DE102010015470A1 - Verfahren zur Innenbeschichtung von Funktionsschichten mit einem Vergütungsmaterial - Google Patents

Verfahren zur Innenbeschichtung von Funktionsschichten mit einem Vergütungsmaterial Download PDF

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Publication number
DE102010015470A1
DE102010015470A1 DE201010015470 DE102010015470A DE102010015470A1 DE 102010015470 A1 DE102010015470 A1 DE 102010015470A1 DE 201010015470 DE201010015470 DE 201010015470 DE 102010015470 A DE102010015470 A DE 102010015470A DE 102010015470 A1 DE102010015470 A1 DE 102010015470A1
Authority
DE
Germany
Prior art keywords
layer
base material
pores
precursor
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE201010015470
Other languages
German (de)
English (en)
Inventor
Prof.Dr. Vaßen Robert
Frank Vondahlen
Dr. Sebold Doris
Dr. Mack Daniel E.
Dr. Mauer Georg
Prof.Dr. Stöver Detlev
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Forschungszentrum Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Juelich GmbH filed Critical Forschungszentrum Juelich GmbH
Priority to DE201010015470 priority Critical patent/DE102010015470A1/de
Priority to JP2013504118A priority patent/JP2013525599A/ja
Priority to CN2011800193259A priority patent/CN102844461A/zh
Priority to EP11724528A priority patent/EP2558611A1/de
Priority to PCT/DE2011/000370 priority patent/WO2011127896A1/de
Priority to US13/640,401 priority patent/US20130196141A1/en
Publication of DE102010015470A1 publication Critical patent/DE102010015470A1/de
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B19/00—Machines or methods for applying the material to surfaces to form a permanent layer thereon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/403—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C23C16/45555—Atomic layer deposition [ALD] applied in non-semiconductor technology
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12—Blades
    • F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/288—Protective coatings for blades
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249967—Inorganic matrix in void-containing component
    • Y10T428/249969—Of silicon-containing material [e.g., glass, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249967—Inorganic matrix in void-containing component
    • Y10T428/24997—Of metal-containing material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
DE201010015470 2010-04-16 2010-04-16 Verfahren zur Innenbeschichtung von Funktionsschichten mit einem Vergütungsmaterial Withdrawn DE102010015470A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE201010015470 DE102010015470A1 (de) 2010-04-16 2010-04-16 Verfahren zur Innenbeschichtung von Funktionsschichten mit einem Vergütungsmaterial
JP2013504118A JP2013525599A (ja) 2010-04-16 2011-04-05 改質材料による機能層の内部コーティング方法
CN2011800193259A CN102844461A (zh) 2010-04-16 2011-04-05 用调质材料内涂覆功能层的方法
EP11724528A EP2558611A1 (de) 2010-04-16 2011-04-05 Verfahren zur innenbeschichtung von funktionsschichten mit einem vergütungsmaterial.
PCT/DE2011/000370 WO2011127896A1 (de) 2010-04-16 2011-04-05 Verfahren zur innenbeschichtung von funktionsschichten mit einem vergütungsmaterial.
US13/640,401 US20130196141A1 (en) 2010-04-16 2011-04-05 Process for internally coating functional layers with a through-hardened material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201010015470 DE102010015470A1 (de) 2010-04-16 2010-04-16 Verfahren zur Innenbeschichtung von Funktionsschichten mit einem Vergütungsmaterial

Publications (1)

Publication Number Publication Date
DE102010015470A1 true DE102010015470A1 (de) 2011-10-20

Family

ID=44202162

Family Applications (1)

Application Number Title Priority Date Filing Date
DE201010015470 Withdrawn DE102010015470A1 (de) 2010-04-16 2010-04-16 Verfahren zur Innenbeschichtung von Funktionsschichten mit einem Vergütungsmaterial

Country Status (6)

Country Link
US (1) US20130196141A1 (https=)
EP (1) EP2558611A1 (https=)
JP (1) JP2013525599A (https=)
CN (1) CN102844461A (https=)
DE (1) DE102010015470A1 (https=)
WO (1) WO2011127896A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113529075A (zh) * 2020-04-20 2021-10-22 厦门大学 一种液态金属复合多孔膜及其制备方法和应用

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9290836B2 (en) * 2012-08-17 2016-03-22 General Electric Company Crack-resistant environmental barrier coatings
US11326253B2 (en) * 2016-04-27 2022-05-10 Applied Materials, Inc. Atomic layer deposition of protective coatings for semiconductor process chamber components
US10186400B2 (en) 2017-01-20 2019-01-22 Applied Materials, Inc. Multi-layer plasma resistant coating by atomic layer deposition
US10975469B2 (en) * 2017-03-17 2021-04-13 Applied Materials, Inc. Plasma resistant coating of porous body by atomic layer deposition
US11473197B2 (en) 2018-03-16 2022-10-18 Raytheon Technologies Corporation HPC and HPT disks coated by atomic layer deposition
US10443126B1 (en) * 2018-04-06 2019-10-15 Applied Materials, Inc. Zone-controlled rare-earth oxide ALD and CVD coatings
US11015252B2 (en) * 2018-04-27 2021-05-25 Applied Materials, Inc. Protection of components from corrosion
US11053855B2 (en) * 2019-06-06 2021-07-06 Raytheon Technologies Corporation Reflective coating and coating process therefor
EP3754049A1 (en) 2019-06-21 2020-12-23 Raytheon Technologies Corporation Reactive thermal barrier coating
FR3114588B1 (fr) * 2020-09-29 2023-08-11 Safran Ceram Procédé de fabrication d’une barrière environnementale
US20240343917A1 (en) * 2023-04-14 2024-10-17 Raytheon Technologies Corporation Environmental barrier coating and method of applying the same

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0852223A1 (en) * 1996-12-04 1998-07-08 European Atomic Energy Community (Euratom) Method of sealing open-pore ceramic coatings, in particular thermal barriers
US20030059633A1 (en) * 2001-09-21 2003-03-27 Ackerman John Frederick Article protected by thermal barrier coating having a sintering inhibitor, and its fabrication
DE10200803A1 (de) 2002-01-11 2003-07-31 Forschungszentrum Juelich Gmbh Herstellung eines keramischen Werkstoffes für eine Wärmedämmschicht sowie eine den Werkstoff enthaltene Wärmedämmschicht
US20050158590A1 (en) * 2004-01-16 2005-07-21 Honeywell International Inc. Atomic layer deposition for turbine components
WO2006102568A2 (en) * 2005-03-22 2006-09-28 Burchill Stuart G Jr Highly porous coated fine particles, composition, and method of production
US20070141255A1 (en) * 2005-12-21 2007-06-21 Bilal Zuberi Method and apparatus for strengthening a porous substrate
WO2010139855A1 (en) * 2009-06-05 2010-12-09 Beneq Oy Protective coating, method for protecting a substrate and use for the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050202168A1 (en) * 2002-08-16 2005-09-15 General Electric Company Thermally-stabilized thermal barrier coating and process therefor
US20050287826A1 (en) * 2004-06-29 2005-12-29 Abell Thomas J Method of sealing low-k dielectrics and devices made thereby
US7678712B2 (en) * 2005-03-22 2010-03-16 Honeywell International, Inc. Vapor phase treatment of dielectric materials

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0852223A1 (en) * 1996-12-04 1998-07-08 European Atomic Energy Community (Euratom) Method of sealing open-pore ceramic coatings, in particular thermal barriers
US20030059633A1 (en) * 2001-09-21 2003-03-27 Ackerman John Frederick Article protected by thermal barrier coating having a sintering inhibitor, and its fabrication
DE10200803A1 (de) 2002-01-11 2003-07-31 Forschungszentrum Juelich Gmbh Herstellung eines keramischen Werkstoffes für eine Wärmedämmschicht sowie eine den Werkstoff enthaltene Wärmedämmschicht
US20050158590A1 (en) * 2004-01-16 2005-07-21 Honeywell International Inc. Atomic layer deposition for turbine components
WO2006102568A2 (en) * 2005-03-22 2006-09-28 Burchill Stuart G Jr Highly porous coated fine particles, composition, and method of production
US20070141255A1 (en) * 2005-12-21 2007-06-21 Bilal Zuberi Method and apparatus for strengthening a porous substrate
WO2010139855A1 (en) * 2009-06-05 2010-12-09 Beneq Oy Protective coating, method for protecting a substrate and use for the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113529075A (zh) * 2020-04-20 2021-10-22 厦门大学 一种液态金属复合多孔膜及其制备方法和应用

Also Published As

Publication number Publication date
JP2013525599A (ja) 2013-06-20
WO2011127896A1 (de) 2011-10-20
US20130196141A1 (en) 2013-08-01
CN102844461A (zh) 2012-12-26
EP2558611A1 (de) 2013-02-20

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