example, a ball screw drive, alternatively a planetary roller screw drive or other forms of spindle drives) is used instead of a hydraulic latching mechanism. In this case, a threaded spindle is used with opposite slope on both sides. The spindle is driven, for example, by an electric motor 137 , An arrangement with two separate spindles and a single or two electric motors 137 would also be possible.

26A shows a plan view of an embodiment of a movement device according to the invention 127 '' in open position (two-part tool 134 or die ascended) and 26B in closed position (two-part tool 134 or die closed). In this case, the method according to the invention is based on a movement device 127 '' with an electromechanical spindle drive (for example ball screw drive or planetary roller screw drive) with an electric motor 137 and a spindle drive 131 applied.

The arrangement corresponds for example to a screw press (also referred to in this design as "servo press" or "synchro press"), the upper and lower parts of the movable elements 127 '' . 128 '' form, the press foot is the base 132 '' , In the example provided with opposing gradients threaded spindles, which for example via a Riemenvorgelege 136 each of an electric motor 137 be driven, used. The present embodiment with oppositely increasing spindles offers the possibility of compulsory weight compensation of the arrangement (assuming equal masses for upper and lower part). In addition, the achievable with the method advantage in terms of dynamics, energy consumption and power consumption, but in particular with respect to the derived in the foundation dynamic forces on screw presses can be transmitted.

LIST OF REFERENCE NUMBERS

1, 1 ', 1' ', 2, 3

mover

4, 4, 5, 6, 6 '

mover

7

foundation

8th

Underframe, lower structure

9

Spring-damper

10

Base (linear)

11, 11 ', 11' '

first moving element

12, 12 ', 12' '

second moving element

13

primary part

14

secondary part

15

Linear motor drive

16

guide rail

17

carriages

18

guidance system

19

joint

20

Base (right-angled)

21

first moving element

22

second moving element

23

primary part

24

secondary part

25

Linear motor drive

26

guide rail

27

carriages

28

guidance system

29

workpiece

30

Base (U-shaped)

31

first moving element

32

second moving element

33, 33 '

primary part

34, 34 '

secondary part

35

Linear motor drive

36

guide rail

37

carriages

38

guidance system

39

workpiece

40

Base (hollow cylindrical)

41

first moving element

42

second moving element

43

Workpiece clamping table

45

Milling spindle, tool

50

Base (rod-shaped)

51

first moving element

52

second moving element

53

Workpiece clamping table

59

workpiece

60, 60 '

Base (spherical shell)

61, 61 '

first moving element

62, 62 '

second moving element

63

Workpiece clamping table

71, 71 '

Ball Screw

74, 74 '

guide rail

75, 75 '

carriages

76, 76 '

guidance system

77

relatively leadership

78

Leadership system versus base

79

Relative measurement system

80

Measuring system compared to base

81

outer cover

82

Measuring system with respect to external reference

83

Leveling compound

84

Control loop axis 1

85

Control circuit axis 2

86

target trajectory

87

higher-level position control loop

88

superior position and velocity control loop

100

Module cutting / forming

101

support plate

102

cutting die

103

sheet metal blank

110

Module machining

111

table

112

Means for holding grinding spindle

113

workpiece

114

Grinding wheel, tool

115

Planing tool, tool

116

spindle

117

workpiece

118

Turning tool, tool

120

Module beamline

121

Beam, radiation

122

first optical element, sliding mirror

123

second optical element, sliding mirror

124

outer cover

125

Base (cylindrical)

127, 127 ', 127' '

mover

128, 128 ', 128' '

first moving element

129, 129 ', 129' '

second moving element

130

coupling gear

131

spindle drive

132, 132 ', 132' '

Base

133

drive cylinder

134

two-piece tool

136

Belt gear

139

Press base

140

stamp

141

die

149

mover

150

Base

151

first moving element

152

second moving element

153

spindle drive

154

electric motor

158

guidance system

List of abbreviations and formula symbols

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• US 5798927 A [0007, 0007]
• EP 1724054 A1 [0009, 0009]
• EP 0523042 A1 [0010, 0010]
• DE 102004057062 A1 [0011]
• CZ 298615 B6 [0014, 0015]

Cited non-patent literature

• Müller, Jens: Comparative investigation of methods for reducing the frame excitation by linear motor-driven machine tool axes. Dissertation, TU Dresden, 2009. ISBN 978-3-86780-109-6 [0012]
• Grossmann, Knut; Müller, Jens; Peukert, Christoph: Pre-setpoint calculation for the pulse compensation of linear direct drives. ZWF 106 (2011) 5, pp. 352-356 [0012]
• Müller, Jens: Comparative investigation of methods for reducing the frame excitation by linear motor-driven machine tool axes. Dissertation, TU Dresden, 2009. ISBN 978-3-86780-109-6 [0013]
• Bubak, A .; Soucek, P .; Zelený, J .: New Principles for Design of Highly Dynamic Machine Tools, In: Proceedings of the International Conference ICPR-17, Blacksburg, Virginia, USA. 08/2003 [0014]

Claims (20)

Method for producing a relative movement between two or more relative to each other and relative to a base ( 10 . 20 . 30 . 40 . 50 . 60 ) movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ), characterized in that the relative movement between the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) corresponding to a movement-splitting factor from the relative movements of the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) compared to the base ( 10 . 20 . 30 . 40 . 50 . 60 ) and / or opposite movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ), whereby in the base ( 10 . 20 . 30 . 40 . 50 . 60 ) and / or in the upstream movable element ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) and in accordance with the masses of the moving elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) are substantially matched in their progression over time in the amount of substantially identical propulsion reaction forces in the base ( 10 . 20 . 30 . 40 . 50 . 60 ) cancel. A method according to claim 1, characterized in that the division of the movement specifications on the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) takes place before or during the execution of the movement by a constant or variable factor for the movement distribution. Method according to one of the preceding claims, characterized in that the constant or variable factor for the division of movement corresponding to that for the expression of the basis ( 10 . 20 . 30 . 40 . 50 . 60 ) Actuating reaction forces (F _B ) relevant system parameters during the execution of the movement and / or in the run-up to the motion execution to increase the motion quality is adjusted. Method according to one of the preceding claims, characterized in that on the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) and into the base ( 10 . 20 . 30 . 40 . 50 . 60 ) derived driving forces are aligned with each other in their time course in such a way that in the base ( 10 . 20 . 30 . 40 . 50 . 60 ) derived residual force (F _remainder ) minimized and / or in the base ( 10 . 20 . 30 . 40 . 50 . 60 ) introduced resulting residual vibrations are selectively modified. Method according to one of the preceding claims, characterized in that a relative movement between the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) is carried out in one direction of movement and this movement of relative movements in one or two other degrees of freedom of movement (X, X ', Y, Y', Z, Z ', φ _x , φ _y , φ _z ) is superimposed, wherein the guide system ( 18 . 28 . 38 ) allows movement in these other degrees of freedom of movement (X, X ', Y, Y', Z, Z ', φ _x , φ _y , φ _z ). Method according to one of the preceding claims, characterized in that the relative movement between the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) is carried out in two directions of movement and this movement of relative movements in a further degree of freedom of movement (X, X ', Y, Y', Z, Z ', φ _x , φ _y , φ _z ) is superimposed, wherein the guide system ( 18 . 28 . 38 ) enables a movement in this further degree of freedom of movement (X, X ', Y, Y', Z, Z ', φ _x , φ _y , φ _z ). A method according to claim 5 or 6, characterized in that a drive, measuring and control and / or control system, a control of these additional degrees of freedom of movement (X, X ', Y, Y', Z, Z ', φ _x , φ _y , φ _z ). Method according to one of the preceding claims, characterized in that to the one or more degrees of freedom of movement (X, Y, Z, φ _x , φ _y , φ _z ) of the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) one or more additional and / or redundant degrees of freedom of movement (X ', Y', Z ', φ _x' , φ _{y '} , φ _z' ) by at least one on at least one of the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) added additional movement device or by introduced in the kinematic chain additional actuators. Method according to one of the preceding claims, characterized in that the measurement of at least one of the values current position (s), speed (v), acceleration (a) and jerk (r) exclusively relative between the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) and at the tool reference point (TCP), wherein a device for returning the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) in their zero position relative to the base ( 10 . 20 . 30 . 40 . 50 . 60 ) is provided. Method according to one of claims 1 to 8, characterized in that the measurement of at least one of the values current position (s), speed (v), acceleration (a) and jerk (r) exclusively between each one movable element ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) compared to the base ( 10 . 20 . 30 . 40 . 50 . 60 ) or between a substantially stationary and from the base ( 10 . 20 . 30 . 40 . 50 . 60 ) independent reference point and the respective movable element ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) he follows. Method according to one of claims 1 to 8, characterized in that the measurement of at least one of the values current position (s), speed (v), acceleration (a) and jerk (r) both between movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) and base ( 10 . 20 . 30 . 40 . 50 . 60 ) or a substantially still and from the base ( 10 . 20 . 30 . 40 . 50 . 60 ) independent reference point, as well as relatively between the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) he follows. Apparatus for carrying out a method according to one of claims 1 to 11, comprising two or more, relative to each other and relative to a base ( 10 . 20 . 30 . 40 . 50 . 60 ) movable, largely rigid and light elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) designed to feed into the base the drive reaction forces (FB) required for their movement and to produce a resultant useful motion ( 10 . 20 . 30 . 40 . 50 . 60 ) and which are so opposite the base ( 10 . 20 . 30 . 40 . 50 . 60 ) are movably arranged such that the drive reaction forces (FB) in the base (FB) which can be introduced at the current location and in the current direction during the movement 10 . 20 . 30 . 40 . 50 . 60 ) directly and with suppressed vibrational excitation of the base ( 10 . 20 . 30 . 40 . 50 . 60 ) substantially equalize and the kinematic chain for generating the useful movement is immediately closed. Apparatus according to claim 12, characterized in that at least one movable element ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) has at least one additional movement device with at least one further movable element, or at least one additional or / and redundant degree of freedom of movement (X, X ', Y, Y', Z, Z ', φ _x ) by at least one additional adjustment element introduced into the kinematic chain. φ _y , φ _z , φ _{x '} , φ _y' , φ _{z '} ). Device according to claim 12 or 13, characterized in that guide systems ( 18 . 28 . 38 ) are provided, which the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) provide the required degrees of freedom of movement (X, X ', Y, Y', Z, Z ', φ _x , φ _y , φ _z , φ _x ', φ _y ', φ _z '), the guidance systems exclusively between the moving elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) and the base ( 10 . 20 . 30 . 40 . 50 . 60 ), between the moving elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) and the base ( 10 . 20 . 30 . 40 . 50 . 60 ) and at the same time relatively between at least two movable elements or between the movable elements and an external reference point ( 81 ) act and the guide systems are substantially immobile in the other coordinate directions. Device according to one of claims 12 to 14, characterized in that at least one measuring device is provided, the measurement of the current position (s) and / or the speed (v), the acceleration (a), the jerk (r) exclusively relative between the moving elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) and at the tool reference point (TCP), only between a movable element ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) compared to the base ( 10 . 20 . 30 . 40 . 50 . 60 ), between a substantially stationary and from the base ( 10 . 20 . 30 . 40 . 50 . 60 ) independent reference point and the respective mobile element ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) and / or between mobile elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) and base ( 10 . 20 . 30 . 40 . 50 . 60 ) as well as relatively between the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ), wherein in the measurement only relative between the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) means for returning the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) in their zero position relative to the base ( 10 . 20 . 30 . 40 . 50 . 60 ) is provided. Device according to one of claims 12 to 15, characterized in that at least one of the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) and / or the base ( 10 . 20 . 30 . 40 . 50 . 60 ) at least one means ( 112 ) for receiving a workpiece ( 29 . 39 . 117 ) and / or tool ( 45 . 114 . 115 . 118 . 140 . 141 ) and / or means for deflecting radiation, wherein the required relative movements for machining, positioning and handling between tools ( 45 . 114 . 115 . 118 . 140 . 141 ) and workpiece ( 29 . 39 . 117 ) or alternatively for deflecting radiation as a relative movement between in each case two or more movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) and / or one or more movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) and the base ( 10 . 20 . 30 . 40 . 50 . 60 ) arise. Control method for carrying out a method according to one of claims 1 to 11, characterized in that the control of the movement of the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) by separate, cascaded position control loops ( 86 ) with subordinate velocity or speed control loop ( 87 ), subordinate force, torque, acceleration or current control circuit ( 88 . 89 ), each loop ( 86 . 87 . 88 . 89 ) for the respective movable element ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) and the respective movement direction valid, obtained by analytical calculations or optimization calculation values of at least one command variable receives. Control technology method according to claim 17, characterized in that the position or the position and speed control for each two or more movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) in a direction of movement associated with the elements by one for all movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ), higher-level position control loop ( 86 ) or position and velocity loop ( 87 ) he follows. Technical control method according to claim 17 or 18, characterized in that the division of the reference speeds (v _soll) (in the higher-level position control loop 87 ) according to the movement splitting factor for the moving elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) he follows. Control engineering method according to one of claims 17 to 19, characterized in that the distribution of the desired currents (i _soll ) in the higher-level position and velocity control loop ( 87 ) corresponding to a drive _factor (K _{korr_i} ), so that substantially the same force-time characteristics of the movable elements ( 11 . 12 . 21 . 22 . 31 . 32 . 41 . 42 . 51 . 52 . 61 . 62 ) result.

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