DE102012018635A8 - Verfahren zum Herstellen einer 3D-Struktur - Google Patents
Verfahren zum Herstellen einer 3D-Struktur Download PDFInfo
- Publication number
- DE102012018635A8 DE102012018635A8 DE102012018635.5A DE102012018635A DE102012018635A8 DE 102012018635 A8 DE102012018635 A8 DE 102012018635A8 DE 102012018635 A DE102012018635 A DE 102012018635A DE 102012018635 A8 DE102012018635 A8 DE 102012018635A8
- Authority
- DE
- Germany
- Prior art keywords
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0037—Production of three-dimensional images
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/141—Processes of additive manufacturing using only solid materials
- B29C64/153—Processes of additive manufacturing using only solid materials using layers of powder being selectively joined, e.g. by selective laser sintering or melting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE201210018635 DE102012018635A1 (de) | 2012-09-21 | 2012-09-21 | Verfahren zum Herstellen einer 3D-Struktur |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE201210018635 DE102012018635A1 (de) | 2012-09-21 | 2012-09-21 | Verfahren zum Herstellen einer 3D-Struktur |
Publications (2)
Publication Number | Publication Date |
---|---|
DE102012018635A1 DE102012018635A1 (de) | 2014-03-27 |
DE102012018635A8 true DE102012018635A8 (de) | 2014-07-03 |
Family
ID=50234901
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE201210018635 Withdrawn DE102012018635A1 (de) | 2012-09-21 | 2012-09-21 | Verfahren zum Herstellen einer 3D-Struktur |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE102012018635A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015004151B4 (de) | 2015-03-31 | 2022-01-27 | Feinmetall Gmbh | Verfahren zur Herstellung einer Federkontaktstift-Anordnung mit mehreren Federkontaktstiften |
EP3537216B1 (de) * | 2018-03-09 | 2021-09-15 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren zur herstellung einer röntgen- und röntgenbeugungsoptik |
DE102019211001A1 (de) * | 2019-07-24 | 2021-01-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur digitalen Erzeugung eines optischen Elements mit integrierten Funktionalitäten und derart hergestelltes optisches Element |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG52858A1 (en) * | 1996-11-07 | 1998-09-28 | Univ Singapore | Micromachining using high energy light ions |
DE10006081A1 (de) | 2000-02-11 | 2001-08-23 | Heidelberg Instruments Mikrotechnik Gmbh | Verfahren zur Herstellung von dreidimensionalen Mikrostrukturen in Photolack mittels Mehrphotonen-Prozeß |
US7014988B2 (en) * | 2000-06-15 | 2006-03-21 | 3M Innovative Properties Company | Multiphoton curing to provide encapsulated optical elements |
JP2002189112A (ja) * | 2000-12-22 | 2002-07-05 | Canon Inc | 回折光学素子の製造方法、回折光学素子の製造方法によって製造したことを特徴とする回折光学素子製造用金型、回折光学素子、および該回折光学素子を有する光学系、光学機器、露光装置、デバイス製造方法、デバイス |
US6894762B1 (en) * | 2002-09-17 | 2005-05-17 | Lsi Logic Corporation | Dual source lithography for direct write application |
US7846642B2 (en) * | 2007-08-17 | 2010-12-07 | The University Of Massachusetts | Direct incident beam lithography for patterning nanoparticles, and the articles formed thereby |
-
2012
- 2012-09-21 DE DE201210018635 patent/DE102012018635A1/de not_active Withdrawn
Non-Patent Citations (1)
Title |
---|
Tormen, m. et al.: "Three-dimensional micro- and nanostructuring by combination of nanoimprint and x-ray lithography", J. Vac. Sci. Technol. B 22(2), pp.766-770 (2004) |
Also Published As
Publication number | Publication date |
---|---|
DE102012018635A1 (de) | 2014-03-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R163 | Identified publications notified | ||
R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |