DE102008062619B8 - Microwave plasma source and method of forming a linearly elongated plasma under atmospheric pressure conditions - Google Patents

Microwave plasma source and method of forming a linearly elongated plasma under atmospheric pressure conditions Download PDF

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Publication number
DE102008062619B8
DE102008062619B8 DE102008062619A DE102008062619A DE102008062619B8 DE 102008062619 B8 DE102008062619 B8 DE 102008062619B8 DE 102008062619 A DE102008062619 A DE 102008062619A DE 102008062619 A DE102008062619 A DE 102008062619A DE 102008062619 B8 DE102008062619 B8 DE 102008062619B8
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DE
Germany
Prior art keywords
forming
atmospheric pressure
pressure conditions
under atmospheric
linearly elongated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102008062619A
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German (de)
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DE102008062619A1 (en
DE102008062619B4 (en
Inventor
Julius Roch
Dr. Dani Ines
Prof. Dr. Kaskel Stefan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technikum Laubholz GmbH TLH
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority to DE102008062619A priority Critical patent/DE102008062619B8/en
Priority to PCT/DE2009/001765 priority patent/WO2010066247A2/en
Publication of DE102008062619A1 publication Critical patent/DE102008062619A1/en
Publication of DE102008062619B4 publication Critical patent/DE102008062619B4/en
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Publication of DE102008062619B8 publication Critical patent/DE102008062619B8/en
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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/463—Microwave discharges using antennas or applicators

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
DE102008062619A 2008-12-10 2008-12-10 Microwave plasma source and method of forming a linearly elongated plasma under atmospheric pressure conditions Active DE102008062619B8 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE102008062619A DE102008062619B8 (en) 2008-12-10 2008-12-10 Microwave plasma source and method of forming a linearly elongated plasma under atmospheric pressure conditions
PCT/DE2009/001765 WO2010066247A2 (en) 2008-12-10 2009-12-08 Microwave plasma source and method for forming a linearly extended plasma under atmospheric pressure conditions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008062619A DE102008062619B8 (en) 2008-12-10 2008-12-10 Microwave plasma source and method of forming a linearly elongated plasma under atmospheric pressure conditions

Publications (3)

Publication Number Publication Date
DE102008062619A1 DE102008062619A1 (en) 2010-07-01
DE102008062619B4 DE102008062619B4 (en) 2012-01-19
DE102008062619B8 true DE102008062619B8 (en) 2012-03-29

Family

ID=42136177

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102008062619A Active DE102008062619B8 (en) 2008-12-10 2008-12-10 Microwave plasma source and method of forming a linearly elongated plasma under atmospheric pressure conditions

Country Status (2)

Country Link
DE (1) DE102008062619B8 (en)
WO (1) WO2010066247A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012013418A1 (en) 2012-07-02 2014-01-02 Sitec Automation Gmbh Generating device i.e. plasma-jet source, for generating scalable linear plasma in e.g. vacuum atmospheric pressures, has plasma reactor comprising contour with side surfaces, and slot antennas arranged along longitudinal axis of reactor
DE102015205809B4 (en) * 2015-03-31 2018-01-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Apparatus for the production of carbon fibers with plasma assistance

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4957061A (en) * 1985-12-04 1990-09-18 Canon Kabushiki Kaisha Plurality of beam producing means disposed in different longitudinal and lateral directions from each other with respect to a substrate
EP0449081A2 (en) * 1990-03-30 1991-10-02 New Japan Radio Co., Ltd. Microwave plasma CVD apparatus
DE4113142A1 (en) * 1991-03-14 1992-09-17 Leybold Ag DEVICE FOR GENERATING GLIMMENT CHARGES
DE4327958C1 (en) * 1993-08-19 1994-11-17 Ppv Verwaltungs Ag Process and apparatus for recycling waste containing plastic and/or organic material
WO1998059359A1 (en) * 1997-06-23 1998-12-30 Sung Spitzl Hildegard Device for the production of homogenous microwave plasma
US6177148B1 (en) * 1996-08-29 2001-01-23 Carl-Zeiss-Stiftung Plasma CVD system with an array of microwave plasma electrodes and plasma CVD process
DE10239875A1 (en) * 2002-08-29 2004-03-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and device for large-area coating of substrates under atmospheric pressure conditions
DE102004060068A1 (en) * 2004-12-06 2006-07-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Microwave plasma source

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5270616A (en) * 1989-09-25 1993-12-14 Ryohei Itatani Microwave plasma generating apparatus
JPH04144992A (en) * 1990-10-01 1992-05-19 Idemitsu Petrochem Co Ltd Microwave plasma-generating device and method for producing diamond film with the same
DE4437050A1 (en) * 1994-10-17 1996-04-18 Leybold Ag Device for treating surfaces of hollow bodies, in particular inner surfaces of fuel tanks

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4957061A (en) * 1985-12-04 1990-09-18 Canon Kabushiki Kaisha Plurality of beam producing means disposed in different longitudinal and lateral directions from each other with respect to a substrate
EP0449081A2 (en) * 1990-03-30 1991-10-02 New Japan Radio Co., Ltd. Microwave plasma CVD apparatus
DE4113142A1 (en) * 1991-03-14 1992-09-17 Leybold Ag DEVICE FOR GENERATING GLIMMENT CHARGES
DE4327958C1 (en) * 1993-08-19 1994-11-17 Ppv Verwaltungs Ag Process and apparatus for recycling waste containing plastic and/or organic material
US6177148B1 (en) * 1996-08-29 2001-01-23 Carl-Zeiss-Stiftung Plasma CVD system with an array of microwave plasma electrodes and plasma CVD process
WO1998059359A1 (en) * 1997-06-23 1998-12-30 Sung Spitzl Hildegard Device for the production of homogenous microwave plasma
DE10239875A1 (en) * 2002-08-29 2004-03-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and device for large-area coating of substrates under atmospheric pressure conditions
DE102004060068A1 (en) * 2004-12-06 2006-07-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Microwave plasma source

Also Published As

Publication number Publication date
DE102008062619A1 (en) 2010-07-01
DE102008062619B4 (en) 2012-01-19
WO2010066247A3 (en) 2010-11-11
WO2010066247A2 (en) 2010-06-17

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Owner name: TECHNIKUM LAUBHOLZ GMBH, DE

Free format text: FORMER OWNER: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80686 MUENCHEN, DE